公开(公告)号：US6068780A

公开(公告)日：2000-05-30

申请号：US892586

申请日：1997-07-14

申请人： Conrad M. Yu

发明人： Conrad M. Yu

IPC分类号： G01N30/02 ,  G01N30/56 ,  G01N30/60 ,  B01D15/08

CPC分类号： G01N30/6095 ,  G01N2030/025 ,  G01N2030/567 ,  G01N30/6004

摘要： A micro-miniature gas chromatograph column is fabricated by forming matching halves of a circular cross-section spiral microcapillary in two silicon wafers and then bonding the two wafers together using visual or physical alignment methods. Heating wires are deposited on the outside surfaces of each wafer in a spiral or serpentine pattern large enough in area to cover the whole microcapillary area inside the joined wafers. The visual alignment method includes etching through an alignment window in one wafer and a precision-matching alignment target in the other wafer. The two wafers are then bonded together using the window and target. The physical alignment methods include etching through vertical alignment holes in both wafers and then using pins or posts through corresponding vertical alignment holes to force precision alignment during bonding. The pins or posts may be withdrawn after curing of the bond. Once the wafers are bonded together, a solid phase of very pure silicone is injected in a solution of very pure chloroform into one end of the microcapillary. The chloroform lowers the viscosity of the silicone enough that a high pressure hypodermic needle with a thumbscrew plunger can force the solution into the whole length of the spiral microcapillary. The chloroform is then evaporated out slowly to leave the silicone behind in a deposit.

摘要翻译： 通过在两个硅晶片中形成圆形横截面螺旋微毛细管的匹配半部，然后使用视觉或物理对准方法将两个晶片结合在一起来制造微型气相色谱仪柱。 加热丝以大到足以覆盖接合的晶片内的整个微毛细管区域的螺旋或蛇形图案沉积在每个晶片的外表面上。 视觉对准方法包括通过一个晶片中的对准窗口和另一个晶片中的精密匹配对准目标进行蚀刻。 然后使用窗口和目标将两个晶片粘合在一起。 物理对准方法包括通过两个晶片中的垂直对准孔蚀刻，然后通过相应的垂直对准孔使用销或柱，以在接合期间迫使精确对准。 在固化焊接后，销或柱可以被取出。 一旦晶片结合在一起，将非常纯的硅氧烷的固相注入到非常纯的氯仿的溶液中到微毛细管的一端。 氯仿降低了硅胶的粘度，足以使用带有指旋螺丝柱塞的高压皮下注射针将液体推入螺旋微毛细管的整个长度。 然后缓慢蒸发氯仿，使沉积物中的硅酮留下。

公开(公告)号：US4316786A

公开(公告)日：1982-02-23

申请号：US188791

申请日：1980-09-19

申请人： Conrad M. Yu ,  John D. Illige

发明人： Conrad M. Yu ,  John D. Illige

IPC分类号： B01F11/02 ,  C25D17/16 ,  C25D21/10 ,  C25D21/12

CPC分类号： C25D21/10 ,  B01F11/025 ,  C25D17/16 ,  Y10S376/916

摘要： The thickness, uniformity, and surface smoothness requirements for surface coatings of glass microspheres for use as targets for laser fusion research are critical. Because of their minute size, the microspheres are difficult to manipulate and control in electroplating systems. The electroplating apparatus (10) of the present invention addresses these problems by providing a cathode cell (20) having a cell chamber (22), a cathode (23) and an anode (26) electrically isolated from each other and connected to an electrical power source (24). During the plating process, the cathode (23) is controllably vibrated along with solution pulse to maintain the particles in random free motion so as to attain the desired properties.

摘要翻译： 玻璃微球的表面涂层的厚度，均匀度和表面平滑度要求用作激光融合研究的目标是至关重要的。 由于它们的微小尺寸，微球在电镀系统中难以操作和控制。 本发明的电镀设备（10）通过提供具有电池室（22），阴极（23）和阳极（26）的阴极单元（20）来解决这些问题，所述阴极单元彼此电隔离并连接到电气 电源（24）。 在电镀过程中，阴极（23）与溶液脉冲一起可控地振动，以保持颗粒随机自由运动，从而获得所需的性能。

