公开(公告)号：US5496199A

公开(公告)日：1996-03-05

申请号：US447700

申请日：1995-05-23

Applicant: Hideo Makishima ,  Keizo Yamada ,  Yoshinori Tomihari

Inventor： Hideo Makishima ,  Keizo Yamada ,  Yoshinori Tomihari

IPC: H01J1/304 ,  H01J3/02 ,  H01J3/14 ,  H01J3/18 ,  H01J9/02 ,  H01J23/04 ,  H01J29/04 ,  H01J37/073 ,  H01J9/18 ,  H01J1/30

CPC classification number: H01J3/022 ,  H01J29/04

Abstract: A first laminated sub-structure having a semiconductor substrate, a lower insulating layer on the semiconductor substrate, emitter electrodes formed in micro-apertures in the lower insulating layer and a gate electrode on the upper surface of the lower insulating layer is aligned with a second laminated sub-structure having a transparent upper insulating layer and a grid member on the transparent upper insulating layer by means of a stepper, and the first and second laminated sub-structures are fixed to each other through a field assisted glass-metal sealing technique.

Abstract translation: 具有半导体衬底的第一层叠子结构，半导体衬底上的下绝缘层，形成在下绝缘层中的微孔中的发射电极和在下绝缘层的上表面上的栅电极与第二层 通过步进器在透明上绝缘层上具有透明上绝缘层和栅格元件的层叠子结构，并且第一和第二层叠子结构通过场辅助玻璃 - 金属密封技术彼此固定。

公开(公告)号：US5233196A

公开(公告)日：1993-08-03

申请号：US764772

申请日：1991-09-24

Applicant: Masahiko Okunuki ,  Haruhito Ono

Inventor： Masahiko Okunuki ,  Haruhito Ono

IPC: H01J1/312 ,  H01J1/308 ,  H01J3/18 ,  H01J37/063 ,  H01J37/073 ,  H01J37/305 ,  H01L21/027 ,  H01L21/30

CPC classification number: H01J37/063 ,  H01J1/308 ,  H01J2201/319 ,  H01J2237/062 ,  H01J2237/06325 ,  H01J2237/1202

Abstract: An electron beam apparatus for applying an electron beam from an electron source onto a target plane is characterized by comprising one sheet of electrode disposed between said electron source for emitting the electron beam in parallel or substantially parallel and a target arrangement position, and a power source for supplying a desired voltage to said electrode.

Abstract translation: 用于将来自电子源的电子束施加到目标平面上的电子束装置的特征在于包括设置在所述电子源之间的一片电极，用于平行或基本平行地发射电子束和目标布置位置，以及电源 用于向所述电极提供所需的电压。

公开(公告)号：US4464573A

公开(公告)日：1984-08-07

申请号：US355696

申请日：1982-03-08

Applicant: Robert L. Dalglish

Inventor： Robert L. Dalglish

IPC: H01J49/06 ,  G21K1/08 ,  H01J3/18 ,  H01J37/12 ,  H01J49/26 ,  B23K15/00 ,  H01J37/26 ,  H05H5/00

CPC classification number: H01J37/12 ,  G21K1/08 ,  H01J3/18

Abstract: A charged particle beam focussing device in which a pair of rod like electrodes having a potential difference maintained between them are arranged on either side of the path of a beam to be focussed. The configuration of the electrodes is such that the significant electric field between them is confined to a short section of the path of the particles. A second pair of similar electrodes are arranged parallel to and in a plane substantially parallel to the plane of the first pair and displaced in a direction parallel to the plane in which the first pair lie, a potential difference being maintained between the second pair of electrodes. The arrangement is such that by variation of the potentials between the electrodes a beam of charged particles passing along the beam path between the electrodes can be caused to come to a focal line in a predetermined plane. A further device arranged at right angles to the first beam is provided to bring the beam to a point focus. The electrodes are preferably passed through earth reflector planes arranged on either side of the path of the beam.

