公开(公告)号：US20120281224A1

公开(公告)日：2012-11-08

申请号：US13551348

申请日：2012-07-17

Applicant: Adam Wax ,  John W. Pyhtila

Inventor： Adam Wax ,  John W. Pyhtila

IPC: G01J3/45 ,  G01B11/22 ,  G01B9/02

CPC classification number: G01J3/4412 ,  A61B5/0066 ,  A61B5/0075 ,  A61B5/0084 ,  A61B5/7257 ,  G01B9/02044 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01J3/4531 ,  G01N21/31 ,  G01N21/4795 ,  G01N2021/4704 ,  G01N2021/4709 ,  G01N2021/4735 ,  G01N2201/08

Abstract: Fourier domain a/LCI (faLCI) system and method which enables in vivo data acquisition at rapid rates using a single scan. Angle-resolved and depth resolved spectra information is obtained with one scan. The reference arm can remain fixed with respect to the sample due to only one scan required. A reference signal and a reflected sample signal are cross-correlated and dispersed at a multitude of reflected angles off of the sample, thereby representing reflections from a multitude of points on the sample at the same time in parallel. Information about all depths of the sample at each of the multitude of different points on the sample can be obtained with one scan on the order of approximately 40 milliseconds. From the spatial, cross-correlated reference signal, structural (size) information can also be obtained using techniques that allow size information of scatterers to be obtained from angle-resolved data.

Abstract translation: 傅里叶域a / LCI（faLCI）系统和方法，使用单次扫描能够以快速的速率进行体内数据采集。 通过一次扫描获得角度分辨和深度解析的光谱信息。 由于仅需要一次扫描，参考臂可以相对于样品保持固定。 参考信号和反射的采样信号以相对于样本的多个反射角度相互相关并分散，从而同时并行地表示来自样品上的多个点的反射。 可以通过大约40毫秒量级的一次扫描获得关于样本上多个不同点的每个样本的所有深度的信息。 从空间相互关联的参考信号，也可以使用允许从角度分辨数据获得散射体的尺寸信息的技术来获得结构（尺寸）信息。

公开(公告)号：US08294903B2

公开(公告)日：2012-10-23

申请号：US12864760

申请日：2009-09-29

Applicant: Hirotoshi Oikaze ,  Takashi Urashima

Inventor： Hirotoshi Oikaze ,  Takashi Urashima

IPC: G01B11/02

CPC classification number: G01B11/2441 ,  G01B9/02007 ,  G01B9/02069 ,  G01B9/02083 ,  G01B9/0209 ,  G01J2009/0234

Abstract: The measurement accuracy of an apparatus for measuring the surface shape of an object utilizing a two-wavelength phase-shift interferometry is improved. A low-coherence light source, a plurality of wavelength filters with different transmission wavelengths, an angle control unit and an analysis unit are provided. When performing a two-wavelength phase shift method, the analysis unit detects the wavelength difference between two wavelengths, and corrects a calculated wavelength value and a calculated phase value of one of the wavelengths for preventing a fringe-order calculation error. Next, the angle of the wavelength filters is controlled for making the actual wavelength difference coincident with a designed value. Thus, the wavelength difference between the two wavelengths is continuously controlled to be constant, which enables measurements of surface shapes with high accuracy, even when there are wavelength fluctuations due to the temperature change or the time elapse.

Abstract translation: 提高了利用双波长相移干涉法测量物体的表面形状的装置的测量精度。 提供了低相干光源，具有不同透射波长的多个波长滤光器，角度控制单元和分析单元。 当执行双波长相移方法时，分析单元检测两个波长之间的波长差，并校正计算的波长值和计算出的波长之一的相位值，以防止边缘阶计算误差。 接下来，控制波长滤波器的角度，使实际波长差与设计值一致。 因此，即使当由于温度变化或时间经过而导致波长波动时，两个波长之间的波长差被连续地控制为恒定，这使得能够高精度地测量表面形状。

公开(公告)号：US08279446B2

公开(公告)日：2012-10-02

申请号：US13185554

申请日：2011-07-19

Applicant: Filipp V Ignatovich ,  Todd Blalock

Inventor： Filipp V Ignatovich ,  Todd Blalock

IPC: G01B9/02

CPC classification number: G01B9/02027 ,  G01B9/02007 ,  G01B9/0209 ,  G01B2290/70

