公开(公告)号：US20180374928A1

公开(公告)日：2018-12-27

申请号：US15776752

申请日：2015-12-24

Applicant: Intel Corporation

Inventor： GILBERT DEWEY ,  ASHISH AGRAWAL ,  BENJAMIN CHU-KUNG ,  VAN H. LE ,  MATTHEW V. METZ ,  WILLY RACHMADY ,  JACK T. KAVALIEROS ,  RAFAEL RIOS

IPC: H01L29/51 ,  H01L29/78 ,  H01L29/66 ,  H01L29/16

CPC classification number: H01L29/513 ,  H01L29/16 ,  H01L29/517 ,  H01L29/66795 ,  H01L29/78 ,  H01L29/785 ,  H01L29/7851

Abstract: Embodiments of the present disclosure describe semiconductor devices comprised of a semiconductor substrate with a metal oxide semiconductor field effect transistor having a channel including germanium or silicon-germanium, where a dielectric layer is coupled to the channel. The dielectric layer may include a metal oxide and at least one additional element, where the at least one additional element may increase a band gap of the dielectric layer. A gate electrode may be coupled to the dielectric layer. Other embodiments may be described and/or claimed.

公开(公告)号：US20170125524A1

公开(公告)日：2017-05-04

申请号：US15405182

申请日：2017-01-12

Applicant: Intel Corporation

Inventor： RAVI PILLARISETTY ,  SANSAPTAK DASGUPTA ,  NITI GOEL ,  VAN H. LE ,  MARKO RADOSAVLJEVIC ,  GILBERT DEWEY ,  NILOY MUKHERJEE ,  MATTHEW V. METZ ,  WILLY RACHMADY ,  JACK T. KAVALIEROS ,  BENJAMIN CHU-KUNG ,  HAROLD W. KENNEL ,  STEPHEN M. CEA ,  ROBERT S. CHAU

IPC: H01L29/10 ,  H01L29/165 ,  H01L29/20 ,  H01L21/762 ,  H01L29/78 ,  H01L29/06 ,  H01L29/66 ,  H01L29/16 ,  H01L29/267

CPC classification number: H01L29/785 ,  H01L21/76224 ,  H01L21/823431 ,  H01L21/823437 ,  H01L21/823462 ,  H01L27/0886 ,  H01L29/0653 ,  H01L29/1054 ,  H01L29/16 ,  H01L29/165 ,  H01L29/20 ,  H01L29/267 ,  H01L29/66545 ,  H01L29/66795 ,  H01L29/7842 ,  H01L29/7851

Abstract: Ge and III-V channel semiconductor devices having maximized compliance and free surface relaxation and methods of fabricating such Ge and III-V channel semiconductor devices are described. For example, a semiconductor device includes a semiconductor fin disposed above a semiconductor substrate. The semiconductor fin has a central protruding or recessed segment spaced apart from a pair of protruding outer segments along a length of the semiconductor fin. A cladding layer region is disposed on the central protruding or recessed segment of the semiconductor fin. A gate stack is disposed on the cladding layer region. Source/drain regions are disposed in the pair of protruding outer segments of the semiconductor fin.

公开(公告)号：US20170040438A1

公开(公告)日：2017-02-09

申请号：US15295938

申请日：2016-10-17

Applicant: INTEL CORPORATION

Inventor： ANNALISA CAPPELLANI ,  VAN H. LE ,  GLENN A. GLASS ,  KELIN J. KUHN ,  STEPHEN M. CEA

IPC: H01L29/66 ,  H01L29/78 ,  H01L21/306 ,  H01L21/762 ,  H01L29/06 ,  H01L21/02

CPC classification number: H01L29/66795 ,  H01L21/02233 ,  H01L21/02236 ,  H01L21/02238 ,  H01L21/02241 ,  H01L21/02255 ,  H01L21/02304 ,  H01L21/02439 ,  H01L21/0245 ,  H01L21/02455 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/306 ,  H01L21/76 ,  H01L21/7624 ,  H01L21/76283 ,  H01L29/0603 ,  H01L29/0642 ,  H01L29/0653 ,  H01L29/0657 ,  H01L29/1054 ,  H01L29/7378 ,  H01L29/785 ,  H01L33/12 ,  H05K1/18

