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83 条记录 (耗时 0.039 秒)

    Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
    73.
    发明授权
    Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel 有权

    公开(公告)号：US09651432B2

    公开(公告)日：2017-05-16

    申请号：US14471252

    申请日：2014-08-28

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Shiori Kaji

    IPC分类号： G01L1/00 ,  G01L7/08 ,  G01L1/12 ,  G01L9/00

    CPC分类号： G01L1/125 ,  G01L9/007 ,  H04R2201/003 ,  H04R2499/11

    摘要： According to one embodiment, a strain sensing element to be provided on a deformable substrate, the element includes: a reference layer; a magnetization free layer; and a spacer layer. Magnetization of the magnetization free layer changes in accordance with deformation of the substrate. The spacer layer is provided between the reference layer and the magnetization free layer. The magnetization free layer has: a first magnetic layer; a second magnetic layer; and a magnetic coupling layer. The first magnetic layer is provided in contact with the spacer layer. The second magnetic layer is provided to be separated from the first magnetic layer. The magnetic coupling layer is provided between the first magnetic layer and the second magnetic layer. Magnetization of the first magnetic layer is anti-parallel to magnetization of the second magnetic layer.

    Pressure sensor
    76.
    发明授权
    Pressure sensor 有权
    压力传感器

    公开(公告)号：US09422150B2

    公开(公告)日：2016-08-23

    申请号：US14584625

    申请日：2014-12-29

    申请人： Kabushiki Kaisha Toshiba

    发明人： Kazuaki Okamoto ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa ,  Akio Hori ,  Kei Masunishi

    IPC分类号： B81B3/00 ,  H01L41/12 ,  G01L1/12 ,  G01L9/16 ,  G01L17/00

    CPC分类号： B81B3/0051 ,  B81B3/0091 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L1/12 ,  G01L9/16 ,  G01L17/00 ,  H01L41/12 ,  H01L41/125

    摘要： According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

    摘要翻译： 根据一个实施例，压力传感器包括：支撑部分; 电影部分 和应变传感元件。 薄膜部分由支撑部分支撑并且可变形。 薄膜部分包括第一薄膜和第二薄膜。 第一膜包括位于中心部分的第一区域和位于围绕第一区域的周边部分中的第二区域。 在第一区域设置第二胶片。 应变传感元件设置在第二区域的一部分上。 应变传感元件包括第一磁性层; 第二磁性层; 和中间层。 响应于第二区域的变形，第一磁性层的磁化改变。 中间层设置在第一磁性层和第二磁性层之间。

    Strain sensor, pressure sensor, microphone, blood pressure sensor, personal digital assistant, and hearing aid
    77.
    发明授权
    Strain sensor, pressure sensor, microphone, blood pressure sensor, personal digital assistant, and hearing aid 有权
    应变传感器，压力传感器，麦克风，血压传感器，个人数字助理和助听器

    公开(公告)号：US09383268B2

    公开(公告)日：2016-07-05

    申请号：US14472721

    申请日：2014-08-29

    申请人： Kabushiki Kaisha Toshiba

    发明人： Yoshihiro Higashi ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Michiko Hara ,  Masayuki Kii ,  Akio Hori ,  Tomohiko Nagata

    IPC分类号： G01L1/12 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

    CPC分类号： G01L1/12 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00

    摘要： According to one embodiment, a strain sensor includes: a base; a strain sensing element; a magnetic field sensing element; and a processing unit. The strain sensing element includes a first magnetic layer having a first magnetization; a second magnetic layer having a second magnetization; and a first intermediate layer. In the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changes in accordance with a strain. The magnetic field sensing element includes a third magnetic layer having a third magnetization; a fourth magnetic layer having a fourth magnetization; and a second intermediate layer. In the magnetic field sensing an angle between a direction of the third magnetization and a direction of the fourth magnetization changes in accordance with a magnetic field.

    摘要翻译： 根据一个实施例，应变传感器包括：基座; 应变传感元件; 磁场感测元件; 和处理单元。 应变传感元件包括具有第一磁化强度的第一磁性层; 具有第二磁化强度的第二磁性层; 和第一中间层。 在应变传感元件中，第一磁化方向和第二磁化方向之间的角度根据应变而变化。 磁场感测元件包括具有第三磁化强度的第三磁性层; 具有第四磁化强度的第四磁性层; 和第二中间层。 在磁场中，感测第三磁化方向与第四磁化方向之间的角度根据磁场而变化。

    Pressure sensor, microphone, blood pressure sensor, and touch panel
    78.
    发明授权
    Pressure sensor, microphone, blood pressure sensor, and touch panel 有权
    压力传感器，麦克风，血压传感器和触摸屏

