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公开(公告)号:US07259058B2
公开(公告)日:2007-08-21
申请号:US10020314
申请日:2001-12-18
申请人: Yasuhiro Shimamoto , Masahiko Hiratani , Yuichi Matsui , Satoshi Yamamoto , Toshihide Nabatame , Toshio Ando , Hiroshi Sakuma , Shinpei Iijima
发明人: Yasuhiro Shimamoto , Masahiko Hiratani , Yuichi Matsui , Satoshi Yamamoto , Toshihide Nabatame , Toshio Ando , Hiroshi Sakuma , Shinpei Iijima
IPC分类号: H01L21/8242
CPC分类号: H01L28/60 , C23C16/18 , H01L21/28556 , H01L21/28568 , H01L28/55 , H01L28/91
摘要: A ruthenium electrode with a low amount of oxygen contamination and high thermal stability is formed by a chemical vapor deposition method. In the chemical vapor deposition method using an organoruthenium compound as a precursor, the introduction of an oxidation gas is limited to when the precursor is supplying, and the reaction is allowed to occur at a low oxygen partial pressure. Consequently, it is possible to form a ruthenium film with a low amount of oxygen contamination. Further, after formation of the ruthenium film, annealing at not less than the formation temperature is performed, thereby forming a ruthenium film with high thermal stability.
摘要翻译: 通过化学气相沉积法形成氧气污染少,热稳定性高的钌电极。 在使用有机钌化合物作为前体的化学气相沉积方法中,氧化气体的引入限于当前体供应时,并且允许反应在低氧分压下发生。 因此,可以形成氧含量低的钌膜。 此外,在形成钌膜之后,进行不低于形成温度的退火,由此形成热稳定性高的钌膜。
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公开(公告)号:US07180149B2
公开(公告)日:2007-02-20
申请号:US10924205
申请日:2004-08-24
申请人: Satoshi Yamamoto , Tatsuo Suemasu , Sayaka Hirafune , Toshihiko Isokawa , Koichi Shiotani , Kazuya Matsumoto
发明人: Satoshi Yamamoto , Tatsuo Suemasu , Sayaka Hirafune , Toshihiko Isokawa , Koichi Shiotani , Kazuya Matsumoto
IPC分类号: H01L31/0203
CPC分类号: H01L24/94 , H01L21/76898 , H01L23/481 , H01L23/5389 , H01L24/48 , H01L25/0652 , H01L25/0657 , H01L27/14618 , H01L27/14632 , H01L27/14687 , H01L2224/02372 , H01L2224/0401 , H01L2224/13024 , H01L2224/451 , H01L2224/48091 , H01L2224/48227 , H01L2225/06524 , H01L2225/06541 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01057 , H01L2924/01067 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/04953 , H01L2924/10253 , H01L2924/14 , H01L2924/15153 , H01L2924/15165 , H01L2924/15788 , H01L2924/16195 , H01L2924/3025 , H01L2924/00 , H01L2224/45099
摘要: A semiconductor package of the invention comprises: a semiconductor element provided with a circuit element on one surface of a semiconductor substrate; an external wiring region provided on an other surface of the semiconductor substrate; a support substrate disposed on the one surface of the semiconductor substrate; an electrode pad disposed on the one surface of the semiconductor substrate; and a through-electrode which extends from the electrode pad through to the other surface of the semiconductor substrate.
摘要翻译: 本发明的半导体封装包括:在半导体衬底的一个表面上设置有电路元件的半导体元件; 设置在所述半导体衬底的另一个表面上的外部布线区域; 支撑基板,设置在所述半导体基板的一个表面上; 设置在所述半导体衬底的一个表面上的电极焊盘; 以及从电极焊盘延伸到半导体衬底的另一个表面的贯通电极。
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公开(公告)号:US20070006133A1
公开(公告)日:2007-01-04
申请号:US11446226
申请日:2006-06-05
申请人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Noriaki Seki , Yukio Kumazawa
发明人: Yasuhiko Kaneko , Junichi Kaneko , Satoshi Yamamoto , Michitaka Hariya , Takashi Nagao , Noriaki Seki , Yukio Kumazawa
IPC分类号: G06F9/44
CPC分类号: G06F8/20
摘要: A connector has a linking section, an associating section, and a controller. The linking section can link with at least one other connector at an input side or an output side. The associating section associates the connector with a processing module that executes a predetermined processing. The controller recognizes a linked state with other connectors, and, in accordance with the linked state, controls the processing module associated by the associating section.
