Resist composition and patterning process
    1.
    发明授权
    Resist composition and patterning process 失效
    抗蚀剂组成和图案化工艺

    公开(公告)号:US06866982B2

    公开(公告)日:2005-03-15

    申请号:US10329456

    申请日:2002-12-27

    摘要: A resist composition comprising (A) a substantially alkali-insoluble polymer having acidic functional groups protected with acid labile groups, which becomes alkali soluble upon elimination of the acid labile groups, (B) a photoacid generator, and (C) a nonionic fluorinated organosiloxane compound consisting of perfluoroalkyl-containing siloxane bonds and polyoxyethylene type polyether bonds is exposed to UV having a wavelength of at least 150 nm and developed with an alkaline solution to form a pattern without leaving scum.

    摘要翻译: 一种抗蚀剂组合物,其包含(A)具有由酸不稳定基团保护的酸性官能团的基本上不溶于碱的聚合物,其在消除酸不稳定基团时变得碱溶性,(B)光酸产生剂,和(C)非离子氟化有机硅氧烷 由包含全氟烷基的硅氧烷键和聚氧乙烯型聚醚键组成的化合物暴露于波长为至少150nm的UV并用碱性溶液显影以形成图案而不留下浮渣。

    Positive resist composition suitable for lift-off technique and pattern forming method

    公开(公告)号:US06440646B1

    公开(公告)日:2002-08-27

    申请号:US09782189

    申请日:2001-02-14

    IPC分类号: G03F730

    摘要: A positive resist composition contains (A) a novolak resin having a weight average molecular weight calculated as polystyrene of 2,000-20,000 wherein 2.5-27 mol % of the hydrogen atom of a hydroxyl group is replaced by a 1,2-naphthoquinonediazidosulfonyl group and (B) a low molecular aromatic compound having phenolic hydroxyl groups and 2-20 benzene rings wherein the ratio of the number of phenolic hydroxyl groups to the number of benzene rings is between 0.5 and 2.5. By forming a resist layer on a substrate from the positive resist composition and baking the resist layer at 90-130° C., followed by exposure and development, there is formed a resist pattern having an undercut of desired configuration. Owing to high resolution and improved dimensional control, heat resistance and film retention, the resist pattern lends itself to a lift-off technique.

    Positive resist composition suitable for lift-off technique and pattern forming method

    公开(公告)号:US06210855B1

    公开(公告)日:2001-04-03

    申请号:US09459876

    申请日:1999-12-14

    IPC分类号: G03F7023

    CPC分类号: G03F7/0226 G03F7/0233

    摘要: A positive resist composition contains (A) a novolak resin having a weight average molecular weight calculated as polystyrene of 2,000-20,000 wherein 2.5-27 mol % of the hydrogen atom of a hydroxyl group is replaced by a 1,2-naphthoquinonediazidosulfonyl group and (B) a low molecular aromatic compound having phenolic hydroxyl groups and 2-20 benzene rings wherein the ratio of the number of phenolic hydroxyl groups to the number of benzene rings is between 0.5 and 2.5. By forming a resist layer on a substrate from the positive resist composition and baking the resist layer at 90-130° C., followed by exposure and development, there is formed a resist pattern having an undercut of desired configuration. Owing to high resolution and improved dimensional control, heat resistance and film retention, the resist pattern lends itself to a lift-off technique.

    Method of press-forming corrugated paperboard into curved board and
apparatus for same
    9.
    发明授权
    Method of press-forming corrugated paperboard into curved board and apparatus for same 失效
    将瓦楞纸板压制成弯曲板的方法及其装置

    公开(公告)号:US4242172A

    公开(公告)日:1980-12-30

    申请号:US941741

    申请日:1978-09-12

    申请人: Toshihiko Fujii

    发明人: Toshihiko Fujii

    摘要: In a method of press-forming a planer board of corrugated paperboard into a curved board which serves as the substrate of, for example, an automobile roof trim board by utilizing a thermoplastic adhesive in the production of the corrugated paperboard and applying heat to the planer board through dies in a hot-press, the liners of the corrugated paperboard are prevented from wrinkling by preheating the planer board so as to soften the thermoplastic adhesive therein immediately before placement between the dies. An apparatus to perform this method comprises a board carrier which has heaters and can carry the planer board into the hot-press with continued heating of the board.

    摘要翻译: 在将瓦楞纸板的平面板压制成弯曲板的方法中,所述弯曲板用作例如汽车车顶装饰板的基板,在制造瓦楞纸板中使用热塑性粘合剂并向刨床施加热量 通过热压机中的模具板,通过预热刨床来防止瓦楞纸板的衬垫起皱,以便在放置在模具之前立即软化其中的热塑性粘合剂。 执行该方法的装置包括具有加热器的板载体,并且可以在板的持续加热的情况下将刨床携带到热压机中。

    Apparatus for deforming corrugated fiberboard
    10.
    发明授权
    Apparatus for deforming corrugated fiberboard 失效
    瓦楞纸板变形装置

    公开(公告)号:US4143587A

    公开(公告)日:1979-03-13

    申请号:US817434

    申请日:1977-07-20

    申请人: Toshihiko Fujii

    发明人: Toshihiko Fujii

    摘要: Apparatus for inelastically deforming an initially flat blank of a corrugated fiberboard, comprising two die blocks movable relative to each other and having complementarily convex and concave pressing surfaces and blank retaining means adapted to clamp opposite marginal portions of a blank of a corrugated fiberboard being warped between the die blocks with the marginal portions urged sidewise inboardly of the die blocks, the blank retaining means being operative to restrain the blank from being moved in a direction parallel with the marginal portions but to allow the marginal portion of the blank to move the marginal portions of the blank sidewise inboardly of the die blocks in a direction perpendicular to the marginal portions so that not only production of creases in curved portions of the blank but production of fissures as would be caused if the blank is excessively stretched between the opposite marginal portions of the blank are precluded.

    摘要翻译: 用于使瓦楞纤维板的初始平坦的坯料非弹性变形的装置,包括两个可相对于彼此移动并具有互补的凸形和凹形的压制表面的模块,以及用于夹紧瓦楞纸板的坯料的相对的边缘部分的坯料保持装置, 具有边缘部分的模块被侧向地推压在模具块的内侧,坯料保持装置可操作地限制坯料沿平行于边缘部分的方向移动,但是允许坯料的边缘部分移动边缘部分 在坯料侧面沿垂直于边缘部分的方向的坯料侧面的坯料,使得不仅在坯料的弯曲部分中产生折痕,而且如果坯料在相对的边缘部分之间过度拉伸,则会产生裂缝 空白被排除。