METHOD TO DECREASE THIN FILM TENSILE STRESSES RESULTING FROM PHYSICAL VAPOR DEPOSITION
    5.
    发明申请
    METHOD TO DECREASE THIN FILM TENSILE STRESSES RESULTING FROM PHYSICAL VAPOR DEPOSITION 审中-公开
    从物理蒸气沉积中减少薄膜拉伸应力的方法

    公开(公告)号:US20090124067A1

    公开(公告)日:2009-05-14

    申请号:US11940220

    申请日:2007-11-14

    IPC分类号: H01L21/20

    摘要: A method and apparatus for a backside metallization of a wafer is provided. The wafer comprised of a first substance is bent by creating tension on a backside and creating compression on a front side prior to deposition of a thin film of a second substance. After deposition, the wafer is released and the thin film deposited on the wafer exhibits less tensile stress than if the thin film was deposited on a flat wafer.

    摘要翻译: 提供了一种用于晶片背面金属化的方法和装置。 由第一物质构成的晶片通过在背面产生张力而弯曲,并且在沉积第二物质的薄膜之前在前侧产生压缩。 沉积后,晶片被释放,并且沉积在晶片上的薄膜表现出比如果薄膜沉积在平坦的晶片上的拉应力更小的拉应力。

    Low temperature thin wafer backside vacuum process with backgrinding tape
    6.
    发明授权
    Low temperature thin wafer backside vacuum process with backgrinding tape 有权
    低温薄晶片背面真空工艺带背磨带

    公开(公告)号:US09390968B2

    公开(公告)日:2016-07-12

    申请号:US13997992

    申请日:2011-09-29

    申请人: Eric J. Li

    发明人: Eric J. Li

    IPC分类号: H01L21/768 H01L21/683

    摘要: Vacuum processing, such as a backside metallization (BSM) deposition, is performed on a taped wafer after a gas escape path is formed between a base film of the tape and the wafer frontside surface following backgrind. Venting provided by the gas escape path reduces formation of bubbles under the tape. The gas escape path may be provided, for example, by a selective pre-curing of tape adhesive, to breach an edge seal and place the wafer frontside surface internal to the edge seal in fluid communication with an environment external to the edge seal. With the thinned wafer supported by the pre-cured tape, BSM is then deposited while the wafer and tape are cooled, for example, via a cooled electrostatic chuck.

    摘要翻译: 在带状基膜和背面研磨后的晶片正面之间形成气体逸出路径之后,在带状晶片上进行真空处理,例如背面金属化(BSM)沉积。 通过气体逸出路径提供的排气减少了胶带下面的气泡的形成。 气体逸出路径可以例如通过带式粘合剂的选择性预固化来提供,以破坏边缘密封并且将边缘密封件内部的晶片前侧表面与边缘密封件外部的环境流体连通。 利用由预固化带支撑的薄化晶片,然后在晶片和带被冷却时,例如经由冷却的静电卡盘沉积BSM。