公开(公告)号：US20120230352A1

公开(公告)日：2012-09-13

申请号：US13074593

申请日：2011-03-29

申请人： John D. Minelly ,  Sergei V. Govorkov ,  Luis A. Spinelli ,  Douglas William Anthon ,  Jay Michael Ingalls

发明人： John D. Minelly ,  Sergei V. Govorkov ,  Luis A. Spinelli ,  Douglas William Anthon ,  Jay Michael Ingalls

IPC分类号： H01S3/30

CPC分类号： H01S3/042 ,  H01S3/0407 ,  H01S3/06704 ,  H01S3/06733 ,  H01S3/0804 ,  H01S3/08059 ,  H01S3/094015 ,  H01S3/09415 ,  H01S3/105 ,  H01S3/1062 ,  H01S3/1618 ,  H01S3/173 ,  H01S5/4012 ,  H01S2301/03

摘要： A CW fiber-laser includes a gain fiber having a reflector proximity-coupled to one end, with the other end left uncoated. A laser resonator is defined by the reflector and the uncoated end of the gain-fiber. Pump-radiation from two fast-axis diode-laser bar stacks is combined and focused into the uncoated end of the gain-fiber for energizing the fiber. Laser radiation resulting from the energizing is delivered from the uncoated end of the gain-fiber and separated from the pump-radiation by a dichroic minor.

摘要翻译： CW光纤激光器包括增益光纤，其具有与一端近似耦合的反射器，另一端未被涂覆。 激光谐振器由反射器和增益光纤的未涂覆端限定。 来自两个快轴二极管激光棒叠层的泵浦辐射被组合并聚焦到增益光纤的未涂覆端，用于激励光纤。 由激励产生的激光辐射从增益纤维的未涂覆端输送，并通过二色性未分配与泵浦辐射分离。

公开(公告)号：US20100309945A1

公开(公告)日：2010-12-09

申请号：US12814334

申请日：2010-06-11

申请人： Sergei V. GOVORKOV ,  Alexander O.W. Weissner ,  Timur V. Misyuryaev ,  Alexander Jacobson ,  Gongxue Hua ,  Rainer Paetzel ,  Thomas Schroeder ,  Hans-Stephen Albrecht

发明人： Sergei V. GOVORKOV ,  Alexander O.W. Weissner ,  Timur V. Misyuryaev ,  Alexander Jacobson ,  Gongxue Hua ,  Rainer Paetzel ,  Thomas Schroeder ,  Hans-Stephen Albrecht

IPC分类号： H01S3/22

CPC分类号： H01S3/10092 ,  H01S3/08031 ,  H01S3/083 ,  H01S3/097 ,  H01S3/225 ,  H01S2301/02

摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.

摘要翻译： 激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。 功率振荡器包括用于限制可放大的辐射带宽的光学装置。 与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。 功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

公开(公告)号：US07738515B2

公开(公告)日：2010-06-15

申请号：US12138042

申请日：2008-06-12

申请人： Luis A. Spinelli ,  Sergei V. Govorkov ,  R. Russel Austin

发明人： Luis A. Spinelli ,  Sergei V. Govorkov ,  R. Russel Austin

IPC分类号： H01S3/10

CPC分类号： H01S3/1106 ,  G02F1/37 ,  H01S3/0057 ,  H01S3/0092 ,  Y10S372/70

摘要： Laser apparatus is disclosed in which fundamental-wavelength optical pulses delivered from a mode-locked laser resonator at a pulse-repetition frequency (PRF) are converted to harmonic-wavelength pulses in an optical delay loop. One example is disclosed in which the harmonic-wavelength pulses are delivered directly from the delay loop. Another example is disclosed in which the harmonic-wavelength pulses are divided by the delay loop into a number of temporally spaced-apart replicas thereof, and the delay loop delivers bursts of replicas of different one of the harmonic wavelength pulses at a burst-repetition frequency equal to or a multiple of the PRF of the resonator.

