公开(公告)号：US06730593B2

公开(公告)日：2004-05-04

申请号：US09998956

申请日：2001-11-15

Applicant: Wai-Fan Yau ,  David Cheung ,  Shin-Puu Jeng ,  Kuowei Liu ,  Yung-Cheng Yu

Inventor： Wai-Fan Yau ,  David Cheung ,  Shin-Puu Jeng ,  Kuowei Liu ,  Yung-Cheng Yu

IPC: H01L214763

CPC classification number: H01L21/76834 ,  C23C16/401 ,  H01L21/02126 ,  H01L21/02164 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/3122 ,  H01L21/31612 ,  H01L21/31633 ,  H01L21/76801 ,  H01L21/7681 ,  H01L21/76828 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76835 ,  H01L21/76837

Abstract: A method and apparatus for depositing a low dielectric constant film by reaction of an organo silane compound and an oxidizing gas. The oxidized organo silane film has excellent barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organo silane film can also be used as an etch stop or an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organo silane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organo silane film is produced by reaction of methyl silane, CH3SiH3, and N2O.

Abstract translation: 一种通过有机硅烷化合物和氧化性气体反应沉积低介电常数膜的方法和装置。 氧化的有机硅烷膜具有优异的阻挡性能，用作与其它电介质层相邻的衬垫层或盖层。 氧化的有机硅烷膜也可以用作制造双镶嵌结构的蚀刻停止层或金属间介质层。 氧化的有机硅烷膜也提供了不同介电层之间的极好的粘附性。 通过甲基硅烷，CH 3 SiH 3和N 2 O的反应制备优选的氧化有机硅烷膜。

公开(公告)号：US06680420B2

公开(公告)日：2004-01-20

申请号：US09730145

申请日：2000-12-04

Applicant: Ben Pang ,  David Cheung ,  William N. Taylor, Jr. ,  Sebastien Raoux ,  Mark Fodor

Inventor： Ben Pang ,  David Cheung ,  William N. Taylor, Jr. ,  Sebastien Raoux ,  Mark Fodor

IPC: B09B300

CPC classification number: H01J37/32862 ,  B01J19/249 ,  B01J2219/2453 ,  B01J2219/2458 ,  B01J2219/2461 ,  B01J2219/2467 ,  B01J2219/247 ,  B01J2219/2474 ,  B01J2219/2475 ,  B01J2219/2487 ,  B01J2219/2493 ,  B01J2219/2496 ,  C23C16/4405 ,  C23C16/4412 ,  Y02C20/30 ,  Y02P70/605

Abstract: An apparatus for preventing particulate matter and residue build-up within a vacuum exhaust line of a semiconductor processing device. The apparatus uses RF energy to excite the constituents of particulate matter exhausted from a semiconductor processing chamber into a plasma state such that the constituents react to form gaseous products that may be pumped through the vacuum line. The apparatus may include a collection chamber structured and arranged to collect particulate matter flowing through the apparatus and inhibiting egress of the particulate matter from the apparatus. The apparatus may further include an electrostatic collector to enhance particle collection in the collection chamber and to further inhibit egress of the particulate matter.

Abstract translation: 一种用于防止半导体处理装置的真空排气管线内的颗粒物质和残渣积聚的装置。 该装置使用RF能量来激发从半导体处理室排出的颗粒物质的成分进入等离子体状态，使得这些组分反应以形成可被泵送通过真空管线的气态产物。 该装置可以包括收集室，该收集室被构造和布置成收集流过该装置的颗粒物质并且阻止颗粒物质从装置中流出。 该装置还可以包括静电收集器以增强收集室中的颗粒收集并进一步抑制颗粒物质的排出。

公开(公告)号：US06562544B1

公开(公告)日：2003-05-13

申请号：US08743628

申请日：1996-11-04

Applicant: David Cheung ,  Joe Feng ,  Judy H. Huang ,  Wai-Fan Yau

Inventor： David Cheung ,  Joe Feng ,  Judy H. Huang ,  Wai-Fan Yau

IPC: G03F700

CPC classification number: H01L21/3081 ,  G03F7/091 ,  H01L21/0276 ,  H01L21/0332 ,  Y10S430/151 ,  Y10S438/902

Abstract: This invention provides a method and apparatus for depositing a silicon oxide film over an antireflective layer to reduce footing experienced in the a subsequently applied photoresist layer without substantially altering the optical qualities of the antireflective layer. The invention thereby provides more accurate etching of underlying layers during patterning operations. The invention is also capable of providing more accurate patterning of thin films by reducing inaccuracies caused by excessive etching of photoresist during patterning. Additionally, the film of the present invention may be patterned and used as a mask in the patterning of underlying layers.

