公开(公告)号：US08513802B2

公开(公告)日：2013-08-20

申请号：US13013290

申请日：2011-01-25

Applicant: Keum-Hee Ma ,  Woo-Dong Lee ,  Min-Seung Yoon ,  Ju-Il Choi ,  Sang-Sick Park ,  Son-Kwan Hwang

Inventor： Keum-Hee Ma ,  Woo-Dong Lee ,  Min-Seung Yoon ,  Ju-Il Choi ,  Sang-Sick Park ,  Son-Kwan Hwang

IPC: H01L23/48

CPC classification number: H01L25/0657 ,  H01L21/561 ,  H01L21/563 ,  H01L23/481 ,  H01L23/49816 ,  H01L2224/16145 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06555

Abstract: A semiconductor device having semiconductor chips of different thicknesses is provided. The semiconductor device may include a first semiconductor chip, a sub-board on a first side of the first semiconductor chip, at least one second semiconductor chip on a second side of the first semiconductor chip, at least one external contact terminal on the at least one second semiconductor chip. In example embodiments the at least one second semiconductor chip may include a plurality of through silicon vias and the at least one external contact terminal may be in electrical contact with the first semiconductor chip and the at least one second semiconductor chip via the plurality of through silicon vias. In example embodiments, the at least one second semiconductor chip may be thinner than the first semiconductor chip.

Abstract translation: 提供具有不同厚度的半导体芯片的半导体器件。 半导体器件可以包括第一半导体芯片，在第一半导体芯片的第一侧上的子板，在第一半导体芯片的第二侧上的至少一个第二半导体芯片，至少一个外部接触端子 一秒钟的半导体芯片。 在示例实施例中，所述至少一个第二半导体芯片可以包括多个通孔硅通孔，并且所述至少一个外部接触端子可以经由多个通孔与第一半导体芯片和至少一个第二半导体芯片电接触 通孔 在示例实施例中，至少一个第二半导体芯片可以比第一半导体芯片更薄。

公开(公告)号：US20130075905A1

公开(公告)日：2013-03-28

申请号：US13602581

申请日：2012-09-04

Applicant: Ju-il Choi ,  Jeong-Woo Park ,  Jeonggi Jin ,  Hyungseok Kim

Inventor： Ju-il Choi ,  Jeong-Woo Park ,  Jeonggi Jin ,  Hyungseok Kim

IPC: H01L23/48 ,  H01L23/532

CPC classification number: H01L23/481 ,  H01L21/76898 ,  H01L24/11 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L25/0657 ,  H01L2224/0401 ,  H01L2224/05571 ,  H01L2224/05599 ,  H01L2224/13009 ,  H01L2224/13023 ,  H01L2224/13111 ,  H01L2224/13147 ,  H01L2224/13184 ,  H01L2224/13562 ,  H01L2224/13583 ,  H01L2224/13644 ,  H01L2224/13647 ,  H01L2224/13664 ,  H01L2224/13666 ,  H01L2224/13669 ,  H01L2224/13681 ,  H01L2224/13686 ,  H01L2224/14181 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/16237 ,  H01L2224/16503 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2924/00014 ,  H01L2924/01327 ,  H01L2924/15788 ,  H01L2924/00 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/01047 ,  H01L2924/00012 ,  H01L2224/05552

Abstract: A semiconductor device includes a substrate and a through via penetrating the substrate. The through via has a protruding portion at a first end thereof extending out from a first surface of the substrate and a second end of the via contacting an interconnection line proximate a second, opposite, end of the substrate. A wetting layer is positioned between the via and the substrate and extends over the protruding portion of the via. The wetting layer includes a material selected to improve an adhesive strength between the wetting layer and a solder ball contacting the wetting layer extending over the protruding portion of the via when a solder ball is coupled to the wetting layer.

Abstract translation: 半导体器件包括基板和穿透基板的贯通孔。 通孔在其第一端处具有从基板的第一表面延伸出的突出部分，并且通孔的第二端接近靠近基板的第二相对端的互连线。 润湿层位于通孔和基底之间并且在通孔的突出部分上延伸。 润湿层包括选择的材料，以便当焊球与润湿层耦合时，改善润湿层与接触润湿层的焊球之间的粘合强度，该润湿层在通孔的突出部分上延伸。

公开(公告)号：US08088648B2

公开(公告)日：2012-01-03

申请号：US12840656

申请日：2010-07-21

Applicant: Cha-Jea Jo ,  Myung-Kee Chung ,  Nam-Seog Kim ,  In-Young Lee ,  Seok-Ho Kim ,  Ho-Jin Lee ,  Ju-Il Choi ,  Chang-Woo Shin

Inventor： Cha-Jea Jo ,  Myung-Kee Chung ,  Nam-Seog Kim ,  In-Young Lee ,  Seok-Ho Kim ,  Ho-Jin Lee ,  Ju-Il Choi ,  Chang-Woo Shin

