Abstract:
The present invention provides systems and methods for automatically mining massive intelligence databases to discover sequential patterns therein using a novel combination of forward and reverse temporal processing techniques as an enhancement to well known pattern discovery algorithms.
Abstract:
The present invention provides systems and methods for automatically mining massive intelligence databases to discover sequential patterns therein using a novel combination of forward and reverse temporal processing techniques as an enhancement to well known pattern discovery algorithms.
Abstract:
A heater plate for butt fusion of polyolefin pipe has concentric rings, each with an array of radial bores containing cartridge heaters, and a concentric cavity between the rings to carry wiring from the cartridge heaters. The inner ring components are symmetrical to provide a foundation for uniform surface temperature distribution across the entire area of the inner ring. The outer ring components are coordinated to counterbalance the heat sinks resulting from their asymmetrical configuration so as to increase the likelihood that the uniform surface temperature distribution foundation established for the entire area of the inner ring can be maintained and so that the total diameter of the heater plate, including the outer ring, can be used in fusing pipe.
Abstract:
A data fusion workstation apparatus and method utilizes algorithms and can be used for applications such as, e.g., hydrogeological modeling, steady-state hydrological flow modeling, transport uncertainty determination, flow/transport fusion, oil reserve management, water supply development, geo-technical engineering projects, and management decision optimization. The invention uses a spatial continuity model which is extended to 3D and equations are provided for computation of the spatial AR coefficients from a desired covariance function. The data fusion workstation provides more robust optimization iterations by use of an algorithm that includes Trust Region or Step Halving methods to limit the Gauss Newton step in solving non-linear least squares problems. Measurement biases and error parameters, and parameters which define a hydrological flow model can be included in the common set of estimated states. An LSQR or other iterative algorithm is used to reduce the computation time for each step of a nonlinear optimization, thereby allowing computation of problems having a very large number of states. The invention preferably provides transport uncertainty calculations in a fusion post-processing step. The invention allows contaminant measurements to be used with hydraulic head and conductivity measurements for better calibration of flow and transport models.
Abstract:
A data fusion workstation provides an apparatus and method for realizing the full potential of geophysical and remote sensing by mathematically integrating sensors with each other. Sensor data from each of a plurality of sensor types are related mathematically to each other through a common site model to produce a fused picture with quantified accuracy. Using the concept of pseudo-data, information in sensor data is made equivalent to data in a statistical correlation model, allowing fusion of model information with sensor data during a data inversion step. The process of data fusion comprises several processing steps, which are executed by various microprocessors in a recursire/distributed/parallel-architecture platform. These steps comprise geophysical inversion, geostatistical Kriging, application of statistical information concepts, implementation of a square root information smoother, and application of likelihood techniques.
Abstract:
Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a substrate holder, an anode chamber housing an anode, and an ionically resistive ionically permeable element positioned between a substrate and the anode chamber during electroplating. The anode chamber may be movable with respect to the ionically resistive ionically permeable element to vary a distance between the anode chamber and the ionically resistive ionically permeable element during electroplating. The anode chamber may include an insulating shield oriented between the anode and the ionically resistive ionically permeable element, with opening in a central region of the insulating shield.
Abstract:
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
Abstract:
An apparatus for wet etching metal from a semiconductor wafer comprises a wafer holder for rotating a wafer and a plurality of nozzles for applying separate flow patterns of etching liquid to the surface of the wafer. The flow patterns impact the wafer in distinct band-like impact zones. The flow pattern of etching liquid from at least one nozzle is modulated during a total etching time control the cumulative etching rate in one local etch region relative to the cumulative etching rate in one or more other local etch regions. Some embodiments include a lower etch chamber and an upper rinse chamber separated by a horizontal splash shield. Some embodiments include a retractable vertical splash shield used to prevent splashing of etching liquid onto the inside walls of a treatment container. An etch-liquid delivery system includes a plurality of nozzle flow paths having corresponding nozzle flow resistances, and a plurality of drain flow paths having corresponding drain flow resistances. Nozzle flow resistances and drain flow resistances are matched so that switching the flow from a nozzle to a corresponding drain flow path does not change the flow rate of etching liquid through other nozzles. A non-wafer-contacting measuring device measures a metal thickness on a rotating semiconductor wafer during metal wet etching by immersing a plurality of electrodes in etching liquid in close proximity to the wafer surface of the rotating wafer and determining electrical resistance between a plurality of electrodes.
Abstract:
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
Abstract:
Disclosed are pre-wetting apparatus designs and methods. These apparatus designs and methods are used to pre-wet a wafer prior to plating a metal on the surface of the wafer. Disclosed compositions of the pre-wetting fluid prevent corrosion of a seed layer on the wafer and also improve the filling rates of features on the wafer.