ELECTRON MICROSCOPE, METHODS TO DETERMINE THE CONTACT POINT AND THE CONTACT OF THE PROBE
    2.
    发明申请
    ELECTRON MICROSCOPE, METHODS TO DETERMINE THE CONTACT POINT AND THE CONTACT OF THE PROBE 失效
    电子显微镜,确定接触点和探头接触的方法

    公开(公告)号:US20070262254A1

    公开(公告)日:2007-11-15

    申请号:US11459359

    申请日:2006-07-23

    IPC分类号: H01J37/26

    CPC分类号: G01R31/307 H01J2237/2594

    摘要: An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or conductive. The electron microscope includes a stage, an electron gun, and at least one probe. The stage is suitable for carrying the sample and the sample is not electrically grounded. The electron gun is suitable for generating an electron beam and accumulating charges on the sample. When the probe contacts with the testing area, the image contrast of the testing area will change. The current through the probe will also change upon contact. Methods have been provided based on these principles to determine “when” and “where” the probe starts to contact the sample surface inside an electron microscope.

    摘要翻译: 提供适用于观察至少一个样品的电子显微镜。 样品具有至少一个测试区域,测试区域上的样品材料是半导体或导电的。 电子显微镜包括载物台,电子枪和至少一个探针。 该阶段适用于携带样品,样品不接地。 电子枪适用于产生电子束并在样品上积累电荷。 当探头与测试区域接触时,测试区域的图像对比度将发生变化。 通过探头的电流也将随接触而改变。 已经基于这些原理提供了用于确定探针在电子显微镜内开始与样品表面接触的“何时”和“在哪里”的方法。

    Module and method for automatic restoring BIOS device

    公开(公告)号:US07100087B2

    公开(公告)日:2006-08-29

    申请号:US10329683

    申请日:2002-12-27

    IPC分类号: G06F11/00

    摘要: A BIOS module for automatic restoring and the related method are provided. The BIOS module has a BIOS memory and a prime BIOS code embedded therein. When the contents of a BIOS memory is damaged, a backup BIOS code can be loaded from other storage media for rebooting the computer system. The BIOS code comprises a BIOS function program module having a compressed function program, a detecting means for detecting the correctness of the BIOS function program module, a restoring module responsive to the detecting means for automatic rebooting the computer when the decompressing procedure has errors to load and execute the BIOS backup code from other storing media. And after rebooting the computer system successfully the restoring module also can restore the BIOS backup code into the BIOS memory. Besides, a differentiating means is applied to check the versions of the backup BIOS code and the prime BIOS code. When the prime BIOS code can boot the computer system successfully and the version thereof is latest than that of the backup BIOS code, the prime BIOS code can be backuped to the storage media.

    Chemically-amplified resist compositions
    4.
    发明授权
    Chemically-amplified resist compositions 失效
    化学扩增抗原组合物

    公开(公告)号:US06878504B2

    公开(公告)日:2005-04-12

    申请号:US10445924

    申请日:2003-05-28

    IPC分类号: G03F7/004 G03F7/039

    摘要: A chemically-amplified resist composition is disclosed, which comprises a polymer of formula (I) below: wherein R1 is H, C1-C4 alkyl, or CF3; Q is C4-C12 cycloalkyl; R2 is H, C1-C4 alkyl, or CF3; R3 is C4-C12 branched or cyclic alkyl; and x+y+z equals to 1. The chemically-amplified resist compositions of the present invention not only can be applied maturely to general lithographic processes, especially to 193 nm lithographic process, but also have excellent photo-sensitivity, and can form a well-resolved pattern and profile.