Abstract: An apparatus for measuring a layered object comprising a low coherence light source, a coherent light source, and an interferometer including a reference arm and a measurement arm. The reference arm is comprised of a first section of polarization maintaining optical fiber engaged with a first fiber stretcher. The measurement arm is comprised of a second section of polarization maintaining optical fiber engaged with a second fiber stretcher. The first and second fiber stretchers are driven so as to alternatingly vary the lengths of the first section of polarization maintaining optical fiber and the second section of polarization maintaining optical fiber, thereby causing interference signals with the low coherence light when the length of the reference arm is equal to the length of the measurement arm including the distance from the second section of polarization maintaining optical fiber to any of the surfaces of the layers of the object.

Abstract translation: 一种用于测量分层物体的装置，包括低相干光源，相干光源和包括参考臂和测量臂的干涉仪。 参考臂包括与第一纤维担架接合的第一部分偏振保持光纤。 测量臂由与第二纤维担架接合的第二部分偏振保持光纤组成。 驱动第一和第二光纤拉伸器，以便交替地改变偏振保持光纤的第一部分的长度和偏振保持光纤的第二部分，从而当参考臂的长度产生具有低相干光的干涉信号 等于测量臂的长度，包括从第二部分的偏振保持光纤到物体的各层的任何表面的距离。

公开(公告)号：US08248617B2

公开(公告)日：2012-08-21

申请号：US12427079

申请日：2009-04-21

Applicant: Peter De Groot ,  Jan Liesener ,  Xavier Colonna De Lega

Inventor： Peter De Groot ,  Jan Liesener ,  Xavier Colonna De Lega

IPC: G01B11/02

CPC classification number: G01B9/02084 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/95607 ,  G03F7/70633 ,  Y10T29/49004

Abstract: In general, in a first aspect, the invention features a system including an interferometer configured to direct test light to an overlay target and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source, a multi-element detector, one or more optics to image the overlay target on the multi-element detector; and an electronic processor in communication with the multi-element detector. The overlay target includes a first pattern and a second pattern and the electronic processor is configured to determine information about the relative alignment between the first and second patterns.

Abstract translation: 通常，在第一方面，本发明的特征在于一种包括干涉仪的系统，该干涉仪被配置为将测试光引导到覆盖目标，并随后将其与参考光组合以形成干涉图案，测试和参考光源自公共源， 多元素检测器，用于对多元件检测器上的覆盖目标进行成像的一个或多个光学元件; 以及与多元件检测器通信的电子处理器。 覆盖目标包括第一图案和第二图案，并且电子处理器被配置为确定关于第一图案和第二图案之间的相对对准的信息。

公开(公告)号：US08248593B2

公开(公告)日：2012-08-21

申请号：US12742802

申请日：2008-11-11

Applicant: Toyohiko Yamauchi ,  Hidenao Iwai

Inventor： Toyohiko Yamauchi ,  Hidenao Iwai

IPC: G01N21/00

CPC classification number: G01B9/0209 ,  G01B9/02071 ,  G01B11/2441 ,  G01B2290/60 ,  G02B27/1006 ,  G02B27/14 ,  G02B27/144

Abstract: An interference measuring device comprises light sources lenses, an aperture, an optical multiplexer, an optical branching filter, a half mirror, an imaging unit, an analyzing unit, a light receiving unit, a displacement detecting unit, a piezoelectric actuator, a drive unit, a mirror, a stage, a drive unit, and a control unit. According to a result of optical path length difference detection by the displacement detecting unit, the control unit controls optical path length difference adjusting operations by the piezoelectric actuator and stage through the drive units such that the optical path length difference becomes a plurality of target values in sequence. The control unit subjects the moving operation by the piezoelectric actuator to a feedback control such that the optical path length difference becomes each of the target values upon the moving operation by the stage as well.

