SELF-ALIGNED VERTICAL CNT ARRAY TRANSISTOR
    28.
    发明申请
    SELF-ALIGNED VERTICAL CNT ARRAY TRANSISTOR 有权
    自对准垂直CNT阵列晶体管

    公开(公告)号:US20160293668A1

    公开(公告)日:2016-10-06

    申请号:US14744132

    申请日:2015-06-19

    Abstract: A transistor device includes an array of fin structures arranged on a substrate, each of the fin structures being vertically alternating stacks of a first isoelectric point material having a first isoelectric point and a second isoelectric point material having a second isoelectric point that is different than the first isoelectric point; one or more carbon nanotubes (CNTs) suspended between the fin structures and contacting a side surface of the second isoelectric point material in the fin structures; a gate wrapped around the array of CNTs; and source and drain contacts arranged over the fin structures; wherein each of the fin structures have a trapezoid shape or parallel sides that are oriented about 90° with respect to the substrate.

    Abstract translation: 晶体管器件包括布置在衬底上的翅片结构的阵列,每个翅片结构是具有第一等电点的第一等电点材料和具有不同于第一等电点材料的第二等电点材料的第二等电点材料的垂直交替堆叠 第一等电点; 一个或多个碳纳米管(CNT),其悬挂在翅片结构之间并与翅片结构中的第二等电点材料的侧表面接触; 围绕CNT阵列的门; 以及布置在鳍结构上的源极和漏极触点; 其中每个翅片结构具有相对于基底定向成大约90°的梯形或平行边。

Patent Agency Ranking