公开(公告)号：US20090227040A1

公开(公告)日：2009-09-10

申请号：US11977541

申请日：2007-10-24

申请人： Ozgur Sahin ,  Calvin F. Quate ,  Olav Solgaard ,  Henrik H. J. Persson

发明人： Ozgur Sahin ,  Calvin F. Quate ,  Olav Solgaard ,  Henrik H. J. Persson

IPC分类号： G01N33/00 ,  B01J19/00

CPC分类号： G01Q60/34 ,  C12Q1/6816 ,  G01Q60/42 ,  Y10T436/143333 ,  C12Q2565/607 ,  C12Q2565/501

摘要： Method and apparatus which uses harmonic cantilevers, such as used in atomic force microscopy, to detect variations in the attractive and repulsive forces on a solid surface as a result of macromolecular binding, for example, hybridization of a single stranded DNA molecule attached to the surface with another DNA molecule. The complexed macromolecule is less flexible than an uncomplexed molecule. It will typically have more negative charge due to amino acids or DNA monomers. Both stiffness of the surface and the attractive capillary forces will change after binding and may be detected. The present methods and materials enable ultraflat surfaces for the macromolecule deposition, and may include the use of a gold-coated mica substrate and a self-assembling monolayer.

摘要翻译： 使用诸如用于原子力显微镜的谐波悬臂的方法和装置来检测由于大分子结合而导致的固体表面上的吸引力和排斥力的变化，例如附着在表面上的单链DNA分子的杂交 与另一个DNA分子。 络合的大分子比未复合的分子灵活性低。 由于氨基酸或DNA单体，它通常会具有更多的负电荷。 表面的刚度和吸引的毛细管力将在结合后改变并且可以被检测。 本发明的方法和材料可以实现用于高分子沉积的超平坦表面，并且可以包括使用镀金的云母基材和自组装单层。

公开(公告)号：US06935167B1

公开(公告)日：2005-08-30

申请号：US10801394

申请日：2004-03-15

申请人： Ozgur Sahin ,  Abdullah Atalar ,  Calvin F. Quate ,  Olav Solgaard

发明人： Ozgur Sahin ,  Abdullah Atalar ,  Calvin F. Quate ,  Olav Solgaard

IPC分类号： G01Q30/06 ,  G01Q60/32 ,  G01Q70/14 ,  H01J37/00

CPC分类号： G01Q60/38 ,  G01Q60/34 ,  G01Q70/10 ,  Y10S977/873

摘要： A harmonic cantilever for use in a tapping-mode atomic force microscope includes a cantilever arm and a probe tip. The cantilever arm has a shape selected to tune the fundamental resonance frequency or a resonance frequency of a selected higher order mode so that the fundamental and higher-order resonance frequencies have an integer ratio or near integer ratio. In one embodiment, the cantilever arm can be shaped to tune the fundamental resonance frequency. Alternately, the cantilever arm can include a geometric feature for tuning the resonance frequency of the fundamental mode or the selected higher order mode. An imaging method using the harmonic cantilever is disclosed whereby signals at the higher harmonics are measured to determine the material properties of a sample. In other embodiment, a cantilever includes a probe tip positioned at a location of minimum displacement of unwanted harmonics for suppressing signals associated with the unwanted harmonics.

摘要翻译： 用于攻丝模​​式原子力显微镜的谐波悬臂包括悬臂和探针尖。 悬臂臂具有选择的形状来调谐基本共振频率或所选高阶模式的谐振频率，使得基波和高次谐振频率具有整数比或接近整数比。 在一个实施例中，悬臂可以成形为调谐基本共振频率。 或者，悬臂可以包括用于调谐基本模式或选择的较高阶模式的谐振频率的几何特征。 公开了使用谐波悬臂的成像方法，其中测量高次谐波的信号以确定样品的材料性质。 在另一个实施例中，悬臂包括位于最小位移处的不需要的谐波的探针尖端，用于抑制与不需要的谐波相关联的信号。

