公开(公告)号：US07925377B2

公开(公告)日：2011-04-12

申请号：US11458667

申请日：2006-07-19

申请人： Tetsuya Ishikawa ,  Rick J. Roberts ,  Helen R. Armer ,  Leon Volfovski ,  Jay D. Pinson ,  Michael Rice ,  David H. Quach ,  Mohsen S. Salek ,  Robert Lowrance ,  William Tyler Weaver ,  Charles Carlson ,  Chongyang Wang ,  Jeffrey Hudgens ,  Harald Herchen ,  Brian Lue ,  John A. Backer

发明人： Tetsuya Ishikawa ,  Rick J. Roberts ,  Helen R. Armer ,  Leon Volfovski ,  Jay D. Pinson ,  Michael Rice ,  David H. Quach ,  Mohsen S. Salek ,  Robert Lowrance ,  William Tyler Weaver ,  Charles Carlson ,  Chongyang Wang ,  Jeffrey Hudgens ,  Harald Herchen ,  Brian Lue ,  John A. Backer

IPC分类号： G06F7/00

CPC分类号： H01L21/67225 ,  G03B27/32 ,  G03D13/006 ,  G03F7/40 ,  G05B19/41825 ,  G05B2219/40476 ,  G05B2219/45031 ,  G05B2219/49137 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/67754 ,  H01L21/6831 ,  H01L21/6838 ,  H01L21/68707 ,  H01L22/26 ,  Y02P90/087 ,  Y10S414/135 ,  Y10S414/136 ,  Y10T29/53187 ,  Y10T29/5323

摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment of the cluster tool, grouping substrates together, and transferring and processing the substrates in groups of two or more, improves system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

摘要翻译： 实施例通常提供使用具有增加的系统吞吐量，增加的系统可靠性的多腔室处理系统（例如，集群工具）来处理衬底的装置和方法，在集群工具中处理的衬底具有更可重复的晶片历史，并且还 集群工具具有更小的系统占用空间。 在集群工具的一个实施例中，将基板分组在一起，并且以两个或更多个组的方式传送和处理基板，提高了系统吞吐量，并且减少了机器人必须在处理室之间传送一批基板的移动次数 从而减少机器人的磨损，提高系统的可靠性。 实施例还提供了用于增加衬底转移过程以减少系统停机时间的可靠性的方法和装置。

公开(公告)号：US20110045206A1

公开(公告)日：2011-02-24

申请号：US12862244

申请日：2010-08-24

申请人： Quanyuan Shang ,  Lu Yang ,  Karl M. Brown ,  Donald J.K. Olgado ,  Victor Pebenito ,  Hooman Bolandi ,  Tetsuya Ishikawa ,  Robert Z. Bachrach ,  Liang-Yuh Chen

发明人： Quanyuan Shang ,  Lu Yang ,  Karl M. Brown ,  Donald J.K. Olgado ,  Victor Pebenito ,  Hooman Bolandi ,  Tetsuya Ishikawa ,  Robert Z. Bachrach ,  Liang-Yuh Chen

IPC分类号： C23C16/513 ,  H05H1/24 ,  C23C16/06

CPC分类号： H01M4/0419 ,  H01M4/1391

摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

摘要翻译： 提供一种用于形成薄膜电池的电化学层的方法和装置。 包含分散在携带介质中的前体颗粒的前体混合物通过施加电场在活化室中活化，以电离至少一部分前体混合物。 然后将活化的前体混合物与可燃气体混合物混合，以向前体颗粒添加热能，将其转化成沉积在基材上的纳米晶体。 当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。

