公开(公告)号：US07382815B2

公开(公告)日：2008-06-03

申请号：US10915517

申请日：2004-08-09

Applicant: Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

Inventor： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

IPC: H01S5/00

CPC classification number: G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

Abstract translation: 一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。 在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。 然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。 控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。 提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。 在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。 在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。 在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。 其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。

公开(公告)号：US07298770B2

公开(公告)日：2007-11-20

申请号：US10912933

申请日：2004-08-05

Applicant: Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

Inventor： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

IPC: H01S3/22 ,  H01S3/223 ,  H01S3/10 ,  H01S3/13

CPC classification number: G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

Abstract translation: 一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。 在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。 然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。 控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。 提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。 在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。 在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。 在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。 其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。

公开(公告)号：US07251263B2

公开(公告)日：2007-07-31

申请号：US11136617

申请日：2005-05-23

Applicant: Jorge J. Rocca

Inventor： Jorge J. Rocca

IPC: H01S3/22 ,  H01S3/095

CPC classification number: H01S4/00 ,  H01S3/0323 ,  H01S3/038 ,  H01S3/0975 ,  H01S3/0977 ,  H01S3/22

Abstract: A compact, high repetition rate, extreme ultraviolet/soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through a capillary channel containing the medium. By reducing the inductance of the discharge apparatus, excitation of the laser medium can be achieved without the use of Marx generators. Neon-like Ar atom laser pulses at 46.9 nm having energies of about 13 μJ are generated at repetition rates up to 12 Hz. Between 2 and 3×104 laser shots can be generated using a single capillary. Such a source of intense, short-wavelength radiation can be used for applications which include surface characterization of materials, high resolution imaging and printing, photochemistry and photophysics, laser ablation, characterization of x-ray optics, and dense plasma diagnostics.

Abstract translation: 描述了紧凑，高重复率，极紫外/软X射线激光器和用于产生这种辐射的方法。 气体或气相激光介质的激发通过将储存在固体介电电容器件中的能量通过包含介质的毛细通道放电来实现。 通过减小放电装置的电感，可以在不使用马克思发生器的情况下实现激光介质的激发。 以高达12Hz的重复率产生具有约13μJ能量的46.9nm处的氖样Ar原子激光脉冲。 可以使用单个毛细管产生2至3×10 4个激光照射。 这种强烈的短波长辐射源可用于包括材料的表面表征，高分辨率成像和印刷，光化学和光物理学，激光烧蚀，X射线光学表征和致密等离子体诊断等应用。

公开(公告)号：US07230965B2

公开(公告)日：2007-06-12

申请号：US10672722

申请日：2003-09-26

Applicant: Timothy S. Dyer ,  Richard G. Morton ,  Walter D. Gillespie ,  Thomas D. Steiger

Inventor： Timothy S. Dyer ,  Richard G. Morton ,  Walter D. Gillespie ,  Thomas D. Steiger

IPC: H01S3/22 ,  H01S3/03 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

Abstract: Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

Abstract translation: 公开了一种用于氟气体放电激光器的电极，其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线形状，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体上直的部分相交，并且顶部部分斜切远离第一和第二侧壁部分的不对称排出侧 阳极。

公开(公告)号：US07203216B2

公开(公告)日：2007-04-10

申请号：US10922692

申请日：2004-08-20

Applicant: Alexander I. Ershov ,  Richard M. Ness

Inventor： Alexander I. Ershov ,  Richard M. Ness

IPC: H01S3/22

CPC classification number: H01S3/0385 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/0057 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2333 ,  H01S3/2366

Abstract: Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. The feedback timing control is programmed to permit in some circumstances discharges timed so that no significant laser energy is output from the system. Use of this technique permits burst mode operation in which the first discharge of a burst is a no-output discharge so that timing parameters for each of the two chambers can be monitored before the first laser output pulse of the burst. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber.