Abstract: Techniques are disclosed for converting a strain-inducing semiconductor buffer layer into an electrical insulator at one or more locations of the buffer layer, thereby allowing an above device layer to have a number of benefits, which in some embodiments include those that arise from being grown on a strain-inducing buffer and having a buried electrical insulator layer. For instance, having a buried electrical insulator layer (initially used as a strain-inducing buffer during fabrication of the above active device layer) between the Fin and substrate of a non-planar integrated transistor circuit may simultaneously enable a low-doped Fin with high mobility, desirable device electrostatics and elimination or otherwise reduction of substrate junction leakage. Also, the presence of such an electrical insulator under the source and drain regions may further significantly reduce junction leakage. In some embodiments, substantially the entire buffer layer is converted to an electrical insulator.

Abstract translation: 公开了用于将应变诱导半导体缓冲层转化为缓冲层的一个或多个位置处的电绝缘体的技术，从而允许上述器件层具有许多益处，其在一些实施例中包括由于生长而产生的那些 在应变诱导缓冲器上并具有埋入的电绝缘体层。 例如，在非平面集成晶体管电路的Fin和衬底之间具有埋入的电绝缘体层（最初用作制造上述有源器件层期间的应变诱导缓冲器）可以同时使得具有高的低掺杂Fin 移动性，期望的器件静电，以及消除或以其他方式减少衬底结泄漏。 此外，源极和漏极区域下的这种电绝缘体的存在可以进一步显着减少结漏电。 在一些实施例中，基本上整个缓冲层被转换成电绝缘体。

公开(公告)号：US20150380481A1

公开(公告)日：2015-12-31

申请号：US14844816

申请日：2015-09-03

Applicant: INTEL CORPORATION

Inventor： ANNALISA CAPPELLANI ,  VAN H. LE ,  GLENN A. GLASS ,  KELIN J. KUHN ,  STEPHEN M. CEA

IPC: H01L29/06

CPC classification number: H01L29/66795 ,  H01L21/02233 ,  H01L21/02236 ,  H01L21/02238 ,  H01L21/02241 ,  H01L21/02255 ,  H01L21/02304 ,  H01L21/02439 ,  H01L21/0245 ,  H01L21/02455 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/306 ,  H01L21/76 ,  H01L21/7624 ,  H01L21/76283 ,  H01L29/0603 ,  H01L29/0642 ,  H01L29/0653 ,  H01L29/0657 ,  H01L29/1054 ,  H01L29/7378 ,  H01L29/785 ,  H01L33/12 ,  H05K1/18

Abstract: Techniques are disclosed for converting a strain-inducing semiconductor buffer layer into an electrical insulator at one or more locations of the buffer layer, thereby allowing an above device layer to have a number of benefits, which in some embodiments include those that arise from being grown on a strain-inducing buffer and having a buried electrical insulator layer. For instance, having a buried electrical insulator layer (initially used as a strain-inducing buffer during fabrication of the above active device layer) between the Fin and substrate of a non-planar integrated transistor circuit may simultaneously enable a low-doped Fin with high mobility, desirable device electrostatics and elimination or otherwise reduction of substrate junction leakage. Also, the presence of such an electrical insulator under the source and drain regions may further significantly reduce junction leakage. In some embodiments, substantially the entire buffer layer is converted to an electrical insulator.