    摘要翻译: 公开了一种化学增幅抗蚀剂组合物,其包含下式(I)的聚合物:其中R 1为H,C 1 -C 4烷基或CF 3; Q是C 4 -C 12环烷基; R 2是H,C 1 -C 4烷基或CF 3; R 3是C 4 -C 12支链或环状烷基; x + y + z等于1.本发明的化学增幅抗蚀剂组合物不仅可以成熟地应用于一般的光刻工艺,特别是对193nm的光刻工艺,而且还具有优异的光敏性,并且可以形成 良好的模式和形象。

    Hybrid microlens array
    9.
    发明授权
    Hybrid microlens array 失效
    混合微透镜阵列

    公开(公告)号:US06847491B1

    公开(公告)日:2005-01-25

    申请号:US09672159

    申请日:2000-09-27

    摘要: The disclosed hybrid microlens enables the economical production of large diameter, high numerical aperture refractive microlens by microfabrication. The hybrid microlens has a combination of a refractive microlens formed on a thin layer of high index material such as silicon and a spacer layer of a low index material such as fused silica. Advantages include substantially reduced lens sag, fast etching of the microlens, small wafer stack thickness, large diffraction angle in the low index spacer, large optical beam diameter, high optical performance, and low cost.Also disclosed is a design for substantially reduced optical return signal and small polarization dependent optical loss from an optical fiber which is perpendicular to and butt-coupled to a planar optical surface. This design is to form a small slanted surface on the planar optical surface in the vicinity of the optical fiber core and fill the space between the fiber and the slanted surface with an index-matching optical epoxy.

    摘要翻译: 所公开的混合微透镜可通过微细加工经济地生产大直径,高数值孔径折射微透镜。 混合微透镜具有形成在诸如硅的高折射率材料的薄层上的屈光微透镜和诸如熔融二氧化硅的低折射率材料的间隔层的组合。 优点包括:实质上减小的透镜凹陷,微透镜的快速蚀刻,小的晶片堆叠厚度,低折射率间隔物中的大的衍射角,大的光束直径,高的光学性能和低的成本。还公开了一种基本上减小光学返回的设计 来自与平面光学表面垂直并对接耦合的光纤的信号和小偏振相关的光学损耗。 该设计是在光纤芯附近的平面光学表面上形成小的倾斜表面,并用折射率匹配光学环氧树脂填充纤维和倾斜表面之间的空间。

    Multilayer optical fiber coupler
    10.
    发明授权
    Multilayer optical fiber coupler 有权
    多层光纤耦合器

    公开(公告)号:US06328482B1

    公开(公告)日:2001-12-11

    申请号:US09327826

    申请日:1999-06-08

    申请人: Benjamin Bin Jian

    发明人: Benjamin Bin Jian

    IPC分类号: G02B636

    摘要: A multilayer optical fiber coupler for coupling optical radiation between an optical device and an optical fiber, including a first layer that has a fiber socket formed by photolithographic masking and etching to extend through said first layer, and a second layer bonded to the first layer. The first layer may comprise substantially single-crystal silicon. An optical fiber is inserted into the fiber socket to align the optical fiber precisely within the fiber socket. In one embodiment the optical fiber is a single mode fiber, and an optical focusing element formed on the second layer is aligned with the core of the single mode fiber. The second layer may comprise glass having an index of refraction that approximately matches the index of the optical fiber, and an optical epoxy is used to affix the optical fiber into the fiber socket and fill the gaps between the end face of the fiber and the second layer. Embodiments are disclosed in which an optical device such as a VCSEL or photodetector is bonded to the second layer. Alternative embodiments are disclosed in which the optical device is incorporated into the second layer. Advantages include reduced cost due to batch fabrication techniques, and passive alignment of the optical fiber.

    摘要翻译: 一种用于在光学器件和光纤之间耦合光学辐射的多层光纤耦合器,包括具有通过光刻掩模形成的光纤插座和蚀刻以延伸通过所述第一层的第一层,以及结合到第一层的第二层。 第一层可以包括基本上单晶硅。 将光纤插入光纤插座中,将光纤精确地对准光纤插座。 在一个实施例中,光纤是单模光纤,并且形成在第二层上的光聚焦元件与单模光纤的芯对准。 第二层可以包括具有与光纤的折射率近似匹配的折射率的玻璃,并且使用光学环氧树脂将光纤固定到光纤插座中并填充光纤端面与第二个光纤之间的间隙 层。 公开了一种诸如VCSEL或光电检测器的光学装置结合到第二层的实施例。 公开了其中将光学装置并入第二层的替代实施例。 优点包括由批量制造技术降低的成本以及光纤的被动对准。