公开(公告)号：US20150035163A1

公开(公告)日：2015-02-05

申请号：US14012402

申请日：2013-08-28

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Guang-Hwa Ma ,  Shih-Kuang Chiu ,  Shih-Ching Chen ,  Chun-Chi Ke ,  Chang-Lun Lu ,  Chun-Hung Lu ,  Hsien-Wen Chen ,  Chun-Tang Lin ,  Yi-Che Lai ,  Chi-Hsin Chiu ,  Wen-Tsung Tseng ,  Tsung-Te Yuan ,  Lu-Yi Chen ,  Mao-Hua Yeh

IPC: H01L23/538 ,  H01L23/00

CPC classification number: H01L24/96 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/5389 ,  H01L24/19 ,  H01L24/20 ,  H01L24/24 ,  H01L24/82 ,  H01L2221/68372 ,  H01L2221/68377 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/24137 ,  H01L2224/82005 ,  H01L2224/82007 ,  H01L2924/12042 ,  H01L2924/18162 ,  H01L2924/351 ,  H01L2924/3511 ,  H01L2924/00

Abstract: The present invention provides a semiconductor package and a method of fabricating the same, including: placing a semiconductor element in a groove of a carrier; forming a dielectric layer on the semiconductor element; forming on the dielectric layer a circuit layer electrically connected to the semiconductor element; and removing a first portion of the carrier below the groove to keep a second of the carrier on a sidewall of the groove intact for the second portion to function as a supporting part. The present invention does not require formation of a silicon interposer, therefore the overall cost of the final product is much reduced.

Abstract translation: 本发明提供一种半导体封装及其制造方法，包括：将半导体元件放置在载体的凹槽中; 在所述半导体元件上形成介电层; 在所述电介质层上形成电连接到所述半导体元件的电路层; 以及在所述凹槽下方移除所述载体的第一部分以将所述载体的第二载体保持在所述凹槽的侧壁上，以使所述第二部分用作支撑部分。 本发明不需要形成硅插入件，因此最终产品的总成本大大降低。

公开(公告)号：US20140342507A1

公开(公告)日：2014-11-20

申请号：US14449278

申请日：2014-08-01

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Yan-Heng Chen ,  Jung-Pang Huang ,  Hsin-Yi Liao ,  Shih-Kuang Chiu ,  Guang-Hwa Ma

IPC: H01L23/00

CPC classification number: H01L24/11 ,  H01L21/561 ,  H01L21/568 ,  H01L23/3107 ,  H01L23/3128 ,  H01L23/5389 ,  H01L24/14 ,  H01L24/19 ,  H01L24/24 ,  H01L24/81 ,  H01L24/96 ,  H01L25/105 ,  H01L2224/033 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/1412 ,  H01L2224/16225 ,  H01L2224/24137 ,  H01L2224/48227 ,  H01L2224/81 ,  H01L2225/1035 ,  H01L2225/1058 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/00 ,  H01L2924/00012

Abstract: A semiconductor package includes: a dielectric layer having opposite first and second surfaces; a semiconductor chip embedded in the dielectric layer and having a plurality of electrode pads; a plurality of first metal posts disposed on the electrode pads of the semiconductor chip, respectively, such that top ends of the first metal posts are exposed from the first surface; at least a second metal post penetrating the dielectric layer such that two opposite ends of the second metal post are exposed from the first and second surfaces, respectively; a first circuit layer formed on the first surface for electrically connecting the first and second metal posts; and a second circuit layer formed on the second surface for electrically connecting the second metal post. The semiconductor package dispenses with conventional laser ablation and electroplating processes for forming conductive posts in a molding compound, thereby saving fabrication time and cost.

Abstract translation: 半导体封装包括：具有相反的第一和第二表面的电介质层; 嵌入在介电层中并具有多个电极焊盘的半导体芯片; 分别设置在半导体芯片的电极焊盘上的多个第一金属柱，使得第一金属柱的顶端从第一表面露出; 至少第二金属柱穿透介电层，使得第二金属柱的两个相对端分别从第一表面和第二表面露出; 第一电路层，形成在第一表面上，用于电连接第一和第二金属柱; 以及形成在所述第二表面上用于电连接所述第二金属柱的第二电路层。 该半导体封装省去了用于在模塑料中形成导电柱的常规激光烧蚀和电镀工艺，从而节省制造时间和成本。

公开(公告)号：US20140021629A1

公开(公告)日：2014-01-23

申请号：US13654754

申请日：2012-10-18

Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.