    公开(公告)号：US09250142B2

    公开(公告)日：2016-02-02

    申请号：US14047108

    申请日：2013-10-07

    申请人： Kabushiki Kaisha Toshiba

    发明人： Hideaki Fukuzawa ,  Yoshihiro Higashi ,  Yoshihiko Fuji ,  Michiko Hara ,  Akio Hori ,  Shiori Kaji ,  Tomohiko Nagata ,  Akiko Yuzawa

    IPC分类号： G01L1/12 ,  A61B5/021 ,  H04R19/04 ,  B81B3/00 ,  G01L3/10

    CPC分类号： G01L1/125 ,  A61B5/021 ,  A61B2562/0247 ,  B81B3/0086 ,  B81B2201/0257 ,  G01L3/102 ,  H04R19/04

    摘要： According to one embodiment, a pressure sensor includes a base unit, a film unit, and a plurality of sensing elements. The plurality of sensing elements is provided on the film unit radially with respect to a centroid of the film unit. The plurality of sensing elements has a first side and a second side intersecting the first side. Each of the plurality of sensing elements includes a first magnetic layer, a second magnetic layer, and an intermediate layer. Each of the plurality of sensing elements has a shape anisotropy characterized by a length of the first side being longer than a length of the second side intersecting the first side. The plurality of sensing elements is provided at lines having radial configurations extending from the centroid to have a prescribed angle between the first side and the line.

    摘要翻译： 根据一个实施例，压力传感器包括基座单元，薄膜单元和多个感测元件。 多个感测元件相对于胶片单元的质心沿径向设置在胶片单元上。 多个感测元件具有与第一侧相交的第一侧和第二侧。 多个感测元件中的每一个包括第一磁性层，第二磁性层和中间层。 多个感测元件中的每一个具有形状各向异性，其特征在于第一侧的长度比与第一侧相交的第二侧的长度长。 多个感测元件设置在具有从质心延伸的径向构型的线上，以在第一侧和线之间具有规定的角度。

    PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
    79.
    发明申请
    PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权
    压力传感器，麦克风，超声波传感器，血压传感器和触控面板

    公开(公告)号：US20150338300A1

    公开(公告)日：2015-11-26

    申请号：US14721523

    申请日：2015-05-26

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Kei MASUNISHI ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa ,  Kazuaki Okamoto

    IPC分类号： G01L9/00

    CPC分类号： G01L9/16 ,  A61B5/02141 ,  A61B2562/0247 ,  A61B2562/028 ,  A61B2562/12

    摘要： According to an embodiment, a pressure sensor includes a support part, a flexible membrane part, and a magnetoresistive element. The flexible membrane part is supported by the support part, and includes a first region and a second region with rigidity lower than rigidity of the first region. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.

    摘要翻译： 根据实施例，压力传感器包括支撑部分，柔性膜部分和磁阻元件。 柔性膜部分由支撑部分支撑，并且包括刚性低于第一区域刚度的第一区域和第二区域。 磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。

    METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM
    80.
    发明申请
    METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM 有权
    制造压力传感器，沉积系统和退火系统的方法

    公开(公告)号：US20150268116A1

    公开(公告)日：2015-09-24

    申请号：US14661164

    申请日：2015-03-18

    申请人： KABUSHIKI KAISHA TOSHIBA

    发明人： Yoshihiko FUJI ,  Hideaki Fukuzawa ,  Shiori Kaji

    IPC分类号： G01L9/06 ,  H01L43/12 ,  H01L43/02

    CPC分类号： H01L43/12 ,  C23C14/50 ,  C23C16/458 ,  G01L1/125 ,  G01L9/0042 ,  G01L9/16 ,  G03F7/707 ,  H01L21/67288 ,  H01L21/6838 ,  H01L21/68728 ,  H01L21/68742 ,  H01L21/6875

    摘要： A method of manufacturing a pressure sensor comprises: above a film portion formed on one surface of a substrate, depositing a first magnetic layer, a second magnetic layer and an intermediate layer between the first and second magnetic layers on one surface of a substrate; removing the deposited layers leaving a part thereof; and removing a part of the substrate from another surface of the substrate. By removing the deposited layers leaving a part thereof, a strain detecting element is formed in a part of a first region, the strain detecting element comprising the first magnetic layer, the second magnetic layer and the intermediate layer. By removing a part of the substrate, a part of the first region of the substrate is removed. In addition, the deposition of the first magnetic layer is performed with the substrate being bended.

    摘要翻译： 制造压力传感器的方法包括：在形成在基板的一个表面上的膜部分上方，在基板的一个表面上在第一和第二磁性层之间沉积第一磁性层，第二磁性层和中间层; 去除留下其一部分的沉积层; 以及从所述衬底的另一表面去除所述衬底的一部分。 通过去除留下其一部分的沉积层，应变检测元件形成在第一区域的一部分中，应变检测元件包括第一磁性层，第二磁性层和中间层。 通过去除衬底的一部分，去除衬底的第一区域的一部分。 此外，第一磁性层的沉积是在衬底被弯曲的情况下进行的。