Abstract translation: 干涉测量装置包括光源透镜，光圈，光复用器，光分路滤波器，半反射镜，成像单元，分析单元，光接收单元，位移检测单元，压电致动器，驱动单元 ，镜子，舞台，驱动单元和控制单元。 根据由位移检测单元的光程长度差检测的结果，控制单元通过驱动单元控制压电致动器和载物台的光程长度差调整操作，使得光路长度差成为多个目标值 序列。 控制单元通过压电致动器对移动操作进行反馈控制，使得在步骤的移动操作时光路长度差变为每个目标值。

公开(公告)号：US20120176625A1

公开(公告)日：2012-07-12

申请号：US13386485

申请日：2010-07-20

Applicant: Jonathan Mark Huntley ,  Pablo Daniel Ruiz ,  Taufiq Widjanarko

Inventor： Jonathan Mark Huntley ,  Pablo Daniel Ruiz ,  Taufiq Widjanarko

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02008 ,  G01B9/02044 ,  G01B9/0209 ,  G01B2290/25

Abstract: An apparatus for the absolute measurement of a two dimensional optical path distribution comprising: a light source (4) for illuminating an object (26) with light having a plurality of wavelengths: an interferometer (12) for forming an image of at least part of the object, which image comprises a broad band interferogram; a hyperspectral imager (30) in optical communication with the interferometer for spectrally separating the broad band interferogram into a plurality of narrow band two dimensional interferograms (72, 74, 76); a register (38) for spatially registering the narrow band interferograms; an extractor for extracting one dimensional intensity signals from corresponding pixels in each narrow band interferogram; and a calculator (100) for calculating the frequency for each point on the object from a one dimensional intensity signal associated with that point.

Abstract translation: 一种用于二维光路分布的绝对测量的装置，包括：用于用具有多个波长的光照射物体的光源（4）;干涉仪（12），用于形成至少部分 该图像包括宽带干涉图; 与所述干涉仪光通信的高光谱成像器（30），用于将所述宽带干涉图分解成多个窄带二维干涉图（72,74,76）; 寄存器（38），用于空间对准窄带干涉图; 提取器，用于从每个窄带干涉图中的相应像素提取一维强度信号; 以及计算器（100），用于从与该点相关联的一维强度信号计算物体上的每个点的频率。

公开(公告)号：US20120133951A1

公开(公告)日：2012-05-31

申请号：US13302675

申请日：2011-11-22

Applicant: Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

Inventor： Josef Heinisch ,  Stefan Krey ,  Eugen Dumitrescu ,  Aiko Ruprecht ,  Patrik Langehanenberg

IPC: G01B11/02

CPC classification number: G01B9/0209 ,  G01B9/02025 ,  G01B11/14 ,  G01B11/272 ,  G01M11/0221

Abstract: A method for measuring spacings between optical surfaces of a multi-lens optical system includes detecting the centring state of the optical system by taking into consideration all optical surfaces of the optical system. Then the optical system is adjusted in such a way, taking the centring state into consideration, that the optical axis of the optical system is aligned as far as possible with a reference axis. In a next step the spacings between the optical surfaces are determined with the aid of a short-coherence interferometer. The measuring-light ray directed onto the optical system for this purpose runs likewise along the reference axis.

Abstract translation: 用于测量多透镜光学系统的光学表面之间的间隔的方法包括通过考虑光学系统的所有光学表面来检测光学系统的对中状态。 然后，以考虑到定心状态的方式调整光学系统，使得光学系统的光轴尽可能与参考轴对准。 在下一步骤中，借助于短相干干涉仪来确定光学表面之间的间距。 为此目的，指向光学系统的测量光线同样沿着参考轴线运行。

公开(公告)号：US20120084045A1

公开(公告)日：2012-04-05

申请号：US13248538

申请日：2011-09-29

Applicant: Chishio KOSHIMIZU ,  Jun YAMAWAKU ,  Tatsuo MATSUDO

Inventor： Chishio KOSHIMIZU ,  Jun YAMAWAKU ,  Tatsuo MATSUDO

IPC: G01K11/00

CPC classification number: G01K11/125 ,  G01B9/02021 ,  G01B9/02025 ,  G01B9/0209 ,  G01B11/0675

Abstract: Provided is a temperature measuring method which can accurately measure a temperature of an object to be measured compared to a conventional method, even if a thin film is formed on the object. The temperature measuring method includes: transmitting a light from a light source to a measurement point of an object to be measured, the object being a substrate on which a thin film is formed; measuring a first interference wave caused by a reflected light from a surface of the substrate, and a second interference wave caused by reflected lights from an interface between the substrate and the thin film and from a rear surface of the thin film; calculating an optical path length from the first interference wave to the second interference wave; calculating a film thickness of the thin film based on an intensity of the second interference wave; calculating an optical path difference between an optical path length of the substrate and the calculated optical path length, based on the calculated film thickness of the thin film; compensating for the optical path length from the first interference wave to the second interference wave based on the calculated optical path difference; and calculating a temperature of the object at the measurement point based on the compensated optical path length.