Inventor： Chiang-Cheng Chang ,  Meng-Tsung Lee ,  Jung-Pang Huang ,  Shih-Kuang Chiu ,  Fu-Tang Huang

IPC: H01L23/48 ,  H01L21/56

CPC classification number: H01L21/568 ,  H01L21/561 ,  H01L21/6835 ,  H01L21/76802 ,  H01L21/76834 ,  H01L21/76877 ,  H01L23/3128 ,  H01L24/19 ,  H01L24/96 ,  H01L2221/68318 ,  H01L2221/68359 ,  H01L2221/68381 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/05567 ,  H01L2224/12105 ,  H01L2224/131 ,  H01L2224/24153 ,  H01L2924/00014 ,  H01L2924/014 ,  H01L2224/05552

Abstract: A method of fabricating a semiconductor package is provided, including: disposing a plurality of semiconductor elements on a carrier through an adhesive layer in a manner that a portion of the carrier is exposed from the adhesive layer; forming an encapsulant to encapsulate the semiconductor elements; removing the adhesive layer and the carrier to expose the semiconductor elements; and forming a build-up structure on the semiconductor elements. Since the adhesive layer is divided into a plurality of separated portions that will not affect each other due to expansion or contraction when temperature changes, the present invention prevents positional deviations of the semiconductor elements during a molding process, thereby increasing the alignment accuracy.

Abstract translation: 提供一种制造半导体封装的方法，包括：通过粘合剂层将多个半导体元件设置在载体上，使载体的一部分从粘合剂层露出; 形成密封剂以封装半导体元件; 去除粘合剂层和载体以暴露半导体元件; 以及在半导体元件上形成积聚结构。 由于当温度变化时粘合剂层被分成多个不会由于膨胀或收缩而相互影响的分离部分，所以本发明防止了半导体元件在成型过程中的位置偏差，从而提高了对准精度。

公开(公告)号：US20170229387A1

公开(公告)日：2017-08-10

申请号：US15434599

申请日：2017-02-16

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Wen-Tsung Tseng ,  Yi-Che Lai ,  Shih-Kuang Chiu ,  Mao-Hua Yeh

IPC: H01L23/498 ,  H01L23/13 ,  H01L23/14 ,  H01L21/48 ,  H01L23/373

CPC classification number: H01L23/49827 ,  H01L21/481 ,  H01L21/4853 ,  H01L23/13 ,  H01L23/147 ,  H01L23/15 ,  H01L23/3738 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49838 ,  H01L23/49894 ,  H01L2224/11

Abstract: A semiconductor package is provided, including a semiconductor substrate having a plurality of conductive vias, a buffer layer formed on the semiconductor substrate, a plurality of conductive pads formed on end surfaces of the conductive vias and covering the buffer layer. During a reflow process, the buffer layer greatly reduces the thermal stress, thereby eliminating the occurance of cracking at the interface of conductive pads. A method of fabricating such a semiconductor package is also provided.

公开(公告)号：US09607939B2

公开(公告)日：2017-03-28

申请号：US14259629

申请日：2014-04-23

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Wen-Tsung Tseng ,  Yi-Che Lai ,  Shih-Kuang Chiu ,  Mao-Hua Yeh

IPC: H01L21/768 ,  H01L23/498 ,  H01L23/14 ,  H01L23/15

CPC classification number: H01L23/49827 ,  H01L21/481 ,  H01L21/4853 ,  H01L23/13 ,  H01L23/147 ,  H01L23/15 ,  H01L23/3738 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49838 ,  H01L23/49894 ,  H01L2224/11

Abstract: A semiconductor package is provided, including a semiconductor substrate having a plurality of conductive vias, a buffer layer formed on the semiconductor substrate, a plurality of conductive pads formed on end surfaces of the conductive vias and covering the buffer layer. During a reflow process, the buffer layer greatly reduces the thermal stress, thereby eliminating the occurance of cracking at the interface of conductive pads. A method of fabricating such a semiconductor package is also provided.

