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207 条记录 (耗时 0.037 秒)

    Reduction of metal oxide in a dual frequency etch chamber
    1.
    发明授权
    Reduction of metal oxide in a dual frequency etch chamber 失效
    在双频蚀刻室中还原金属氧化物

    公开(公告)号：US06547934B2

    公开(公告)日：2003-04-15

    申请号：US09082746

    申请日：1998-05-21

    申请人： Barney M. Cohen ,  Gilbert Hausmann ,  Vijay Parkhe ,  Zheng Xu

    发明人： Barney M. Cohen ,  Gilbert Hausmann ,  Vijay Parkhe ,  Zheng Xu

    IPC分类号： C25B500

    CPC分类号： H01J37/321 ,  H01J37/32165 ,  H01L21/31122

    摘要： The invention generally provides an apparatus and a method of removing metal oxides, particularly copper oxides and aluminum oxides, from a substrate surface. Primarily, the invention eliminates sputtering of copper oxide from the bottom of an interconnect feature onto the side walls of an interconnect feature, thereby preventing diffusion of the copper atom through the dielectric material and degradation of the device. The invention also eliminates sputtering of the copper oxides onto the chamber side walls that may eventually flake off and cause defects on the substrate. The method of reducing metal oxides from a substrate surface comprises placing the substrate within a plasma processing chamber, flowing a processing gas comprising hydrogen into the chamber, and maintaining a plasma of the processing gas within the chamber through inductive coupling. The method is preferably performed using a dual frequency etch chamber wherein adjustments are made in the processing gas flow, the RF powers and the exhaust pumping speeds to eliminate sputtering of the copper oxide and to maximize the reduction reaction.

    摘要翻译： 本发明通常提供从基材表面去除金属氧化物，特别是铜氧化物和氧化铝的装置和方法。 首先，本发明消除了氧化铜从互连结构的底部溅射到互连部件的侧壁上，从而防止铜原子通过电介质材料的扩散和器件的劣化。 本发明还消除了铜氧化物溅射到腔室侧壁上，这可最终剥落并引起衬底上的缺陷。 从衬底表面还原金属氧化物的方法包括将衬底放置在等离子体处理室内，使包含氢气的处理气体流入室中，以及通过电感耦合将处理气体的等离子体保持在室内。 该方法优选使用双频蚀刻室进行，其中在处理气体流中进行调节，RF功率和排气泵送速度以消除氧化铜的溅射并使还原反应最大化。

    System and method for conditional task switching during ordering scope transitions
    2.
    发明授权
    System and method for conditional task switching during ordering scope transitions 有权
    在订购范围转换期间进行条件任务切换的系统和方法

    公开(公告)号：US09372724B2

    公开(公告)日：2016-06-21

    申请号：US14231789

    申请日：2014-04-01

    申请人： Zheng Xu ,  Tommi M. Jokinen ,  William C. Moyer

    发明人： Zheng Xu ,  Tommi M. Jokinen ,  William C. Moyer

    IPC分类号： G06F9/48

    CPC分类号： G06F9/4843 ,  G06F9/461 ,  G06F9/48

    摘要： A data processing system includes a processor core and a hardware module. The processor core performs tasks on data packets. The hardware module stores a first ordering scope identifier at a first storage location of the ordering scope manager. The first ordering scope identifier indicates a first ordering scope that a first task is operating in. The ordering scope manager increments the first ordering scope identifier to create a new ordering scope identifier. In response to determining that the processor core is authorized to transition the first task from the first ordering scope to a second ordering scope associated with the new ordering scope identifier, the ordering scope manager provides hint information to the processor core. The processor core transitions from the first ordering scope to the second ordering scope without completing a task switch in response to the hint information.