摘要翻译： 公开了一种激光装置，其中以脉冲重复频率（PRF）从锁模激光谐振器传送的基波波长光脉冲被转换成光延迟环路中的谐波波长脉冲。 公开了一个示例，其中谐波波长脉冲直接从延迟环路传送。 公开了另一个例子，其中谐波波长脉冲被延迟环分成多个时间间隔分开的副本，并且延迟环以突发重复频率递送不同一个谐波波长脉冲的复制脉冲串 等于谐振器的PRF或倍数。

公开(公告)号：US07697207B2

公开(公告)日：2010-04-13

申请号：US12322601

申请日：2009-02-04

申请人： Sergei V. Govorkov ,  Sol Peter DiJaili ,  Douglas William Anthon ,  Luis A. Spinelli

发明人： Sergei V. Govorkov ,  Sol Peter DiJaili ,  Douglas William Anthon ,  Luis A. Spinelli

IPC分类号： G02B27/10 ,  G02B27/30

CPC分类号： B23K26/0613 ,  G02B19/0014 ,  G02B19/0028 ,  G02B19/0057 ,  G02B27/0905 ,  G02B27/0994 ,  G02B27/283 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/02248 ,  H01S5/02252 ,  H01S5/02272 ,  H01S5/02484 ,  H01S5/4012 ,  H01S5/4018 ,  H01S5/4025 ,  H01S5/4043 ,  H01S5/4056 ,  H01S5/4087

摘要： Arrangements for combination and fast-axis alignment of fast-axes of diode-laser beams are disclosed. Alignment arrangements include providing each diode-laser with a corresponding alignable fast-axis collimating lens, providing individually alignable mirrors for steering an re-orienting beams from each diode-laser, and providing single diode-laser slab-modules in which the diode-laser beams can be pre-aligned to a common propagation-axis direction, and in which edges and surfaces of the slabs can be used to align the fast and slow-axes of the beams. Beam combination methods include combination by dichroic elements, polarization-sensitive elements, and optical fiber bundles.

摘要翻译： 公开了二极管激光束的快速轴组合和快速对准的布置。 对准布置包括为每个二极管激光器提供相应的可对准的快轴准直透镜，提供用于转向来自每个二极管激光器的重定向光束的单独对准的反射镜，并提供单个二极管激光板模块，其中二极管激光器 梁可以预先对齐到公共传播轴方向，并且其中板的边缘和表面可以用于对准梁的快轴和慢轴。 光束组合方法包括二色性元件，偏振敏感元件和光纤束的组合。

公开(公告)号：US20100078857A1

公开(公告)日：2010-04-01

申请号：US12539985

申请日：2009-08-12

申请人： Sergei V. Govorkov ,  John H. Jerman

发明人： Sergei V. Govorkov ,  John H. Jerman

IPC分类号： B41J27/00 ,  B29C35/08

CPC分类号： B41J2/471 ,  B41J3/4075 ,  G02B26/105 ,  G02B27/40

摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image. Light from the laser can be delivered to the oscillating mirror via an optical fiber.

摘要翻译： 用于在磁带上标记位图图像的设备包括可调制激光束的源。 光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。 振动镜将光束引导到安装在滑架上的聚焦透镜。 聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。 当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。 布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。 磁带是递增的，并且重复的滑动遍历被完成打印位图图像。 来自激光器的光可以通过光纤被传送到振动反射镜。

公开(公告)号：US07615722B2

公开(公告)日：2009-11-10

申请号：US11487798

申请日：2006-07-17

申请人： Sergei V. Govorkov ,  R. Russel Austin ,  Joerg Ferber

发明人： Sergei V. Govorkov ,  R. Russel Austin ,  Joerg Ferber

IPC分类号： H01L21/00

CPC分类号： B23K26/0604 ,  B23K26/0613 ,  B23K2101/40

摘要： An amorphous silicon layer on a glass substrate is crystallized by concentrating CW radiation from a number of OPS-lasers into a line of light on the layer. The layer is moved with respect to the line of light to control the dwell time of the line on any location on the layer and to crystallize an extended area of the layer.

