Positive photosensitive composition and pattern-forming method using the same
    61.
    发明申请
    Positive photosensitive composition and pattern-forming method using the same 审中-公开
    正光敏组合物和使用其的图案形成方法

    公开(公告)号:US20070054217A1

    公开(公告)日:2007-03-08

    申请号:US11514957

    申请日:2006-09-05

    IPC分类号: G03C1/00

    CPC分类号: G03F7/0397

    摘要: A positive photosensitive composition comprises: (A) a compound capable of generating an acid upon irradiation with actinic ray or radiation; and (B) a resin having a group capable of decomposing by action of an acid to increase solubility of the group in an alkali developer, wherein the resin (B) comprises: at least one methacrylate repeating unit; at least one acrylate repeating unit; and at least one repeating unit (Ba) having a diamantane structure.

    摘要翻译: 正型感光性组合物包含:(A)能够在光化射线或辐射照射时能够产生酸的化合物; 和(B)具有能够通过酸分解的基团的树脂,以增加基团在碱性显影剂中的溶解度,其中树脂(B)包含:至少一个甲基丙烯酸酯重复单元; 至少一个丙烯酸酯重复单元; 和至少一个具有双金刚烷结构的重复单元(Ba)。

    Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition
    62.
    发明申请
    Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition 有权
    感光组合物,用于感光组合物的化合物和使用感光组合物的图案形成方法

    公开(公告)号:US20060172228A1

    公开(公告)日:2006-08-03

    申请号:US11337899

    申请日:2006-01-24

    申请人: Kenji Wada

    发明人: Kenji Wada

    IPC分类号: G03C5/00 C07C309/45

    摘要: The invention provides a photosensitive composition for use in the production process of a semiconductor such as IC, in the production of a circuit substrate of liquid crystal, thermal head and the like or in other photofabrication processes, a pattern forming method using the photosensitive composition, and a specific organic acid, which are: a photosensitive composition comprising a compound having a proton acceptor functional group and producing a sulfonic acid group upon irradiation with actinic rays or radiation to reduce or lose the acceptor property or change the proton acceptor functional group to be acidic, or a compound capable of generating a specific organic acid upon irradiation with actinic rays or radiation; a pattern forming method using the photosensitive composition; and a specific organic acid.

    摘要翻译: 本发明提供了一种用于半导体(例如IC)的制造中的液晶,热敏头等电路基板的制造中的光敏性组合物,或者其他的光加工工序,使用该感光性组合物的图案形成方法, 和特定的有机酸,其是:包含具有质子受体官能团的化合物并在用光化射线或辐射照射时产生磺酸基以降低或失去受主性质或将质子受体官能团改变为 酸性或能够在用光化射线或辐射照射时能够产生特定有机酸的化合物; 使用该感光性组合物的图案形成方法; 和特定的有机酸。

    Method for providing a layer, wiring substrate, elector-optical device, and electronic equipment
    64.
    发明申请
    Method for providing a layer, wiring substrate, elector-optical device, and electronic equipment 审中-公开
    提供层,布线基板,电光设备和电子设备的方法

    公开(公告)号:US20060013970A1

    公开(公告)日:2006-01-19

    申请号:US11146136

    申请日:2005-06-07

    申请人: Kenji Wada

    发明人: Kenji Wada

    IPC分类号: B05D5/12 B41M5/00

    摘要: A method for providing a layer by ink jetting, comprising: (a) discharging a first liquid insulating material of a first concentration on a surface of a first level so that a side of a first conductive layer placed on the surface is covered by the first insulating material; (b) providing a first insulating layer facing the first conductive layer by one of activating and drying the first insulating material that has been discharged; (c) discharging a second liquid insulating material of a second concentration on the first conductive layer and the first insulating layer, the second concentration being higher than the first concentration; and (d) providing a second insulating layer covering the first conductive layer and the first insulating layer by one of activating and drying the second insulating material that has been discharged.

    摘要翻译: 一种通过喷墨提供层的方法,包括:(a)在第一层的表面上排出第一浓度的第一液体绝缘材料,使得放置在表面上的第一导电层的一侧被第一层 绝缘材料; (b)通过激活和干燥已经排出的第一绝缘材料之一来提供面向第一导电层的第一绝缘层; (c)在第一导电层和第一绝缘层上排出第二浓度的第二液体绝缘材料,第二浓度高于第一浓度; 和(d)通过激活和干燥已经排出的第二绝缘材料之一来提供覆盖第一导电层和第一绝缘层的第二绝缘层。

    Broadcast receiving device and stream output device
    65.
    发明申请
    Broadcast receiving device and stream output device 有权
    广播接收设备和流输出设备