Abstract translation: 提供一种温度测量方法，即使在物体上形成薄膜，也可以与以往的方法相比，能够精确地测定被测量物体的温度。 温度测量方法包括：将来自光源的光传输到被测量物体的测量点，所述物体是其上形成有薄膜的基板; 测量由来自基板的表面的反射光引起的第一干涉波，以及由来自基板和薄膜之间的界面和薄膜的后表面的反射光引起的第二干涉波; 计算从第一干涉波到第二干涉波的光路长度; 基于第二干涉波的强度计算薄膜的膜厚; 基于计算出的薄膜的膜厚度，计算基板的光路长度与算出的光程长度之间的光程差; 基于计算的光程差补偿从第一干涉波到第二干涉波的光路长度; 以及基于补偿的光程长度计算测量点处的物体的温度。

公开(公告)号：US20120033229A1

公开(公告)日：2012-02-09

申请号：US13192595

申请日：2011-07-28

Applicant: Tomonori Goto ,  Jyota Miyakura

Inventor： Tomonori Goto ,  Jyota Miyakura

IPC: G01B11/24

CPC classification number: G01B9/02083 ,  G01B9/0207 ,  G01B9/0209 ,  G01B11/2441

Abstract: A shape measuring apparatus includes: an optical system configured to guide a light from a light source having a wideband spectrum to an object to be measured and a reference face; an imaging unit configured to image the interfering light intensity distribution image output from the optical system; an optical path length difference changing unit configured to change the optical path length difference; and an arithmetic processing unit configured to obtain the peak value of an interfering light intensity sequence indicating the change in the interfering light intensity due to the change in the optical path length difference at each measurement position of the interfering light intensity distribution images stored in the image storing unit, and configured to obtain the peak value as the position in the direction of the optical axis at each measurement position of the object to be measured.

Abstract translation: 一种形状测量装置，包括：光学系统，被配置为将来自具有宽带光谱的光源的光引导到待测量对象和参考面; 成像单元，被配置为对从所述光学系统输出的干涉光强度分布图像进行成像; 光路长度差改变单元，被配置为改变光程长度差; 以及算术处理单元，被配置为获得指示由于在存储在图像中的干涉光强度分布图像的每个测量位置处的光程长度差的变化引起的干扰光强度的变化的干扰光强度序列的峰值 并且被配置为获得峰值作为在待测量对象的每个测量位置处的光轴方向上的位置。

公开(公告)号：US20120013849A1

公开(公告)日：2012-01-19

申请号：US12835221

申请日：2010-07-13

Applicant: Adrian Podoleanu ,  Michael Leitner

Inventor： Adrian Podoleanu ,  Michael Leitner

IPC: A61B3/10 ,  G01B11/02

CPC classification number: G01B9/02057 ,  A61B3/1005 ,  A61B3/102 ,  G01B9/02004 ,  G01B9/02021 ,  G01B9/02044 ,  G01B9/02064 ,  G01B9/0209

Abstract: A spectral interferometry apparatus and method are disclosed, that can be used to monitor or measure an unknown length by following a characteristic of an indicating signal. The measurement is performed by adjusting an optical path difference (OPD) in an interferometer until sound or light or both are obtained with the desired strength and pitch. Embodiments are presented where the unknown length is the eye length. Sound of different pitches are produced by scanning the channeled spectrum output of an interferometer with the object returning at least one of the interferometer optical signals. The scanning is performed by reading the signal of an analogue photodetector array driven by a nonlinear clock or by tuning a low cost swept source using a distorted driving signal.

Abstract translation: 公开了一种光谱干涉测量装置和方法，其可以用于通过遵循指示信号的特性来监视或测量未知长度。 通过调整干涉仪中的光程差（OPD）来进行测量，直到以期望的强度和间距获得声音或光或者两者。 呈现其中未知长度是眼睛长度的实施例。 通过用对象返回干涉仪光信号中的至少一个来扫描干涉仪的信道频谱输出来产生不同音调的声音。 通过读取由非线性时钟驱动的模拟光电检测器阵列的信号或通过使用失真的驱动信号调谐低成本扫频源来执行扫描。