摘要:
The present invention provides a high temperature chemical solution supply system for cleaning substrates. The system includes a solution tank, a buffer tank, a first pump and a second pump. The solution tank contains high temperature chemical solution. The buffer tank has a tank body, a vent line and a needle valve. The tank body contains the high temperature chemical solution. An end of the vent line connects to the tank body, and the other end of the vent line connects to the solution tank. The needle valve is mounted on the vent line, wherein the needle valve is adjusted to reach a flow rate to vent gas bubbles inside of the high temperature chemical solution out of the buffer tank through the vent line. An inlet of the first pump connects to the solution tank, and an outlet of the first pump connects to the buffer tank. An inlet of the second pump connects to the buffer tank, and an outlet of the second pump connects to a cleaning chamber in which a substrate is cleaned. The present invention also provides an apparatus including the high temperature chemical solution supply system and an ultra or mega sonic device for cleaning the substrate. The present invention also provides methods for cleaning the substrates.
摘要:
A precision additive dosing device comprising a liquid additive tank, dosing pump, filter, electric actuator, and pump control unit. Upon completion of fueling, the control unit is input with the corresponding volume of fuel just delivered. The pump starts until a time is reached that achieves the correct blend of additive for the fuel. The dosing pump delivers a constant volume of additive with time being the only variable to achieve the correct ratio of additive to fuel. Operation of the pump may be delayed or the time of pump operation may be increased during low ambient temperatures by the pump control circuit. Additionally, a heater may be used to heat the additive in similarly low temperatures.
摘要:
Exhaust gas from which impurities have been removed through pressurization and cooling by a compressor-based impurity separation mechanism is further cooled by a refrigerator-type heat exchanger. Drain produced from the cooling by the refrigerator-type heat exchanger is discharged and supplied as an alkalinity control agent to at least upstream of an aftercooler in a first impurity separator.
摘要:
A diaphragm pump includes a bypass valve and spring that are easy to install and do not require support by a special plug or mounting bracket. The pump outlet is perpendicular to the input, causing the bypass valve and spring to operate laterally as seen from the pump base. When installed, the bypass spring is suspended between the bypass valve and a simple “T” insert that is held in place within the pump by interior elements of the pump, without need for a special plug or bracket. The longitudinal strength of the housing is increased by providing a cone-shaped outer wall having a scalloped inner surface. The conical shape enhances the housing's resistance to longitudinal forces applied to the diaphragm. The cusps of the scalloped shape provide wall support ribs and locations for assembly screws, while increasing the interior volume and reducing the pump weight.
摘要:
A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.
摘要:
Liquid pump (1) comprising: a cylinder (24), an inlet valve (47a) for feeding the liquid into said cylinder (24), a discharge valve (47b) for discharging the liquid out of said cylinder (24), a piston (52) actuated by a transmission tube (51) and sliding in said cylinder (24) so as to draw said liquid into said cylinder (24) and then to expel it from said cylinder (24). The cylinder (24) comprises at least one heating cartridge (41) in order to heat the liquid in said cylinder (24).
摘要:
An apparatus and method for reducing or controlling VOC emissions from a low-pressure storage tank for a VOC-containing substance stored or transported as a liquid in the storage tank are provided. The apparatus and method include a filter media operatively positioned between a headspace in the storage tank and the atmosphere, wherein: (i) a gaseous substance from a headspace in the storage tank passes through the filter media to be vented to the atmosphere; (ii) the filter media comprises a permeable substrate and a liquid stripper for a VOC, wherein the liquid stripper coats the permeable substrate; (iii) the filter media provides a gaseous back pressure across the filter media to the atmosphere of less than 1 psig; and (iv) a liquid condensate from the filter media can drip or flow under gravity back into the storage tank.
摘要:
A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.
摘要:
The present invention generally relates to an abrasive particles injection system. In one aspect, a high pressure solids pump for use in an abrasive particles injection system is provided. The high pressure solids pump includes a pump body having a chamber with an inlet and an outlet. The high pressure solids pump further includes a first valve connected to the inlet for allowing abrasive particles to enter the chamber. The high pressure solids pump also includes a second valve connected to the outlet for allowing pressurized abrasive particles to exit the chamber. Additionally, the high pressure solids pump includes a piston member movable within the chamber of the pump body, wherein the piston member is configured to pressurize the abrasive particles. In another aspect, a method of injecting abrasive particles into a high pressure line is provided.
摘要:
A sealing system for a pump includes a housing having an internal chamber adapted to receive a portion of a plunger. A primary seal is translatable within the chamber in sealing relation with the housing. The primary seal includes first and second elastomeric members adapted to sealingly engage the plunger. The first and second elastomeric members are spaced apart from one another a distance greater than or equal to a maximum stroke of the plunger. A secondary seal is spaced apart from the primary seal and adapted to sealingly engage the plunger. A chamber contains a barrier fluid in contact with the primary seal and the secondary seal. A pressurizing device maintains a pressure of barrier fluid at a magnitude greater than a peak pressure of a fluid pumped by the plunger such that the pumped fluid is restricted from entering the barrier fluid chamber.