公开(公告)号：US5697824A

公开(公告)日：1997-12-16

申请号：US488066

申请日：1995-06-07

Applicant: Chenggang Xie ,  Donald E. Patterson ,  Nalin Kumar

Inventor： Chenggang Xie ,  Donald E. Patterson ,  Nalin Kumar

IPC: C25D13/02 ,  H01J9/22 ,  H01J9/18

CPC classification number: C25D13/02

Abstract: A system and method for producing thin, uniform powder phosphors for field emission display screens features a planarization of the phosphor powder layer. That planarization is accomplished by placing the deposited phosphor layer in an anode plate between two optical flats, which are then mounted within a mechanical press.

Abstract translation: 用于制造用于场致发射显示屏的薄均匀粉末磷光体的系统和方法包括荧光粉层的平坦化。 该平坦化通过将沉积的磷光体层放置在两个光学平面之间的阳极板中来实现，然后将它们安装在机械压力机中。

公开(公告)号：US5686791A

公开(公告)日：1997-11-11

申请号：US479480

申请日：1995-06-07

Applicant: Nalin Kumar ,  Chenggang Xie

Inventor： Nalin Kumar ,  Chenggang Xie

IPC: H01J1/304 ,  H01J9/02 ,  H01J31/12 ,  H01J61/067 ,  H01J63/00 ,  H01J63/06 ,  H01J1/30

CPC classification number: H01J63/06 ,  H01J1/304 ,  H01J1/3042 ,  H01J31/127 ,  H01J61/0677 ,  H01J63/00 ,  H01J9/027 ,  H01J2201/304 ,  H01J2201/30426 ,  H01J2201/30457 ,  H01J2329/00 ,  H01J2329/8625 ,  Y10T428/292

Abstract: A field emission cathode for use in flat panel displays is disclosed comprising a layer of conductive material and a layer of amorphic diamond film, functioning as a low effective work-function material, deposited over the conductive material to form emission sites. The emission sites each contain at least two sub-regions having differing electron affinities. Use of the cathode to form a computer screen is also disclosed along with the use of the cathode to form a fluorescent light source.

公开(公告)号：US5612712A

公开(公告)日：1997-03-18

申请号：US479270

申请日：1995-06-07

Applicant: Nalin Kumar ,  Chenggang Xie

Inventor： Nalin Kumar ,  Chenggang Xie

IPC: G09G3/22 ,  G09G3/30 ,  H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J29/08 ,  H01J29/28 ,  H01J31/12 ,  H01J61/067 ,  H01J63/06

CPC classification number: H01J1/304 ,  G09G3/22 ,  H01J1/3042 ,  H01J29/085 ,  H01J31/127 ,  H01J61/0677 ,  H01J63/06 ,  H01J9/027 ,  H01J2201/304 ,  H01J2201/30426 ,  H01J2201/30457 ,  H01J2201/319 ,  H01J2329/8625 ,  H01J2329/864

Abstract: A matrix-addressed diode flat panel display of field emission type is described, utilizing a diode (two terminal) pixel structure. The flat panel display comprises a cathode assembly having a plurality of cathodes, each cathode including a layer of cathode conductive material and a layer of a low effective work-function material deposited over the cathode conductive material and an anode assembly having a plurality of anodes, each anode including a layer of anode conductive material and a layer of cathodoluminescent material deposited over the anode conductive material, the anode assembly located proximate the cathode assembly to thereby receive charged particle emissions from the cathode assembly, the cathodoluminescent material emitting light in response to the charged particle emissions. The flat panel display further comprises means for selectively varying field emission between the plurality of corresponding light-emitting anodes and field-emission cathodes to thereby effect an addressable grey-scale operation of the flat panel display.