Abstract translation: 公开了用于将应变诱导半导体缓冲层转化为缓冲层的一个或多个位置处的电绝缘体的技术，从而允许上述器件层具有许多益处，其在一些实施例中包括由于生长而产生的那些 在应变诱导缓冲器上并具有埋入的电绝缘体层。 例如，在非平面集成晶体管电路的Fin和衬底之间具有埋入的电绝缘体层（最初用作制造上述有源器件层期间的应变诱导缓冲器）可以同时使得具有高的低掺杂Fin 移动性，期望的器件静电，以及消除或以其他方式减少衬底结泄漏。 此外，源极和漏极区域下的这种电绝缘体的存在可以进一步显着减少结漏电。 在一些实施例中，基本上整个缓冲层被转换成电绝缘体。

公开(公告)号：US20210384419A1

公开(公告)日：2021-12-09

申请号：US16322890

申请日：2016-09-02

Applicant: Intel Corporation

Inventor： ABHISHEK A. SHARMA ,  VAN H. LE ,  GILBERT DEWEY ,  RAFAEL RIOS ,  JACK T. KAVALIEROS ,  SHRIRAM SHIVARAMAN

IPC: H01L45/00 ,  H01L27/24

Abstract: Embodiments include a resistive random access memory (RRAM) storage cell, having a resistive switching material layer and a semiconductor layer between two electrodes, where the semiconductor layer serves as an OEL. In addition, the RRAM storage cell may be coupled with a transistor to form a RRAM memory cell. The RRAM memory cell may include a semiconductor layer as a channel for the transistor, and also shared with the storage cell as an OEL for the storage cell. A shared electrode may serve as a source electrode of the transistor and an electrode of the storage cell. In some embodiments, a dielectric layer may be shared between the transistor and the storage cell, where the dielectric layer is a resistive switching material layer of the storage cell.

公开(公告)号：US20200152635A1

公开(公告)日：2020-05-14

申请号：US16473592

申请日：2017-03-31

Applicant: Intel Corporation

Inventor： ABHISHEK A. SHARMA ,  VAN H. LE ,  GILBERT DEWEY ,  SHRIRAM SHIVARAMAN ,  YIH WANG ,  TAHIR GHANI ,  JACK T. KAVALIEROS

IPC: H01L27/108 ,  H01L29/786 ,  H01L29/417 ,  H01L29/49 ,  H01L29/51 ,  H01L29/66 ,  H01L29/45

Abstract: Embodiments herein describe techniques for a semiconductor device including a TFT having a gate electrode with a gate length determined by a spacer. Embodiments may include a gate electrode above a substrate, a channel layer above the gate electrode, and a source electrode, a drain electrode, and a spacer above the channel layer. The drain electrode may be separated from the source electrode by the spacer. The drain electrode and the source electrode may have different widths or include different materials. Furthermore, the spacer may overlap with the gate electrode, hence the gate length of the gate electrode may be determined by the spacer width. Other embodiments may be described and/or claimed.

公开(公告)号：US20190198675A1

公开(公告)日：2019-06-27

申请号：US16329044

申请日：2016-09-27

Applicant: Intel Corporation

Inventor： ABHISHEK A. SHARMA ,  VAN H. LE ,  GILBERT DEWEY ,  RAFAEL RIOS ,  JACK T. KAVALIEROS ,  YIH WANG ,  SHRIRAM SHIVARAMAN

IPC: H01L29/786 ,  H01L21/768 ,  H01L23/50 ,  H01L29/66

CPC classification number: H01L29/78642 ,  H01L21/768 ,  H01L21/76802 ,  H01L23/50 ,  H01L29/66742 ,  H01L2224/16225 ,  H01L2924/15311

Abstract: Embodiments of the present disclosure describe a non-planar gate thin film transistor. An integrated circuit may include a plurality of layers formed on a substrate, and the plurality of layers may include a first one of a source or drain, an inter-layer dielectric (ILD) formed on the first one of the source or drain, and a second one of the source or drain formed on the ILD. A semiconductive layer may be formed on a sidewall of the plurality of layers. A gate dielectric layer formed on the semiconductive layer, and a gate may be in contact with the gate dielectric layer.