公开(公告)号：US06670024B1

公开(公告)日：2003-12-30

申请号：US10163683

申请日：2002-06-05

申请人： Conrad M. Yu

发明人： Conrad M. Yu

IPC分类号： G01N3002

CPC分类号： H01L23/3738 ,  F28F3/12 ,  G01N30/6095 ,  G01N2030/3061 ,  H01L23/473 ,  H01L2924/0002 ,  Y10T428/131 ,  Y10T428/24917 ,  Y10T428/2495 ,  H01L2924/00

摘要： A glass-silicon column that can operate in temperature variations between room temperature and about 450° C. The glass-silicon column includes large area glass, such as a thin Corning 7740 boron-silicate glass bonded to a silicon wafer, with an electrode embedded in or mounted on glass of the column, and with a self alignment silicon post/glass hole structure. The glass/silicon components are bonded, for example be anodic bonding. In one embodiment, the column includes two outer layers of silicon each bonded to an inner layer of glass, with an electrode imbedded between the layers of glass, and with at least one self alignment hole and post arrangement. The electrode functions as a column heater, and one glass/silicon component is provided with a number of flow channels adjacent the bonded surfaces.

摘要翻译： 玻璃 - 硅柱可以在室温和约450℃之间的温度变化下工作。玻璃 - 硅柱包括大面积玻璃，例如结合到硅晶片的薄的Corning 7740硼硅酸盐玻璃，其中电极嵌入 插入或安装在玻璃柱上，并具有自对准硅柱/玻璃孔结构。 玻璃/硅组分被结合，例如是阳极结合。 在一个实施方案中，该柱包括两个外部硅层，每个硅层分别结合到玻璃的内层，电极嵌入在玻璃层之间，以及至少一个自对准孔和柱布置。 电极用作列加热器，并且一个玻璃/硅部件在接合表面附近设置有多个流动通道。

公开(公告)号：US6134944A

公开(公告)日：2000-10-24

申请号：US302047

申请日：1999-04-29

申请人： Conrad M. Yu ,  Jackson C. Koo

发明人： Conrad M. Yu ,  Jackson C. Koo

IPC分类号： G01N1/40 ,  G01N29/02 ,  G01N30/12 ,  G01N29/18 ,  G01N31/06

CPC分类号： G01N29/022 ,  G01N30/12 ,  G01N1/40 ,  G01N2030/121 ,  G01N2291/02466 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0426

摘要： A system and method for preconcentrating, identifying, and quantifying chemical and biological substances is disclosed. An input valve directs a first volume of a sample gas to a surface acoustic wave (SAW) device. The SAW device preconcentrates and detects a mass of a substance within the sample gas. An output valve receives a second volume of the sample gas containing the preconcentrated substance from the SAW device and directs the second volume to a gas chromatograph (GC). The GC identifies the preconcentrated substance within the sample gas. A shunt valve exhausts a volume of the sample gas equal to the first volume minus the second volume away from the SAW device and the GC. The method of the present invention includes the steps of opening an input valve for passing a first volume of a sample gas to a SAW device; preconcentrating and detecting a mass of a substance within the sample gas using the SAW device; opening an output valve for passing a second volume of the sample gas containing the preconcentrated substance to a gas chromatograph (GC); and then identifying the preconcentrated substance within the sample gas using the GC.

摘要翻译： 公开了一种用于预浓缩，鉴定和定量化学和生物物质的系统和方法。 输入阀将第一体积的样品气体引导到表面声波（SAW）装置。 SAW器件预浓缩并检测样品气体中物质的质量。 输出阀从SAW装置接收含有预浓缩物质的样品气体的第二体积，并将第二体积引导至气相色谱仪（GC）。 GC识别样品气体中的预浓缩物质。 分流阀排出等于第一容积的样品气体的体积减去远离SAW器件和GC的第二体积。 本发明的方法包括以下步骤：打开用于将第一体积样品气体传递到SAW器件的输入阀; 使用SAW器件预浓缩和检测样品气体内的物质的质量; 打开输出阀，用于将含有预浓缩物质的第二体积的样品气体通入气相色谱仪（GC）; 然后使用GC鉴定样品气体中的预浓缩物质。