Abstract translation: 反馈定时控制设备和注射种子模块化气体放电激光器的过程。 优选的实施方案是能够以大约4,000Hz或更大的脉冲速率产生高质量脉冲激光束并且在约20至40瓦或更大的集成输出的脉冲能量为约5至10mJ或更大的系统。 反馈定时控制被编程为允许在某些情况下放电定时，使得不会从系统输出显着的激光能量。 使用这种技术允许突发模式操作，其中突发的第一次放电是无输出放电，使得可以在突发的第一激光输出脉冲之前监视两个室中的每一个的定时参数。 提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。 可以单独控制室，允许在主振荡器中优化波长参数并优化放大室中的脉冲能量参数。

公开(公告)号：US07139301B2

公开(公告)日：2006-11-21

申请号：US10701280

申请日：2003-11-03

Applicant: Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  John M. Algots ,  Khurshid Ahmed

Inventor： Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  John M. Algots ,  Khurshid Ahmed

IPC: H01S3/22

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

公开(公告)号：US07132123B2

公开(公告)日：2006-11-07

申请号：US10629364

申请日：2003-07-29

Applicant: Richard G. Morton ,  Timothy S. Dyer ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Bryan Moosman ,  Alex P. Ivaschenko ,  Walter Gillespie ,  Curtis Rettig

Inventor： Richard G. Morton ,  Timothy S. Dyer ,  Thomas D. Steiger ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Bryan Moosman ,  Alex P. Ivaschenko ,  Walter Gillespie ,  Curtis Rettig

IPC: B05D5/12 ,  B05D3/02

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0388 ,  H01S3/041 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225

Abstract: The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

公开(公告)号：US20060227839A1

公开(公告)日：2006-10-12

申请号：US11095293

申请日：2005-03-31

Applicant: Herve Besaucele ,  Igor Fomenkov ,  William Partlo ,  Fedor Trintchouk ,  Hao Ton That

Inventor： Herve Besaucele ,  Igor Fomenkov ,  William Partlo ,  Fedor Trintchouk ,  Hao Ton That

IPC: H01S3/22

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/134

Abstract: A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loo; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.

Abstract translation: 公开了一种窄气体放电激光系统和操作方法，其可以包括：振荡器腔; 激光室，包括容纳激光介质气体的腔室; 至少一个峰值电容器电连接到所述腔室壳体和一对电极中的第一电极; 所述一对电极中的第二个连接到所述至少一个峰值电容器的相对端子; 连接到所述腔室壳体的电流返回路径; 一个端子，第一个电极，激光介质气体，第二个电极，电流返回路径和第二个端子，形成具有特定头电流电感槽独有的电感的头电流感应回路; 光谱质量调谐机构包括用于改变特定头电流电感回路的特定头电流感应环电感值的机构。

公开(公告)号：US07095774B2

公开(公告)日：2006-08-22

申请号：US10672181

申请日：2003-09-26

Applicant: Richard G. Morton ,  Timothy S. Dyer

Inventor： Richard G. Morton ,  Timothy S. Dyer

IPC: H01S3/22 ,  H01S3/097

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

Abstract: A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint and a lower portion. In one aspect of an embodiment of the present invention, the upper region may include copper and the lower region may include a copper alloy. A portion of the electrode facing a gas discharge region may be formed in an arcuate shape extending into straight line portions on either side of the arcuate portion. The straight line portions may terminate in vertical straight sides.

Abstract translation: 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极及其制造方法。 电极可以包括铜和铜合金体，其具有包含放电覆盖区和下部的上部弯曲区域。 在本发明的一个实施方案的一个方面，上部区域可以包括铜，并且下部区域可以包括铜合金。 面对气体放电区域的电极的一部分可以形成为延伸到弓形部分的任一侧上的直线部分的弓形形状。 直线部分可以在垂直的直边终止。

公开(公告)号：US07079565B2

公开(公告)日：2006-07-18

申请号：US10727718

申请日：2003-12-04

Applicant: Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

Inventor： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

IPC: H01S3/097

CPC classification number: H01S3/038 ,  H01S3/09713 ,  H01S3/225

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract translation: 通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。 电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。 绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于 控制电极的放电面积。 可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。