公开(公告)号：US20150344299A1

公开(公告)日：2015-12-03

申请号：US14821010

申请日：2015-08-07

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Hong-Da Chang ,  Hsin-Yi Liao ,  Chun-An Huang ,  Shih-Kuang Chiu ,  Chien-An Chen

IPC: B81C1/00

CPC classification number: B81C1/00301 ,  B81B2201/0264 ,  B81C1/00269 ,  B81C2203/0154 ,  H01L29/84 ,  H01L2224/48091 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A wafer level package having a pressure sensor and a fabrication method thereof are provided. A wafer having the pressure sensor is bonded to a lid, and electrical connecting pads are formed on the wafer. After the lid is cut, wire-bonding and packaging processes are performed. Ends of bonding wires are exposed and serve as an electrical connecting path. A bottom opening is formed on a bottom surface of the wafer, in order to form a pressure sensor path.

Abstract translation: 提供了具有压力传感器及其制造方法的晶片级封装。 将具有压力传感器的晶片接合到盖上，并且在晶片上形成电连接焊盘。 在切割盖子之后，进行引线键合和封装处理。 接合线的端部暴露并用作电连接路径。 为了形成压力传感器路径，在晶片的底面上形成底部开口。

公开(公告)号：US20150041969A1

公开(公告)日：2015-02-12

申请号：US14074148

申请日：2013-11-07

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Hong-Da Chang ,  Yi-Che Lai ,  Chi-Hsin Chiu ,  Shih-Kuang Chiu

IPC: H01L23/28 ,  H01L21/56

CPC classification number: H01L21/4857 ,  H01L21/561 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/5383 ,  H01L24/97 ,  H01L25/0655 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/81005 ,  H01L2224/83005 ,  H01L2224/92125 ,  H01L2224/97 ,  H01L2924/15311 ,  H01L2924/351 ,  H01L2224/83 ,  H01L2224/81 ,  H01L2924/00

Abstract: A fabrication method of a semiconductor package is disclosed, which includes the steps of: providing a semiconductor structure having a carrier, a circuit portion formed on the carrier and a plurality of semiconductor elements disposed on the circuit portion; disposing a lamination member on the semiconductor elements; forming an insulating layer on the circuit portion for encapsulating the semiconductor elements; and removing the carrier. The lamination member increases the strength between adjacent semiconductor elements so as to overcome the conventional cracking problem caused by a CTE mismatch between the semiconductor elements and the insulating layer when the carrier is removed.

Abstract translation: 公开了一种半导体封装的制造方法，其包括以下步骤：提供具有载体的半导体结构，形成在载体上的电路部分和设置在电路部分上的多个半导体元件; 在所述半导体元件上设置层压部件; 在用于封装半导体元件的电路部分上形成绝缘层; 并移除载体。 层叠构件增加相邻半导体元件之间的强度，以克服当移除载体时由半导体元件和绝缘层之间的CTE失配引起的常规裂纹问题。

公开(公告)号：US20150035164A1

公开(公告)日：2015-02-05

申请号：US14012447

申请日：2013-08-28

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Guang-Hwa Ma ,  Shih-Kuang Chiu ,  Shih-Ching Chen ,  Chun-Chi Ke ,  Chang-Lun Lu ,  Chun-Hung Lu ,  Hsien-Wen Chen ,  Chun-Tang Lin ,  Yi-Che Lai ,  Chi-Hsin Chiu ,  Wen-Tsung Tseng ,  Tsung-Te Yuan ,  Lu-Yi Chen ,  Mao-Hua Yeh

IPC: H01L23/538 ,  H01L23/00

CPC classification number: H01L24/96 ,  H01L21/568 ,  H01L21/6835 ,  H01L23/3135 ,  H01L23/5389 ,  H01L24/19 ,  H01L24/20 ,  H01L24/24 ,  H01L24/82 ,  H01L2221/68359 ,  H01L2221/68372 ,  H01L2221/68377 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/24137 ,  H01L2224/82005 ,  H01L2224/82007 ,  H01L2924/12042 ,  H01L2924/18162 ,  H01L2924/351 ,  H01L2924/3511 ,  H01L2924/00

Abstract: The present invention provides a semiconductor package and a method of fabricating the same, including: placing in a groove of a carrier a semiconductor element having opposing active and non-active surfaces, and side surfaces abutting the active surface and the non-active surface; applying an adhesive material in the groove and around a periphery of the side surfaces of the semiconductor element; forming a dielectric layer on the adhesive material and the active surface of the semiconductor element; forming on the dielectric layer a circuit layer electrically connected to the semiconductor element; and removing a first portion of the carrier below the groove to keep a second portion of the carrier on a side wall of the groove intact for the second portion to function as a supporting member. The present invention does not require formation of a silicon interposer, and therefore the overall cost of a final product is much reduced.