Abstract translation: 本发明提供了一种用于在抗反射层上沉积氧化硅膜的方法和装置，以减少随后施加的光致抗蚀剂层中的基础，而基本上不改变抗反射层的光学质量。 因此，本发明在图案化操作期间提供对底层的更精确的蚀刻。 本发明还能够通过减少在图案化期间过度蚀刻光致抗蚀剂所引起的不精确度来提供更精确的薄膜图案化。 此外，本发明的膜可以被图案化并用作下层的图案化中的掩模。

公开(公告)号：US06541282B1

公开(公告)日：2003-04-01

申请号：US09594187

申请日：2000-06-13

Applicant: David Cheung ,  Wai-Fan Yau ,  Robert P. Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf B. Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Wing Poon

Inventor： David Cheung ,  Wai-Fan Yau ,  Robert P. Mandal ,  Shin-Puu Jeng ,  Kuo-Wei Liu ,  Yung-Cheng Lu ,  Michael Barnes ,  Ralf B. Willecke ,  Farhad Moghadam ,  Tetsuya Ishikawa ,  Tze Wing Poon

IPC: H05H102

CPC classification number: H01L21/76835 ,  C23C16/401 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02208 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/31612 ,  H01L21/76801 ,  H01L21/76808 ,  H01L21/7681 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76834 ,  H01L2221/1031 ,  Y10T428/24926 ,  Y10T428/31663

Abstract: A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas at a constant RF power level from about 10 W to about 200 W or a pulsed RF power level from about 20 W to about 500 W. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organosilane film is produced by reaction of methylsilane, CH3SiH3, or dimethylsilane, (CH3)2SiH2, and nitrous oxide, N2O; at a constant RF power level from about 10 W to about 150 W, or a pulsed RF power level from about 20 W to about 250 W during 10% to 30% of the duty cycle.

Abstract translation: 一种用于通过有机硅化合物和氧化性气体以约10W至约200W的恒定RF功率水平的反应沉积低介电常数膜的方法和设备或从约20W至约500W的脉冲RF功率水平。 在与有机硅化合物混合之前，优选在单独的微波室内可以提高氧化气体的离解，以帮助控制沉积膜的碳含量。 氧化的有机硅烷或有机硅氧烷膜具有良好的屏障性能，用作邻近其它介电层的衬垫层或盖层。 氧化的有机硅烷或有机硅氧烷膜也可以用作蚀刻停止层和用于制造双镶嵌结构的金属间介电层。 氧化的有机硅烷或有机硅氧烷膜也在不同的介电层之间提供优异的粘附性。 优选的氧化有机硅烷膜是通过甲基硅烷，CH 3 SiH 3或二甲基硅烷，（CH 3）2 SiH 2和一氧化二氮，N 2 O的反应制备的; 在约10W至约150W的恒定RF功率水平或在占空比的10％至30％期间从约20W至约250W的脉冲RF功率水平。

公开(公告)号：US06395092B1

公开(公告)日：2002-05-28

申请号：US09550151

申请日：2000-04-17

Applicant: Dian Sugiarto ,  Judy Huang ,  David Cheung

Inventor： Dian Sugiarto ,  Judy Huang ,  David Cheung

IPC: C23C1600

CPC classification number: H01L21/02274 ,  C23C16/401 ,  H01L21/02131 ,  H01L21/31625

Abstract: A silicon oxide film is deposited on a substrate by first introducing a process gas into a chamber. The process gas includes a gaseous source of silicon (such as silane), a gaseous source of fluorine (such as SiF4), a gaseous source of oxygen (such as nitrous oxide), and a gaseous source of nitrogen (such as N2). A plasma is formed from the process gas by applying a RF power component. Deposition is carried out at a rate of at least about 1.5 &mgr;m/min. The resulting FSG film is stable and has a low dielectric constant.

Abstract translation: 首先将工艺气体引入室中，将氧化硅膜沉积在衬底上。 工艺气体包括硅的气体源（例如硅烷），气体的氟源（例如SiF 4），气体的氧源（例如一氧化二氮）和气态的氮源（例如N 2）。 通过施加RF功率分量从处理气体形成等离子体。 以至少约1.5mum / min的速率进行沉积。 所得的FSG膜是稳定的并且具有低的介电常数。

公开(公告)号：US06361707B1

公开(公告)日：2002-03-26

申请号：US09660322

申请日：2000-09-12

Applicant: Tsutomu Tanaka ,  Mukul Kelkar ,  Kevin Fairbairn ,  Hari Ponnekanti ,  David Cheung

Inventor： Tsutomu Tanaka ,  Mukul Kelkar ,  Kevin Fairbairn ,  Hari Ponnekanti ,  David Cheung

