公开(公告)号：US20180267079A1

公开(公告)日：2018-09-20

申请号：US15760615

申请日：2016-11-02

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKAHIRO SHINOHARA ,  HITOSHI YOSHIDA ,  KAZUO GODA ,  RIE OKAMOTO ,  HIROSHI NAKATSUKA ,  MASAKO YAMAGUCHI ,  HIDEKI UEDA ,  TAKANORI AOYAGI ,  YUKI MAEGAWA ,  TAKUYA KAJIWARA ,  KEISUKE KURODA ,  TAKESHI MORI

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0862 ,  H01L29/84

Abstract: A connection assembly includes a sensor substrate, a layer substrate coupled to the sensor substrate so as to face an upper surface of the sensor substrate, and a wire connected between the sensor substrate and the layer substrate. The sensor substrate includes first and second projections provide on the upper surface of the sensor substrate and extending in an extension direction along the upper surface of the sensor substrate. The wire has a first end sandwiched between the layer substrate and the first projection, and a second end sandwiched between the layer substrate and the second projection. The connection assembly provides reliable connection.

公开(公告)号：US20180238926A1

公开(公告)日：2018-08-23

申请号：US15554264

申请日：2016-11-09

Applicant: Hitachi, Ltd.

Inventor： Takashi SHIOTA ,  Tatsuyuki SAITO ,  Tatemi IDO ,  Noriyuki SAKUMA ,  Yuudai KAMADA ,  Atsushi ISOBE ,  Chisaki TAKUBO

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/00 ,  B81B2201/0235 ,  B81C1/00047 ,  B81C1/00198 ,  B81C3/00 ,  G01P15/0802 ,  G01P2015/0862

Abstract: Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE1, VE2 and fixed electrodes FE1, FE2, the fixed electrodes are formed by portions surrounded by a through hole TH1 provided in a cap layer CL, and the through hole is filled with an insulating film IF1 and polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IF1 and the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.

公开(公告)号：US09945968B2

公开(公告)日：2018-04-17

申请号：US14295080

申请日：2014-06-03

Applicant: PGS Geophysical AS ,  Agency for Science Technology and Research (A*STAR)

Inventor： Ilker Ender Ocak ,  Chengliang Sun ,  Julius Ming-Lin Tsai ,  Sanchitha Nirodha Fernando

IPC: G01P15/13 ,  G01V1/18 ,  G01V1/09 ,  G01V1/38 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01V1/18 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0837 ,  G01P2015/0862 ,  G01P2015/0882 ,  G01V1/09 ,  G01V1/38

Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

公开(公告)号：US20180024160A1

公开(公告)日：2018-01-25

申请号：US15547312

申请日：2016-01-27

Applicant: NORTHROP GRUMMAN LITEF GMBH

Inventor： STEFAN KOENIG ,  PETER LEINFELDER

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0054 ,  B81B3/0059 ,  B81B2201/0235 ,  B81B2203/0163 ,  B81B2203/04 ,  B81B2203/051 ,  G01P15/131 ,  G01P2015/0814 ,  G01P2015/0862 ,  G01P2015/0882

Abstract: The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, au electrostatic three acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).

公开(公告)号：US09682856B2

公开(公告)日：2017-06-20

申请号：US13557861

申请日：2012-07-25

Applicant: George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

Inventor： George Whitesides ,  Xinyu Liu ,  XiuJun Li ,  Martin M. Thuo ,  Michael O'Brien ,  Yu Sun

IPC: G01P15/12 ,  B81B7/02 ,  G01P15/08 ,  G01P15/18 ,  G01L1/18 ,  B81C1/00 ,  G01G3/13

CPC classification number: B81B7/02 ,  B81C1/0015 ,  G01G3/13 ,  G01L1/18 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/0862

Abstract: MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive sensors, including accelerometers are prepared. Signal-processing circuitry can also be patterned on the substrate material.The sensors can be utilized as two-dimensional sensors, or the paper substrate material can be folded to arrange the sensors in a three dimensional conformation. For example, three sensors can be patterned on a paper substrate and folded into a cube such that the three sensors are orthogonally positioned on the faces of a cube, permitting simultaneous measurement of accelerations along three orthogonal directions (x-y-z). These paper-based sensors can be mass produced by incorporating highly developed technologies for automatic paper cutting, folding, and screen-printing.Also provided are methods of modifying paper for use as a substrate material in MEMS devices.

公开(公告)号：US20140352431A1

公开(公告)日：2014-12-04

申请号：US14367670

申请日：2012-12-20

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： Jacques Leclerc

IPC: G01P15/18 ,  G01P15/08 ,  G01C19/5712

CPC classification number: G01P15/18 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  G01P15/14 ,  G01P2015/0862

Abstract: A resonator micro-electronic inertial sensor, preferably a micro-electromechanical system (MEMS) sensor (e.g. a gyro), for detecting linear accelerations and rotation rates in more than one axis comprises: a proof-mass system (21.1, 21.4) flexibly suspended above a substrate for performing a rotational in-plane vibration about a central axis (24,) a drive electrode system (D1, . . . D4) for driving the proof-mass system (21.1, . . . 21.4) to perform said rotational in-plane vibration, and a sensing electrode system (S1, S8) connected to the proof-mass system (21.1, . . . 21.4) for detecting linear accelerations or rotation rates in more than one axis. Said proof-mass system (21.1 21.4) has more than two proof-mass elements flexibly coupled (25.1a, 25.1b) to each other. Each proof-mass element (21.1, 21.2) is directly and flexibly connected (23.1, 25.1a, 25.1b) to an anchor structure (22) on the substrate (32). The proof-mass elements (21.1, . . . 21.4) are preferably arranged In a ring-shaped configuration between an inner and an outer radius (R1, R2) with respect to the central axis (24).