Abstract translation: 利用二极管（二端）像素结构描述场发射型矩阵寻址二极管平板显示器。 平板显示器包括具有多个阴极的阴极组件，每个阴极包括阴极导电材料层和沉积在阴极导电材料上的低有效功函数材料层和具有多个阳极的阳极组件， 每个阳极包括阳极导电材料层和沉积在阳极导电材料上的阴极发光材料层，阳极组件位于阴极组件附近，从而接收来自阴极组件的带电粒子发射，阴极发光材料响应于 带电粒子排放。 平板显示器还包括用于选择性地改变多个对应的发光阳极和场发射阴极之间的场发射的装置，从而实现平板显示器的可寻址的灰度级操作。

公开(公告)号：US5531880A

公开(公告)日：1996-07-02

申请号：US304918

申请日：1994-09-13

Applicant: Chenggang Xie ,  Donald E. Patterson ,  Nalin Kumar

Inventor： Chenggang Xie ,  Donald E. Patterson ,  Nalin Kumar

IPC: C25D13/02

CPC classification number: C25D13/02

Abstract: A system and method for producing thin, uniform powder phosphors for field emission display screens wherein a planarization of the phosphor powder layer is accomplished by placing the deposited phosphor layer in an anode plate between two optical flats, which are then mounted within a mechanical press.

Abstract translation: 一种用于产生用于场致发射显示屏的薄均匀粉末磷光体的系统和方法，其中通过将沉积的磷光体层放置在两个光学平面之间的阳极板中来实现荧光粉层的平坦化，然后将它们安装在机械压力机中。

公开(公告)号：US5451551A

公开(公告)日：1995-09-19

申请号：US290652

申请日：1994-08-15

Applicant: Ajay Krishnan ,  Nalin Kumar

Inventor： Ajay Krishnan ,  Nalin Kumar

IPC: H01L21/768 ,  H05K3/38 ,  H05K3/46 ,  H01L21/02

CPC classification number: H01L21/76849 ,  H01L21/76843 ,  H01L21/76877 ,  H05K3/38 ,  H05K3/4644

Abstract: A maskless process for forming a protected metal feature in a planar insulating layer of a substrate is disclosed. A first barrier material is disposed in a recess in an insulating layer, a conductive metal is disposed on the first barrier material such that the entire metal feature is positioned within the recess below the top of the recess, a second barrier material is disposed on the metal feature such that the second barrier material occupies the entire portion of the recess above the-metal feature and extends above the top surface of the insulating layer, and the second barrier material is then polished until the top of the second barrier material is in and aligned with the top of the insulating layer. As a result, the metal feature is surrounded and protected by the first and second barrier materials, and the substrate is planarized.

Abstract translation: 公开了一种用于在基板的平面绝缘层中形成受保护的金属特征的无掩模工艺。 第一阻挡材料设置在绝缘层的凹部中，导电金属设置在第一阻挡材料上，使得整个金属特征位于凹部下方的凹部内，第二阻挡材料设置在 金属特征使得第二阻挡材料占据金属特征上方的凹部的整个部分并且在绝缘层的顶表面上方延伸，然后抛光第二阻挡材料直到第二阻挡材料的顶部在 与绝缘层的顶部对齐。 结果，金属特征被第一和第二阻挡材料包围和保护，并且基板被平坦化。

公开(公告)号：US5449970A

公开(公告)日：1995-09-12

申请号：US995846

申请日：1992-12-23

Applicant: Nalin Kumar ,  Chenggang Xie

Inventor： Nalin Kumar ,  Chenggang Xie

IPC: G09G3/22 ,  G09G3/30 ,  H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J29/08 ,  H01J29/28 ,  H01J31/12 ,  H01J61/067 ,  H01J63/06 ,  H01J1/30

CPC classification number: H01J1/304 ,  G09G3/22 ,  H01J1/3042 ,  H01J29/085 ,  H01J31/127 ,  H01J61/0677 ,  H01J63/06 ,  H01J9/027 ,  H01J2201/304 ,  H01J2201/30426 ,  H01J2201/30457 ,  H01J2201/319 ,  H01J2329/8625 ,  H01J2329/864