摘要翻译: 连接器具有连接部分,关联部分和控制器。 连接部分可以在输入侧或输出侧与至少一个其它连接器连接。 关联部分将连接器与执行预定处理的处理模块相关联。 控制器识别与其他连接器的链接状态,并且根据链接状态来控制由关联部分关联的处理模块。
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公开(公告)号:US20060151099A1
公开(公告)日:2006-07-13
申请号:US10566991
申请日:2004-08-10
IPC分类号: B32B37/00
CPC分类号: B29C65/1635 , B29C65/1616 , B29C65/1654 , B29C65/1674 , B29C65/1677 , B29C65/168 , B29C65/8207 , B29C65/8215 , B29C65/8253 , B29C66/1282 , B29C66/12841 , B29C66/14 , B29C66/43 , B29C66/71 , B29C66/7332 , B29C66/7392 , B29C66/73921 , B29C66/836 , B29K2101/12 , B29K2995/002 , B29K2995/0022 , B29K2023/06 , B29K2023/12 , B29K2025/06 , B29K2025/08 , B29K2033/08 , B29K2033/12 , B29K2055/02 , B29K2059/00 , B29K2067/003 , B29K2067/006 , B29K2069/00 , B29K2071/00 , B29K2071/12 , B29K2077/00 , B29K2081/04
摘要: A method for laser welding comprises: forming a laser-transmissible resin workpiece 1 exhibiting whitish hue of white, gray or tint color out of a resin composition which includes 100 parts by weight of a thermoplastic resin and 0.1 to 2 parts by weight of white pigment having 2 to 2.8 of reflectance, piling a resin workpiece 2 being at least partly capable of laser-absorption onto the laser-transmissible resin workpiece 1, and then irradiating a laser beam 3 thereto to weld them thermally.
摘要翻译: 一种激光焊接方法,其特征在于,在树脂组合物中形成具有白色,灰色或着色色发白色的激光透过性树脂工件1,该树脂组合物包含100重量份的热塑性树脂和0.1-2重量份的白色颜料 具有2至2.8的反射率,将至少部分能够激光吸收的树脂工件2堆叠在激光可透射树脂工件1上,然后向其照射激光束3以将其热焊接。
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公开(公告)号:US07075748B2
公开(公告)日:2006-07-11
申请号:US10997153
申请日:2004-11-24
申请人: Matthew T. White , Satoshi Yamamoto
发明人: Matthew T. White , Satoshi Yamamoto
IPC分类号: G11B5/596
CPC分类号: G11B5/5552 , G11B5/5534
摘要: A dual-stage actuator disk drive has calibration tracks located in a nondata band, and uses a secondary-actuator failure detection and calibration test run by the servo control processor. The calibration tracks contain a pattern of pre-written magnetized test blocks. The test is run with the primary actuator biased against a crash stop, which enables the read head to access the calibration tracks. The servo control processor generates a test signal to the secondary actuator and receives a calibration signal from the read head as the read head detects the test blocks in the calibration tracks. The test comprises two measurements: a measurement of the secondary actuator static characteristics, and a measurement of the secondary actuator dynamic characteristics.
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公开(公告)号:US07052787B2
公开(公告)日:2006-05-30
申请号:US10221338
申请日:2002-01-09
申请人: Osamu Tajima , Katsuya Oda , Tatsuji Hatayama , Ryuji Yukawa , Taketoshi Ouki , Akira Fuju , Koji Shindo , Kazuhiro Tajima , Satoshi Yamamoto , Katsuyuki Makihara , Keigo Miyai , Masataka Kadowaki , Masatoshi Ueda
发明人: Osamu Tajima , Katsuya Oda , Tatsuji Hatayama , Ryuji Yukawa , Taketoshi Ouki , Akira Fuju , Koji Shindo , Kazuhiro Tajima , Satoshi Yamamoto , Katsuyuki Makihara , Keigo Miyai , Masataka Kadowaki , Masatoshi Ueda
CPC分类号: H01M8/0612 , C01B3/48 , C01B2203/0227 , C01B2203/0283 , C01B2203/044 , C01B2203/047 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , C01B2203/1223 , C01B2203/1241 , C01B2203/1604 , C01B2203/1685 , H01M8/04029 , H01M8/0662 , H01M2300/0082 , Y02P20/123 , Y02P20/124 , Y02P20/128
摘要: Proton-exchange membrane fuel-cell power generating equipment includes a heat exchanger coupled to a process burner and, therethrough, to a fan. When water needs to be heated, such as during startup, the water is circulated through the heat exchanger and the process burner is operated (ignited) to heat the water. When the water needs to be cooled, such as when a hot water reserving tank is full, the water is circulated through the heat exchanger and the fan is operated, but the process burner is not operated, to cool the water. Water is circulated through part or all of a water system to prevent freezing while the system is stopped. Optionally, the process burner is operated to heat the circulated water. The heat exchanger and other heat exchangers in the system are arranged to efficiently recover heat from burners, a fuel-cell cooling system and exothermic processes.