摘要翻译： 通过将来自多个OPS激光器的CW辐射集中到该层上的光线中，玻璃基板上的非晶硅层被结晶。 该层相对于光线移动，以控制该层在该层上任何位置上的停留时间并使该层的延伸区域结晶。

公开(公告)号：US20080143888A1

公开(公告)日：2008-06-19

申请号：US12012966

申请日：2008-02-06

申请人： Juan L. Chilla ,  Sergei V. Govorkov ,  Andrea Caprara ,  Murray K. Reed ,  Luis A. Spinelli

发明人： Juan L. Chilla ,  Sergei V. Govorkov ,  Andrea Caprara ,  Murray K. Reed ,  Luis A. Spinelli

IPC分类号： H04N5/74

CPC分类号： H04N9/3129 ,  H04N9/3114 ,  H04N9/315

摘要： A projection video display includes a light source including an OPS-laser delivering laser radiation in multiple transverse modes (a multiple-transverse-mode OPS-laser). The display includes a spatial light modulator for spatially modulating the radiation from the multiple-transverse-mode OPS-laser in accordance with a portion of an image to be displayed. Projection optics project the spatially modulated light on a screen on which the image is to be displayed. In one example the OPS-laser is a diode-laser array pumped OPS-laser and is one of three lasers, one delivering red light, one delivering blue light, and the other delivering green light. The lasers are time modulated such that the spatial light modulator receives light from each of the lasers separately. The OPS laser is directly time modulated by periodically turning the diode-laser array on and off.

公开(公告)号：US07158553B2

公开(公告)日：2007-01-02

申请号：US10776404

申请日：2004-02-11

申请人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

发明人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

IPC分类号： H01S3/22

CPC分类号： H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

公开(公告)号：US06546037B2

公开(公告)日：2003-04-08

申请号：US10077328

申请日：2002-02-15

申请人： Uwe Stamm ,  Sergei V. Govorkov

发明人： Uwe Stamm ,  Sergei V. Govorkov

IPC分类号： H01S322

CPC分类号： H01S3/0057 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/081 ,  H01S3/0812 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/1305 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2258 ,  Y10S372/70

摘要： A narrow band molecular fluorine laser system includes an oscillator and an amplifier, wherein the oscillator produces a 157 nm beam having a linewidth less than 1 pm and the amplifier increases the power of the beam above a predetermined amount, such as more than one or several Watts. The oscillator includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, electrodes within the discharge chamber connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam having a wavelength around 157 nm. Line-narrowing optics are included intra- and/or extra-resonator for reducing the linewidth of the laser beam to less than 1 pm. The amplifier may be the same or a different discharge chamber, and optical and/or electronic delays may be used for timing pulses from the oscillator to reach the amplifier at a maximum in the discharge current of the amplifier.

公开(公告)号：US06515741B1

公开(公告)日：2003-02-04

申请号：US09454803

申请日：1999-12-03

申请人： Dirk L. Basting ,  Sergei V. Govorkov

发明人： Dirk L. Basting ,  Sergei V. Govorkov

IPC分类号： G01N2100

CPC分类号： G03F7/70025 ,  G01J9/02 ,  G01M11/00 ,  G03F7/70575 ,  G03F7/706 ,  H01S3/08009 ,  H01S3/225

摘要： An apparatus and method for testing the quality of a line narrowing and/or selection module that has been particularly assembled for use with a line-narrowed excimer or molecular fluorine laser is described. The method includes providing a test beam which has been previously line-narrowed using an installed line-narrowing and/or selection module. Then, the test beam is directed into the test module. Next, the one or more properties of the retroreflected beam are measured, i.e., after the beam has traversed the test module. The quality of the test module and one or more of its components may be determined based on the measurements. Such properties as wavefront distortions, excessive scattering, total reflectivity, total dispersion and aging of components of the test module may be measured for making this quality determination.

摘要翻译： 描述了一种用于测试特别组装用于线狭窄的准分子或分子氟激光的线狭窄和/或选择模块的质量的装置和方法。 该方法包括提供已经使用安装的线狭窄和/或选择模块预先线狭窄的测试梁。 然后，测试光束被引导到测试模块中。 接下来，测量回射光束的一个或多个属性，即在光束穿过测试模块之后。 可以基于测量来确定测试模块及其一个或多个组件的质量。 可以测量波长失真，过度散射，总反射率，测试模块的组件的总体色散和老化等特性以进行该质量测定。