Electronic device manufacturing method
    44.
    发明申请
    Electronic device manufacturing method 失效
    电子元件制造方法

    公开(公告)号:US20040163246A1

    公开(公告)日:2004-08-26

    申请号:US10717718

    申请日:2003-11-21

    IPC分类号: H05K003/10

    摘要: It is an object to provide a semiconductor device having a buried multilayer wiring structure in which generation of a resolution defect of a resist pattern is suppressed and generation of a defective wiring caused by the resolution defect is reduced. After a via hole (7) reaching an etching stopper film (4) is formed, annealing is carried out at 300 to 400null C. with the via hole (7) opened. As an annealing method, it is possible to use both a method using a hot plate and a method using a heat treating furnace. In order to suppress an influence on a lower wiring (20) which has been manufactured, heating is carried out for a short time of approximately 5 to 10 minutes by using the hot plate. Consequently, a by-product staying in an interface of an upper protective film (6) and an interlayer dielectric film (5) having a low dielectric constant and a by-product staying in an interface of the etching stopper film (4) and the interlayer dielectric film (5) having a low dielectric constant are discharged so that an amount of the residual by-product can be decreased.

    摘要翻译: 本发明的目的是提供一种具有掩埋多层布线结构的半导体器件,其中抗蚀剂图案的分辨率缺陷的产生被抑制,并且由分辨率缺陷引起的缺陷布线的产生减少。 在形成到达蚀刻停止膜(4)的通孔(7)之后,在通孔(7)打开的情况下,在300〜400℃进行退火。 作为退火方法,可以使用使用热板的方法和使用热处理炉的方法。 为了抑制对制造的下布线(20)的影响,通过使用热板进行约5〜10分钟的短时间的加热。 因此,残留在上部保护膜(6)和具有低介电常数的副产物残留在蚀刻阻挡膜(4)的界面上的层间电介质膜(5)的界面中的副产物和 排出具有低介电常数的层间绝缘膜(5),从而可以减少残留副产物的量。

    Method for constructing a membrane probe using a depression
    46.
    发明申请
    Method for constructing a membrane probe using a depression 有权
    使用凹陷构造膜探针的方法

    公开(公告)号:US20030192183A1

    公开(公告)日:2003-10-16

    申请号:US10418510

    申请日:2003-04-16

    摘要: A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

    摘要翻译: 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成,使得可以容易地在其中形成凹陷。 优选图案化的电介质(绝缘)层由衬底支撑。 导电材料位于凹陷内,然后优选地研磨以从电介质层的顶表面去除多余的并提供平坦的总体表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

    Method for reducing multiline effects on a printed circuit board
    48.
    发明申请
    Method for reducing multiline effects on a printed circuit board 失效
    减少印刷电路板上多行影响的方法

    公开(公告)号:US20030061711A1

    公开(公告)日:2003-04-03

    申请号:US09964810

    申请日:2001-09-28

    摘要: A method is provided for designing a printed circuit board. This may include analyzing at least one characteristic of a first plurality of relatively parallel conductive paths on the printed circuit board. The first plurality of relatively parallel conductive paths may be arranged in a pattern in a first area of the printed circuit board. The method may also include rearranging the pattern of conductive paths such that a second plurality of relatively parallel conductive paths in a second area of the printed circuit board have a different geometry or arrangement with respect to one another as compared to a geometry or arrangement of the first plurality of relatively parallel conductive paths in the first area.

    摘要翻译: 提供了一种用于设计印刷电路板的方法。 这可以包括分析印刷电路板上的第一多个相对平行的导电路径的至少一个特征。 第一多个相对平行的导电路径可以布置在印刷电路板的第一区域中的图案中。 该方法还可以包括重新布置导电路径的图案,使得印刷电路板的第二区域中的第二多个相对平行的导电路径相对于彼此具有不同的几何形状或布置,与 在第一区域中的第一多个相对平行的导电路径。

    Embedded PCB identification
    49.
    发明申请
    Embedded PCB identification 有权
    嵌入式PCB识别

    公开(公告)号:US20030047350A1

    公开(公告)日:2003-03-13

    申请号:US09954402

    申请日:2001-09-11

    发明人: Brian S. Forbes

    IPC分类号: H05K003/10

    摘要: A method of tracking a printed circuit board is described. An embedded identification device is utilized. The embedded identification device is placed in a layer of the printed circuit board. An external transceiver is used to communicate with the embedded device and record platform information.

    摘要翻译: 描述了跟踪印刷电路板的方法。 使用嵌入式识别装置。 将嵌入式识别装置放置在印刷电路板的一层中。 外部收发器用于与嵌入式设备通信并记录平台信息。