Optical semiconductor integrated circuit device
    52.
    发明申请
    Optical semiconductor integrated circuit device 审中-公开
    光半导体集成电路器件

    公开(公告)号:US20050218469A1

    公开(公告)日:2005-10-06

    申请号:US11086998

    申请日:2005-03-23

    IPC分类号: H01L27/14 H01L31/105

    摘要: Disclosed is an optical semiconductor integrated circuit device, in which an opening portion is formed in an insulating layer, which is formed in a light receiving region of a photodiode, and the insulating layer is covered with a refractory metal layer as a light shadowing film. As result, since the refractory metal layer has an excellent step coverage, the refractory metal layer is not broken by a step of the opening portion located on an upper plane of a region where the photodiode is formed. Accordingly, a problem that the light shadowing film is broken when Al is used as the light shadowing film is solved.

    摘要翻译: 公开了一种光学半导体集成电路器件,其中在绝缘层中形成开口部分,该绝缘层形成在光电二极管的光接收区域中,绝缘层被作为遮光膜的难熔金属层覆盖。 结果,由于难熔金属层具有优异的台阶覆盖率,难熔金属层不会被位于形成光电二极管的区域的上平面上的开口部分的台阶破坏。 因此,解决了当使用Al作为遮光膜时遮光膜破裂的问题。

    Falling sensor and the information processing device making use of it
    56.
    发明授权
    Falling sensor and the information processing device making use of it 失效
    落下的传感器和使用它的信息处理设备

    公开(公告)号:US06771449B1

    公开(公告)日:2004-08-03

    申请号:US09694372

    申请日:2000-10-24

    IPC分类号: G11B2102

    摘要: A falling sensor is provided, which detects a falling of a magnetic disk drive or a information processing device installed with the magnetic disk drive and which is effective for avoiding physical damage of magnetic heads and magnetic disk media. The magnetic disk drive or the information processing device, include an unload mechanism moving or evacuating the magnetic head from a surface of the magnetic disk media, and a falling sensor comprising a conductive flexible beam or member having a compatible function, a conductive weight supported by these beams and a conductive wall arranged to be made in contact or non-contact with the weight. The sensor can detect a falling of the magnetic disk drive or the information processing device, which is typically a notebook personal computer installed with the magnetic disk drive, and evacuate the magnetic head by the unload mechanism. The conductive wall can be formed of a tubular member.

    摘要翻译: 提供了一种下降的传感器,其检测磁盘驱动器或安装有磁盘驱动器的信息处理装置的下降,并且其有效地避免磁头和磁盘介质的物理损坏。 磁盘驱动器或信息处理装置包括从磁盘介质的表面移动或抽出磁头的卸载机构,以及包括具有兼容功能的导电柔性梁或构件的下落传感器,由 这些梁和导电壁布置成与重物接触或不接触。 该传感器可以检测磁盘驱动器或信息处理装置的下落,该装置通常是安装有磁盘驱动器的笔记本个人计算机,并通过卸载机构排出磁头。 导电壁可以由管状构件形成。

    Laminated structure and a method of forming the same
    58.
    发明授权
    Laminated structure and a method of forming the same 失效
    叠层结构及其形成方法

    公开(公告)号:US06404021B1

    公开(公告)日:2002-06-11

    申请号:US09023712

    申请日:1998-02-13

    IPC分类号: H01L2976

    摘要: A method of forming a gate electrode of a multi-layer structure includes a step of supplying a processing gas for poly-crystal film formation and impurities of a P-type into a film formation device, to form a poly-crystal silicon layer doped with P-type impurities, on a surface of a gate film target, a step of maintaining the processing target in the film formation device to prevent formation of an oxide film might not be formed on the poly-crystal silicon layer, and a step of supplying a processing gas for tungsten silicide film formation and impurities of a P-type into the film formation device, to form a tungsten silicide layer doped with impurities of P-type impurities, on the poly-crystal silicon layer on which no oxide film is formed.

    摘要翻译: 形成多层结构的栅电极的方法包括:向成膜器件提供多晶硅膜形成处理气体和P型杂质的步骤,以形成掺杂有多晶硅层的多晶硅层 在栅极膜靶的表面上的P型杂质可能不会在多晶硅层上形成保持成膜装置中的处理对象以防止形成氧化膜的步骤, 用于形成钨硅化物膜的处理气体和P型杂质成膜装置,以在不形成氧化膜的多晶硅层上形成掺有P型杂质的杂质的硅化钨层 。

    Semiconductor integrated circuit and manufacturing method thereof
    59.
    发明授权
    Semiconductor integrated circuit and manufacturing method thereof 失效
    半导体集成电路及其制造方法

    公开(公告)号:US6110772A

    公开(公告)日:2000-08-29

    申请号:US16512

    申请日:1998-01-30

    摘要: A semiconductor IC including a resistance element on a circuit substrate. The resistance element includes a resistance layer formed on an insulating layer. The resistance layer is formed using a Si layer obtained by forming an a-Si layer, doping the a-Si layer with impurities, and heating the doped a-Si layer to diffuse the impurities while substantially preserving the fineness of the a-Si layer surface. Preferably, a SiN layer is provided lying beneath the resistance layer. A capacitor may be integrated on the same circuit substrate where the resistance element is formed. In this case, a lower electrode, a SiN dielectric layer, and an upper electrode are formed in this order to constitute a capacitor. The SiN dielectric layer of the capacitor is formed extending from a capacitor formation region to another region, so that the resistance layer of the resistance element is formed on the extending SiN dielectric layer. The lower and upper electrodes of the capacitor may be formed using an a-Si layer, similar to the resistance layer.

    摘要翻译: 一种在电路基板上包括电阻元件的半导体IC。 电阻元件包括形成在绝缘层上的电阻层。 电阻层使用通过形成a-Si层获得的Si层,用杂质掺杂a-Si层并加热掺杂的a-Si层以扩散杂质而形成,同时基本上保持a-Si层的细度 表面。 优选地,设置在电阻层下方的SiN层。 电容器可以集成在形成电阻元件的同一电路基板上。 在这种情况下,依次形成下电极,SiN电介质层和上电极,构成电容器。 电容器的SiN介质层形成为从电容器形成区域延伸到另一区域,使得电阻元件的电阻层形成在延伸的SiN电介质层上。 可以使用类似于电阻层的a-Si层来形成电容器的下电极和上电极。