Abstract translation: 本发明提供一种半导体封装及其制造方法，包括：将具有相对的有源和非有源表面的半导体元件和邻接有源表面和非有效表面的侧表面放置在载体的沟槽中; 在所述凹槽中并且围绕所述半导体元件的侧表面的周边施加粘合剂材料; 在所述粘合剂材料和所述半导体元件的有源表面上形成介电层; 在所述电介质层上形成电连接到所述半导体元件的电路层; 以及在所述凹槽下方移除所述载体的第一部分，以将所述载体的第二部分保持在所述凹槽的侧壁上，以使所述第二部分用作支撑构件。 本发明不需要形成硅插入件，因此最终产品的总成本大大降低。

公开(公告)号：US08741693B2

公开(公告)日：2014-06-03

申请号：US14078845

申请日：2013-11-13

Applicant: Siliconware Precision Industries Co., Ltd.

Inventor： Chun-An Huang ,  Hsin-Yi Liao ,  Shih-Kuang Chiu

IPC: H01L21/00 ,  H01L29/84 ,  H01L21/50

CPC classification number: H01L29/84 ,  B81B7/007 ,  B81B2207/096 ,  B81C1/00301 ,  H01L21/50 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/49816 ,  H01L23/5389 ,  H01L24/48 ,  H01L24/49 ,  H01L24/97 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2224/85 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A package structure includes a micro-electromechanical element having a plurality of electrical contacts; a package layer enclosing the micro-electromechanical element and the electrical contacts, with a bottom surface of the micro-electromechanical element exposed from a lower surface of the package layer; a plurality of bonding wires embedded in the package layer, each of the bonding wires having one end connected to one of the electrical contacts, and the other end exposed from the lower surface of the package layer; and a build-up layer structure provided on the lower surface of the package layer, the build-up layer including at least one dielectric layer and a plurality of conductive blind vias formed in the dielectric layer and electrically connected to one ends of the bonding wires. The package structure is easier to accurately control the location of an external electrical contact, and the compatibility of the manufacturing procedures is high.

Abstract translation: 封装结构包括具有多个电触头的微机电元件; 封装层，其包围微机电元件和电触点，微机电元件的底表面从封装层的下表面露出; 嵌入在所述封装层中的多个接合线，每个所述接合线的一端连接到所述电接触中的一个，另一端从所述封装层的下表面露出; 以及设置在所述封装层的下表面上的堆积层结构，所述堆积层包括形成在所述电介质层中并且电连接到所述接合线的一端的至少一个电介质层和多个导电盲孔 。 封装结构更容易准确地控制外部电触点的位置，并且制造程序的兼容性高。

公开(公告)号：US20130341774A1

公开(公告)日：2013-12-26

申请号：US13628795

申请日：2012-09-27

Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.

Inventor： Chiang-Cheng Chang ,  Meng-Tsung Lee ,  Shih-Kuang Chiu

IPC: H01L23/495 ,  H01L21/56

CPC classification number: H01L24/19 ,  H01L21/561 ,  H01L21/563 ,  H01L21/568 ,  H01L23/3128 ,  H01L23/5389 ,  H01L24/96 ,  H01L2224/12105 ,  H01L2924/18162 ,  H01L2924/3511 ,  H01L2924/00

Abstract: A semiconductor package is provided, including: an insulating layer; a semiconductor element embedded in the insulating layer; an adhesive body embedded in the insulating layer, wherein a portion of the semiconductor element is embedded in the adhesive body; a patterned metal layer embedded in the adhesive body and electrically connected to the semiconductor element; and a redistribution structure formed on the insulating layer and electrically connected to the patterned metal layer. By embedding the semiconductor element in the adhesive body, the present invention can securely fix the semiconductor element at a predetermined position without any positional deviation, thereby improving the product yield.

Abstract translation: 提供一种半导体封装，包括：绝缘层; 嵌入绝缘层中的半导体元件; 嵌入在所述绝缘层中的粘合体，其中所述半导体元件的一部分嵌入所述粘合体中; 图案化金属层，其嵌入在所述粘合体中并电连接到所述半导体元件; 以及形成在绝缘层上并与图案化的金属层电连接的再分布结构。 通过将半导体元件嵌入到粘合体中，本发明可以将半导体元件可靠地固定在预定位置而没有任何位置偏差，从而提高产品产量。