公开(公告)号：US20220157820A1

公开(公告)日：2022-05-19

申请号：US17588938

申请日：2022-01-31

Applicant: Intel Corporation

Inventor： ABHISHEK A. SHARMA ,  VAN H. LE ,  GILBERT DEWEY ,  SHRIRAM SHIVARAMAN ,  YIH WANG ,  TAHIR GHANI ,  JACK T. KAVALIEROS

IPC: H01L27/108 ,  H01L29/417 ,  H01L29/45 ,  H01L29/49 ,  H01L29/51 ,  H01L29/66 ,  H01L29/786

Abstract: Embodiments herein describe techniques for a semiconductor device including a TFT having a gate electrode with a gate length determined by a spacer. Embodiments may include a gate electrode above a substrate, a channel layer above the gate electrode, and a source electrode, a drain electrode, and a spacer above the channel layer. The drain electrode may be separated from the source electrode by the spacer. The drain electrode and the source electrode may have different widths or include different materials. Furthermore, the spacer may overlap with the gate electrode, hence the gate length of the gate electrode may be determined by the spacer width. Other embodiments may be described and/or claimed.

公开(公告)号：US20200006229A1

公开(公告)日：2020-01-02

申请号：US16337794

申请日：2016-10-28

Applicant: INTEL CORPORATION

Inventor： SEUNG HOON SUNG ,  GLENN A. GLASS ,  VAN H. LE ,  ASHISH AGRAWAL ,  BENJAMIN CHU-KUNG ,  ANAND S. MURTHY ,  JACK T. KAVALIEROS

IPC: H01L23/535 ,  H01L29/78 ,  H01L29/417 ,  H01L29/423 ,  H01L27/092

Abstract: Techniques are disclosed for forming transistor devices having reduced interfacial resistance in a local interconnect. The local interconnect can be a material having similar composition to that of the source/drain material. That composition can be a metal alloy of a group IV element such as nickel germanide. The local interconnect of the semiconductor integrated circuit can function in the absence of barrier and liner layers. The devices can be used on MOS transistors including PMOS transistors.

公开(公告)号：US20160372607A1

公开(公告)日：2016-12-22

申请号：US15120818

申请日：2014-03-28

Applicant: INTEL CORPORATION

Inventor： VAN H. LE ,  BENJAMIN CHU-KUNG ,  JACK T. KAVALIEROS ,  RAVI PILLARISETTY ,  WILLY RACHMADY ,  HAROLD W. KENNEL

IPC: H01L29/786 ,  H01L29/66 ,  H01L29/423 ,  H01L29/15 ,  H01L29/06

CPC classification number: H01L29/78696 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/02381 ,  H01L21/0245 ,  H01L21/02461 ,  H01L21/02463 ,  H01L21/02466 ,  H01L21/02505 ,  H01L21/02532 ,  H01L21/02543 ,  H01L21/02546 ,  H01L29/0673 ,  H01L29/1054 ,  H01L29/1079 ,  H01L29/155 ,  H01L29/165 ,  H01L29/42364 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/66742 ,  H01L29/66772 ,  H01L29/775 ,  H01L29/7849 ,  H01L29/78603 ,  H01L29/78618 ,  H01L29/78684

Abstract: An embodiment includes a device comprising: a first epitaxial layer, coupled to a substrate, having a first lattice constant; a second epitaxial layer, on the first layer, having a second lattice constant; a third epitaxial layer, contacting an upper surface of the second layer, having a third lattice constant unequal to the second lattice constant; and an epitaxial device layer, on the third layer, including a channel region; wherein (a) the first layer is relaxed and includes defects, (b) the second layer is compressive strained and the third layer is tensile strained, and (c) the first, second, third, and device layers are all included in a trench. Other embodiments are described herein.

Abstract translation: 一个实施例包括一种装置，包括：第一外延层，其耦合到具有第一晶格常数的衬底; 第二外延层，在第一层上，具有第二晶格常数; 第三外延层，与第二层的上表面接触，具有不等于第二晶格常数的第三晶格常数; 以及在所述第三层上的包括沟道区的外延器件层; 其中（a）第一层被松弛并且包括缺陷，（b）第二层被压缩应变并且第三层被拉伸应变，并且（c）第一层，第二层，第三层以及器件层都包括在沟槽 。 本文描述了其它实施例。