摘要:
A method of and apparatus for manufacturing a semiconductor device are presented wherein a silicon oxide film on an intermediate semiconductor device is etched out properly without damaging the silicon, under the condition that a difference between the etching speeds of silicon and silicon oxide film becomes small, and immediately thereafter another film is formed on the surface of the silicon with the silicon oxide film removed therefrom.
摘要:
A semiconductor device includes at least one wiring layer containing aluminum as the major constituent and provided through an insulating film on a semiconductor substrate on which components or elements are formed, and a heat resistant high molecular organic film having a radical of small water absorbing property provided on side surfaces of the wiring layer. The heat resisting high molecular organic film is preferably formed of polyphenylene sulfide. A method of the semiconductor device includes the steps of forming components on a semiconductor substrate, forming an insulating film on the components to form an aluminum wiring layer by deposition and patterning, depositing a heat resistant high molecular organic film having a radical of small water absorbing property, and heating the heat resistant high molecular organic film at a temperature to fluidify to and flatten the heat resistant high molecular organic film.
摘要:
An apparatus for forming a film on the silicon surface of an intermediate semiconductor device, wherein a silicon oxide film on the intermediate semiconductor device is etched out with an active species without damage to the silicon surface, the difference between the etching speeds of the silicon and the silicon oxide film being 5 or less. Immediately after the etching, another film is formed on the surface of the silicon without the surface being exposed to the atmosphere. Thus, the etching of the silicon oxide film and the forming of another film can be performed in the same chamber or different chambers.
摘要:
A photoresist layer having a prescribed pattern is formed on a substrate to be etched. The substrate is immersed into a predetermined solution to form a layer on the substrate except on those portions where the photoresist layer is formed. The photoresist layer is removed, and the substrate is etched using the remaining layer as a mask.
摘要:
In a process for polymerizing olefins in the gaseous phase in a first gas-phase polymerization zone and a second gas-phase polymerization zone, which are provided independently from each other, in the presence of a catalyst composed of a transition metal catalyst component and an organometallic compound of a metal of Groups I to III of the periodic table while feeding the catalyst-containing polymer formed in the first zone to the second zone; the improvement wherein(i) a suspension zone for forming a suspension of the polymer from the first zone in an easily volatile hydrocarbon medium which is liquid under the conditions of feeding the polymer is provided in a feed passage for feeding the polymer from the first zone to the second zone, and(ii) the suspension of the polymer in said liquid medium formed in the suspension zone is fed to the second zone.
摘要:
The present invention relates to a system for controlling microgrid facilities. In particular, the microgrid control system provided is capable of controlling multiple facilities according to characteristics of the facilities in order to achieve economic efficiency, environmental friendliness, and continued operability. The microgrid control system for controlling the operations of the multiple power facilities is provided with: a power supply activation/suspension planning unit that has a prediction unit for predicting outputs or loads of power supply facilities or load facilities and a prediction unit for predicting prediction errors contained therein; and an economical load allocation unit that determines command values related to the distribution of loads to be borne by currently running power supply facilities.
摘要:
There is a request for charging and discharging of a lithium-ion battery with as less degradation as possible. In an operation using only binary values as in conventional technology, however, in a charged state in which the battery is used, there is a high possibility that the battery is used toward accelerating the degradation thereof. In a power distribution device for distributing power between a plurality of batteries and a plurality of customers, when distributing the power of the batteries to the loads of the customers, by being based at least on the degradation information of the batteries, the state of charge, and the temperature data of the batteries, a battery discharging function is achieved that makes the degradation of the batteries minimum.
摘要:
The invention provides a plan execution control apparatus, a plan execution control method and a plan execution control program capable of giving instructions for sensitively and efficiently maintaining even installations located in a wide range. The plan execution control apparatus includes a linkage reliability calculating section for calculating a target reliability of a single or a plurality of mutually related installations, a damaged state transition control section that provides a damaged state transition structure of the installations, a maintenance time limit calculating section for calculating a time limit related to the maintenance work to meet the target level of reliability of each key point and section, the constraint control section for recognizing and recording the constraints related to traveling of maintenance personnel, the traveling workload and the acceptable workload, and the itinerary maintenance determining section for calculating the itinerary schedule indicating the assignment to the object to be maintained.
摘要:
Electric-power management system, an area controller transmits, to each of section controllers, information about a target voltage and information about the present voltage, each of the section controllers calculating a difference between the target voltage and the present voltage, received from the area controller, and calculating a power's demand-supply-adjustment request amount based on difference between the information about the voltages, each of facility-equipment controllers transmitting power-reception/power-release capable equipment information to each section controller, being information about a power-reception/power-release capable equipment in a facility into which the facility-equipment controller is installed, the section controller, based on the power-reception/power-release capable equipment information about the equipment, transmitting the equipment's demand-supply-adjustment request amount and the facility-equipment controller transmitting a control signal to the equipment based on the equipment's demand-supply-adjustment request amount received from the section controller to the facility-equipment controller in the facility.
摘要:
An imaging apparatus for reducing power consumption. The apparatus includes a first regulator connected to a signal processing circuit and a second regulator connected to an output circuit. The first regulator generates a first regulated voltage that is in accordance with an output level of a solid-state image sensor. The second regulator generates a second regulated voltage that is in accordance with an input level of an external device.