IPC: H01L21/50 ,  H01L21/60

CPC classification number: H01L23/3128 ,  H01L21/76898 ,  H01L23/481 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/05001 ,  H01L2224/05009 ,  H01L2224/05025 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05181 ,  H01L2224/05184 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2225/06513 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2924/00014 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/15311 ,  H01L2224/05599

Abstract: A chip stack package includes a substrate, a plurality of chips, a plurality of adhesive layers and a plug. The substrate has a wiring pattern and a seed layer formed on the wiring pattern. Each of the chips has an electrode pad and a first through-hole that penetrates the electrode pad. The chips are stacked such that the first through-holes are aligned on the seed layer of the substrate. The adhesive layers are interposed between the substrate and one of the chips, as well as between the chips. Each of the adhesive layers has a second through-hole connected to the first through-hole. The plug fills up the first through-holes and the second through-holes and electrically connects the electrode pads to the wiring pattern of the substrate. A cross-sectional area of the plug in the second through-holes may be larger than that of the plug in the first through-holes.

Abstract translation: 芯片堆叠封装包括基板，多个芯片，多个粘合剂层和插头。 基板具有形成在布线图案上的布线图案和种子层。 每个芯片具有电极焊盘和穿过电极焊盘的第一通孔。 芯片被堆叠，使得第一通孔在衬底的籽晶层上排列。 粘合层介于基片和芯片之一之间以及芯片之间。 每个粘合层具有连接到第一通孔的第二通孔。 插头填充第一通孔和第二通孔，并将电极焊盘电连接到衬底的布线图案。 第二通孔中的插塞的横截面面积可以大于第一通孔中的插头的横截面面积。

公开(公告)号：US20090085224A1

公开(公告)日：2009-04-02

申请号：US12244591

申请日：2008-10-02

Applicant: Ju-Il CHOI ,  Hyun-Soo CHUNG ,  In-Young LEE ,  Ho-Jin LEE ,  Son-Kwan HWANG

Inventor： Ju-Il CHOI ,  Hyun-Soo CHUNG ,  In-Young LEE ,  Ho-Jin LEE ,  Son-Kwan HWANG

IPC: H01L23/538 ,  H01L21/58

CPC classification number: H01L24/29 ,  H01L21/561 ,  H01L23/3121 ,  H01L24/24 ,  H01L24/82 ,  H01L24/97 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/24145 ,  H01L2224/29101 ,  H01L2224/9202 ,  H01L2224/97 ,  H01L2225/06541 ,  H01L2225/06551 ,  H01L2225/06575 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2224/82 ,  H01L2924/00

Abstract: Provided is a stack-type semiconductor package including a base chip having a circuit formed on one of its surfaces, at least one stack chip having a circuit stacked on the base chip, an adhesive interposed between the base chip and the stack chip, and signal transmission members formed along a lateral surface of the stack chip. The fabrication process of this stack-type semiconductor package may be simplified and the number of process operations may be lessened, thereby reducing the production time and cost. Also, a state of electrical contact of a terminal with a signal transmission member may be solidified, thereby improving the reliability of the stack-type semiconductor package. Furthermore, new post-type signal transmission members are adopted instead of wires or electrodes so that the structural stability and productivity of the stack-type semiconductor package may be markedly enhanced.

Abstract translation: 提供了一种堆叠型半导体封装，其包括具有形成在其一个表面上的电路的基底芯片，具有堆叠在基底芯片上的电路的至少一个堆叠芯片，插入在基底芯片和堆叠芯片之间的粘合剂，以及信号 传输构件沿着堆叠芯片的侧表面形成。 可以简化该堆叠型半导体封装的制造工艺，并且可以减少工艺操作的数量，从而减少生产时间和成本。 此外，端子与信号传输部件的电接触的状态可以被固化，从而提高堆叠型半导体封装的可靠性。 此外，采用新的后置型信号传输构件代替线或电极，从而可以显着提高堆叠型半导体封装的结构稳定性和生产率。

公开(公告)号：US20080230912A1

公开(公告)日：2008-09-25

申请号：US12053478

申请日：2008-03-21

Applicant: In-Young Lee ,  Ho-Jin Lee ,  Hyun-Soo Chung ,  Ju-Il Choi ,  Son-Kwan Hwang

Inventor： In-Young Lee ,  Ho-Jin Lee ,  Hyun-Soo Chung ,  Ju-Il Choi ,  Son-Kwan Hwang

IPC: H01L23/48 ,  H01L21/4763

CPC classification number: H01L21/76898 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/81 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0401 ,  H01L2224/05009 ,  H01L2224/0557 ,  H01L2224/06181 ,  H01L2224/11462 ,  H01L2224/13009 ,  H01L2224/13022 ,  H01L2224/13025 ,  H01L2224/13099 ,  H01L2224/13147 ,  H01L2224/16 ,  H01L2224/81801 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/0002 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01055 ,  H01L2924/0106 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/14 ,  H01L2924/19043 ,  H01L2224/05552

Abstract: A method of manufacturing a semiconductor device includes forming an integrated circuit region on a semiconductor wafer. A first metal layer pattern is formed over the integrated circuit region. A via hole is formed to extend through the first metal layer pattern and the integrated circuit region. A final metal layer pattern is formed over the first metal layer pattern and within the via hole. A plug is formed within the via hole. Thereafter, a passivation layer is formed to overlie the final metal layer pattern.

