公开(公告)号：US5920390A

公开(公告)日：1999-07-06

申请号：US882848

申请日：1997-06-26

申请人： Faramarz Farahi ,  Mohammad Yasin Akhtar Raja ,  Robert Splinter

发明人： Faramarz Farahi ,  Mohammad Yasin Akhtar Raja ,  Robert Splinter

IPC分类号： A61B5/00 ,  G01B9/02

CPC分类号： A61B5/0084 ,  A61B5/0086 ,  G01B9/02007 ,  G01B9/02088 ,  G01B9/02091 ,  A61B5/0066

摘要： The fiberoptic interferometer includes a broadband light source which is selected to illuminate tissue of predetermined organ with light having a wavelength within a predetermined range of wavelengths. Within the predetermined range of wavelengths, the attenuation characteristics of tissue of the predetermined organ define a region of minimum attenuation upon illumination with light having a first wavelength. As a result, the fiberoptic interferometer can precisely determine the optical properties of the tissue and can therefore identify the tissue by comparing the interferometric signal produced upon illumination of the tissue sample with predetermined interferometric signals corresponding to illumination of different types of tissue of the predetermined organ with light having the first wavelength. The fiberoptic interferometer can also include a light source which includes wavelength selection means for controllably selecting the predetermined wavelength of light emitted by the light source. Thus, the optical properties of the tissue can be analyzed at the different wavelengths emitted by the light source to individually determine the optimum wavelength of light for subsequent treatment of the tissue.

摘要翻译： 光纤干涉仪包括宽带光源，其被选择为用波长在预定波长范围内的光照射预定器官的组织。 在预定范围的波长范围内，预定器官的组织的衰减特性在具有第一波长的光照射时限定最小衰减的区域。 因此，光纤干涉仪可以精确地确定组织的光学特性，因此可以通过将组织样本的照射产生的干涉信号与预定的器官的不同类型的组织的照明相对应的预定干涉信号进行比较来识别组织 具有第一波长的光。 光纤干涉仪还可以包括光源，其包括用于可控地选择由光源发射的光的预定波长的波长选择装置。 因此，可以在由光源发射的不同波长处分析组织的光学性质，以分别确定光的最佳波长以用于随后的组织处理。

公开(公告)号：US11906302B2

公开(公告)日：2024-02-20

申请号：US18302151

申请日：2023-04-18

申请人： UNITY SEMICONDUCTOR

发明人： Jean-François Boulanger ,  Isabelle Bergoënd

IPC分类号： G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC分类号： G01B9/0209 ,  G01B9/02083 ,  G01B9/02088 ,  G01B11/0625 ,  G01B2210/56

摘要： A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, the method including: - acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module: classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signals to derive information on the structure at the measurement points, as a function of the class of each interferometric signal.

公开(公告)号：US20170241764A1

公开(公告)日：2017-08-24

申请号：US14980215

申请日：2015-12-28

申请人： KLA-Tencor Corporation

发明人： Helen Liu ,  Xuan Zhao ,  Xiaowei Li

IPC分类号： G01B9/02 ,  G01B11/06

CPC分类号： G01B9/02083 ,  G01B9/02078 ,  G01B9/02088 ,  G01B11/0608 ,  G01B11/2441 ,  G01B2210/56

摘要： A wafer metrology system includes an interferometer sub-system and a controller. The interferometer sub-system is configured to generate an interferogram with an intensity map that corresponds to a modulated representation of a wafer surface. Further, the interferometer sub-system includes a detector configured to capture the interferogram. The controller includes one or more processors configured to generate a wrapped phase map of the interferogram, define patterns associated with features on the wafer, and correct phase discontinuities by applying a phase unwrapping procedure to the wrapped phase map to generate an unwrapped phase map and correcting phase discontinuities in the unwrapped phase map based on the patterns, or by combining phase unwrapping and correction in a unified step. Further, the patterns comprise two or more structures such that a portion of the unwrapped phase map associated with structures of the same type is continuous across borders separating structures of the same type.