公开(公告)号：US06307202B1

公开(公告)日：2001-10-23

申请号：US09332540

申请日：1999-06-14

申请人： Scott R. Manalis ,  Stephen C. Minne ,  Calvin F. Quate

发明人： Scott R. Manalis ,  Stephen C. Minne ,  Calvin F. Quate

IPC分类号： G01J510

CPC分类号： G01J5/40

摘要： A bimorph spiral which exhibits a shape-altering response to thermal radiation and is dimensioned to have a focussing effect on light, such as a visible light, by acting as a quasi-Fresnel element. The focussing effect varies as the shape of the bimorph spiral changes due to absorption of thermal radiation. An array of such bimorph spirals can be used for efficient, high-resolution and rapid uncooled photothermal spectroscopy.

摘要翻译： 具有对热辐射形状改变的响应的双压电晶片螺旋，并且通过充当准菲涅尔元件的尺寸设计成具有对光（例如可见光）的聚焦效应。 聚焦效应随着双压电晶片的形状由于热辐射的吸收而变化。 这种双压电晶片阵列可用于高效，高分辨率和快速非冷却光热光谱。

公开(公告)号：US06271957B1

公开(公告)日：2001-08-07

申请号：US09318775

申请日：1999-05-26

申请人： Calvin F. Quate ,  David Stern

发明人： Calvin F. Quate ,  David Stern

IPC分类号： G02B2608

CPC分类号： G03F7/70291 ,  B01J19/0046 ,  B01J2219/00353 ,  B01J2219/00439 ,  B01J2219/00527 ,  B01J2219/00529 ,  B01J2219/00585 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/00722 ,  B01J2219/00725 ,  B82Y30/00 ,  C40B40/06 ,  C40B60/14 ,  G03F7/70283 ,  G03F7/704

摘要： An improved optical photolithography system and method provides predetemined light patterns generated by a direct write system without the use of photomasks. The Direct Write System provides predetermined light patterns projected on the surface of a substrate (e.g., a wafer) by using a computer controlled component for dynamically generating the predetermined light pattern, e.g., a spatial light modulator. Image patterns are store in computer and through electronic control of the spatial light modulator directly illuminate the wafer to define a portion of the polymer array, rather than being defined by a pattern on a photomask. Thus, in the Direct Write System each pixel is illuminated with an optical beam of suitable intensity and the imaging (printing) of an individual feature is determined by computer control of the spatial light modulator at each photolithographic step without the use of a photomask. The Direct Write System including a spatial light modulator is particularly useful in the synthesis of DNA arrays and provides an efficient element for polymer array synthesis by using spatial light modulators to generate a predetermined light pattern that defines the image patterns of a polymer array to be deprotected.

摘要翻译： 改进的光学光刻系统和方法提供由直接写入系统产生的预先设定的光图案，而不使用光掩模。 直接写入系统通过使用用于动态生成预定光图案的计算机控制部件（例如空间光调制器）来提供投影在基板（例如，晶片）的表面上的预定光图案。 图像图案存储在计算机中，并且通过空间光调制器的电子控制直接照亮晶片以限定聚合物阵列的一部分，而不是由光掩模上的图案限定。 因此，在直写系统中，每个像素用适当强度的光束照射，并且通过在每个光刻步骤的计算机控制空间光调制器而不使用光掩模来确定单个特征的成像（打印）。 包括空间光调制器在内的直接写入系统在DNA阵列的合成中特别有用，并且通过使用空间光调制器产生限定要去保护的聚合物阵列的图像图案的预定光图案，为聚合物阵列合成提供有效元素 。

公开(公告)号：US6000947A

公开(公告)日：1999-12-14

申请号：US548307

申请日：1995-11-01

申请人： Stephen Charles Minne ,  Hyongsok Soh ,  Calvin F. Quate

发明人： Stephen Charles Minne ,  Hyongsok Soh ,  Calvin F. Quate

IPC分类号： B81B1/00 ,  B81B3/00 ,  B82B3/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q70/16 ,  G01Q80/00 ,  G03F7/20 ,  H01L21/31 ,  H01L21/465

