摘要:
The higher efficiency and lower power consumption are realized in a laser system for generating a high-power short-pulse laser beam. The laser system includes a laser oscillator for generating a pulse laser beam by laser oscillation, plural amplifiers for sequentially inputting the pulse laser beam generated by the laser oscillator and amplifying the pulse laser beam, and a control unit for controlling the laser oscillator to perform burst oscillation and halting an amplification operation of at least one of the plural amplifiers in a burst halt period between burst oscillation periods.
摘要:
A debris collector for EUV light generators is disclosed which enables to improve durabilities of optical units in a chamber including a collector mirror, to keep the vacuum degree in the chamber, and to suppress decrease in EUV light output by efficiently collecting debris bumping into the collector mirror at high speed from a target transformed into a plasma or debris adhering the collector mirror. A laser light irradiator (10) is so arranged that the irradiation direction of a laser light (L) is opposite to the traveling direction of a target (1). A debris collector (30) for collecting debris (3) is arranged in the travel path of the target (1).
摘要:
A semiconductor memory device formed on a semiconductor chip comprises a plurality of first memory arrays, a plurality of second memory arrays, a first voltage generator, and a plurality of first bonding pads. The semiconductor chip is divided into a first rectangle region, a second rectangle region, and a third rectangle region and the third rectangle region is arranged between the first rectangle region and the second rectangle region. The plurality of first memory arrays are formed in the first rectangle region. The plurality of second memory arrays are formed in the second rectangle region. The voltage generator and the plurality of first bonding pads are arranged in the third rectangle region. The plurality of first bonding pads are arranged between the first rectangle region and the voltage generator and no bonding pads are arranged between the voltage generator and the plurality of second memory arrays.
摘要:
A semiconductor memory device, in which peripheral circuits are arranged in a cross area of a semiconductor chip composed of the longitudinal center portions and the transverse center portions, and in which memory arrays are arranged in the four regions which are divided by the cross area. A benefit of this structure in which the peripheral circuits are arranged at the center portion of the chip, is that the longest signal transmission paths can be shortened to about one half of the chip size to speed up the DRAM which is intended to have a large storage capacity.
摘要:
Herein disclosed is a semiconductor memory device, in which peripheral circuits are arranged in a cross area of a semiconductor chip composed of the longitudinal center portions and the transverse center portions, and in which memory arrays are arranged in the four regions which are divided by the cross area. Thanks to this structure in which the peripheral circuits are arranged at the center portion of the chip, the longest signal transmission paths can be shortened to about one half of the chip size to speed up the DRAM which is intended to have a large storage capacity.
摘要:
An electric motor 10 for an electric power steering system, in which a board mounting portion 23 of aluminum for partitioning an electric motor body 10A and a circuit board 40 is formed all over the inner side of a motor case 20 and in which a bearing 25 of an output shaft 11 of the electric motor body 10A is supported on the board mounting portion 23 to release the heat effectively from FETs 43 mounted on the circuit board 40 and the output shaft 11. On the other hand, pigtail wires 36 from brushes 33 are welded to brush leads 27 having a wide surface area so that the circuit board 40 may be prevented from rising to a high temperature at the welding time. A torque limiter 80 is interposed between the output shaft 11 and a worm shaft 92 in a worm case 90 to reduce the size of the entire system, and the cogging of the motor torque is suppressed by correcting the feed current to the electric motor body 10A on the basis of the position changes in a plurality of slits 101 which are formed in the outer circumference of a case 81 of the torque limiter 80 and in phase with the electrodes of a commutator 35.
摘要:
A master radio-frequency signal output from a master oscillator is input to a frequency converter. The frequency converter generates and outputs a multiplied signal having a frequency higher than that of the master radio-frequency signal by using the master radio-frequency signal. A loss of light reciprocating in an optic resonator of a laser oscillator is controlled by both the master radio-frequency signal output from the master oscillator and the multiplied signal output from the frequency converter. It is possible to highly precisely synchronize a pulse laser beam and a radio-frequency signal.
摘要:
An arrangement of circuit casings and circuit boards in a motorized power steering device including a drive circuit casing, a control circuit casing and a gear casing connected to the drive circuit casing. The drive circuit casing includes a drive circuit board provided thereon with a drive circuit whereas the control circuit casing includes a control circuit board provided thereon with a control circuit for outputting a control signal to the drive circuit. An electric motor is attached to the drive circuit casing such that the drive circuit casing is interposed between the gear casing and the electric motor.
摘要:
A semiconductor memory device having wiring formed next to word lines at the extreme ends of the memory cell arrays or next to word lines of the dummy cell arrays, in order to prevent such word lines from breaking or from becoming deformed. The wiring is irrelevant to the circuit operation, but is provided with a fixed potential, and is formed through the steps of forming the word lines. The wiring makes the processing conditions applied to the neighboring word lines the same as the processing conditions applied to other word lines.
摘要:
An integrated multi-layered microwave circuit includes a substrate which is constituted by dielectric layers and conductive layers laminated alternately. The conductive layer disposed at one major surface of the substrate forms a micro strip line which constitutes an antenna portion. The conductive layer disposed at the other major surface of the substrate forms a circuit pattern including a grounding line and a power source line, and then the circuit pattern forms a communication portion together with discrete parts incorporated in the circuit pattern. One of the intermediate conductive layers of the substrate constitutes a grounding layer and the other thereof constitutes a power source layer. In the substrate, a feeding via hole, a via hole for a power source, and a grounding via hole are formed so as to penetrate the substrate. Conductors are formed on the inner walls of the substrate forming the feeding via hole, the via hole for the power source, and the grounding via hole by the plating technique, respectively, whereby the antenna portion, the power source layer and the grounding layer are electrically connected to the communication portion, the power source line and the grounding line, respectively. The antenna portion is provided with a feeding land connected to the conductors of the feeding via hole, three radiators each having a circular configuration formed by the micro strip line, and a phase shifter formed by the micro strip line for connecting the respective radiators to the feeding land.