    摘要翻译： 数据处理系统包括处理器核心和硬件模块。 处理器内核在数据包上执行任务。 硬件模块在订购范围管理器的第一存储位置处存储第一订购范围标识符。 第一个订购范围标识符指示第一个任务正在操作的第一个订购范围。订购范围管理器增加第一个订购范围标识符以创建新的订购范围标识符。 响应于确定处理器核被授权将第一任务从第一排序范围转换到与新排序范围标识符相关联的第二排序范围，订购范围管理器向处理器核提供提示信息。 处理器核心从第一订购范围转换到第二订购范围，而不响应于提示信息完成任务切换。

    Event triggered memory mapped access
    3.
    发明授权
    Event triggered memory mapped access 有权
    事件触发内存映射访问

    公开(公告)号：US08700878B2

    公开(公告)日：2014-04-15

    申请号：US12485190

    申请日：2009-06-16

    申请人： William D. Schwarz ,  Joseph P. Gergen ,  Jason T. Nearing ,  Zheng Xu

    发明人： William D. Schwarz ,  Joseph P. Gergen ,  Jason T. Nearing ,  Zheng Xu

    IPC分类号： G06F12/00

    CPC分类号： G06F12/0292 ,  G06F11/3636

    摘要： In one or more embodiments, a data processing system can include at least one core capable of executing instructions of an instruction set architecture and a triggered memory map access (tMMA) system coupled to the at least one core. The tMMA system can receive one or more events and, in response, perform one or more actions. For example, the actions can include transactions which can include a write to a an address of the memory map, a read from an address of the memory map, a read followed by write to two respective addresses of the memory map, and/or a fetch transaction. A result of a transaction (e.g., data read, data written, error, etc.) can be used in generating a trace message. For example, the tMMA system can generate a trace message that includes the result of the transaction and send the trace message to a trace message bus.

    摘要翻译： 在一个或多个实施例中，数据处理系统可以包括能够执行指令集架构的指令的至少一个核心以及耦合到所述至少一个核心的触发的存储器映射访问（tMMA）系统。 tMMA系统可以接收一个或多个事件，并作为响应执行一个或多个动作。 例如，动作可以包括可以包括对存储器映射的地址的写入，从存储器映射的地址的读取，随后写入存储器映射的两个相应地址的读取的事务，和/或 提取事务。 事务的结果（例如，数据读取，数据写入，错误等）可用于生成跟踪消息。 例如，tMMA系统可以生成包含事务结果的跟踪消息，并将跟踪消息发送到跟踪消息总线。

    System and method for performing handover in WiMAX mobile communication system
    5.
    发明授权
    System and method for performing handover in WiMAX mobile communication system 有权
    用于在WiMAX移动通信系统中执行切换的系统和方法

    公开(公告)号：US08588176B2

    公开(公告)日：2013-11-19

    申请号：US12034706

    申请日：2008-02-21

    申请人： Seong-Taek Hwang ,  Shuangfeng Han ,  Chunhui Zhou ,  Jing Wang ,  Ming Zhao ,  Zheng Xu

    发明人： Seong-Taek Hwang ,  Shuangfeng Han ,  Chunhui Zhou ,  Jing Wang ,  Ming Zhao ,  Zheng Xu

    IPC分类号： H04W4/00

    CPC分类号： H04W36/06 ,  H04W88/085

    摘要： Disclosed is a system and a method for performing handover in a Worldwide interoperability for Microwave Access (WiMAX) mobile communication system supporting broadband wireless access. The system includes a plurality of Mobile Stations (MSs); at least one distributed antenna having the ability to perform simultaneous communications with the plurality of MSs; and a base station connected to the at least one distributed antenna through optical fibers for performing communications and handovers with the multiple MSs.