CPC分类号： G01Q60/30 ,  B82Y35/00 ,  G01Q20/04 ,  G03F7/2049 ,  G03F7/70358 ,  G03F7/70375 ,  Y10S977/857

摘要： A scanning probe microscope is used to fabricate a gate or other feature of a transistor by scanning a silicon substrate in which the transistor is to be formed. An electric field is created between the cantilever tip and the silicon substrate, thereby causing an oxide layer to be formed on the surface of the substrate. As the tip is scanned across the substrate the electric field is switched on and off so that an oxide pattern is formed on the silicon. Preferably, the oxide pattern is formed on a deposited layer of amorphous silicon. Extremely small features, e.g., a MOSFET gate having a length of 0.2 .mu.m or less can be fabricated by this technique.

摘要翻译： 扫描探针显微镜用于通过扫描其中将形成晶体管的硅衬底来制造晶体管的栅极或其它特征。 在悬臂尖端和硅衬底之间产生电场，从而在衬底的表面上形成氧化物层。 当尖端扫描穿过衬底时，电场被打开和关闭，使得在硅上形成氧化物图案。 优选地，氧化物图案形成在非晶硅的沉积层上。 通过这种技术可以制造极小的特征，例如长度为0.2μm或更小的MOSFET栅极。

公开(公告)号：US5908981A

公开(公告)日：1999-06-01

申请号：US708446

申请日：1996-09-05

申请人： Abdullah Atalar ,  Scott R. Manalis ,  Stephen C. Minne ,  Calvin F. Quate

发明人： Abdullah Atalar ,  Scott R. Manalis ,  Stephen C. Minne ,  Calvin F. Quate

IPC分类号： G01B9/02 ,  G01B9/04 ,  G01B11/30 ,  G01B21/30

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  Y10S977/87 ,  Y10S977/873

摘要： A deflection sensor for a microcantilever includes two sets of interdigitated fingers, one (reference) set being attached to the substrate from which the microcantilever extends and the other (movable) set being attached to the tip of the microcantilever. Together the interdigitated fingers form an optical phase grating. The deflection of the microcantilever is measured by directing a light beam against the optical phase grating and detecting the intensity of the reflected light in the first (or other) component of the resulting diffraction pattern. As the microcantilever deflects, the reference and movable fingers move relative to one another creating large variations in the intensity of the zeroth and first order components of the diffraction pattern. To eliminate "1/f" noise the deflection of the microcantilever can be measured using an AC signal.

摘要翻译： 用于微悬臂梁的偏转传感器包括两组交叉指状物，一个（参考）组附接到基体上，微型悬臂从该基底延伸，另一组（可移动）组附接到微悬臂梁的尖端。 交叉指状物一起形成光学相位光栅。 通过将光束引导到光学相位光栅并检测所得衍射图案的第一（或其它）分量中的反射光的强度来测量微悬臂梁的偏转。 当微悬臂梁偏转时，参考和可动指状物相对于彼此移动，从而产生衍射图案的第零级和第一级分量的强度的大变化。 为了消除“1 / f”噪声，可以使用AC信号测量微悬臂梁的偏转。

公开(公告)号：US5633455A

公开(公告)日：1997-05-27

申请号：US470658

申请日：1995-06-05

申请人： Calvin F. Quate

发明人： Calvin F. Quate

IPC分类号： G01Q20/04 ,  G01Q30/00 ,  G01Q60/38 ,  G01R1/067 ,  H01L21/66 ,  H01J37/00

CPC分类号： G01Q70/06 ,  B82Y35/00 ,  G01Q20/04 ,  G01Q60/38 ,  H01L22/12 ,  Y10S977/854

摘要： A device for detecting the presence of particles and irregularities on the surface of a semiconductor wafer or other substrate includes a plurality of cantilevers formed on a semiconductor substrate and a means of detecting the deflection of each of the cantilevers. The cantilevers may, for example, be formed in rows and separated by selected distances. The entire substrate is then scanned over the surface to be examined, in a raster pattern, for example, and the deflection of the individual cantilevers is monitored.