Abstract translation: 一种带电粒子束聚焦装置，其中一对具有保持在它们之间的电位差的棒状电极被布置在待聚焦的光束的路径的任一侧上。 电极的配置使得它们之间的有效电场被限制在颗粒路径的短的部分。 第二对相似的电极平行于基本上平行于第一对的平面的平面布置并且在平行于第一对所在的平面的方向上移位，在第二对电极之间保持电位差 。 通过使电极之间的电位发生变化，能够使沿电极之间的光束路径通过的带电粒子束在预定的平面中到达焦点线。 提供与第一光束成直角布置的另一装置，以使光束成为点聚焦。 电极优选通过布置在梁的路径的任一侧上的接地反射器平面。

公开(公告)号：US4245159A

公开(公告)日：1981-01-13

申请号：US962656

申请日：1978-11-21

Applicant: Siegfried Beisswenger

Inventor： Siegfried Beisswenger

IPC: H01J3/18 ,  H01J3/22 ,  H01J29/64 ,  H01J37/141 ,  H01J37/21 ,  G21K1/08

CPC classification number: H01J37/141 ,  H01J3/22 ,  H01J37/21

Abstract: An electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.

Abstract translation: 一种用于具有静态和动态聚焦透镜系统的电子束装置的电子 - 光学透镜装置，其中动态聚焦透镜系统位于静态聚焦透镜系统内部。

公开(公告)号：US10032595B2

公开(公告)日：2018-07-24

申请号：US15056479

申请日：2016-02-29

Applicant: General Electric Company

Inventor： Sergio Lamaitre

IPC: H01J35/14 ,  H01J3/18 ,  H01J35/06 ,  H01J3/02

Abstract: In the present invention, a cathode assembly for an X-ray tube is provided including a cathode cup, a pair of emitters disposed within the cup and each configured to emit an electron beam therefrom and an electrode spaced from the pair of emitters and configured to affect the shape and/or intensity of the electron beams emitted by the pair of emitters. The electrode includes a rod extending across a central aperture defined within the electrode that enables the electrode to grid or focus the electron beam or beams emitted from the emitters using a bias voltage between +10 kV and −10 kV.

公开(公告)号：US20160293375A1

公开(公告)日：2016-10-06

申请号：US15037971

申请日：2014-09-16

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Oliver HEID

IPC: H01J3/02 ,  H01J35/14 ,  H01J3/18 ,  H01J35/06

CPC classification number: H01J3/027 ,  H01J3/02 ,  H01J3/18 ,  H01J35/06 ,  H01J35/14

Abstract: The invention relates to an electron gun for generating a flat electron beam, comprising a cathode with an emission surface which is curved about a central axis and which is designed to emit electrons. The electron gun further comprises an accelerating device for accelerating the electrons in a radial direction towards a target region on the central axis. Furthermore, the emission surface has a width in the azimuth direction and a height oriented perpendicularly to the width, said width being at least ten times greater than the height.

Abstract translation: 本发明涉及一种用于产生平面电子束的电子枪，包括具有围绕中心轴线弯曲且被设计为发射电子的发射表面的阴极。 电子枪还包括加速装置，用于沿着径向加速电子朝向中心轴上的目标区域。 此外，发射表面具有方位方向上的宽度和垂直于宽度的高度，所述宽度比高度高至少十倍。

公开(公告)号：US08664619B2

公开(公告)日：2014-03-04

申请号：US13801713

申请日：2013-03-13

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang

IPC: H01J3/18 ,  H01J37/12 ,  H01J49/06

CPC classification number: H01J3/18 ,  H01J37/12 ,  H01J37/3171 ,  H01J49/067 ,  H01J2237/121

Abstract: A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first electrode disposed at the first end and a second electrode disposed at the second end. The elongated tube is configured to receive a voltage bias to create an electric field within the Einzel lens as the ion beam travels through the hybrid electrostatic lens. The hybrid electrostatic lens further includes a quadrupole lens having a first stage and a second stage, where each of the stages is defined by a plurality of electrodes turned 90° with respect to each other to define a pathway in the Z direction through the elongated tube. The Einzel lens focuses the ion beam and the quadrupole lens shapes the ion beam.

