METHOD OF PRODUCING COATED MEMBER
    61.
    发明申请
    METHOD OF PRODUCING COATED MEMBER 审中-公开
    制造涂层成员的方法

    公开(公告)号:US20130059093A1

    公开(公告)日:2013-03-07

    申请号:US13696921

    申请日:2011-05-12

    IPC分类号: C23C16/30

    摘要: The coated member production method includes a DLC film forming step of introducing a feedstock gas containing a carbon compound and an oxygen-containing organic silicon compound into a treatment chamber in which a base is accommodated, and applying a voltage to the base at a treatment pressure of not lower than 100 Pa and not higher than 400 Pa to generate plasma to form a DLC film on a surface of the base. Hexamethyldisiloxane, for example, is used as the oxygen-containing organic silicon compound. A DC pulse voltage, for example, is applied to the base in the DLC film forming step.

    摘要翻译: 涂布部件的制造方法包括:将含有碳化合物和含氧有机硅化合物的原料气体导入容纳基体的处理室中的DLC膜形成工序,并在处理压力下向基材施加电压 不低于100Pa并且不高于400Pa,以在基底的表面上产生等离子体以形成DLC膜。 例如使用六甲基二硅氧烷作为含氧有机硅化合物。 例如,在DLC膜形成步骤中将直流脉冲电压施加到基底。