摘要翻译： 用于检测半导体晶片或其它基板的表面上的颗粒和凹凸的存在的装置包括形成在半导体基板上的多个悬臂和检测每个悬臂的偏转的装置。 悬臂可以例如以行形成并且分开一定距离。 然后，例如，以光栅图案将整个基板扫描在要检查的表面上，并且监测各个悬臂的偏转。

公开(公告)号：US5517280A

公开(公告)日：1996-05-14

申请号：US226784

申请日：1994-04-12

申请人： Calvin F. Quate

发明人： Calvin F. Quate

IPC分类号： B81B1/00 ,  B81B3/00 ,  G01Q20/02 ,  G01Q80/00 ,  G03F7/00 ,  G03F7/20 ,  H01L21/31 ,  H01J3/14

CPC分类号： G01Q70/06 ,  B82Y35/00 ,  G01Q20/02 ,  G03F7/2049 ,  G03F7/70358 ,  G03F7/70375 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/859 ,  Y10S977/868

摘要： A photolithography system includes a plurality of cantilevers, preferably formed in a silicon wafer. Each cantilever includes a tip located near the free end of the cantilever and a waveguide which extends along the length of the cantilever and intersects the tip. An aperture is formed at the apex of the tip so that light travelling through the waveguide may exit the tip. A light switch is included in the waveguide to control the passage of light to the tip of the cantilever.The array of cantilevers is positioned adjacent a wafer which is to be lithographed, in the manner of an atomic force microscope operating in the attractive mode. Each cantilever is a compound structure, including a thick portion and a thin portion, the latter having a preselected mechanical resonant frequency. The cantilevers are caused to vibrate at their resonant frequency and the actual frequency of vibration is detected and used to maintain a uniform spacing between the tip of the cantilever and the surface of a photoresist layer which is to be exposed. Preferably, both the vibrational motion and the control of the tip-photoresist spacing are effected by means of a capacitive plate located adjacent the cantilever.The cantilever array is scanned over a photoresist layer on the wafer, preferably in a raster pattern, and the individual light switches are operated so as to expose individual pixels on the photoresist layer.

摘要翻译： 光刻系统包括多个悬臂，优选地形成在硅晶片中。 每个悬臂包括位于悬臂自由端附近的尖端和沿着悬臂的长度延伸并与尖端相交的波导。 在尖端的顶点处形成孔，使得穿过波导的光可以离开尖端。 波导中包括光开关以控制光通向悬臂的尖端。 悬臂的阵列以原子力显微镜在吸引模式下操作的方式定位在要被光刻的晶片附近。 每个悬臂是复合结构，包括厚部分和薄部分，后者具有预选的机械共振频率。 使悬臂以其谐振频率振动，并且检测振动的实际频率并用于保持悬臂的尖端与要暴露的光致抗蚀剂层的表面之间的均匀间隔。 优选地，振动运动和尖端 - 光致抗蚀剂间隔的控制都通过位于悬臂附近的电容板来实现。 将悬臂阵列扫描在晶片上的光致抗蚀剂层上，优选以光栅图案扫描，并且操作各个光开关以暴露光致抗蚀剂层上的各个像素。

公开(公告)号：US5317533A

公开(公告)日：1994-05-31

申请号：US566335

申请日：1990-08-17

申请人： Calvin F. Quate ,  Mark J. Zdeblick ,  Thomas R. Albrecht

发明人： Calvin F. Quate ,  Mark J. Zdeblick ,  Thomas R. Albrecht

IPC分类号： G01B7/34 ,  B44C1/22 ,  G01N23/00 ,  G01N23/225 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q20/04 ,  G01Q30/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/04 ,  G11B9/14 ,  G11C13/00 ,  G11C13/04 ,  H01J37/20 ,  H01J37/28 ,  H01L41/09 ,  H01L41/22 ,  H02N2/00 ,  G11C11/00 ,  G21K7/00