Abstract: A matrix-addressed diode flat panel display of field emission type is described, utilizing a diode (two terminal) pixel structure. The flat panel display includes a cathode assembly having a plurality of cathodes, each cathode including a layer of cathode conductive material and a layer of a low effective work-function material deposited over the cathode conductive material and an anode assembly having a plurality of anodes, each anode including a layer of anode conductive material and a layer of cathodoluminescent material deposited over the anode conductive material, the anode assembly located proximate the cathode assembly to thereby receive charged particle emissions from the cathode assembly, the cathodoluminescent material emitting light in response to the charged particle emissions. The flat panel display further includes the capability for selectively varying field emission between the plurality of corresponding light-emitting anodes and field-emission cathodes to thereby effect an addressable grey-scale operation of the flat panel display.

Abstract translation: 利用二极管（二端）像素结构描述场发射型矩阵寻址二极管平板显示器。 平板显示器包括具有多个阴极的阴极组件，每个阴极包括阴极导电材料层和沉积在阴极导电材料上的低有效功函数材料层和具有多个阳极的阳极组件， 每个阳极包括阳极导电材料层和沉积在阳极导电材料上的阴极发光材料层，阳极组件位于阴极组件附近，从而接收来自阴极组件的带电粒子发射，阴极发光材料响应于 带电粒子排放。 平板显示器还包括用于选择性地改变多个对应的发光阳极和场致发射阴极之间的场发射的能力，从而实现平板显示器的可寻址的灰度级操作。

公开(公告)号：US5382315A

公开(公告)日：1995-01-17

申请号：US120264

申请日：1993-09-13

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: H01J9/02 ,  H01L21/48 ,  H01L21/60 ,  H01L23/485 ,  H05K1/14 ,  H05K3/00 ,  H05K3/04 ,  H05K3/10 ,  H05K3/14 ,  H05K3/18 ,  H05K3/38 ,  H05K3/46

CPC classification number: H05K3/465 ,  H01J9/025 ,  H01L21/4857 ,  H01L24/11 ,  H01L24/13 ,  H05K3/045 ,  H05K3/184 ,  H01J2201/30407 ,  H01J2201/30457 ,  H01L2224/0347 ,  H01L2224/0401 ,  H01L2224/1147 ,  H01L2224/1148 ,  H01L2224/13099 ,  H01L2924/0001 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/04941 ,  H01L2924/12042 ,  H01L2924/19041 ,  H05K1/142 ,  H05K2201/0154 ,  H05K2201/0166 ,  H05K2201/0376 ,  H05K2201/2081 ,  H05K2203/0554 ,  H05K2203/107 ,  H05K2203/121 ,  H05K2203/1338 ,  H05K3/0023 ,  H05K3/0041 ,  H05K3/107 ,  H05K3/143 ,  H05K3/146 ,  H05K3/185 ,  H05K3/388 ,  H05K3/4644 ,  H05K3/4661 ,  Y10S438/942

Abstract: A method of forming an etch mask and patterning a substrate. The method includes directing a particle beam at a substrate without using a mask to deposit an etch mask on the substrate which selectively exposes predetermined portions of the substrate, the etch mask consisting of particles mechanically placed on the substrate by the particle beam, and then etching the exposed portions of the substrate through the etch mask to form channels therein. The process is well suited to fabricating high density copper/polyimide multi-chip modules.

