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    Electron beam metrology system
    2.
    发明授权
    Electron beam metrology system 失效
    电子束计量系统

    公开(公告)号：US4767926A

    公开(公告)日：1988-08-30

    申请号：US911791

    申请日：1986-09-26

    申请人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Kenichi Yamamoto

    发明人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Kenichi Yamamoto

    IPC分类号： G01B15/00 ,  H01J37/28 ,  H01J37/22

    CPC分类号： H01J37/28 ,  G01B15/00

    摘要： Disclosed is an electron beam metrology system for measuring the width of a pattern on a specimen by scanning the specimen with a deflected electron beam, detecting a pattern image signal provided by secondary electrons emitted from the specimen, and measuring the pattern width on the specimen on the basis of the pattern detection signal. The system comprises a signal detecting device including at least one set of two detectors disposed toward the scanning direction of the electron beam in a relation symmetrical with respect to the optical axis of the electron beam for detecting pattern image signals independently of each other, a device for recognizing surface topography of the pattern using an output signal of the signal detecting device, and a device for measuring the pattern width while discriminating as to whether the pattern is a raised-profile pattern or a hollow-profile pattern.

    摘要翻译： 公开了一种电子束测量系统，用于通过用偏转的电子束扫描样本来测量样本上的图案的宽度，检测由样本发射的二次电子提供的图案图像信号，并测量样本上的图案宽度 模式检测信号的基础。 该系统包括信号检测装置，该信号检测装置包括至少一组两个检测器，其以相对于电子束的光轴对称关系的电子束的扫描方向设置，用于彼此独立地检测图案图像信号;装置 用于使用信号检测装置的输出信号来识别图案的表面形貌，以及用于测量图案宽度的装置，同时鉴别图案是凸起轮廓图案还是中空轮廓图案。

    Electron beam metrology system
    3.
    发明授权
    Electron beam metrology system 失效
    电子束计量系统

    公开(公告)号：US4751384A

    公开(公告)日：1988-06-14

    申请号：US13534

    申请日：1987-02-11

    申请人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Hideo Todokoro

    发明人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Hideo Todokoro

    IPC分类号： G01B15/00 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01B15/00

    摘要： An electron beam metrology system for measuring the width of a pattern on a surface of a sample in such a manner that the surface of the sample is scanned with an electron beam, secondary electrons emitted from the surface are detected to obtain a detection signal, and the width of the pattern is measured by using the detection signal, is disclosed in which a pair of detectors are disposed symmetrically with respect to the optical axis of the electron beam in a scanning direction thereof, a ratio of one of the output signals of the detectors to the other output signal and a ratio of the other output signal to the one output signal are formed, and a sum signal indicative of the sum of two ratios is produced, to be used for measuring the width of the pattern correctly and accurately, without being affected by a change in pattern material.

    摘要翻译： 一种用于以样品表面用电子束扫描的方式测量样品表面上的图案的宽度的电子束计量系统，检测从表面发射的二次电子以获得检测信号，以及 通过使用检测信号测量图案的宽度，公开了一对检测器相对于电子束的光轴在其扫描方向上对称设置，其中一个检测器的输出信号 形成与其他输出信号的检测器和其他输出信号与一个输出信号的比率，并且产生指示两个比率之和的和信号，以用于正确且精确地测量图案的宽度， 而不受图案材料变化的影响。

    Small-dimension measurement system by scanning electron beam
    4.
    发明授权
    Small-dimension measurement system by scanning electron beam 失效
    通过扫描电子束的小尺寸测量系统

    公开(公告)号：US4600839A

    公开(公告)日：1986-07-15

    申请号：US576324

    申请日：1984-02-02

    申请人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    发明人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    IPC分类号： G01B15/00 ,  G01R31/305 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01B15/00 ,  G01R31/305

    摘要： A small-dimension measurement system by scanning electron beam comprises an electron optical column including an electron source for emitting an electron beam to scan a sample, at least one pair of detectors disposed symmetrically with respect to an optical axis of the electron optical column for detecting position information from the sample by scanning of the electron beam, and a signal selecting circuit for subjecting the outputs of the paired detectors to a predetermined signal selection. The signal selecting circuit selectively and alternately provides maximum or peak portions of the outputs of the paired detectors which portions correspond to opposite edge portions of the sample. The output of the signal selecting circuit is applied to a signal processing circuit for conversion into a dimension of a predetermined pattern on the sample.

    摘要翻译： 通过扫描电子束的小尺寸测量系统包括电子光学柱，其包括用于发射电子束以扫描样品的电子源，至少一对相对于电子光学柱的光轴对称设置的检测器，用于检测 通过扫描电子束从样品的位置信息，以及信号选择电路，用于对成对的检测器的输出进行预定的信号选择。 信号选择电路选择性地并且交替地提供成对检测器的输出的最大值或峰值部分，这些部分对应于样品的相对边缘部分。 信号选择电路的输出被施加到信号处理电路，以转换成样本上的预定图案的尺寸。

    Field-emission transmission electron microscope and operation method thereof
    5.
    发明授权
    Field-emission transmission electron microscope and operation method thereof 失效
    场发射透射电子显微镜及其操作方法

