Method of evaluating a semiconductor wafer
    32.
    发明授权
    Method of evaluating a semiconductor wafer 失效
    评估半导体晶片的方法

    公开(公告)号:US5897327A

    公开(公告)日:1999-04-27

    申请号:US14084

    申请日:1998-01-27

    IPC分类号: G01N27/00 H01L21/66 G01R31/26

    CPC分类号: H01L22/12

    摘要: A MOS capacitor in which an insulating layer of thermal oxide film is disposed between the electrode 2 and the silicon wafer 1 is formed. While a light beam of an energy larger than 1.1 eV is irradiated on the electrode 2 and its periphery, electrons inject from the electrode 2 side (voltage is applied from the silicon wafer 1 side). The injected electrons are activated by the light irradiation. For both p-type or n-type semiconductor, the dielectric breakdown electric field strength can be precisely measured according to the degree of processing defects. The evaluation method is particularly effective for the n-type semiconductor wafer, which was difficult to evaluate by the prior art.

    摘要翻译: 形成在电极2和硅晶片1之间配置有热氧化膜绝缘层的MOS电容器。 虽然能量大于1.1eV的光束照射在电极2及其周围,但电子从电极2侧注入电压(从硅晶片1侧施加电压)。 注入的电子被光照射激活。 对于p型或n型半导体,可以根据加工缺陷的程度精确地测量绝缘击穿电场强度。 该评价方法对于现有技术难以评价的n型半导体晶片特别有效。

    Silver halide color photographic material
    33.
    发明授权
    Silver halide color photographic material 失效
    卤化银彩色照相材料

    公开(公告)号:US5691125A

    公开(公告)日:1997-11-25

    申请号:US665897

    申请日:1996-06-19

    摘要: There is disclosed a silver halide color photographic material having a red-sensitive silver halide emulsion layer, a green-sensitive silver halide emulsion layer, a blue-sensitive silver halide emulsion layer, which comprises a cyan dye-forming coupler represented by formula (I) and (a) a monodisperse silver halide emulsion, (b) non-photosensitive silver halide emulsion wherein the inside or the surface of grains is fogged, (c) a colloidal silver, (d) negative-type interval latent image-type silver halide grains chemically sensitized to a defined depth from the surface, (e) a sensitizing dye containing a sulfonamide group, (f) three separated layers of high, medium, and low sensitivities, (g) two separated layers each having different content of iodine, (h) grains each having a defined spectral sensitivity distribution and a DIR-hydroquinone, or (i) a DIR-hydroquinone: formula (I) ##STR1## wherein R.sup.1 represents a hydrogen atom or a substituent, R.sup.2 represents a substituent, X represents a hydrogen atom or a group capable of being released upon a coupling reaction of the coupler represented by formula (I) with the oxidized product of a color-developing agent, and Z.sup.1 represents a group of nonmetallic atoms required for forming a nitrogen-containing 6-membered heterocyclic ring, which contains at least one group capable of being dissociated.

    摘要翻译: 公开了具有感红卤化银乳剂层,感绿卤化银乳剂层,感蓝卤化银乳剂层的卤化银彩色照相材料,其包含由式(I)表示的青色染料形成成色剂 )和(a)单分散卤化银乳剂,(b)非感光卤化银乳剂,其中颗粒的内部或表面起雾,(c)胶态银,(d)负型间隔潜像型银 (e)含有磺酰胺基团的敏化染料,(f)三种高,中,低灵敏度的分离层,(g)两个分开的层,每层具有不同的碘含量 ,(h)各自具有限定的光谱灵敏度分布的颗粒和DIR-氢醌,或(i)DIR-氢醌:式(I)其中R 1表示氢原子或取代基,R 2表示取代基,X 代表 氢原子或能够由式(I)表示的成色剂与显色剂的氧化物偶联反应后释放的基团,Z1表示形成含氮6的所需非金属原子团 含有至少一个能够解离的基团。

    Method of manufacturing a capacitor having metal electrodes
    36.
    发明授权
    Method of manufacturing a capacitor having metal electrodes 失效
    制造具有金属电极的电容器的方法

    公开(公告)号:US5527729A

    公开(公告)日:1996-06-18

    申请号:US412563

    申请日:1995-03-29

    CPC分类号: H01L28/40

    摘要: On a silicon substrate, a silicon oxide layer, a first platinum layer, a dielectric film and a second platinum layer are formed, and then the second platinum layer and the dielectric film are dry etched, via a resist layer, in a 1-5 Pa low pressure region with a mixed gas of HBr and O.sub.2 as the etching gas. As soon as the first platinum layer is exposed, the unetched portion of dielectric film is etched off in a 5-50 Pa high pressure region, and then the first platinum layer is dry etched again in the low pressure region to form a capacitor consisting of a top electrode, a capacitance insulation layer and a bottom electrode in a semiconductor integrated circuit chip. Using this manufacturing method prevents the deterioration in definition caused by the use of a thick resist and the operation failure of circuit elements such as transistors due to over etching on the insulation layer.