公开(公告)号：US20100279020A1

公开(公告)日：2010-11-04

申请号：US12770306

申请日：2010-04-29

申请人： Yuriy Melnik ,  Hidehiro Kojiri ,  Olga Kryliouk ,  Tetsuya Ishikawa

发明人： Yuriy Melnik ,  Hidehiro Kojiri ,  Olga Kryliouk ,  Tetsuya Ishikawa

IPC分类号： B05D1/36

CPC分类号： C23C16/4488 ,  C23C16/303 ,  C23C16/45523 ,  C30B25/02 ,  C30B29/403

摘要： A method and apparatus is provided for preparing a substrate for forming electronic devices incorporating III/V compound semiconductors. Elemental halogen gases, hydrogen halide gases, or other halogen or halide gases, are contacted with liquid or solid group III metals to form precursors which are reacted with nitrogen sources to deposit a nitride buffer layer on the substrate. The buffer layer, which may be a transition layer, may incorporate more than one group III metal, and may be deposited with amorphous or crystalline morphology. An amorphous layer may be partially or fully recrystallized by thermal treatment. Instead of a layer, a plurality of discrete nucleation sites may be formed, whose size, density, and distribution may be controlled. The nitrogen source may include reactive nitrogen compounds as well as active nitrogen from a remote plasma source. The composition of the buffer or transition layer may also vary with depth according to a desired profile.

摘要翻译： 提供了一种用于制备用于形成结合III / V化合物半导体的电子器件的衬底的方法和装置。 元素卤素气体，卤化氢气体或其它卤素或卤化物气体与液体或固体III族金属接触以形成与氮源反应以在衬底上沉积氮化物缓冲层的前体。 可以是过渡层的缓冲层可以结合多于一个III族金属，并且可以以无定形或结晶形态沉积。 非晶层可以通过热处理部分或完全重结晶。 代替层，可以形成多个离散的成核位点，其尺寸，密度和分布可以被控制。 氮源可以包括反应性氮化合物以及来自远程等离子体源的活性氮。 缓冲层或过渡层的组成也可根据所需的轮廓随深度而变化。

公开(公告)号：US20100267135A1

公开(公告)日：2010-10-21

申请号：US12685569

申请日：2010-01-11

申请人： Kazuhiro Sakurada ,  Hideki Masaki ,  Tetsuya Ishikawa ,  Shunichi Takahashi

发明人： Kazuhiro Sakurada ,  Hideki Masaki ,  Tetsuya Ishikawa ,  Shunichi Takahashi

IPC分类号： C12N5/071

CPC分类号： C12N15/85 ,  C12N5/0696 ,  C12N2501/602 ,  C12N2501/603 ,  C12N2501/604 ,  C12N2501/606 ,  C12N2510/00 ,  C12N2799/027

摘要： Described herein are multipotent stem cells, e.g., human and other mammalian pluripotent stem cells, and related methods.

公开(公告)号：US07811015B2

公开(公告)日：2010-10-12

申请号：US11842532

申请日：2007-08-21

申请人： Haruyuki Yanagi ,  Kentaro Onuma ,  Tetsuya Ishikawa

发明人： Haruyuki Yanagi ,  Kentaro Onuma ,  Tetsuya Ishikawa

IPC分类号： B41J13/03 ,  B41J13/00 ,  B65H43/00

CPC分类号： B41J11/0095 ,  B41J13/0027 ,  B41J13/0045 ,  B41J13/03

摘要： This invention relates to a printing apparatus and a conveyance control method capable of simultaneously operating plural encoder sensors and executing more accurate printing medium conveyance control. A first encoder sensor provided adjacent to a first conveyance roller detects the conveyance amount of a printing medium by the first conveyance roller provided in the conveyance path of the printing medium. A second encoder sensor provided adjacent to a second conveyance roller detects the conveyance amount of the printing medium by the second conveyance roller provided in the conveyance path of the printing medium at the downstream side from the first conveyance roller in the conveyance direction of the printing medium. For example, conveyance of the printing medium is controlled on the basis of the output signals from the first and second encoder sensors when a tail end of the printing medium is located adjacent to the first conveyance roller.

