Method of forming main pole of thermally-assisted magnetic recording head
    72.
    发明授权
    Method of forming main pole of thermally-assisted magnetic recording head 有权
    形成热辅助磁记录头主极的方法

    公开(公告)号:US08465658B2

    公开(公告)日:2013-06-18

    申请号:US13110442

    申请日:2011-05-18

    IPC分类号: B44C1/22 G11B5/127 G11B11/00

    摘要: In a method of forming a main pole, an initial accommodation layer is etched by RIE using a first etching mask having a first opening, whereby a groove is formed in the initial accommodation layer. Next, a part of the initial accommodation layer including the groove is etched by RIE using a second etching mask having a second opening, so that the groove becomes an accommodation part. The main pole is then formed in the accommodation part. The first etching mask has first and second sidewalls that face the first opening and are opposed to each other at a first distance in a track width direction. The second etching mask has third and fourth sidewalls that face the second opening and are opposed to each other at a second distance greater than the first distance.

    摘要翻译: 在形成主极的方法中,使用具有第一开口的第一蚀刻掩模,通过RIE蚀刻初始容纳层,由此在初始容纳层中形成凹槽。 接下来,使用具有第二开口的第二蚀刻掩模,通过RIE蚀刻包括凹槽的初始容纳层的一部分,使得凹槽变成容纳部分。 主杆然后形成在容纳部分中。 第一蚀刻掩模具有面向第一开口并且在轨道宽度方向上以第一距离彼此相对的第一和第二侧壁。 第二蚀刻掩模具有面向第二开口的第三和第四侧壁,并且在大于第一距离的第二距离处彼此相对。

    Heat-assisted magnetic recording head with laser diode fixed to slider
    75.
    发明授权
    Heat-assisted magnetic recording head with laser diode fixed to slider 有权
    带激光二极管的热辅助磁记录头固定在滑块上

    公开(公告)号:US08406089B2

    公开(公告)日:2013-03-26

    申请号:US12585150

    申请日:2009-09-04

    IPC分类号: G11B11/00

    摘要: A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, and a near-field light generating element. The laser diode includes: an emitting end face that lies at an end in a direction parallel to the plane of an active layer and includes a laser-light emission part; and a mounting surface that lies at an end in a direction perpendicular to the plane of the active layer and faces the slider. The external mirror includes: a first reference surface that is parallel to the emitting end face and faces the emitting end face; a second reference surface that is parallel to the mounting surface and faces toward the same direction as the mounting surface does; and a reflecting surface that connects the first and second reference surfaces to each other and reflects the laser light emitted from the emission part toward the waveguide.

    摘要翻译: 热辅助磁记录头包括滑块,固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极,波导和近场光产生元件。 激光二极管包括:发射端面,其位于与有源层的平面平行的方向上的端部,并且包括激光发射部分; 以及安装表面,其位于垂直于有源层的平面的方向上的端部并且面向滑块。 外部反射镜包括:平行于发射端面并面对发射端面的第一参考表面; 第二参考表面,其平行于安装表面并面向与安装表面相同的方向; 以及将第一和第二参考表面彼此连接并将从发射部分发射的激光反射到波导的反射表面。

    Method of manufacturing plasmon generator
    76.
    发明授权
    Method of manufacturing plasmon generator 有权
    等离子体发生器的制造方法

    公开(公告)号:US08400884B1

    公开(公告)日:2013-03-19

    申请号:US13353981

    申请日:2012-01-19

    IPC分类号: G11B21/08 G11B7/085

    摘要: A method of manufacturing a plasmon generator includes the steps of forming an accommodation part and forming the plasmon generator to be accommodated in the accommodation part. The step of forming the accommodation part includes the steps of: forming a dielectric layer having an upper surface; etching the dielectric layer by using an etching mask and thereby forming a groove in the dielectric layer; and forming a dielectric film in the groove. The groove has first and second sidewalls and a bottom. Each of the first and second sidewalls forms an angle in the range of 0° to 15° relative to the direction perpendicular to the upper surface of the dielectric layer. The dielectric film includes a first portion interposed between the first sidewall and the first side surface, and a second portion interposed between the second sidewall and the second side surface.