    公开(公告)号：US5373158A

    公开(公告)日：1994-12-13

    申请号：US69838

    申请日：1993-06-01

    申请人： Hisaya Murakoshi ,  Mikio Ichihashi

    发明人： Hisaya Murakoshi ,  Mikio Ichihashi

    IPC分类号： H01J37/073 ,  H01J37/141 ,  H01J37/26

    CPC分类号： H01J37/26 ,  H01J2237/0492 ,  H01J2237/06341 ,  H01J2237/25

    摘要： An object of the present invention is to realize a field-emission transmission electron microscope which is able to cope with both observation of an electron-microscopic image of a high brightness and microanalysis. A low aberration condenser lens 4 is disposed at the farthest position from a specimen 7, and a short focal length lens 5 is disposed at the midpoint between the specimen 7 and the condenser lens 4. In the case of an observation of an electron-microscopic image, the condenser lens unit is operated for enlargement in which the condenser lens 4 and the condenser lens 5 are driven in an interlocking motion. When the size of a beam spot on a specimen is to be reduced, a condenser lens 6 disposed close to the specimen between the condenser lens 5 and the specimen 7 is driven to make the condenser lens unit be operated for reduction. The coexistence of a small illuminating angle and the illumination of a specimen with a fine beam spot is realized, which makes it possible for a field-emission transmission electron microscope to have both functions, being able to observe a bright electron microscopic image and to perform an element analysis.

    摘要翻译： 本发明的目的是实现能够应对高亮度和微量分析的电子显微图像的观察的场致发射透射电子显微镜。 低像差聚光透镜4设置在距样本7最远的位置，并且短焦距透镜5设置在样本7和聚光透镜4之间的中点。在观察电子显微镜的情况下 图像中，聚光透镜单元被操作以使聚光透镜4和聚光透镜5以互锁的方式驱动。 当要减小试样上的束斑的尺寸时，驱动设置在聚光透镜5和样品7之间的样本附近的聚光透镜6，以使聚光透镜单元被操作以进行还原。 实现了小的照明角度和具有精细光束点的样本的照射的共存，这使得场致发射透射电子显微镜具有两个功能，能够观察明亮的电子显微镜图像并执行 元素分析。

    Apparatus for focusing a charged particle beam onto a specimen
    6.
    发明授权
    Apparatus for focusing a charged particle beam onto a specimen 失效
    用于将带电粒子束聚焦到样本上的装置

    公开(公告)号：US4605860A

    公开(公告)日：1986-08-12

    申请号：US654457

    申请日：1984-09-26

    申请人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    发明人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    IPC分类号： H01J37/21 ,  H01J37/28 ,  H01J37/304 ,  G01K1/08 ,  H01J3/14

    CPC分类号： H01J37/304 ,  H01J37/21

    摘要： Disclosed is an apparatus for focusing a charged particle beam onto a speciman, which comprises a scanner for scanning a pre-formed standard pattern with a charged particle beam, a converging unit capable of converging the charged particle beam onto a specimen, a detector for detecting secondary charged particles emitted as a result of scanning the standard pattern by the scanner, a circuit for deriving a standard frequency component determined by the period of scanning with the charged particle beam and the shape of the portion of the standard pattern in the region being scanned with the charged particle beam, and a circuit cooperating with the converging unit for finding the maximum value of the amplitude of the standard frequency component thereby identifying attainment of focusing of the charged particle beam with high accuracy.

    摘要翻译： 公开了一种用于将带电粒子束聚焦到标本上的装置，其包括用于利用带电粒子束扫描预形成的标准图案的扫描器，能够将带电粒子束收敛到样本上的会聚单元，用于检测的检测器 作为由扫描仪扫描标准图案的结果而发射的二次带电粒子，用于导出由带电粒子束扫描的周期确定的标准频率分量的电路和被扫描的区域中的标准图案的部分的形状 带电粒子束，以及与会聚单元配合的电路，用于找到标准频率分量的振幅的最大值，从而以高精度识别带电粒子束的聚焦。

    Beam irradiation device
    7.
    发明授权
    Beam irradiation device 失效
    光束照射装置

    公开(公告)号：US07351944B2

    公开(公告)日：2008-04-01

    申请号：US11283999

    申请日：2005-11-22

    申请人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    发明人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    IPC分类号： G01J1/32 ,  G02B27/40 ,  G02B26/08 ,  H01J3/14 ,  B41J2/47

    CPC分类号： G01S17/42 ,  G01S7/4811 ,  G01S7/4817 ,  G01S7/491 ,  G01S17/48

    摘要： In a beam irradiation device of the present invention, laser beams emitted from a semiconductor laser impinge on an irradiation lens supported by a lens actuator. The laser beams that have passed through the irradiation lens change in outgoing angle in the direction of a y-z plane as the lens actuator is driven. A laser beam scan in the target region is thus performed. A part of the laser beams that have passed through the irradiation lens is reflected and separated by a beam splitter. The separated beams are converged on a PSD through a converging lens. A DSP control circuit monitors a scan position of the laser beams that have passed through the irradiation lens based on a signal from the PSD. When an irradiation position has deviated from a scan trajectory, the DSP control circuit controls an actuator driving circuit to draw the irradiation position back onto the scan trajectory. This beam irradiation device can realize a smooth and stable beam scan operation with a simple construction.

    摘要翻译： 在本发明的光束照射装置中，从半导体激光器发射的激光束照射在由透镜致动器支撑的照射透镜上。 当透镜致动器被驱动时，穿过照射透镜的激光束在y-z平面的方向上以出射角度改变。 因此执行目标区域中的激光束扫描。 已经通过照射透镜的激光束的一部分被分束器反射和分离。 分离的光束通过会聚透镜会聚在PSD上。 DSP控制电路基于来自PSD的信号监视已经通过照射透镜的激光束的扫描位置。 当照射位置偏离扫描轨迹时，DSP控制电路控制致动器驱动电路将照射位置反射回扫描轨迹。 该光束照射装置能够以简单的结构实现平稳稳定的束扫描操作。

    Method and apparatus for scanning transmission electron microscopy
    9.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06531697B1

    公开(公告)日：2003-03-11

    申请号：US09259334

    申请日：1999-03-01

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3700

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。