公开(公告)号：US10833108B2

公开(公告)日：2020-11-10

申请号：US16860027

申请日：2020-04-27

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar

IPC: H01L27/146 ,  H01L27/15 ,  H01L27/12 ,  H01L27/28

Abstract: A 3D micro display, the 3D micro display including: a first single crystal layer including at least one LED driving circuit; a second single crystal layer including a first plurality of light emitting diodes (LEDs), where the second single crystal layer is on top of the first single crystal layer, where the second single crystal layer includes at least ten individual first LED pixels; and a second plurality of light emitting diodes (LEDs), where the 3D micro display includes an oxide to oxide bonding structure.

公开(公告)号：US10825779B2

公开(公告)日：2020-11-03

申请号：US16907234

申请日：2020-06-20

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach

IPC: H01L23/02 ,  H01L21/00 ,  H01L23/544 ,  H01L23/00 ,  H01L25/065

Abstract: A 3D semiconductor device and structure, the device including: a first die including first transistors and first interconnect, overlaid by a second die including second transistors and second interconnect, where the first die has a first die area and the second die has a second die area, where the first die area is at least 10% larger than the second die area, where the second die is aligned to the first die with less than 400 nm alignment error, where second die includes an array of memory cells, and where the first die includes decoders for the array.

公开(公告)号：US10651054B2

公开(公告)日：2020-05-12

申请号：US16115519

申请日：2018-08-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L21/48 ,  H01L23/498 ,  H01L27/092 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L25/065 ,  H01L23/60 ,  H01L23/522 ,  H01L23/367 ,  H01L25/00 ,  H01L27/098 ,  H01L23/373 ,  H01L23/50 ,  H01L21/8238

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors and a first metal layer, where the first metal layer includes interconnecting the first transistors forming, at least in part a plurality of logic gates; a plurality of second transistors overlaying, at least in part the first single crystal layer; a plurality of third transistors overlaying, at least in part the second transistors; a second metal layer overlaying, at least in part the third transistors; Input/Output pads to provide connection to external devices, a local power grid to distribute power to the logic gates, where the third transistors are aligned to the first transistors with less than 40 nm misalignment, where the first single crystal layer includes a Phase Lock Loop (“PLL”) structure connected to at least one of the Input/Output pads, where a memory cell includes at least one of the third transistors.

公开(公告)号：US10418369B2

公开(公告)日：2019-09-17

申请号：US15990611

申请日：2018-05-26

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Jin-Woo Han

IPC: H01L27/115 ,  H01L27/112 ,  H01L27/11556 ,  H01L23/48 ,  H01L27/11529 ,  H01L27/11573 ,  H01L27/11582 ,  G11C5/02 ,  G11C13/00 ,  G11C16/04 ,  G11C16/08 ,  G11C16/10 ,  G11C16/16 ,  G11C16/26 ,  G11C17/16 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11519 ,  H01L27/11548 ,  H01L27/11565 ,  H01L27/1157 ,  H01L27/11575 ,  H01L27/11578 ,  H01L27/24

Abstract: A multilevel semiconductor device including: a first level including a first array of first memory cells and first control line; a second level including a second array of second memory cells and second control line; a third level including a third array of third memory cells and third control line, where the second level overlays the first, and where the third level overlays the second; a first, second and third access pillar; memory control circuits designed to individually control cells of the first, second and third memory cells, where the device includes an array of units, where each of the units includes a plurality of the first, second and third memory cells, and a portion of the memory control circuits, where the array of units include at least eight rows and eight columns of units, and where the memory control is designed to control independently each of the units.

公开(公告)号：US10355121B2

公开(公告)日：2019-07-16

申请号：US15727592

申请日：2017-10-07

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Yuniarto Widjaja

IPC: H01L29/78 ,  G11C16/02 ,  H01L27/115 ,  G11C11/404 ,  G11C11/4097 ,  H01L27/108 ,  H01L27/11 ,  H01L27/11578 ,  H01L27/24 ,  G11C11/412 ,  G11C16/04

Abstract: A semiconductor device, the device including: a first stratum including memory periphery circuits; a second stratum including an array of first memory cells, where the first stratum is overlaid by the second stratum; a third stratum including an array of second memory cells, where the second stratum is overlaid by the third stratum, where the first memory cells include a plurality of first polysilicon structures and the second memory cells include a plurality of second polysilicon structures, and where at least one of the first memory cells is self-aligned to at least one of the second memory cells.

公开(公告)号：US20190067109A1

公开(公告)日：2019-02-28

申请号：US16169969

申请日：2018-10-24

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first single crystal transistors; contact plugs; a first metal layer, where a portion of the contact plugs provide connections from the plurality of first single crystal transistors to the first metal layer, and where connections include forming memory control circuits; a second level including a plurality of second transistors; a third level including a plurality of third transistors, where the second level overlays the first level, the third level overlays the second level; a second metal layer overlaying the third level; and a third metal layer overlaying the second metal layer, where second transistors are aligned to first transistors with less than 40 nm alignment error, where the second level includes first memory cells, where the third level includes second memory cells, and where the memory control circuits are designed to adjust a memory write voltage according to the device specific process parameters.