    摘要翻译: 制造等离子体发生器的方法包括以下步骤:形成容纳部分并形成容纳在容纳部分中的等离子体发生器。 形成容纳部的步骤包括以下步骤:形成具有上表面的电介质层; 通过使用蚀刻掩模蚀刻介电层,从而在电介质层中形成凹槽; 以及在所述槽中形成电介质膜。 凹槽具有第一和第二侧壁和底部。 第一和第二侧壁中的每一个相对于与电介质层的上表面垂直的方向形成0°至15°的范围内的角度。 介电膜包括介于第一侧壁和第一侧表面之间的第一部分和介于第二侧壁和第二侧表面之间的第二部分。

    Heat-assisted magnetic recording head with laser diode fixed to slider
    77.
    发明授权
    Heat-assisted magnetic recording head with laser diode fixed to slider 有权
    带激光二极管的热辅助磁记录头固定在滑块上

    公开(公告)号:US08395971B2

    公开(公告)日:2013-03-12

    申请号:US12458546

    申请日:2009-07-15

    IPC分类号: G11B11/00

    摘要: A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The substrate has a top surface facing toward the magnetic pole, the near-field light generating element and the waveguide. The slider has a top surface that lies above the top surface of the substrate, at an end of the slider farther from the top surface of the substrate. The laser diode includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface of the slider. The external mirror reflects the laser light emitted from the emission part toward the waveguide.

    摘要翻译: 热辅助磁记录头包括滑块,固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极,波导,近场光产生元件和基板。 基板具有面向磁极的顶表面,近场光产生元件和波导。 滑块具有位于基板顶表面上方的顶表面,在滑块的距基板顶表面更远的一端。 激光二极管包括:有源层; 位于与有源层的平面平行的方向上的端部的发射端面,并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。 激光二极管被布置成使得底表面面向滑块的顶表面。 外部反射镜将从发射部分发射的激光朝向波导反射。

    Method of manufacturing near-field light generating element and method of manufacturing heat-assisted magnetic recording head
    79.
    发明授权
    Method of manufacturing near-field light generating element and method of manufacturing heat-assisted magnetic recording head 有权
    制造近场光产生元件的方法和制造热辅助磁记录头的方法

    公开(公告)号:US08366948B2

    公开(公告)日:2013-02-05

    申请号:US12714998

    申请日:2010-03-01

    IPC分类号: B44C1/22 B29D11/00

    摘要: A near-field light generating element has an outer surface including first and second inclined surfaces and an edge part that connects the first and second inclined surfaces to each other. In a method of manufacturing the near-field light generating element, a polishing stopper layer is initially formed on a metal layer, and the polishing stopper layer and the metal layer are etched so that the metal layer is provided with the first inclined surface. Next, a coating layer is formed to cover the metal layer and the polishing stopper layer. The coating layer is made of a non-metallic inorganic material that has an etching rate lower than that of the metal layer in a second etching step to be performed later. Next, the coating layer is polished until the polishing stopper layer is exposed. Next, the second etching step is performed to etch the polishing stopper layer and the metal layer using the coating layer as the etching mask. This provides the metal layer with the second inclined surface and the edge part, and thereby makes the metal layer into the near-field light generating element.

    摘要翻译: 近场光产生元件具有包括第一和第二倾斜表面的外表面和将第一和第二倾斜表面彼此连接的边缘部分。 在制造近场光产生元件的方法中,最初在金属层上形成抛光阻挡层,并且蚀刻抛光阻挡层和金属层,使得金属层设置有第一倾斜表面。 接下来,形成涂覆层以覆盖金属层和抛光阻挡层。 在稍后执行的第二蚀刻步骤中,涂层由非金属无机材料制成,其蚀刻速率低于金属层的蚀刻速率。 接下来,抛光涂层直到抛光停止层露出。 接下来,进行第二蚀刻步骤,使用涂层作为蚀刻掩模来蚀刻抛光停止层和金属层。 由此,使金属层具有第二倾斜面和边缘部,由此使金属层成为近场光产生元件。