摘要翻译： 本发明涉及能够同时操作多个编码器传感器并执行更精确的打印介质传送控制的打印设备和传送控制方法。 与第一输送辊相邻设置的第一编码器传感器通过设置在打印介质的输送路径中的第一输送辊来检测打印介质的输送量。 与第二输送辊相邻设置的第二编码器传感器通过设置在打印介质的输送路径中的第二输送辊在打印介质的输送方向上检测从第一输送辊的下游侧的打印介质的输送量 。 例如，当打印介质的尾端位于第一传送辊附近时，基于来自第一和第二编码器传感器的输出信号来控制打印介质的传送。

公开(公告)号：US07764389B2

公开(公告)日：2010-07-27

申请号：US11837377

申请日：2007-08-10

申请人： Kentaro Onuma ,  Haruyuki Yanagi ,  Tetsuya Ishikawa ,  Minoru Teshigawara

发明人： Kentaro Onuma ,  Haruyuki Yanagi ,  Tetsuya Ishikawa ,  Minoru Teshigawara

IPC分类号： G06K15/16 ,  H04N1/034 ,  H04N1/23 ,  B41J2/01 ,  B41J13/02

CPC分类号： H04N1/1215 ,  B41J11/0095 ,  B41J13/0027 ,  H04N1/0062 ,  H04N1/128 ,  H04N1/1912 ,  H04N2201/0082

摘要： A recording apparatus for forming images using a recording head includes a feeding roller, a conveying roller, a conveyance control unit, and a recording control unit. The conveyance control unit performs a conveying operation a number of times after the trailing end of a sheet reaches a predetermined position defined between the feeding roller and the conveying roller such that the trailing end of the sheet is disposed in a predetermined range upstream of the conveying roller in a sheet conveying direction after the conveying operations. At least one of the conveying operations performed a number of times is performed based on a distance from the position of the trailing end of the sheet to the position of the conveying roller.

摘要翻译： 使用记录头形成图像的记录装置包括进给辊，输送辊，输送控制单元和记录控制单元。 输送控制单元在纸张的后端到达在进给辊和输送辊之间限定的预定位置之后执行输送操作，使得纸张的后端设置在输送的上游的预定范围内 在传送操作之后沿着纸张传送方向滚动。 基于从片材的后端的位置到输送辊的位置的距离执行多次进行多次的输送操作中的至少一次。

公开(公告)号：US20100111650A1

公开(公告)日：2010-05-06

申请号：US12565485

申请日：2009-09-23

申请人： DAVID H. QUACH ,  Tetsuya Ishikawa

发明人： DAVID H. QUACH ,  Tetsuya Ishikawa

IPC分类号： H01L21/677

CPC分类号： C23C16/54 ,  H01L21/67161 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68 ,  H01L21/68764 ,  H01L21/68771

摘要： Embodiments of the present invention provide method and apparatus for automatically loading substrates to a substrate carrier tray. On embodiment of the present invention provides an automatic substrate loader comprises a cassette handling mechanism, a substrate aligner configured to align a substrate, and a carrier tray aligner. The automatic substrate loader further comprises a first robot configured to transfer substrates between the substrate aligner and the substrate storage cassettes, and a second robot configured to transfer substrates between the substrate aligner and the carrier tray disposed on the carrier tray aligner.

摘要翻译： 本发明的实施例提供了用于将衬底自动加载到衬底托盘的方法和装置。 在本发明的实施例中，提供一种自动基板装载器，其包括盒式处理机构，被配置为对准基板的基板对准器和载体盘对准器。 自动基板装载器还包括第一机器人，其被配置为在基板对准器和基板存储盒之间传送基板，以及第二机器人，其被配置为在基板对准器和设置在托盘调准器上的托盘之间传送基板。

公开(公告)号：US20100105100A1

公开(公告)日：2010-04-29

申请号：US12580216

申请日：2009-10-15

申请人： Kazuhiro Sakurada ,  Hideki Masaki ,  Tetsuya Ishikawa ,  Shunichi Takahashi

发明人： Kazuhiro Sakurada ,  Hideki Masaki ,  Tetsuya Ishikawa ,  Shunichi Takahashi

IPC分类号： C12Q1/02 ,  C12N5/0797

CPC分类号： C12N15/85 ,  C12N5/0696 ,  C12N2501/602 ,  C12N2501/603 ,  C12N2501/604 ,  C12N2501/606 ,  C12N2510/00 ,  C12N2799/027

摘要： Described herein are multipotent stem cells, e.g., human and other mammalian pluripotent stem cells, and related methods.