Abstract translation: 一种形成蚀刻掩模和图案化衬底的方法。 该方法包括在基板上引导粒子束而不使用掩模在基板上沉积选择性地暴露基板的预定部分的蚀刻掩模，该蚀刻掩模由颗粒束机械地放置在基板上的颗粒组成，然后蚀刻 通过蚀刻掩模的衬底的暴露部分在其中形成通道。 该工艺非常适合制造高密度铜/聚酰亚胺多芯片模块。

公开(公告)号：US5178743A

公开(公告)日：1993-01-12

申请号：US649311

申请日：1991-01-30

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: C23C14/34 ,  C23C14/56 ,  H01J37/34 ,  H01L39/24

CPC classification number: H01J37/3402 ,  C23C14/3407 ,  C23C14/56 ,  H01J37/3277 ,  H01J37/342

Abstract: A system for depositing a film on a substrate includes a sputtering system and means for causing the substrate to move through the sputtering system. Embodiments of the present invention employ a cylindrical hollow cathode magnetron sputtering system, which causes the overall film deposition system to be ideally suited for coating elongate cylindrical substrates such as wires and fibers and the like.

Abstract translation: 用于在衬底上沉积膜的系统包括溅射系统​​和用于使衬底移动通过溅射系统的装置。 本发明的实施例采用圆柱形空心阴极磁控溅射系统，其使得整个膜沉积系统理想地适用于涂覆细长的圆柱形基底，例如电线和纤维等。

公开(公告)号：US5164332A

公开(公告)日：1992-11-17

申请号：US669814

申请日：1991-03-15

Applicant: Nalin Kumar

Inventor： Nalin Kumar

IPC: H01L23/528 ,  H01L23/532

CPC classification number: H01L23/53238 ,  H01L23/5283 ,  H01L23/53233 ,  H01L2924/0002

Abstract: A diffusion barrier which reduces the diffusion of a copper feature into an oxygen containing polymer is provided by a copper metal alloy. The diffusion barrier is fabricated by coating a metal on a copper feature, heating the metal and copper feature to form an alloy of the copper feature and the metal, etching the non-alloyed metal which covers the alloy, and depositing an oxygen containing polymer on the alloy. Preferably the metal is aluminum and a copper aluminum alloy diffusion barrier is at least 300 angstroms thick and contains at least 8 percent aluminum on the surface in contact with the polymer.

Abstract translation: 通过铜金属合金提供减少铜特征扩散到含氧聚合物中的扩散阻挡层。 通过在铜特征上涂覆金属来制造扩散阻挡层，加热金属和铜的特征以形成铜特征和金属的合金，蚀刻覆盖合金的非合金金属，并将含氧聚合物沉积在 合金。 优选地，金属是铝，并且铜铝合金扩散阻挡层至少为300埃厚，并且在与聚合物接触的表面上含有至少8％的铝。

公开(公告)号：US5156997A

公开(公告)日：1992-10-20

申请号：US653609

申请日：1991-02-11

Applicant: Nalin Kumar ,  Rama R. Goruganthu ,  Mohammed K. Ghazi

Inventor： Nalin Kumar ,  Rama R. Goruganthu ,  Mohammed K. Ghazi

IPC: H01L21/60 ,  H01L23/485 ,  H05K3/00

CPC classification number: H01L24/13 ,  H01L24/11 ,  H01J2201/30457 ,  H01L2224/11822 ,  H01L2224/13099 ,  H01L2224/13111 ,  H01L2224/13116 ,  H01L2224/13144 ,  H01L2224/13155 ,  H01L2924/0001 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/0104 ,  H01L2924/01046 ,  H01L2924/01049 ,  H01L2924/01072 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2924/14 ,  H05K2201/2081 ,  H05K2203/0554 ,  H05K2203/107 ,  H05K3/0023 ,  H05K3/0041

Abstract: A method of making bonding bumps on the pads of an electrical chip including depositing a layer of metallic adhesion material over the surface, depositing metallic bumps on the metallic adhesion material over each of the pad areas using a focused liquid metal ion source, and chemically etching the layer of metallic adhesion material off the surface outside of the deposited bumps.

Abstract translation: 一种在电芯片的焊盘上形成接合凸块的方法，包括在表面上沉积一层金属粘附材料，使用聚焦的液态金属离子源在每个焊盘区域上沉积金属粘附材料上的金属凸块，以及化学蚀刻 金属粘合材料层从沉积的凸块外部的表面离开。