Abstract:
An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.
Abstract:
A defect inspection apparatus includes: stages each mounting an inspecting object on which a circuit pattern having a group of parallel lines is formed, and each running perpendicular or parallel to the group of lines; an illumination optical system which illuminating a surface of the inspecting object with a slit beam being slit light so that a longitudinal direction of the slit beam is substantially perpendicular to the running directions of the stages, and which has a first inclined angle formed by the direction of the group of lines and a projection line, of an optical axis of the slit beam, to the inspecting object; a spatial filter that shields or transmits reflected and scattered light of the inspecting object according to a difference in distribution of orientation; and a detection optical system that detects the reflected and scattered light transmitted through the spatial filter by image sensors. Moreover, the illumination optical system illuminates the inspecting object with another slit beam from a direction opposite to an incident direction of the slit beam on a plane.
Abstract:
Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatus includes unit for registering feature points of alignment marks formed on a surface of an inspected object, unit for collecting image data of the alignment marks formed on the surface of the inspected object and a data processor for extracting a feature point from the image data and calculating a correlation value of both feature points, and registers the image data of the alignment mark on the basis of a threshold value of the correlation value.
Abstract:
A binding device having a binding member that operates at a binding position of objects to be bound has a structure with which the bound objects do not readily come off. The binding device includes a board having a bearing plate. A spring member and an operation lever are attached to a shaft inserted in the bearing plate and a turned-up part. Protruding pieces of a binding member are inserted in through holes of turned-up parts formed in the board. One end of the spring member is secured to the operation lever, and the other end is fitted in a through hole of a turned portion at the distal end of the binding member. By closing the operation lever, the binding member rotates around a line connecting the protruding pieces at both ends, thereby pressing down sheets of paper placed on the board with a pressing portion. At this time, the other end of the spring member presses the turned portion, thereby biasing the pressing portion.
Abstract:
A semiconductor device (100) comprises a first resin substrate (101) on which a first semiconductor chip (125) is mounted a surface thereof; a second resin substrate (111) on which a second semiconductor chip (131) is mounted on a surface thereof; and a resin base material (109), joined to a front surface of the first resin substrate (101) and to a back surface of the second resin substrate (111), so that these surfaces are electrically connected. The resin base material (109) is disposed in a circumference of the first resin substrate (101) in the surface of the first resin substrate (101). Further, the first semiconductor chip (125) is disposed in a space section provided among the first resin substrate (101), the second resin substrate (111) and the resin base material (109) in the surface of the first resin substrate (101).
Abstract:
An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.
Abstract:
A method of operating an internal combustion engine having a combustion chamber with a piston and a spark plug, comprising during a first mode, bringing the temperature of the combustion chamber to auto-ignition temperature by adjusting engine operating conditions and producing auto-ignition in said combustion chamber without requiring spark from said spark plug; and during a second mode, bringing the temperature of the combustion chamber close to auto-ignition temperature by adjusting engine operating conditions, forming a small cloud of stratified air-fuel mixture near said spark plug, igniting said fuel cloud by a spark form said spark plug, and then causing cylinder pressure to rise, thereby producing auto-ignition at other sites in said combustion chamber wherein said first mode is implemented in a first operating range and said second mode is implemented only in a second operating range where engine speed and load are lower than said first operating range.
Abstract:
A video signal recording apparatus with a video and audio memorizing section for temporarily memorizing an inputted video audio signal, a time code generating section for generating a time-code of said video audio signal an auxiliary information memorizing section for temporarily memorizing auxiliary information appended to said video audio signal including said time code generating a regeneration value obtained from a time code to which one frame time is added to said recorded time code when a recording starts and correcting said regeneration value for an amount of delay corresponding to a storage volume temporarily memorized in said auxiliary information (time code, metadata, CUE audio signal, and the like) memorizing section and thus obtaining a corrected time code, and thereafter sequential time codes are generated from said corrected time code though said time code generating section.
Abstract:
In a refillable ink cartridge having an ink supply opening portion that is hermetically sealed with a sealing member, leakage of ink out of the cartridge due to a decrease in the sealing property of the sealing member is prevented. The sealing member, which is elastically deformable, is penetrated by a needle-shaped member when refilling the cartridge with ink via the ink supply opening portion. The ink supply opening portion is covered with a protection member including a projecting portion for hermetically sealing the ink supply opening portion outside the sealing member.
Abstract:
A binding device having a binding member that operates at a binding position of objects to be bound has a structure with which the bound objects do not readily come off. The binding device includes a board having a bearing plate. A spring member and an operation lever are attached to a shaft inserted in the bearing plate and a turned-up part. Protruding pieces of a binding member are inserted in through holes of turned-up parts formed in the board. One end of the spring member is secured to the operation lever, and the other end is fitted in a through hole of a turned portion at the distal end of the binding member. By closing the operation lever, the binding member rotates around a line connecting the protruding pieces at both ends, thereby pressing down sheets of paper placed on the board with a pressing portion. At this time, the other end of the spring member presses the turned portion, thereby biasing the pressing portion.