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16 条记录 (耗时 0.015 秒)

    LASER APPARATUS
    1.
    发明申请
    LASER APPARATUS 审中-公开

    公开(公告)号：US20190173259A1

    公开(公告)日：2019-06-06

    申请号：US16266189

    申请日：2019-02-04

    申请人： Gigaphoton Inc.

    发明人： Takeshi ASAYAMA ,  Hiroyuki MASUDA

    IPC分类号： H01S3/097 ,  H01S3/038 ,  H01S3/036

    摘要： A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.

    LASER APPARATUS
    4.
    发明申请
    LASER APPARATUS 有权
    激光装置

    公开(公告)号：US20160190763A1

    公开(公告)日：2016-06-30

    申请号：US15060148

    申请日：2016-03-03

    申请人： GIGAPHOTON INC.

    发明人： Kouji KAKIZAKI ,  Takeshi ASAYAMA ,  Osamu WAKABAYASHI

    IPC分类号： H01S3/038 ,  H01S3/225

    CPC分类号： H01S3/038 ,  H01S3/08009 ,  H01S3/134 ,  H01S3/225

    摘要： There may be provided a laser apparatus including: an optical resonator including an output coupler; a laser chamber containing a laser medium and disposed in an optical path inside the optical resonator; a pair of discharge electrodes disposed inside the laser chamber; an electrode gap varying section configured to vary a gap between the discharge electrodes; a laser beam measurement section disposed in an optical path of a laser beam outputted from the output coupler, the laser beam resulting from electric discharge between the discharge electrodes; and a controller configured to control the gap between the discharge electrodes through activating the electrode gap varying section, based on a beam parameter of the laser beam measured by the laser beam measurement section.

    摘要翻译： 可以提供一种激光装置，包括：包括输出耦合器的光谐振器; 包含激光介质并设置在光学谐振器内的光路中的激光室; 设置在激光室内的一对放电电极; 电极间隙变化部，被配置为改变所述放电电极之间的间隙; 设置在从输出耦合器输出的激光束的光路中的激光束测量部分，由放电电极之间的放电产生的激光束; 以及控制器，被配置为基于由激光束测量部测量的激光束的光束参数来激活电极间隙变化部分来控制放电电极之间的间隙。

    EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
    7.
    发明申请
    EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS 审中-公开
    极光紫外线光源设备

    公开(公告)号：US20130126762A1

    公开(公告)日：2013-05-23

    申请号：US13742276

    申请日：2013-01-15

    申请人： GIGAPHOTON INC.

    发明人： Masato MORIYA ,  Hiroshi KOMORI ,  Takeshi ASAYAMA

    IPC分类号： H05G2/00

    CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

    摘要： An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.

    摘要翻译： 能够防止在室内移动的碎屑减少EUV收集镜等的光学元件的反射率或透射率的极端紫外线光源装置，能够长时间稳定地产生极紫外光。 该装置包括：目标供给单元，用于将目标供给到室内的预定位置; 用于将激光束施加到所述靶以产生第一等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集从第一等离子体辐射的极紫外光; 气体供应单元，用于将气体供应到所述室中; 用于激发气体以在产生第一等离子体的区域周围产生第二等离子体的激励单元; 以及排气单元，用于排出室并将从第一等离子体发射的碎屑喷射到室外。

    EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
    8.
    发明申请
    EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM 审中-公开

    公开(公告)号：US20180048109A1

    公开(公告)日：2018-02-15

    申请号：US15792111

    申请日：2017-10-24

    申请人： Gigaphoton Inc.

    发明人： Takeshi ASAYAMA ,  Osamu WAKABAYASHI ,  Kouji KAKIZAKI

    IPC分类号： H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/038

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

    摘要： The excimer laser apparatus may include a laser chamber configured to contain gas, a pair of electrodes provided in the laser chamber, a power source unit configured to supply a pulse voltage between the pair of electrodes, a gas supply unit configured to supply gas into the laser chamber, a gas exhaust unit configured to partially exhaust gas from within the laser chamber, and a gas control unit configured to control the gas supply unit and the gas exhaust unit, where a replacement ratio of gas to be replaced from within the laser chamber increases as deterioration of the pair of electrodes progresses, the deterioration being represented by a deterioration parameter of the pair of electrodes.

    LASER CHAMBER
    9.
    发明申请
    LASER CHAMBER 有权
    激光室

    公开(公告)号：US20160365696A1

    公开(公告)日：2016-12-15

    申请号：US15245245

    申请日：2016-08-24

    申请人： Gigaphoton Inc.

    发明人： Hiroaki TSUSHIMA ,  Kouji KAKIZAKI ,  Takashi MATSUNAGA ,  Takeshi ASAYAMA ,  Hisakazu KATSUUMI ,  Hiroshi UMEDA ,  Hiroyuki IKEDA

    IPC分类号： H01S3/036 ,  H01S3/225 ,  H01S3/038 ,  H01S3/041 ,  H01S3/04

    CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/134 ,  H01S3/225

    摘要： A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.

    摘要翻译： 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。