    摘要翻译: 在硅衬底上形成氧化硅层,第一铂层,电介质膜和第二铂层,然后通过抗蚀剂层在1-5中干法蚀刻第二铂层和电介质膜 Pa低压区域,混合气体为HBr和O2作为蚀刻气体。 一旦露出第一铂层,在5-50Pa高压区域中蚀刻介电膜的未蚀刻部分,然后在低压区域再次干法蚀刻第一铂层,形成由 半导体集成电路芯片中的顶部电极,电容绝缘层和底部电极。 使用该制造方法可以防止由于在绝缘层上的过度蚀刻而使用厚的抗蚀剂引起的定义的劣化以及诸如晶体管的电路元件的操作故障。

    Silver halide color photographic material containing an imidazotriazole
cyan coupler
    37.
    发明授权
    Silver halide color photographic material containing an imidazotriazole cyan coupler 失效
    含有咪唑并三唑青色成色剂的卤化银彩色照相材料

    公开(公告)号:US5292630A

    公开(公告)日:1994-03-08

    申请号:US18454

    申请日:1993-02-16

    IPC分类号: G03C7/305 G03C7/38

    CPC分类号: G03C7/30529 G03C7/3835

    摘要: A silver halide color photographic material containing one or more imidazotriazole cyan couplers each having an electron attracting group with a .sigma.p of 0.35 or more in at least one layer on the support. The material provides a cyan color image having a sharp light absorption characteristic absorbing light having a relatively long wavelength falling within a narrow wavelength range. The imidazotriazole cyan coupler is of the following structural formula (I): ##STR1## where R.sub.1 represents a hydrogen atom or a substituent; R.sub.2 represents an electron attracting group having a Hammett's constant value .sigma.p of 0.35 or ore; X represents a hydrogen atom or a group released by coupling with an oxidation product of an aromatic primary amine color developing agent; and R.sub.1 or R.sub.2 may also be a divalent group forming a dimer or higher polymer, or they each may be bonded to a polymer chain to form a homopolymer or copolymer.

    摘要翻译: 含有一种或多种咪唑并三唑青色成色剂的卤化银彩色照相材料,其各自具有在载体上的至少一层中(Sigma)p为0.35以上的吸电子基团。 该材料提供了具有吸收特征的清晰吸收特征的青色图像,该特征吸收了波长较小的较长波长的光。 咪唑并三唑青色成色剂具有以下结构式(I):(*化学结构*)(I)其中R1表示氢原子或取代基; R2表示哈米特常数值(Sigma)p为0.35或矿石的吸电子基团; X表示氢原子或通过与芳族伯胺显色剂的氧化产物偶联而释放的基团; 并且R 1或R 2也可以是形成二聚体或更高级聚合物的二价基团,或者它们各自可以与聚合物链结合以形成均聚物或共聚物。

    Substituted thiazole dye compounds
    39.
    发明授权
    Substituted thiazole dye compounds 失效
    取代的噻唑染料化合物

    公开(公告)号:US5084571A

    公开(公告)日:1992-01-28

    申请号:US423221

    申请日:1989-10-18

    申请人: Yasuhiro Shimada

    发明人: Yasuhiro Shimada

    摘要: There are disclosed substituted thiazole dye compounds represented by the following Formula (I):Formula (I) ##STR1## wherein R.sub.1 represents a hydrogen atom or a group capable of substitution onto a benzene ring, n is an integer of 1 to 4, x represents a substitutent capable of forming a hydrogen bond with the hydrogen of --CONH--, R.sub.2 represents an electron-attractive substituent, R.sub.3 represents a group capable of substitution onto a thiazole ring, and R.sub.4 represents an aromatic group or an unsaturated heterocyclic group that bonds to the nitrogen atom at a carbon atom having an unsaturated linkage.The dye compounds provide a cyan color which is good in hues and possesses fastness to light and heat.

    摘要翻译: 公开了由下式(I)表示的取代的噻唑染料化合物:式(I)其中R 1表示氢原子或能够取代苯环的基团,n是1〜4的整数,x 表示能够与-CONH-的氢形成氢键的取代基,R2表示吸电子取代基,R3表示可以取代到噻唑环上的基团,R4表示键合的芳香族基团或不饱和杂环基团 具有不饱和键的碳原子上的氮原子。 染料化合物提供色调良好并具有耐光性和耐热性的青色。

    Silver halide photographic materials comprising non-diffusible
photographically useful compounds
    40.
    发明授权
    Silver halide photographic materials comprising non-diffusible photographically useful compounds 失效
    卤化银照相材料包含非扩散照相用的化合物

    公开(公告)号:US4837136A

    公开(公告)日:1989-06-06

    申请号:US917133

    申请日:1986-10-09

    摘要: A silver halide photographic material is described comprising a support having coated thereon at least one silver halide emulsion layer, wherein at least one of the silver halide emulsion layer and other hydrophilic colloid layer contains a nondiffusible photographically useful compound having a sulfo group and a group represented by the following general formula (I): ##STR1## wherein R.sub.1 and R.sub.2 each represents an aliphatic group having at least 2 carbon atoms and r represents 0 or 1.The compounds represented by the general formula (I) are photographically useful compounds which impart excellent photographic properties to silver halide photographic materials, including improved dispersibility.

    摘要翻译: 描述了一种卤化银照相材料,其包括其上涂覆有至少一个卤化银乳剂层的载体,其中卤化银乳剂层和其它亲水胶体层中的至少一种含有具有磺基的非扩散性照相用化合物和表示的基团 通式(I)表示:其中R 1和R 2各自表示具有至少2个碳原子的脂族基团,r表示0或1.由通式(I)表示的化合物是照相的有用的 赋予卤化银照相材料优异照相性能的化合物,包括改进的分散性。