公开(公告)号：US09471277B2

公开(公告)日：2016-10-18

申请号：US14122228

申请日：2012-04-25

申请人： Yoshiaki Yasuno ,  Lian Duan ,  Masahide Ito

发明人： Yoshiaki Yasuno ,  Lian Duan ,  Masahide Ito

IPC分类号： G01B9/02 ,  G06F7/483 ,  A61B5/00 ,  G01N21/27 ,  G01N21/47 ,  A61B3/10

CPC分类号： G06F7/483 ,  A61B3/102 ,  A61B5/0066 ,  A61B5/7203 ,  G01B9/02011 ,  G01B9/02027 ,  G01B9/02044 ,  G01B9/0207 ,  G01B9/02088 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/274 ,  G01N21/4795

摘要： Data measured by PS-OCT is corrected in a non-linear manner to enhance the quantitative analysis capability of PS-OCT and permit accurate quantitative diagnosis, including diagnosis of disease stage of lesions, as a useful means for computer diagnosis. Even when retardation per PS-OCT 1 contains error and becomes noise and its distribution is not normal or symmetrical around the true value, measured data is converted using a distribution conversion function obtained by analyzing the characteristics of noise via Monte Carlo simulation to remove the systematic error and estimate the true value otherwise buried in noise and thereby correct the PS-OCT 1 image more clearly.

摘要翻译： 通过PS-OCT测量的数据以非线性方式进行校正，以增强PS-OCT的定量分析能力，并允许准确的定量诊断，包括诊断病变的疾病阶段，作为计算机诊断的有用手段。 即使每PS-OCT1的延迟包含误差并且成为噪声，并且其分布在真实值附近不是正态或对称的，所以使用通过蒙特卡罗模拟分析噪声特征而获得的分布转换函数来转换测量数据，以去除系统 误差并估计其它的噪声中的真值，从而更清楚地校正PS-OCT 1图像。

公开(公告)号：US20150160124A1

公开(公告)日：2015-06-11

申请号：US14097246

申请日：2013-12-05

申请人： NATIONAL TAIWAN UNIVERSITY

发明人： Tuan-Shu HO ,  Chien-Chung TSAI ,  Kuang-Yu HSU ,  Sheng-Lung HUANG

IPC分类号： G01N21/27 ,  G01B11/06 ,  G01B9/02

CPC分类号： G01B9/02091 ,  G01B9/02044 ,  G01B9/02088 ,  G01B11/0675 ,  G01N21/4795

摘要： A method for measuring characteristics of a sample is provided. The method includes the following steps: obtaining an interference spectrum of the sample; transforming the interference spectrum into a temporal interference signal via a Fourier transform, in which the temporal interference signal includes a plurality of coherence wave packets; separating the wave packets; transforming the wave packets into a plurality of interface interference signals via an inverse Fourier transform; and fitting a plurality of factors of the interface interference signals into a model for obtaining the refractive indexes, the extinction coefficients, and a thickness of the sample.

摘要翻译： 提供了一种用于测量样品特性的方法。 该方法包括以下步骤：获得样品的干涉光谱; 通过傅里叶变换将干扰频谱变换为时间干扰信号，其中时间干扰信号包括多个相干波分组; 分离波包; 通过逆傅里叶变换将波分组变换成多个接口干扰信号; 并将接口干扰信号的多个因素拟合成用于获得折射率，消光系数和样品厚度的模型。

公开(公告)号：US20130235385A1

公开(公告)日：2013-09-12

申请号：US13762447

申请日：2013-02-08

申请人： CANON KABUSHIKI KAISHA

发明人： Masaki NAKAJIMA

IPC分类号： G01B11/24

CPC分类号： G01B11/2441 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02071 ,  G01B9/02088

摘要： A method of measuring a surface shape of a target object by irradiating a target object and a reference surface with coherent light while changing a frequency of the coherent light includes: setting a rate of changing the frequency of the coherent light based on at least one of first information of a contour of an image of the target object projected onto a surface perpendicular to an optical axis of a measurement light and known second information of the surface shape; obtaining, by an image sensor, a plurality of images of interference fringes while changing the frequency of the coherent light with which the target object and the reference surface are irradiated at the set rate; and obtaining the surface shape based on the obtained plurality of images.

摘要翻译： 通过在改变相干光的频率的同时照射目标物体和具有相干光的参考表面来测量目标物体的表面形状的方法包括：基于以下中的至少一个来设置改变相干光的频率的速率： 投射到与测量光的光轴垂直的表面上的目标物体的图像的轮廓的第一信息和已知的表面形状的第二信息; 通过图像传感器获得干涉条纹的多个图像，同时以设定速率改变目标对象和参考表面照射的相干光的频率; 并且基于获得的多个图像获得表面形状。

公开(公告)号：US07823782B2

公开(公告)日：2010-11-02

申请号：US12085423

申请日：2006-11-22

申请人： Toyohiko Yatagai ,  Yoshiaki Yasuno ,  Masami Tamura

发明人： Toyohiko Yatagai ,  Yoshiaki Yasuno ,  Masami Tamura

IPC分类号： G06K7/10

CPC分类号： G01N21/4795 ,  A61B5/0062 ,  A61B5/0066 ,  A61B5/0088 ,  A61B5/7257 ,  A61C13/0004 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0205 ,  G01B9/02088 ,  G01B9/02091 ,  G01B11/2441 ,  G01B2290/70