摘要翻译: 质子交换膜燃料电池发电设备包括耦合到工艺燃烧器并通过其流到风扇的热交换器。 当水需要加热时,例如在起动期间,水通过热交换器循环,并且工艺燃烧器被操作(点燃)以加热水。 当水需要冷却时,例如当热水储存罐已满时,水通过热交换器循环,风扇运行,但工艺燃烧器不工作,以冷却水。 水通过部分或全部水系统循环,以防止系统停止时冻结。 可选地,操作处理燃烧器以加热循环的水。 系统中的热交换器和其他热交换器被布置成有效地从燃烧器回收热量,燃料电池冷却系统和放热过程。
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公开(公告)号:US07026352B1
公开(公告)日:2006-04-11
申请号:US10470806
申请日:2002-02-01
申请人: Yoshiharu Mizui , Takashi Sakai , Satoshi Yamamoto , Keisuke Komeda , Masanori Fujita , Akifumi Okuda , Kumiko Kishi , Jun Niijima , Mitsuo Nagai , Kiyoshi Okamoto , Masao Iwata , Yoshihiko Kotake , Toshimitsu Uenaka , Naoki Asai , Motoko Matsufuji , Tomohiro Sameshima , Naoto Kawamura , Kazuyuki Dobashi , Takashi Nakashima , Masashi Yoshida , Toshio Tsuchida , Susumu Takeda , Tomonari Yamada , Koji Norihisa , Takao Yamori
发明人: Yoshiharu Mizui , Takashi Sakai , Satoshi Yamamoto , Keisuke Komeda , Masanori Fujita , Akifumi Okuda , Kumiko Kishi , Jun Niijima , Mitsuo Nagai , Kiyoshi Okamoto , Masao Iwata , Yoshihiko Kotake , Toshimitsu Uenaka , Naoki Asai , Motoko Matsufuji , Tomohiro Sameshima , Naoto Kawamura , Kazuyuki Dobashi , Takashi Nakashima , Masashi Yoshida , Toshio Tsuchida , Susumu Takeda , Tomonari Yamada , Koji Norihisa , Takao Yamori
IPC分类号: A61K31/365 , C07D313/00
CPC分类号: C07D405/14 , A61K31/335 , A61K31/336 , A61K31/4025 , A61K31/4427 , A61K31/4523 , A61K31/455 , A61K31/496 , A61K31/5377 , A61K31/74 , C07D313/00 , C07D407/06 , C07D407/14 , C07D493/04 , C07D493/08 , C12P17/02
摘要: The present invention provides a novel bioactive substance having an antitumor activity and a process for producing it, and a medical use thereof. Namely, it provides a 12-membered ring macrolide compound represented by the following formula obtained from the incubation solution of Streptomyces sp. Mer. 11107 or a variant thereof, a pharmacologically acceptable salt thereof or a hydrate of them, and a process for producing it
摘要翻译: 本发明提供了具有抗肿瘤活性的新型生物活性物质及其制造方法及其医疗用途。 即,它提供了由下列公式表示的12元环大环内酯化合物,其由Streptomyces sp。 梅尔 11107或其变体,其药理学上可接受的盐或它们的水合物及其制备方法
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公开(公告)号:US20060073411A1
公开(公告)日:2006-04-06
申请号:US11233130
申请日:2005-09-23
申请人: Satoshi Yamamoto , Yukio Hanamoto , Koji Kuwana
发明人: Satoshi Yamamoto , Yukio Hanamoto , Koji Kuwana
IPC分类号: G03C1/76
CPC分类号: G03F7/0397 , G03F7/0392
摘要: The present invention provides a chemically amplified resist composition comprising a treated resin (1), an acid generator and a solvent, wherein resin (1) is (a) a (meth)acrylic resin which is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid, and which comprises a repeating unit having an alicyclic hydrocarbon group in its side chain or (b) a styrenic resin which is insoluble or poorly soluble in an alkali aqueous solution and becomes soluble in an alkali aqueous solution by the action of an acid, and which comprises a repeating unit derived from hydroxystyrene, and wherein the treated resin (1) is obtained by (A) contacting crude resin (1) with activated carbon at 40 to 90° C. to obtain hemi-treated crude resin (1) and contacting the hemi-treated resin (1) with at least one member selected from the group consisting of kieselguhr and silica gel, or (B) contacting crude resin (1) with activated carbon and at least one member selected from the group consisting of kieselguhr and silica gel at 40 to 90 ° C.