Abstract translation: 一种制造半导体器件的方法包括在半导体晶片上形成集成电路区域。 在集成电路区域上形成第一金属层图案。 通孔形成为延伸穿过第一金属层图案和集成电路区域。 最终的金属层图案形成在第一金属层图案之上并且在通孔内。 在通孔内形成插头。 此后，形成钝化层以覆盖最终金属层图案。

公开(公告)号：US20080157332A1

公开(公告)日：2008-07-03

申请号：US12000384

申请日：2007-12-12

Applicant: Cha-Jea Jo ,  Seok-Ho Kim ,  Ju-Il Choi ,  Chang-Woo Shin

Inventor： Cha-Jea Jo ,  Seok-Ho Kim ,  Ju-Il Choi ,  Chang-Woo Shin

IPC: H01L23/538 ,  H01L21/58

CPC classification number: H01L25/0657 ,  H01L21/6835 ,  H01L24/24 ,  H01L24/82 ,  H01L25/50 ,  H01L2224/24145 ,  H01L2224/48463 ,  H01L2225/06524 ,  H01L2225/06551 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19107

Abstract: A stacked semiconductor package may include: a substrate; semiconductor packages stacked on the substrate; an interconnection member formed on edges of the semiconductor packages; and a conductive reinforcement member formed on the interconnection member. Each of the semiconductor packages may include a conductive line. The interconnection member may electrically connect the conductive line of the semiconductor packages to the conductive line of at least one other semiconductor package. A method of manufacturing a stacked semiconductor package may include: forming semiconductor packages; stacking the semiconductor packages on a substrate; forming a mask pattern on the semiconductor packages and the substrate to expose the edges of the semiconductor packages; performing an electroless plating process on the edges of the semiconductor packages to form a seed layer; and performing an electroplating process on the seed layer to form an interconnection member for electrically connecting the conductive lines to each other.

Abstract translation: 层叠的半导体封装可以包括：衬底; 堆叠在基板上的半导体封装; 形成在所述半导体封装的边缘上的互连构件; 以及形成在所述互连构件上的导电加强构件。 每个半导体封装可以包括导线。 互连构件可将半导体封装的导线电连接至至少一个其它半导体封装的导线。 层叠半导体封装的制造方法可以包括：形成半导体封装; 将半导体封装堆叠在衬底上; 在所述半导体封装和所述衬底上形成掩模图案以暴露所述半导体封装的边缘; 在半导体封装的边缘上进行化学镀处理以形成种子层; 以及在种子层上进行电镀处理以形成用于将导线彼此电连接的互连构件。

公开(公告)号：US20080014735A1

公开(公告)日：2008-01-17

申请号：US11775120

申请日：2007-07-09

Applicant: Hyun-Soo CHUNG ,  Seung-Kwan RYU ,  Ju-Il CHOI ,  Dong-Ho LEE ,  Seong-Deok HWANG

Inventor： Hyun-Soo CHUNG ,  Seung-Kwan RYU ,  Ju-Il CHOI ,  Dong-Ho LEE ,  Seong-Deok HWANG

IPC: H01L21/44

CPC classification number: H01L21/76898 ,  H01L23/3128 ,  H01L23/3178 ,  H01L23/481 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/16 ,  H01L24/19 ,  H01L24/20 ,  H01L24/82 ,  H01L25/0657 ,  H01L25/105 ,  H01L25/50 ,  H01L2224/02313 ,  H01L2224/02372 ,  H01L2224/02379 ,  H01L2224/0239 ,  H01L2224/036 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/05009 ,  H01L2224/05548 ,  H01L2224/06181 ,  H01L2224/11334 ,  H01L2224/11462 ,  H01L2224/12105 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/16145 ,  H01L2224/16235 ,  H01L2224/94 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06586 ,  H01L2225/1058 ,  H01L2924/00 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/01028 ,  H01L2224/03

Abstract: Provided are methods of fabricating semiconductor chips, semiconductor chips formed by the methods, and chip-stack packages having the semiconductor chips. One embodiment specifies a method that includes patterning a scribe line region of a semiconductor substrate to form a semiconductor strut spaced apart from edges of a chip region of the semiconductor substrate.

Abstract translation: 提供制造半导体芯片的方法，通过该方法形成的半导体芯片和具有半导体芯片的芯片堆叠封装。 一个实施例规定了一种方法，其包括图案化半导体衬底的划线区域以形成与半导体衬底的芯片区域的边缘间隔开的半导体支柱。