Pressure-type flow rate control apparatus
    51.
    发明授权
    Pressure-type flow rate control apparatus 有权
    压力式流量控制装置

    公开(公告)号:US06964279B2

    公开(公告)日:2005-11-15

    申请号:US10469151

    申请日:2002-11-22

    摘要: A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by: Qc=KP2m(P1−P2)n so that the flow rate can be controlled to the target flow rate with high precision and speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1=r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value r, and under critical conditions (r≦rc), the flow rate is calculated by: Qc=KP1. Under non-critical conditions (r>rc), the flow rate is calculated by Qc=KP2m(P1−P2)n.

    摘要翻译: 压力式流量控制装置将通过孔口的流体的流量控制为目标流量。 通过孔口的非临界条件(亚音)的可压缩流体的流量通过以下公式计算:<?in-line-formula description =“In-line Formulas”end =“lead”?> Qc = KP (P 1→P 2) -formulae description =“在线公式”end =“tail”?>,可以以高精度和高速度将流量控制在目标流量上。 还提供了一种改进的压力型流量控制装置,其中从上游压力P 1获得的压力比P 2 / P 1 / / SUB>和下游压力P 2 2不断与临界值r进行比较,在临界条件(r≤Rc c)下,流量由下式计算: :<?in-line-formula description =“In-line Formulas”end =“lead”?> Qc = KP <1> <?in-line-formula description =“In-line Formulas” end =“tail”?>在非关键条件下(r> r> c ),流量通过Qc = KP 2 / (P 1→P 2)

    Long life welding electrode and its fixing structure, welding head and welding method
    56.
    发明授权
    Long life welding electrode and its fixing structure, welding head and welding method 失效
    长寿命焊接电极及其固定结构,焊头和焊接方法

    公开(公告)号:US06462298B1

    公开(公告)日:2002-10-08

    申请号:US09045526

    申请日:1998-03-20

    IPC分类号: B23K3538

    摘要: The present invention provides a fixing structure for a welding electrode and a welding head which enable improvement of durability of a welding electrode, improvement of work efficiency in welding, and reduction of time required for welding and also which make it possible to execute welding for a long time with high reliability. In this fixing structure, a fixed section of a welding electrode is inserted via a thermally conductive material into an inserting section of a fixing base and a peripheral surface of the fixed section of the welding electrode is uniformly contacted to the fixing base to fix the welding electrode to the fixing base.

    摘要翻译: 本发明提供一种焊接电极和焊接头的固定结构,其能够提高焊接电极的耐久性,提高焊接中的工作效率,并且减少焊接所需的时间,并且还可以执行焊接 长时间具有高可靠性。在该固定结构中,焊接电极的固定部分通过导热材料插入到固定基座的插入部分中,焊接电极的固定部分的周面与 固定基座,将焊接电极固定在固定基座上。

    Welding method for fluorine-passivated member for welding, fluorine-passivation method after being weld, and welded parts
    58.
    发明授权
    Welding method for fluorine-passivated member for welding, fluorine-passivation method after being weld, and welded parts 有权
    用于焊接的氟钝化部件的焊接方法,焊接后的氟钝化方法以及焊接部件

    公开(公告)号:US06220500B1

    公开(公告)日:2001-04-24

    申请号:US09130583

    申请日:1998-08-07

    IPC分类号: B23K120

    摘要: A welding method for materials to be welded which are subjected to fluoride passivation treatment, and a fluoride passivation retreatment method, wherein, when fluoride passivation retreatment is conducted after welding, there is no generation of particles or dust. The method provides superior resistance to fluorine system gases. During fluoride passivation treatment, hydrogen is added to the gas (the back shield gas) flowing through the materials to be welded. In one embodiment of the welding method, the thickness of the fluoride passivated film in a predetermined range from the butt end surfaces of the materials to be welded is set to 10 nm or less, followed by subsequent welding. Furthermore, the fluoride passivation retreatment method, includes the steps of heating at least the welded parts following welding and flowing a gas containing fluorine gas in the interior portion of the parts.

    摘要翻译: 对经过氟化物钝化处理的待焊接材料的焊接方法以及氟化物钝化再处理方法,其中,在焊接后进行氟化物钝化再处理时,不产生颗粒或灰尘。 该方法提供了优异的耐氟体系气体阻力。 在氟化物钝化处理期间,将氢气流入待焊接材料的气体(背面保护气体)。 在焊接方法的一个实施例中,氟化钝化膜在待焊接材料的对接端面的预定范围内的厚度设定为10nm以下,随后进行焊接。 此外,氟化物钝化再处理方法包括以下步骤:至少在焊接之后加热焊接部分,并且在部件的内部部分使含有氟气的气体流动。

    Susceptor for vapor-phase growth apparatus
    59.
    发明授权
    Susceptor for vapor-phase growth apparatus 失效
    气相生长装置的受体

    公开(公告)号:US6129047A

    公开(公告)日:2000-10-10

    申请号:US122803

    申请日:1998-07-27

    申请人: Osamu Nakamura

    发明人: Osamu Nakamura

    摘要: It was an objective of the present invention to provide a susceptor which can prevent a increasing phenomenon of the dopant concentration of the epitaxial layer at the peripheral portion of the wafer. By providing a through-hole 7 passing through to a rear side at the outer peripheral side of the wafer inside the wafer pocket 6, a down flow of a reacting source gas from the upper surface of the susceptor 5 is formed, so that the unwanted flow of the dopant species being exhausted at the rear surface onto the wafer surface can be avoided. As a result, a raise in the dopant concentration at the outer peripheral portion of the epitaxial layer 9 can be controlled.

    摘要翻译: 本发明的目的是提供一种能够防止外延层在晶片周边部分的掺杂剂浓度增加的感受体。 通过在晶片槽6内的晶片的外周侧设置贯通贯通的贯通孔7,形成来自基座5的上表面的反应源气体的向下流动, 可以避免在后表面被排出到晶片表面上的掺杂剂物质的流动。 结果,可以控制在外延层9的外周部分的掺杂剂浓度的升高。