摘要翻译： 本文描述的是多能干细胞，例如人和其他哺乳动物多能干细胞，以及相关方法。

公开(公告)号：US07694647B2

公开(公告)日：2010-04-13

申请号：US11458664

申请日：2006-07-19

申请人： Tetsuya Ishikawa ,  Rick J. Roberts ,  Helen R. Armer ,  Leon Volfovski ,  Jay D. Pinson ,  Michael Rice ,  David H. Quach ,  Mohsen S. Salek ,  Robert Lowrance ,  John A. Backer ,  William Tyler Weaver ,  Charles Carlson ,  Chongyang Wang ,  Jeffrey Hudgens ,  Harald Herchen ,  Brian Lue

发明人： Tetsuya Ishikawa ,  Rick J. Roberts ,  Helen R. Armer ,  Leon Volfovski ,  Jay D. Pinson ,  Michael Rice ,  David H. Quach ,  Mohsen S. Salek ,  Robert Lowrance ,  John A. Backer ,  William Tyler Weaver ,  Charles Carlson ,  Chongyang Wang ,  Jeffrey Hudgens ,  Harald Herchen ,  Brian Lue

IPC分类号： B05C13/02 ,  C23C14/00 ,  H01L21/677

CPC分类号： H01L21/67225 ,  G03B27/32 ,  G03D13/006 ,  G03F7/40 ,  G05B19/41825 ,  G05B2219/40476 ,  G05B2219/45031 ,  G05B2219/49137 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  H01L21/67754 ,  H01L21/6831 ,  H01L21/6838 ,  H01L21/68707 ,  H01L22/26 ,  Y02P90/087 ,  Y10S414/135 ,  Y10S414/136 ,  Y10T29/53187 ,  Y10T29/5323

摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

摘要翻译： 实施例通常提供使用具有增加的系统吞吐量，增加的系统可靠性的多腔室处理系统（例如，集群工具）来处理衬底的装置和方法，在集群工具中处理的衬底具有更可重复的晶片历史，并且还 集群工具具有更小的系统占用空间。 实施例还提供了用于改进涂布室，显影室，曝光后烘烤室，冷却室和烘焙室处理结果的方法和装置。 实施例还提供了用于增加衬底转移过程以减少系统停机时间的可靠性的方法和装置。

公开(公告)号：US07614795B2

公开(公告)日：2009-11-10

申请号：US11512298

申请日：2006-08-30

申请人： Ken Adachi ,  Youichi Tsuzaki ,  Masaru Deguchi ,  Tetsuya Ishikawa

发明人： Ken Adachi ,  Youichi Tsuzaki ,  Masaru Deguchi ,  Tetsuya Ishikawa

IPC分类号： F16C33/78

CPC分类号： F16J15/3456 ,  B60B27/00 ,  F16C19/386 ,  F16C33/7886 ,  F16C33/7896 ,  F16C2326/02

摘要： A rolling bearing assembly includes: an outer ring member; an inner ring member; a hub wheel formed with a flange at one axial end thereof; and a seal member for sealing a space between one axial end of the outer ring member and an inside surface of the flange, which axially opposes the one end of the outer ring member. The seal member includes: a cylindrical core fitted on the one axial end of the outer ring member and axially extended from the one end toward the flange; and an annular lip portion secured to the core and formed from an elastic material as axially extended from the core to the inside surface of the flange.

摘要翻译： 滚动轴承组件包括：外圈构件; 内圈构件; 在其一个轴向端部形成有凸缘的轮毂轮; 以及密封构件，用于密封外圈构件的一个轴向端部与轴向相对于外圈构件的一端的凸缘的内表面之间的空间。 密封构件包括：安装在外圈构件的一个轴向端部并且从一端朝向凸缘轴向延伸的圆柱形芯; 以及固定到所述芯部并由弹性材料形成的环形唇部，所述弹性材料从所述芯部到所述凸缘的内表面轴向延伸。