    公开(公告)号:US20050123277A1

    公开(公告)日:2005-06-09

    申请号:US10969800

    申请日:2004-10-19

    申请人: Chiyo Ono Kenji Wada

    发明人: Chiyo Ono Kenji Wada

    摘要: A broadcast receiving device configured to receive broadcasted digital programs includes a tuner to select a channel from a plurality of channels, so that a desired digital program may be received via the selected channel; a recording component to record the received program and copy control information associated with the received program; a digital terminal to output the program recorded on the recording component to a video recording device coupled to the digital terminal; and a controller to control the output of the recorded program to the video recording device that is coupled to the digital terminal. The recorded program is not output via the digital terminal if more than one video recording device is coupled to the digital terminal and if the copy control information of the recorded program imposes restriction on copying of the recorded program.

    摘要翻译: 被配置为接收广播的数字节目的广播接收装置包括从多个频道中选择频道的调谐器,从而可以经由所选择的频道接收期望的数字节目; 用于记录所接收的节目的记录组件和与所接收节目相关联的复制控制信息; 数字终端,将记录在记录部件上的程序输出到耦合到数字终端的视频记录装置; 以及控制器,用于将记录的节目的输出控制到耦合到数字终端的视频记录装置。 如果多于一个的视频记录装置耦合到数字终端,并且所记录的节目的复制控制信息对所记录的节目的复制的限制,则不经由数字终端输出所记录的节目。

    Service providing system and method
    66.
    发明申请
    Service providing system and method 有权
    服务提供系统和方法

    公开(公告)号:US20050116030A1

    公开(公告)日:2005-06-02

    申请号:US10964687

    申请日:2004-10-15

    摘要: A delivery service providing system includes an entrance and exit control unit, an identifier control unit, and a delivery service providing unit. The entrance and exit control unit inputs a ticket identifier of a user who has entered or exited a predetermined area and transmits the identifier to the identifier control unit. The identifier control unit registers the ticket identifier to a database and erases the ticket in case of exit. The identifier control unit receives an identifier set of a ticket identifier and a user's unit identifier from a user's unit, checks to judge whether an identifier set matching the received identifier set in the database. If the result is positive, the delivery service providing unit delivers digital contents to the user's unit. It then becomes possible to provide only the users existing in the area with the contents deliver service.

    摘要翻译: 送货服务提供系统包括入口和出口控制单元,标识符控制单元和递送服务提供单元。 入口和出口控制单元输入已经进入或退出预定区域的用户的票证标识符,并将该标识符发送到标识符控制单元。 标识符控制单元将票证标识符注册到数据库,并在退出的情况下擦除票据。 标识符控制单元从用户单元接收票标识符和用户单位标识符的标识符集,检查是否匹配在数据库中设置的接收标识符的标识符。 如果结果是肯定的,则递送服务提供单元将数字内容提供给用户单元。 然后可以仅向存在于该区域中的用户提供内容传送服务。

    Positive resist composition, pattern forming method using the composition, and compound for use in the composition
    69.
    发明授权
    Positive resist composition, pattern forming method using the composition, and compound for use in the composition 有权
    正性抗蚀剂组合物,使用该组合物的图案形成方法和用于该组合物的化合物

    公开(公告)号:US08507174B2

    公开(公告)日:2013-08-13

    申请号:US12673096

    申请日:2008-08-11

    IPC分类号: G03F7/039 G03F7/20 G03F7/30

    摘要: A positive resist composition comprising (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, (B) a resin capable of increasing the solubility in an alkali developer by the action of an acid, and (C) a compound having a specific structure, which decomposes by the action of an acid to generate an acid, a pattern forming method using the positive resist composition, and a compound for use in the positive resist composition are provided as a positive resist composition exhibiting good performance in terms of pattern profile, line edge roughness, pattern collapse, sensitivity and resolution in normal exposure (dry exposure), immersion exposure and double exposure, a pattern forming method using the positive resist composition and a compound for use in the positive resist composition.

    摘要翻译: 一种正型抗蚀剂组合物,其包含(A)在通过光化射线或辐射照射时能够产生酸的化合物,(B)能够通过酸的作用增加在碱性显影剂中的溶解度的树脂,和(C) 提供具有特定结构的化合物,其通过酸的作用而分解以产生酸,使用正性抗蚀剂组合物的图案形成方法和用于正性抗蚀剂组合物的化合物作为正性抗蚀剂组合物,其表现出良好的性能 使用正性抗蚀剂组合物的图案形成方法和用于正性抗蚀剂组合物的化合物的图案形成方法,线条粗糙度,图案塌陷,在正常曝光(干曝光)中的灵敏度和分辨率,浸渍曝光和双重曝光。