IPC: H01L2100

CPC classification number: H01J37/32862 ,  C23C16/511 ,  C23C16/52 ,  H01J37/32192 ,  H01J37/32357

Abstract: An apparatus and methods for an upgraded CVD system that provides a plasma for efficiently cleaning a chamber, according to a specific embodiment. Etching or depositing a layer onto a substrate also may be achieved using the upgraded CVD system of the present invention. In a specific embodiment, the present invention provides an easily removable, conveniently handled, and relatively inexpensive microwave plasma source as a retrofit for or a removable addition to existing CVD apparatus. In a preferred embodiment, the remote microwave plasma source efficiently provides a plasma without need for liquid-cooling the plasma applicator tube. In another embodiment, the present invention provides an improved CVD apparatus or retrofit of existing CVD apparatus capable of producing a plasma with the ability to efficiently clean the chamber when needed.

Abstract translation: 根据具体实施例的用于提供用于有效清洁腔室的等离子体的升级CVD系统的装置和方法。 使用本发明的升级的CVD系统也可以实现在基板上的蚀刻或沉积层。 在一个具体实施方案中，本发明提供了一种易于拆卸，方便处理且相对便宜的微波等离子体源，作为对现有CVD设备的改进或可移除的添加。 在优选实施例中，远程微波等离子体源有效地提供等离子体，而不需要等离子体施加管的液体冷却。 在另一个实施方案中，本发明提供了一种改进的CVD装置或改进现有的CVD装置，其能够产生等离子体，其能够在需要时有效地清洁腔室。

公开(公告)号：US06324439B1

公开(公告)日：2001-11-27

申请号：US09573499

申请日：2000-05-16

Applicant: David Cheung ,  Joe Feng ,  Madhu Deshpande ,  Wai-Fan Yau ,  Judy H. Huang

Inventor： David Cheung ,  Joe Feng ,  Madhu Deshpande ,  Wai-Fan Yau ,  Judy H. Huang

IPC: G06F1900

CPC classification number: C23C16/308 ,  C23C16/345 ,  C23C16/52

Abstract: This invention provides a stable process for depositing films which include silicon and nitrogen, such as antireflective coatings of silicon oxynitride. Nitrogen is employed to permit lower flow rates of the process gas containing silicon, thereby reducing the deposition rate and providing better control of film thickness. Additionally, the use of nitrogen stabilizes the process, improving film uniformity, and provides a higher-quality film. The invention is capable of providing more accurate and easier fabrication of structures requiring uniformly thin films containing silicon, nitrogen, and, optionally, oxygen, such as antireflective coatings.

Abstract translation: 本发明提供一种用于沉积包括硅和氮的膜的稳定方法，例如氮氧化硅的抗反射涂层。 使用氮气以允许含硅工艺气体的较低流速，从而降低沉积速率并提供更好的膜厚度控制。 另外，氮的使用可以稳定工艺，提高膜的均匀性，并提供更高质量的膜。 本发明能够提供更精确和更容易地制造需要均匀的含有硅，氮和任选的氧的薄膜如薄膜的结构，例如抗反射涂层。

公开(公告)号：US06193802B1

公开(公告)日：2001-02-27

申请号：US08741230

申请日：1996-10-30

Applicant: Ben Pang ,  David Cheung ,  William N. Taylor, Jr. ,  Sebastien Raoux ,  Mark Fodor

Inventor： Ben Pang ,  David Cheung ,  William N. Taylor, Jr. ,  Sebastien Raoux ,  Mark Fodor

IPC: C23C1600

CPC classification number: B01J19/08 ,  B01D45/06 ,  B01D53/32 ,  B01D53/46 ,  B01D2257/206 ,  B01D2259/818 ,  B01J19/088 ,  B01J19/126 ,  B01J19/249 ,  B01J2219/2453 ,  B01J2219/2458 ,  B01J2219/2461 ,  B01J2219/2467 ,  B01J2219/247 ,  B01J2219/2474 ,  B01J2219/2475 ,  B01J2219/2487 ,  B01J2219/2493 ,  B01J2219/2496 ,  C23C16/4405 ,  C23C16/4412 ,  H01J37/3244 ,  H01J37/32844 ,  H01J2237/022 ,  H05H1/46 ,  H05H2001/4622 ,  H05H2001/4667 ,  H05H2245/1215 ,  Y02C20/30 ,  Y02P70/605

Abstract: An apparatus for minimizing deposition in an exhaust line of a substrate processing chamber. The apparatus includes first and second electrodes having opposing surfaces that define a fluid conduit between them. The fluid conduit includes an inlet, an outlet and a collection chamber between the inlet and the outlet. The apparatus is connected at its inlet to receive the exhaust of the substrate processing chamber. The collection chamber is structured and arranged to collect particulate matter flowing through the fluid conduit and to inhibit egress of the particulate matter from the collection chamber. A plasma generation system supplies power to the electrodes to form a plasma from etchant gases within the fluid conduit. Constituents from the plasma react with the particulate matter collected in the collection chamber to form gaseous products that may be pumped out of the fluid conduit. The apparatus may further include an electrostatic collector to enhance particle collection in the collection chamber and to further inhibit egress of the particulate matter.