    摘要翻译： 公开了一种在支持宽带无线接入的全球微波接入（WiMAX）移动通信系统互操作性中进行切换的系统和方法。 该系统包括多个移动站（MS）; 至少一个具有与所述多个MS同时通信的能力的分布式天线; 以及通过光纤连接到所述至少一个分布式天线的基站，用于执行与所述多个MS的通信和切换。

    Electrically tunable liquid crystal lens set with central electrode
    7.
    发明授权
    Electrically tunable liquid crystal lens set with central electrode 有权
    配有中心电极的电可调液晶透镜

    公开(公告)号：US08451408B2

    公开(公告)日：2013-05-28

    申请号：US13530128

    申请日：2012-06-22

    申请人： Chi-Yuan Chin ,  Kuei-Jyun Chen ,  Yong Cao ,  Rong-Li Liu ,  Geng Zhong ,  Zheng Xu ,  Ling-Yuan Tseng

    发明人： Chi-Yuan Chin ,  Kuei-Jyun Chen ,  Yong Cao ,  Rong-Li Liu ,  Geng Zhong ,  Zheng Xu ,  Ling-Yuan Tseng

    IPC分类号： G02F1/1337 ,  G02F1/13

    CPC分类号： G02B3/14 ,  G02F1/29 ,  G02F2001/294

    摘要： A liquid crystal lens cell set includes a plurality of liquid crystal lenses overlapping to each other. Each of the liquid crystal lenses is supported between a pair of flat layers. One of the layers supports a planar electrode made of ITO. The other electrode, also formed of ITO, is supported in the center of the opposing substrate and projects toward the center of the liquid crystal layer. A power supply creates a potential difference between the electrodes and imposes a non-uniform electric field on the liquid crystal modules which aligns them in which a way as to act as a lens. By varying voltage between the electrodes the focal length of the lens may be controlled. A central electrode may be in the form of a beam or of a pointed tip. An electrode having a central hole may be associated with the central electrode or the planar electrode.

    摘要翻译： 液晶透镜单元组包括彼此重叠的多个液晶透镜。 每个液晶透镜被支撑在一对平面层之间。 其中一层支撑由ITO制成的平面电极。 也由ITO形成的另一个电极被支撑在相对基板的中心并朝向液晶层的中心突出。 电源产生电极之间的电位差，并在液晶模块上施加不均匀的电场，使得它们成为透镜的方式。 通过改变电极之间的电压，可以控制透镜的焦距。 中心电极可以是梁或尖尖的形式。 具有中心孔的电极可以与中心电极或平面电极相关联。

    SOLAR CELL WITH SHADE-FREE FRONT ELECTRODE
    9.
    发明申请
    SOLAR CELL WITH SHADE-FREE FRONT ELECTRODE 审中-公开
    太阳能电池与无电镀前电极

    公开(公告)号：US20110277816A1

    公开(公告)日：2011-11-17

    申请号：US13048804

    申请日：2011-03-15

    申请人： Zheng Xu ,  Jianming Fu ,  Jiunn Benjamin Heng ,  Chentao Yu

    发明人： Zheng Xu ,  Jianming Fu ,  Jiunn Benjamin Heng ,  Chentao Yu

    IPC分类号： H01L31/052 ,  H01L31/0232 ,  H01L31/18 ,  H01L31/0224

    CPC分类号： H01L31/022425 ,  H01L31/02363 ,  H01L31/056 ,  H01L31/0747 ,  Y02E10/52

    摘要： One embodiment of the present invention provides a solar cell with shade-free front electrode. The solar cell includes a photovoltaic body, a front-side ohmic contact layer situated above the photovoltaic body, a back-side ohmic contact layer situated below the photovoltaic body, a front-side electrode situated above the front-side ohmic contact layer, and a back-side electrode situated below the back-side ohmic contact layer. The front-side electrode includes a plurality of parallel metal grid lines, and the surface of at least one metal grid line is curved, thereby allowing incident light hitting the curved surface to be reflected downward and absorbed by the solar cell surface adjacent to the metal grid line.

    摘要翻译： 本发明的一个实施例提供一种具有无遮蔽的前电极的太阳能电池。 太阳能电池包括光电体，位于光电体上方的前侧欧姆接触层，位于光伏体下方的背面欧姆接触层，位于前侧欧姆接触层上方的前侧电极，以及 位于背侧欧姆接触层下方的背面电极。 前侧电极包括多个平行的金属网格线，并且至少一个金属网格线的表面是弯曲的，从而允许入射到该曲面的入射光向下反射并被靠近金属的太阳能电池表面吸收 网格线。