摘要翻译: 本发明提供一种化学增幅抗蚀剂组合物,其包含处理过的树脂(1),酸产生剂和溶剂,其中树脂(1)是(a)在碱水溶液中不溶或难溶的(甲基)丙烯酸树脂 并且通过酸的作用而溶于碱性水溶液中,并且其侧链含有具有脂环族烃基的重复单元或(b)在碱性水溶液中不溶或难溶于苯乙烯树脂,成为 通过酸的作用可溶于碱性水溶液,其中含有由羟基苯乙烯衍生的重复单元,其中,(A)将粗树脂(1)与40〜90的活性炭接触而得到 得到半经处理的粗树脂(1),并将半经处理的树脂(1)与选自硅藻土和硅胶的至少一种物质接触,或(B)使粗树脂(1)与 活性炭 和选自硅藻土和硅胶中的至少一种在40至90℃。
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公开(公告)号:US06909133B2
公开(公告)日:2005-06-21
申请号:US10699690
申请日:2003-11-04
IPC分类号: H01L27/092 , H01L21/8234 , H01L21/8238 , H01L27/088 , H01L29/78 , H01L29/108
CPC分类号: H01L21/28194 , H01L21/28079 , H01L21/28202 , H01L21/823462 , H01L21/823842 , H01L21/823857 , H01L29/517 , H01L29/665 , H01L29/66545 , H01L29/7833
摘要: In a process of forming MISFETs that have gate insulating films that are mutually different in thickness on the same substrate, the formation of an undesirable natural oxide film at the interface between the semiconductor substrate and the gate insulating film is suppressed. A gate insulating film of MISFETs constituting an internal circuit is comprised of a silicon oxynitride film. Another gate insulating film of MISFETs constituting an I/O circuit is comprised of a laminated silicon oxynitride film and a high dielectric film. A process of forming the two types of gate insulating films on the substrate is continuously carried out in a treatment apparatus of a multi-chamber system. Accordingly, the substrate will not be exposed to air. Therefore, it is possible to suppress the inclusion of undesirable foreign matter and the formation of a natural oxide film at the interface between the substrate and the gate insulating films.
摘要翻译: 在形成具有相同基板上的厚度相互不同的栅极绝缘膜的MISFET的过程中,抑制了在半导体基板和栅极绝缘膜之间的界面处形成不期望的自然氧化膜。 构成内部电路的MISFET的栅极绝缘膜由氮氧化硅膜构成。 构成I / O电路的MISFET的另一个栅极绝缘膜由层叠的氮氧化硅膜和高介电膜构成。 在多室系统的处理装置中连续地进行在基板上形成两种栅极绝缘膜的工序。 因此,基板不会暴露在空气中。 因此,可以抑制在基板和栅极绝缘膜之间的界面处包含不需要的异物和形成自然氧化膜。
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公开(公告)号:US20050077548A1
公开(公告)日:2005-04-14
申请号:US10968050
申请日:2004-10-20
IPC分类号: H01L27/092 , H01L21/8234 , H01L21/8238 , H01L27/088 , H01L29/78 , H01L23/62
CPC分类号: H01L21/28194 , H01L21/28079 , H01L21/28202 , H01L21/823462 , H01L21/823842 , H01L21/823857 , H01L29/517 , H01L29/665 , H01L29/66545 , H01L29/7833
摘要: In a process of forming MISFETs that have gate insulating films that are mutually different in thickness on the same substrate, the formation of an undesirable natural oxide film at the interface between the semiconductor substrate and the gate insulating film is suppressed. A gate insulating film of MISFETs constituting an internal circuit is comprised of a silicon oxynitride film. Another gate insulating film of MISFETs constituting an I/O circuit is comprised of a laminated silicon oxynitride film and a high dielectric film. A process of forming the two types of gate insulating films on the substrate is continuously carried out in a treatment apparatus of a multi-chamber system. Accordingly, the substrate will not be exposed to air. Therefore, it is possible to suppress the inclusion of undesirable foreign matter and the formation of a natural oxide film at the interface between the substrate and the gate insulating films.
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