CPC分类号： H01L41/0966 ,  B82Y35/00 ,  G01Q10/045 ,  G01Q60/16 ,  G11B9/14 ,  G11B9/1418 ,  G11B9/1436 ,  G11B9/1472 ,  H01J37/20 ,  H01L41/316 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/837 ,  Y10S977/861 ,  Y10S977/872 ,  Y10S977/873 ,  Y10S977/943 ,  Y10S977/947 ,  Y10T29/42

摘要： A integrated mass memory device is formed by combining a piezoelectric bimorph cantilever (214) with a recording surface (212) having a number of storage locations to and from which digital information is transferred using a scanning tunneling microscope or an atomic force microscope mode of operation. Controls circuits (240) are provided for controlling the scanning of the recording surface (212) and for writing and reading information into and from the recording surface. An image storage system stores images captured from an optical sensor using piezoelectric bimorph cantilevers for reading and writing digital information on recording surfaces.

摘要翻译： PCT No.PCT / US89 / 00277 Sec。 371日期1990年8月17日第 102（e）日期1990年8月17日PCT 1989年1月27日提交PCT。通过将压电双晶片悬臂（214）与具有多个存储位置的记录表面（212）组合而形成集成的大容量存储器件 使用扫描隧道显微镜或原子力显微镜操作模式传送数字信息。 控制电路（240）被设置用于控制记录表面（212）的扫描并且用于将信息写入记录表面和从记录表面读取信息。 图像存储系统存储使用压电双压电晶片悬臂的从光学传感器捕获的图像，用于在记录表面上读写数字信息。

公开(公告)号：US4908519A

公开(公告)日：1990-03-13

申请号：US256352

申请日：1988-10-11

申请人： Sang-il Park ,  Calvin F. Quate

发明人： Sang-il Park ,  Calvin F. Quate

IPC分类号： G01Q30/18 ,  G01Q30/20 ,  G01Q60/00 ,  H01J37/20

CPC分类号： G01Q30/18 ,  B82Y35/00 ,  H01J37/20 ,  Y10S977/86

摘要： A sample and selective support structure mounted on a platform in a scanning tunneling microscope includes a double spring support with the springs overlapped to reduce overall length of the support. In a preferred embodiment, a rigid support structure supports a first platform. A second platform is positioned around and spaced from the first platform and includes a plurality of support members extending therefrom. A first set of springs is attached to the rigid support structure and to the second platform for supporting the second platform, and a second set of springs is attached to the second platform and to the first platform for supporting the first platform. By attaching the second set of springs to the rigid members extending from the second platform, the first and second sets of springs can be overlapped, thereby reducing the overall length of the spring support without reducing the effective length of the springs. A lock mechanism is provided for locking the first and second platforms when not in use, and includes a rod that engages holes in two members depending from the first and second platforms. The lock mechanism further includes first and second rigid arms pivotally attached to the rod and supported whereby the rigid arms extend from and retract to the rod when the rod is translated. When the rigid arms are extended from the rod, the arms engage lock mechanisms depending from the first platform, thereby achieving a rigid lock in six axes of motion.

摘要翻译： 在扫描隧道显微镜中安装在平台上的样品和选择性支撑结构包括双弹簧支撑件，弹簧重叠以减少支撑件的总长度。 在优选实施例中，刚性支撑结构支撑第一平台。 第二平台定位在第一平台周围并与第一平台间隔开并包括从其延伸的多个支撑构件。 第一组弹簧附接到刚性支撑结构和第二平台以支撑第二平台，并且第二组弹簧附接到第二平台和第一平台以支撑第一平台。 通过将第二组弹簧连接到从第二平台延伸的刚性构件，第一组弹簧和第二组弹簧可以重叠，从而在不减少弹簧的有效长度的情况下减小弹簧支撑件的总长度。 提供了一种用于在不使用时锁定第一和第二平台的锁定机构，并且包括杆，该杆与第一和第二平台相对应地接合两个构件中的孔。 锁定机构还包括枢转地附接到杆并被支撑的第一和第二刚性臂，由此当杆被平移时，刚性臂从杆延伸并缩回到杆。 当刚性臂从杆延伸时，臂接合从第一平台垂下的锁定机构，从而实现六个运动轴的刚性锁定。