Abstract translation: 使用混合静电透镜来形成和聚焦离子束。 混合静电透镜包括由具有第一和第二端的细长管和设置在第一端的第一电极和设置在第二端的第二电极限定的Einzel透镜。 细长管被配置为当离子束穿过混合静电透镜时，接收电压偏置以在Einzel透镜内产生电场。 混合静电透镜还包括具有第一级和第二级的四极透镜，其中每个级由相对于彼此转动90°的多个电极限定，以通过细长管限定在Z方向上的路径 。 Einzel透镜聚焦离子束，四极透镜成像离子束。

公开(公告)号：US20140034845A1

公开(公告)日：2014-02-06

申请号：US13565011

申请日：2012-08-02

Applicant: N. William Parker

Inventor： N. William Parker

IPC: H01J3/22 ,  H01J37/317 ,  H01J3/18

CPC classification number: H01J3/22 ,  H01J3/18 ,  H01J37/3007 ,  H01J37/317 ,  H01J2237/1534 ,  H01J2237/31776

Abstract: A charged particle shaped beam column includes: an objective lens configured to form a charged particle shaped beam on the surface of a substrate, wherein the disk of least confusion of the objective lens does not coincide with the surface of the substrate; an optical element with 8N poles disposed radially symmetrically about the optic axis of the column, the optical element being positioned between a condenser lens and the objective lens, wherein integer N1; and a power supply applying excitations to the optical element's 8N poles to provide an octupole electromagnetic field. The octupole electromagnetic field induces azimuthally-varying third-order deflections to beam trajectories passing through the 8N-pole optical element. By controlling the excitation of the 8N poles a shaped beam, such as a square beam, can be formed at the surface of the substrate.

Abstract translation: 带电粒子束柱包括：物镜，被配置为在基板的表面上形成带电粒子束，其中物镜的最小混淆盘与基板的表面不一致; 具有8N磁极的光学元件，其围绕所述列的光轴径向对称设置，所述光学元件位于聚光透镜和所述物镜之间，其中整数N1; 以及向光学元件的8N极施加激励以提供八极电磁场的电源。 八极电磁场引起通过8N极光学元件的射束轨迹的方位角变化的三阶偏转。 通过控制8N极的激发，可以在衬底的表面上形成诸如方束的成形光束。

公开(公告)号：US08642949B2

公开(公告)日：2014-02-04

申请号：US13413568

申请日：2012-03-06

Applicant: Alexander A. Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

Inventor： Alexander A. Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

IPC: H01J37/301 ,  H01J49/04 ,  H01J49/24 ,  H01J3/18

CPC classification number: H01J49/062 ,  H01J3/14

Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.

Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括离子传递管道60.导管60具有朝向较高压力室40的入口开口和朝向较低压力室开口的出口70。 导管60还具有围绕离子传递通道115的至少一个侧壁。侧壁包括在侧壁的纵向方向上形成的多个孔140，以允许来自离子传递通道115内的气体流 到导管60的侧壁外侧的较低压力区域。

公开(公告)号：US20130256553A1

公开(公告)日：2013-10-03

申请号：US13436916

申请日：2012-03-31

Applicant: Tom Miller ,  Sean Kellogg ,  Jiri Zbranek

Inventor： Tom Miller ,  Sean Kellogg ,  Jiri Zbranek

IPC: H01J3/18 ,  H05H1/03

CPC classification number: H01J37/08 ,  H01J37/045 ,  H01J37/243 ,  H01J37/302 ,  H01J2237/043 ,  H01J2237/0805 ,  H01J2237/0817 ,  H01J2237/30472 ,  H01J2237/31749

Abstract: An improved method and apparatus for shutting down and restoring an ion beam in an ion beam system. Preferred embodiments provide a system for improved power control of a focused ion beam source, which utilizes an automatic detection of when a charged particle beam system is idle (the beam itself is not in use) and then automatically reducing the beam current to a degree where little or no ion milling occurs at any aperture plane in the ion column. Preferred embodiments include a controller operable to modify voltage to an extractor electrode and/or to reduce voltage to a source electrode when idle state of an ion source of the charged particle beam system is detected.

Abstract translation: 一种用于在离子束系统中关闭和还原离子束的改进的方法和装置。 优选实施例提供了一种用于改进聚焦离子束源的功率控制的系统，其利用对带电粒子束系统何时空闲（束本身不使用）的自动检测，然后自动将束电流减小至 在离子柱中的任何孔径平面处都发生很少或没有离子研磨。 优选的实施例包括可操作以在检测到带电粒子束系统的离子源的空闲状态时，将电压修改为提取器电极和/或降低对源电极的电压的控制器。