摘要:
A positive photosensitive composition comprises: (A) a compound capable of generating an acid upon irradiation with actinic ray or radiation; and (B) a resin having a group capable of decomposing by action of an acid to increase solubility of the group in an alkali developer, wherein the resin (B) comprises: at least one methacrylate repeating unit; at least one acrylate repeating unit; and at least one repeating unit (Ba) having a diamantane structure.
摘要:
The invention provides a photosensitive composition for use in the production process of a semiconductor such as IC, in the production of a circuit substrate of liquid crystal, thermal head and the like or in other photofabrication processes, a pattern forming method using the photosensitive composition, and a specific organic acid, which are: a photosensitive composition comprising a compound having a proton acceptor functional group and producing a sulfonic acid group upon irradiation with actinic rays or radiation to reduce or lose the acceptor property or change the proton acceptor functional group to be acidic, or a compound capable of generating a specific organic acid upon irradiation with actinic rays or radiation; a pattern forming method using the photosensitive composition; and a specific organic acid.
摘要:
A resist composition comprises (A) a compound having a molecular weight of 3,000 or lower which has in its molecule a structure having two or more monovalent anions and a structure having two or more monovalent cations.
摘要:
A method for providing a layer by ink jetting, comprising: (a) discharging a first liquid insulating material of a first concentration on a surface of a first level so that a side of a first conductive layer placed on the surface is covered by the first insulating material; (b) providing a first insulating layer facing the first conductive layer by one of activating and drying the first insulating material that has been discharged; (c) discharging a second liquid insulating material of a second concentration on the first conductive layer and the first insulating layer, the second concentration being higher than the first concentration; and (d) providing a second insulating layer covering the first conductive layer and the first insulating layer by one of activating and drying the second insulating material that has been discharged.
摘要:
A broadcast receiving device configured to receive broadcasted digital programs includes a tuner to select a channel from a plurality of channels, so that a desired digital program may be received via the selected channel; a recording component to record the received program and copy control information associated with the received program; a digital terminal to output the program recorded on the recording component to a video recording device coupled to the digital terminal; and a controller to control the output of the recorded program to the video recording device that is coupled to the digital terminal. The recorded program is not output via the digital terminal if more than one video recording device is coupled to the digital terminal and if the copy control information of the recorded program imposes restriction on copying of the recorded program.
摘要:
A delivery service providing system includes an entrance and exit control unit, an identifier control unit, and a delivery service providing unit. The entrance and exit control unit inputs a ticket identifier of a user who has entered or exited a predetermined area and transmits the identifier to the identifier control unit. The identifier control unit registers the ticket identifier to a database and erases the ticket in case of exit. The identifier control unit receives an identifier set of a ticket identifier and a user's unit identifier from a user's unit, checks to judge whether an identifier set matching the received identifier set in the database. If the result is positive, the delivery service providing unit delivers digital contents to the user's unit. It then becomes possible to provide only the users existing in the area with the contents deliver service.
摘要:
The invention simplifies the manufacturing processes and increases the yield. A semiconductor wafer equipped with a plurality of semiconductor chip forming sections is prepared. An electrical characteristic examination is conducted for each of the semiconductor chip forming sections to determine good product sections or bad product sections. At least another segmented semiconductor chip is electrically connected to each of the semiconductor chip forming sections that are determined to be good product sections.
摘要:
A method of forming a colored oxide film on the surface of an aluminum material is disclosed in which the aluminum material is subjected to an electrolytic treatment in an aqueous solution containing sulfuric acid to form an aluminum oxide film containing aluminous oxides and having lattice defects; sulfuric ions in the solution are caused to enter into the lattice defects of the oxide film; some or all of the sulfuric ions are reduced to form sulfur and sulfides; and the colored oxide film is formed using the sulfur and sulfides as coloring sources.
摘要:
A positive resist composition comprising (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, (B) a resin capable of increasing the solubility in an alkali developer by the action of an acid, and (C) a compound having a specific structure, which decomposes by the action of an acid to generate an acid, a pattern forming method using the positive resist composition, and a compound for use in the positive resist composition are provided as a positive resist composition exhibiting good performance in terms of pattern profile, line edge roughness, pattern collapse, sensitivity and resolution in normal exposure (dry exposure), immersion exposure and double exposure, a pattern forming method using the positive resist composition and a compound for use in the positive resist composition.
摘要:
A photosensitive composition containing a compound having a specific structure as described in the specification, a pattern-forming method using the photosensitive composition and the compound having a specific structure used in the photosensitive composition.