Abstract translation: 一种用于最小化衬底处理室的排气管线中沉积的装置。 该装置包括具有在它们之间限定流体导管的相对表面的第一和第二电极。 流体导管包括在入口和出口之间的入口，出口和收集室。 该设备在其入口处连接以接收衬底处理室的排气。 收集室被构造和布置成收集流过流体导管的颗粒物质并且抑制颗粒物质从收集室排出。 等离子体发生系统向电极供电以从流体导管内的蚀刻剂气体形成等离子体。 来自等离子体的成分与收集室中收集的颗粒物质发生反应，形成可以从流体导管泵出的气体产物。 该装置还可以包括静电收集器以增强收集室中的颗粒收集并进一步抑制颗粒物质的排出。

公开(公告)号：US6107184A

公开(公告)日：2000-08-22

申请号：US207791

申请日：1998-12-09

Applicant: Robert P. Mandal ,  David Cheung ,  Peter Wai-Man Lee ,  Chi-I Lang

Inventor： Robert P. Mandal ,  David Cheung ,  Peter Wai-Man Lee ,  Chi-I Lang

IPC: B05D7/24 ,  C08G61/02 ,  H01L21/283 ,  H01L21/312 ,  H01L21/316 ,  H01L21/768 ,  H01L23/522 ,  H01L21/4763

CPC classification number: B05D1/60 ,  C08G61/025 ,  H01L21/312 ,  C08G2261/3424 ,  H01L21/31695 ,  Y10S438/958

Abstract: A method and apparatus for forming thin copolymer layers having low dielectric constants on semiconductor substrates includes in situ formation of p-xylylenes, or derivatives thereof, from solid or liquid precursors such as cyclic p-xylylene dimer, p-xylene, 1,4-bis(formatomethyl)benzene, or 1,4-bis(N-methyl-aminomethyl)benzene. P-xylylene is copolymerized with a comonomer having labile groups that are converted to dispersed gas bubbles after the copolymer layer is deposited on the substrate. Preferred comonomers comprise diazocyclopentadienyl, diazoquinoyl, formyloxy, or glyoxyloyloxy groups.

Abstract translation: 用于在半导体衬底上形成具有低介电常数的薄共聚物层的方法和装置包括从固体或液体前体如环状对二甲苯二聚物，对二甲苯，1,4-二甲苯二异氰酸酯原位形成对二甲苯或其衍生物， 双（格式甲基）苯或1,4-双（N-甲基 - 氨基甲基）苯。 在共聚物层沉积在基材上之后，将对二甲苯与具有不稳定基团的共聚单体共聚，转化成分散的气泡。 优选的共聚单体包括重氮环戊二烯基，重氮醌基，甲酰氧基或乙酰氧基合氧基。

公开(公告)号：US6077764A

公开(公告)日：2000-06-20

申请号：US837641

申请日：1997-04-21

Applicant: Dian Sugiarto ,  Judy Huang ,  David Cheung

Inventor： Dian Sugiarto ,  Judy Huang ,  David Cheung

IPC: C23C16/40 ,  H01L21/316 ,  H01L21/44 ,  H01L21/4763

CPC classification number: H01L21/02274 ,  C23C16/401 ,  H01L21/02131 ,  H01L21/31625

Abstract: A silicon oxide film is deposited on a substrate by first introducing a process gas into a chamber. The process gas includes a gaseous source of silicon (such as silane), a gaseous source of fluorine (such as SiF.sub.4), a gaseous source of oxygen (such as nitrous oxide), and a gaseous source of nitrogen (such as N.sub.2). A plasma is formed from the process gas by applying a RF power component. Deposition is carried out at a rate of at least about 1.5 .mu.m/min. The resulting FSG film is stable and has a low dielectric constant.

Abstract translation: 首先将工艺气体引入室中，将氧化硅膜沉积在衬底上。 工艺气体包括硅的气体源（例如硅烷），气体的氟源（例如SiF 4），气体的氧源（例如一氧化二氮）和气态的氮源（例如N 2）。 通过施加RF功率分量从处理气体形成等离子体。 以至少约1.5m / min的速率进行沉积。 所得的FSG膜是稳定的并且具有低的介电常数。