公开(公告)号：US20190057903A1

公开(公告)日：2019-02-21

申请号：US16166636

申请日：2018-10-22

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

Abstract: A 3D semiconductor device, the device including: a first layer including a first single crystal transistor; a second layer including second transistors; a third layer including third transistors; a fourth layer including fourth transistors, where the first layer is overlaid by the second layer, where the second layer is overlaid by the third layer, and where the third layer is overlaid by the fourth layer; where a plurality of the fourth transistors are aligned to the plurality of the first single crystal transistor with less than 40 nm alignment error, where the third transistors are junction-less transistors (JLT), where each of the fourth transistors include a transistor channel, a drain and a source, and where the transistor channel is significantly narrower than the drain or the source.

公开(公告)号：US10157909B2

公开(公告)日：2018-12-18

申请号：US15862616

申请日：2018-01-04

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L27/06 ,  H01L29/78

Abstract: A 3D semiconductor device, the device including: a first layer including first transistors each including a silicon channel; a second layer including second transistors each including a silicon channel, the second layer overlaying the first transistors, where at least one of the second transistors is at least partially self-aligned to at least one of the first transistors; and a third layer including third transistors each including a single crystal silicon channel, the third layer underlying the first transistors, where a plurality of the third transistors form a logic circuit, and where the logic circuit is aligned to the second transistors with less than 200 nm alignment error, where the first layer thickness is less than one micron, and where the first transistor is a junction-less transistor.

公开(公告)号：US20180301380A1

公开(公告)日：2018-10-18

申请号：US15950169

申请日：2018-04-11

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/822 ,  H03K19/177 ,  H03K19/0948 ,  H03K17/687 ,  H01L29/786 ,  H01L29/78 ,  H01L27/118 ,  H01L27/112 ,  H01L27/11 ,  H01L27/108 ,  H01L27/105 ,  H01L27/092 ,  H01L27/06 ,  H01L27/02 ,  H01L25/18 ,  H01L25/065 ,  H01L23/544 ,  H01L23/525 ,  H01L23/36 ,  H01L21/84 ,  H01L21/8238 ,  H01L21/762 ,  H01L21/683 ,  G11C29/00 ,  G11C17/14 ,  G11C17/06 ,  G11C16/04 ,  H01L23/48 ,  H01L23/00

CPC classification number: H01L21/8221 ,  G11C5/025 ,  G11C5/063 ,  G11C8/10 ,  G11C13/003 ,  G11C16/0483 ,  G11C17/06 ,  G11C17/14 ,  G11C17/16 ,  G11C29/021 ,  G11C29/028 ,  G11C29/82 ,  G11C2213/71 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/823871 ,  H01L21/823885 ,  H01L21/84 ,  H01L21/845 ,  H01L23/36 ,  H01L23/367 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/49827 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/1157 ,  H01L27/11578 ,  H01L27/11803 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/785 ,  H01L29/78696 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45015 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/207 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K17/687 ,  H03K19/0016 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer interconnecting the plurality of first transistors, where the interconnecting includes forming memory peripheral circuits; a plurality of second transistors overlaying the at least one first metal layer; a second metal layer overlaying the plurality of second transistors; a first memory cell overlaying the memory peripheral circuits; and a second memory cell overlaying the first memory cell, where the first memory cell includes at least one of the second transistors, where at least one of the second transistors includes a source, channel and drain, where the source, the channel and the drain have the same dopant type.

公开(公告)号：US20180277521A1

公开(公告)日：2018-09-27

申请号：US15990684

申请日：2018-05-28

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist

IPC: H01L25/065 ,  H01L29/66 ,  H01L21/768 ,  H01L23/48 ,  H01L23/485 ,  H01L23/522 ,  H01L23/00 ,  H01L25/00 ,  H01L27/06 ,  H01L27/088 ,  H01L21/74 ,  H01L29/78 ,  H01L27/092 ,  H01L29/423

CPC classification number: H01L25/0657 ,  H01L21/743 ,  H01L21/76898 ,  H01L23/36 ,  H01L23/481 ,  H01L23/485 ,  H01L23/522 ,  H01L23/5225 ,  H01L24/25 ,  H01L25/50 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/092 ,  H01L29/4236 ,  H01L29/66621 ,  H01L29/78 ,  H01L2224/24146 ,  H01L2225/06544 ,  H01L2924/00 ,  H01L2924/0002 ,  H01L2924/01104 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/13091 ,  H01L2924/2064 ,  H01L2924/351

Abstract: A 3D semiconductor device, the device including: a first single crystal layer including a plurality of first transistors; at least one first metal layer interconnecting the plurality of first transistors, where the interconnecting includes forming a plurality of logic gates; a plurality of second transistors overlaying the first single crystal layer; a second metal layer overlaying the plurality of second transistors; a plurality of third transistors overlaying the second transistors; a third metal layer overlaying the plurality of third transistors; and a connective metal path between the third metal layer and at least one of the first transistors, where at least one of the plurality of third transistors is aligned to at least one of the plurality of first transistors with less than 40 nm alignment error, where the first metal layer is powered by a first voltage and the second metal layer is powered by a second voltage.