公开(公告)号：US06933496B2

公开(公告)日：2005-08-23

申请号：US09883665

申请日：2001-06-18

申请人： Jackson C. Koo ,  Conrad M. Yu

发明人： Jackson C. Koo ,  Conrad M. Yu

IPC分类号： G01N27/64 ,  B01D59/44 ,  H01J49/00

CPC分类号： G01N27/622

摘要： An ion mobility sensor which can detect both ion and molecules simultaneously. Thus, one can measure the relative arrival times between various ions and molecules. Different ions have different mobility in air, and the ion sensor enables measurement of ion mobility, from which one can identify the various ions and molecules. The ion mobility sensor which utilizes a pair of glow discharge devices may be designed for coupling with an existing gas chromatograph, where various gas molecules are already separated, but numbers of each kind of molecules are relatively small, and in such cases a conventional ion mobility sensor cannot be utilized.

摘要翻译： 可同时检测离子和分子的离子迁移率传感器。 因此，可以测量各种离子和分子之间的相对到达时间。 不同的离子在空气中具有不同的迁移率，离子传感器可以测量离子迁移率，从而可以从中识别各种离子和分子。 利用一对辉光放电装置的离子迁移率传感器可以被设计成与现有的气相色谱仪耦合，其中各种气体分子已被分离，但是各种分子的数量相对较小，在这种情况下，常规的离子迁移率 传感器不能使用。

公开(公告)号：US06649078B2

公开(公告)日：2003-11-18

申请号：US09732004

申请日：2000-12-06

申请人： Conrad M. Yu

发明人： Conrad M. Yu

IPC分类号： C03C1500

CPC分类号： B81C1/00071 ,  B01L3/502707 ,  B01L2200/12 ,  B81B2201/058 ,  B81B2203/0376

摘要： Method and system of forming microfluidic capillaries in a variety of substrate materials. A first layer of a material such as silicon dioxide is applied to a channel etched in substrate. A second, sacrificial layer of a material such as a polymer is deposited on the first layer. A third layer which may be of the same material as the first layer is placed on the second layer. The sacrificial layer is removed to form a smooth walled capillary in the substrate.

摘要翻译： 在各种基材中形成微流体毛细管的方法和系统。 将诸如二氧化硅的材料的第一层施加到在衬底中蚀刻的沟道。 第二层，诸如聚合物的材料的牺牲层沉积在第一层上。 可以与第一层材料相同的第三层被放置在第二层上。 除去牺牲层以在衬底中形成平滑壁的毛细管。

公开(公告)号：US5882496A

公开(公告)日：1999-03-16

申请号：US807152

申请日：1997-02-27

申请人： M. Allen Northrup ,  Conrad M. Yu ,  Norman F. Raley

发明人： M. Allen Northrup ,  Conrad M. Yu ,  Norman F. Raley

IPC分类号： B01D39/20 ,  B01D57/02 ,  B01D71/02 ,  B01J19/00 ,  B01L3/00 ,  G01N27/447 ,  G01N27/27 ,  B01D24/00 ,  B01D53/22

CPC分类号： B01D67/0044 ,  B01D39/2006 ,  B01D57/02 ,  B01D71/02 ,  B01J19/0093 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  G01N27/44743 ,  G01N27/44791 ,  B01D2325/04 ,  B01J2219/00828 ,  B01J2219/00873 ,  B01J2219/00905 ,  B01J2219/00912 ,  B01L2300/0645 ,  B01L2300/0681 ,  B01L2300/1827 ,  B01L2400/0421 ,  B01L2400/0442 ,  B01L2400/0688 ,  Y10S977/832 ,  Y10S977/888

摘要： Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gasses in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters.

摘要翻译： 制造和使用多孔硅结构以增加加热的反应室，电泳装置和热气传感器致动器，化学预浓缩物和过滤或控制流动装置的表面积。 特别地，这种高表面积或特定孔径的多孔硅结构在用于微小尺度的这些方法的应用中将可用于显着增加液体和气体的吸附，汽化，解吸，冷凝和流动。 将受益于高表面积的多孔硅结构的实例包括样品预浓缩器，其设计成吸附并随后从样品背景中解吸特定化学物质; 具有增强的表面反应速率的化学反应室; 以及具有增加压力的传感器致动器室装置，用于集成膜的热气动致动。 受益于特定孔径多孔硅的实例是化学/生物过滤器和具有活性或相邻表面的热活化流动装置，例如电极或加热器。