Abstract translation: 谐振器微电子惯性传感器，优选微机电系统（MEMS）传感器（例如，陀螺仪），用于检测多于一个轴线中的线性加速度和旋转速率包括：柔性悬挂的校验质量系统（21.1,21.4） 在用于驱动所述校验质量系统（21.1，...，21.4）的驱动电极系统（D1 ... D4）的中心轴线（24）上执行旋转平面内振动的基板上方，以执行所述转动 平面振动以及连接到校验质量系统（21.1，...，21.4）的检测电极系统（S1，S8），用于检测多于一个轴的线性加速度或旋转速度。 所述证明质量系统（21.1 21.4）具有两个彼此柔性耦合（25.1a，25.1b）的证明质量元件。 每个证明质量元件（21.1,21.2）直接和柔性地连接（23.1,25.1a，25.1b）到衬底（32）上的锚结构（22）。 证明质量元件（21.1，...，21.4）优选地以相对于中心轴线（24）的内半径（R 1，R 2）和外半径（R 1，R 2）之间的环形构造布置。

公开(公告)号：US20110127877A1

公开(公告)日：2011-06-02

申请号：US12791495

申请日：2010-06-01

Applicant: Florian Schoen ,  Markus Loehndorf

Inventor： Florian Schoen ,  Markus Loehndorf

IPC: H02N11/00

CPC classification number: H03H9/2457 ,  B60C23/0488 ,  B60C23/064 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0862 ,  H03H2009/02527

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device comprises a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract translation: 本发明涉及MEMS谐振器。 在一个实施例中，集成谐振器和传感器装置包括微机电系统（MEMS）谐振器和耦合到MEMS谐振器并被配置为允许MEMS谐振器在第一运动平面和MEMS的移动中的谐振的锚定部分 谐振器在第二运动平面。 在其他实施例中，公开了附加装置，装置，系统和方法。

公开(公告)号：US20090295406A1

公开(公告)日：2009-12-03

申请号：US12131145

申请日：2008-06-02

Applicant: Florian SCHOEN ,  Markus LOEHNDORF

Inventor： Florian SCHOEN ,  Markus LOEHNDORF

IPC: G01R23/04 ,  H01P7/00 ,  G01M17/02

CPC classification number: H03H9/2457 ,  B60C23/0488 ,  B60C23/064 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0862 ,  H03H2009/02527

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device comprises a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract translation: 本发明涉及MEMS谐振器。 在一个实施例中，集成谐振器和传感器装置包括微机电系统（MEMS）谐振器和耦合到MEMS谐振器并被配置为允许MEMS谐振器在第一运动平面和MEMS的移动中的谐振的锚定部分 谐振器在第二运动平面。 在其他实施例中，公开了附加的装置，装置，系统和方法。

公开(公告)号：US07493815B1

公开(公告)日：2009-02-24

申请号：US11448413

申请日：2006-06-07

Applicant: Mohammad I. Younis

Inventor： Mohammad I. Younis

IPC: G01P15/00 ,  H01L49/00

CPC classification number: G01P15/04 ,  G01P15/0891 ,  G01P2015/0862 ,  H01H1/0036

Abstract: An acceleration-triggered or shock-triggered, smart, tunable MEMS switch that may function as both a classic accelerometer and an acceleration threshold detector. A parallel element MEMS device has a stationary and a movable element forming a capacitor. Varying acceleration moves the movable member with respect to the stationary member, thereby changing the capacitance of the device. The capacitance varying may be used, in cooperation with appropriate circuitry, to provide a signal representative of instantaneous acceleration. By applying a biasing voltage, the movable element may be positioned in a predetermined fashion such that acceleration of a predetermined magnitude causes the movable element to pull in (snap down). The movable and stationary elements may function as a switch such that when the predetermined acceleration or shock level occurs, electrodes close, a current flows between the elements so that an external device such as an air bag may be activated.

Abstract translation: 加速度触发或触发触发的智能可调谐MEMS开关，其可以用作经典加速度计和加速度阈值检测器。 并联元件MEMS器件具有形成电容器的静止元件和可动元件。 不同的加速度使可动构件相对于静止构件移动，从而改变装置的电容。 可以与适当的电路配合使用电容变化来提供代表瞬时加速度的信号。 通过施加偏压电压，可移动元件可以以预定方式定位，使得预定幅度的加速度使得可移动元件拉入（向下）。 可移动和固定元件可以用作开关，使得当预定的加速度或冲击水平发生时，电极关闭，电流在元件之间流动，使得诸如气囊的外部装置可被启动。