摘要:
To prevent after-corrosion of wiring or electrodes formed by patterning films of aluminum or an alloy thereof by reactive ion etching (RIE) using an etchant containing chlorine gas or its gaseous compounds, residual chlorine on the surface of the wiring or electrodes is removed by exposing it to a plasma generated in an atmosphere containing water vapor or to neutral active species extracted from the plasma. This treatment is performed either at the same time or after an ashing operation, an operation for removing a resist mask used in the aforesaid RIE by adding water vapor to an atmosphere containing oxygen. To perform the latter separate treatment, an automatic processing system is disclosed in which an after-treatment apparatus for removing residual chlorine is connected, via a second load lock chamber, to an ashing apparatus connected to a RIE apparatus by a load lock chamber which is capable of making a vacuum.
摘要:
Provided is an adhesive composition leading to sufficient adhesive strength when used for bonding to a polyolefin resin molded article that bonds poorly with other members. Also provided is an adhesive composition having excellent heat resistance (heat resistant adhesion) in the bonded part of a composite body obtained by joining a polyolefin resin-formed body and other member. This adhesive composition contains an organic solvent, a carboxyl group-containing polyolefin resin which is dissolved in this organic solvent and which has a melt flow rate of 5 to 40 g/10 min when measured at 130° C., and a polyfunctional isocyanate compound. This adhesive composition may further contain a carboxyl group-containing polyolefin resin having a melting point of 120° C. to 170° C.
摘要:
In an information processing terminal, a second screen activation monitoring unit that has received a focus OFF notification sends a domain switch request notification to a domain control unit, and the domain control unit that has received the notification sends a domain switch notification to a first OS. Then, the first OS sends a focus ON notification to a first screen activation monitoring unit and further sends the focus OFF notification to a first application. A resource is thereby released by the first application that is implemented to release an acquired resource upon receiving the focus OFF notification.
摘要:
A vapor deposition device includes a vapor deposition chamber, a heating chamber, a mixing chamber, a first reservoir for storing trichlorosilane gas, and a second reservoir for storing silane gas that reacts with hydrochloric acid gas. The heating chamber communicates with the first reservoir and the mixing chamber, heats the trichlorosilane gas and then supplies the heated gas to the mixing chamber. The mixing chamber communicates with the second reservoir and the vapor deposition chamber, mixes the heated gas supplied from the heating chamber and the silane gas and then supplies the mixed gas to the vapor deposition chamber. A temperature in the heating chamber is higher than a temperature in the mixing chamber.
摘要:
A process for supplying a mixed material gas that includes a chlorosilane gas and a carrier gas to a surface of a substrate heated at 1200 to 1400° C. from a direction perpendicular to the surface is provided. A supply rate of the chlorosilane gas is equal to or more than 200 μmol per minute per 1 cm2 of the surface of the substrate. The carrier gas includes a hydrogen gas and at least one or more gases selected from argon, xenon, krypton and neon.
摘要:
The purpose of the present invention is to provide an adhesive composition leading to sufficient adhesive strength when used for bonding to a polyolefin resin molded article that bonds poorly with other members. Another purpose of the present invention is to provide an adhesive composition having excellent heat resistance (heat resistant adhesion) in the bonded part of a composite body obtained by joining a polyolefin resin-formed body and other member. This adhesive composition contains an organic solvent, a carboxyl group-containing polyolefin resin which is dissolved in this organic solvent and which has a melt flow rate of 5 to 40 g/10 min when measured at 130° C., and a polyfunctional isocyanate compound. This adhesive composition may further contain a carboxyl group-containing polyolefin resin having a melting point of 120° C. to 170° C.
摘要:
To obtain a program code generation support device, method, and the like, capable of generating a new program code, in particular, generating in accordance with an incorporating apparatus, by performing a further optimization on a program code. The device includes storage means for storing as data, an optimization rule that is composed of a conversion condition for converting data of a program code and a conversion content thereof, and code optimization means that includes a code analysis unit for analyzing the program code, a condition search unit for search a part matching the conversion condition in the program code through a collation with the optimization rule stored in the storage means on the basis of the analyzed program code, and an optimization unit for generating data of a new program code by converting the part matching the conversion condition on the basis of the conversion content.
摘要:
In an information processing terminal, a second screen activation monitoring unit that has received a focus OFF notification sends a domain switch request notification to a domain control unit, and the domain control unit that has received the notification sends a domain switch notification to a first OS. Then, the first OS sends a focus ON notification to a first screen activation monitoring unit and further sends the focus OFF notification to a first application. A resource is thereby released by the first application that is implemented to release an acquired resource upon receiving the focus OFF notification.
摘要:
To obtain a program code generation support device, method, and the like, capable of generating a new program code, in particular, generating in accordance with an incorporating apparatus, by performing a further optimization on a program code.The device includes storage means 6 for storing as data, an optimization rule that is composed of a conversion condition for converting data of a program code and a conversion content thereof, and code optimization means 4 that includes a code analysis unit 4A for analyzing the program code, a condition search unit 4B for search a part matching the conversion condition in the program code through a collation with the optimization rule stored in the storage means on the basis of the analyzed program code, and an optimization unit 4C for generating data of a new program code by converting the part matching the conversion condition on the basis of the conversion content.
摘要:
An externally chargeable vehicle which is charged with electric power from an external power supply includes an HV-ECU for controlling a power storage device during any of operation of the vehicle and external charging, and a PLG-ECU for controlling a charging device during external charging. With such a configuration, running and charging can be controlled while a function of the HV-ECU for controlling operation of the vehicle and a function of the PLG-ECU for external charging is prevented from becoming redundant.