公开(公告)号：US5583281A

公开(公告)日：1996-12-10

申请号：US499625

申请日：1995-07-07

申请人： Conrad M. Yu

发明人： Conrad M. Yu

IPC分类号： G01N30/02 ,  G01N30/20 ,  G01N30/60

CPC分类号： G01N30/20 ,  G01N30/6095 ,  G01N2030/205 ,  G01N30/02

摘要： A microminiature gas chromatograph (.mu.GC) comprising a least one silicon wafer, a gas injector, a column, and a detector. The gas injector has a normally closed valve for introducing a mobile phase including a sample gas in a carrier gas. The valve is fully disposed in the silicon wafer(s). The column is a microcapillary in silicon crystal with a stationary phase and is mechanically connected to receive the mobile phase from the gas injector for the molecular separation of compounds in the sample gas. The detector is mechanically connected to the column for the analysis of the separated compounds of sample gas with electronic means, e.g., ion cell, field emitter and PIN diode.

摘要翻译： 包含至少一个硅晶片，气体注入器，柱和检测器的微型气相色谱仪（μGC）。 气体喷射器具有常闭阀，用于将包括样品气体的流动相引入载气中。 阀完全设置在硅晶片中。 该柱是具有固定相的硅晶体中的微毛细管，并机械连接以从气体注入器接收流动相，用于样品气体中化合物的分子分离。 检测器机械地连接到色谱柱，用于分析样品气体分离的化合物与电子装置，例如离子电池，场致发射体和PIN二极管。

公开(公告)号：US07343779B1

公开(公告)日：2008-03-18

申请号：US11295233

申请日：2005-12-05

申请人： Conrad M. Yu

发明人： Conrad M. Yu

IPC分类号： G01N30/06 ,  G01N30/26 ,  G01N30/62

CPC分类号： G01N30/08 ,  G01N2030/0095 ,  G01N2030/025 ,  G01N2030/085 ,  G01N2030/3007

摘要： A hand-held, ultra-sensitive gas chromatograph which provides real time detection and analysis of chemical compounds or impurities is disclosed. The detection sensitivity ranges from parts per trillion to parts per million with an average retention time ranging from thirty to forty-five seconds. Optimum calculated effective plate number is 55,000, with a response time on the order of two minutes. The self-contained apparatus operates on twenty-four watts, weighs twelve pounds, and measures 8″×6″×13.″

摘要翻译： 公开了一种提供实时检测和分析化合物或杂质的手持式超灵敏气相色谱仪。 检测灵敏度范围从万亿分之几到百万分之一，平均保留时间为三十四十五秒。 最佳计算有效盘数为55,000，响应时间约为2分钟。 独立设备运行二十四瓦，重十二磅，测量8''x6''x13。

公开(公告)号：US06736000B2

公开(公告)日：2004-05-18

申请号：US09919171

申请日：2001-11-15

申请人： Jackson C. Koo ,  Conrad M. Yu

发明人： Jackson C. Koo ,  Conrad M. Yu

IPC分类号： G01N3002

CPC分类号： G01N27/70 ,  G01N30/64 ,  G01N2030/642

摘要： A highly sensitive electronic ion cell for the measurement of trace elements in He carrier gas which involves glow discharge. A constant wave (CW) stable glow discharge detector which is controlled through a biased resistor, can detect the change of electron density caused by impurities in the He carrier gas by many orders of magnitude larger than that caused by direct ionization or electron capture. The stable glow discharge detector utilizes a floating pseudo-electrode to form a probe in or near the plasma and a solid rod electrode. By using this probe, the large variation of electron density due to trace amounts of impurities can be directly measured. The solid rod electrode provides greater stability and thus easier alignment.

摘要翻译： 用于测量He载气中微量元素的高灵敏度电子离子电池，涉及辉光放电。 通过偏置电阻器控制的恒定波（CW）稳定辉光放电检测器可以检测由He载流子中的杂质引起的电子密度的变化比直接电离或电子捕获引起的电子密度变化多许多个数量级。 稳定的辉光放电检测器利用浮动的伪电极在等离子体中或其附近形成探针，以及固体棒电极。 通过使用该探针，可以直接测量由微量杂质引起的电子密度的大变化。 实心棒电极提供更大的稳定性，从而更容易对准。