摘要： A dental optical coherence tomography apparatus for measuring tissue in a stomatognathic region of a living body or an artificial composition in the stomatognathic region as a measured object includes: a variable wavelength light source (15); a light splitting portion (19) that splits light-source light emitted from the variable wavelength light source (15) into reference light (29) and measuring light (28); an interference portion (19) that causes the measuring light (28) and the reference light (29) to interfere with each other, thereby generating interference light; a photodetection portion (41) that measures the interference light; and an arithmetic portion (27b) that generates an image of a measured object (22) by Fourier transforming or inverse Fourier transforming the intensity of the interference light, whose wavelength changes with time, that has been detected by the photodetection portion for each of the wavelengths. Accordingly, an optical coherence tomography apparatus applicable to dental measurement can be provided.

摘要翻译： 一种用于测量作为测量对象的口腔身体区域中的生物体的口腔特征区域中的组织或人造组合物的牙科用光学相干断层摄影装置，包括：可变波长光源（15）; 将从所述可变波长光源（15）发射的光源光分解为参考光（29）和测量光（28）的光分离部（19）; 使测量光（28）和参考光（29）彼此干涉的干涉部分（19），从而产生干涉光; 测量干涉光的光电检测部分（41）; 以及算术部（27b），其通过傅里叶变换或傅立叶逆变换波长随时间变化的波长随时间变化的干涉光的强度来生成测量对象（22）的图像，所述干涉光的强度由光电检测部分检测到 波长。 因此，可以提供适用于牙齿测量的光学相干断层摄影装置。

公开(公告)号：US20100265516A1

公开(公告)日：2010-10-21

申请号：US12701690

申请日：2010-02-08

申请人： Peter De Groot ,  Michael J. Darwin ,  Robert Stoner ,  Gregg M. Gallatin ,  Xavier Colonna De Lega

发明人： Peter De Groot ,  Michael J. Darwin ,  Robert Stoner ,  Gregg M. Gallatin ,  Xavier Colonna De Lega

IPC分类号： G01B11/02

CPC分类号： G01B11/0675 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G03F7/70625

摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.

摘要翻译： 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

公开(公告)号：US20090147268A1

公开(公告)日：2009-06-11

申请号：US12248613

申请日：2008-10-09

申请人： Peter De Groot

发明人： Peter De Groot

IPC分类号： G01B9/023 ,  G01B11/24 ,  G06F15/00

CPC分类号： G01B9/02088 ,  G01B9/02084 ,  G01B9/0209 ,  G01B2210/56

摘要： In certain aspects, disclosed methods include directing test light reflected from an object to form an image of the object on a detector, where the object includes a diffractive structure. The test light at the detector includes both specularly and non-specularly reflected light from the diffractive structure, and the diffractive structure is under-resolved in the image. The method further includes directing reference light to interfere with the test light at the detector where the reference and test light being derived from a common source, varying an optical path length difference between the test and reference light, acquiring an interference signal from the detector while varying the optical path length difference, and determining information about the diffractive structure based on the interference signal and on predetermined information derived from a mathematical model of light reflection from a model diffractive structure.

摘要翻译： 在某些方面，所公开的方法包括引导从物体反射的测试光，以在检测器上形成物体的图像，其中对象包括衍射结构。 检测器上的测试光包括来自衍射结构的镜面反射光和非镜面反射光，并且衍射结构在图像中未被分解。 该方法还包括引导参考光干涉检测器处的​​测试光，其中参考和测试光源从公共源导出，改变测试和参考光之间的光程长度差异，从检测器获取干扰信号，同时 改变光路长度差，以及基于干涉信号确定关于衍射结构的信息，以及根据从模型衍射结构的光反射的数学模型导出的预定信息。

公开(公告)号：US20090015844A1

公开(公告)日：2009-01-15

申请号：US12173972

申请日：2008-07-16

申请人： PETER J. DE GROOT

发明人： PETER J. DE GROOT

IPC分类号： G01B11/00

CPC分类号： G01B9/0201 ,  G01B9/02043 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211 ,  G01N21/8422 ,  G01N21/9501

摘要： A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

摘要翻译： 一种方法，包括：对在测试对象上出现的角度范围内的测试光进行成像，以干涉检测器上的参考光，其中测试和参考光源自公共源; 对于每个角度，同时改变与测试光和参考光的干涉部分之间的光源与检测器之间的光程长度差，其速率取决于测试光从测试对象出射的角度; 并且基于作为光路长度差的测试参考光之间的干涉测定被测物体的光学特性的角度依赖性，对于每个角度而变化。