公开(公告)号：US5008726A

公开(公告)日：1991-04-16

申请号：US273070

申请日：1988-11-18

申请人： Katsumi Nakagawa ,  Shunichi Ishihara ,  Masahiro Kanai ,  Tsutomu Murakami ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai

发明人： Katsumi Nakagawa ,  Shunichi Ishihara ,  Masahiro Kanai ,  Tsutomu Murakami ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai

IPC分类号： H01L31/0296 ,  H01L31/0392 ,  H01L31/075 ,  H01L31/18

CPC分类号： H01L31/076 ,  H01L31/02963 ,  H01L31/02966 ,  H01L31/0392 ,  H01L31/03925 ,  H01L31/075 ,  H01L31/1832 ,  Y02E10/548

摘要： An improved pin junction photovoltaic element which causes photoelectromotive force by the junction of a p-type semiconductor layer, an i-type semiconductor layer and an n-type semiconductor layer, characterized in that at least one of said p-type semiconductor layer and said n-type semiconductor layer comprises a p-typed or n-typed ZSnSe.sub.1-x Te.sub.x :H:M film, where M is a dopant of p-type or n-type: the quantitative ratio of the Se to the Te is in the range of from 1:9 to 3:7 in terms of atomic ratio: the amount of the H is in the range of from 1 to 4 atomic %: and said film contains crystal grain domains in a proportion of 65 to 85 vol % per unit volume; and said i-type semiconductor layer comprises a non-single crystal Si(H,F) film or a non-single crystal Si(C,Ge)(H,F) film.

公开(公告)号：US4959106A

公开(公告)日：1990-09-25

申请号：US399396

申请日：1989-08-28

申请人： Katsumi Nakagawa ,  Masahiro Kanai ,  Shunichi Ishihara ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai ,  Tsutomu Murakami

发明人： Katsumi Nakagawa ,  Masahiro Kanai ,  Shunichi Ishihara ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai ,  Tsutomu Murakami

IPC分类号： H01L21/363 ,  H01L21/365 ,  H01L31/0296 ,  H01L31/068 ,  H01L31/18

CPC分类号： H01L31/073 ,  H01L21/0237 ,  H01L21/02554 ,  H01L21/0256 ,  H01L21/02562 ,  H01L21/02576 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/02631 ,  H01L31/02963 ,  H01L31/02966 ,  H01L31/068 ,  H01L31/1828 ,  H01L31/1832 ,  Y02E10/543 ,  Y02E10/547

摘要： A photovoltaic element which generates photoelectromotive force by the contact of a p-type semiconductor layer and an n-type semiconductor layer, characterized in that at least one of said semiconductor layers is made up from a deposited film composed of zinc atoms, selenium atoms, optional tellurium atoms, and at least hydrogen atoms, said deposited film containing a p-type or n-type doping agent, containing 1 to 4 atomic % of hydrogen atoms, containing selenium atoms and tellurium atoms in a ratio of 1:9 to 3:7 (in terms of number of atoms), and also containing crystal grains in a ratio of 65 to 85 vol % per unit volume.

摘要翻译： 1.一种通过p型半导体层和n型半导体层的连接产生光电动势的光电元件，其特征在于，所述半导体层中的至少一个由锌原子，硒原子， 可选的碲原子和至少氢原子，所述沉积膜含有含有1至4原子％氢原子的p型或n型掺杂剂，其含有比例为1:9至3的硒原子和碲原子 ：7（以原子数计），并且还含有65〜85体积％的每单位体积的晶粒。

公开(公告)号：US4888062A

公开(公告)日：1989-12-19

申请号：US236792

申请日：1988-08-26

申请人： Katsumi Nakagawa ,  Masahiro Kanai ,  Shunichi Ishihara ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai ,  Tsutomu Murakami

发明人： Katsumi Nakagawa ,  Masahiro Kanai ,  Shunichi Ishihara ,  Kozo Arao ,  Yasushi Fujioka ,  Akira Sakai ,  Tsutomu Murakami

IPC分类号： H01L31/0296 ,  H01L31/077 ,  H01L31/18

CPC分类号： H01L31/077 ,  H01L31/0296 ,  H01L31/02963 ,  H01L31/02966 ,  H01L31/1828 ,  Y02E10/543

摘要： An improved pin junction photovoltaic element which generates photoelectromotive force by the junction of a p-type semiconductor layer, an i-type semiconductor layer and an n-type semiconductor layer, characterized in that at least said i-type semiconductor layer comprises a member selected from the group consisting of a ZnSe:H deposited film containing the hydrogen atoms in an amount of 1 to 4 atomic % and crystal grain domains in a proportion of 65 to 85 vol % per unit volume and a ZnSe.sub.1-x Te.sub.x :H deposited film containing the hydrogen atoms in an amount of 1 to 4 atomic % and crystal grain domains in a proportion of 65 to 85 vol % per unit volume and also containing the selenium atoms and the tellurium atoms in a Se/Te quantitative ratio of 1:9 to 3:7.The pin junction photovoltaic element exhibits an improved photoelectric conversion efficiency for short-wavelength light and has a high open-circuit voltage. The pin junction photovoltaic element does not exhibit any undesirable light-induced fatigue even upon continuous use for a long period of time.

公开(公告)号：US5028488A

公开(公告)日：1991-07-02

申请号：US226819

申请日：1988-08-01

申请人： Katsumi Nakagawa ,  Shunichi Ishihara ,  Masahiro Kanai ,  Tsutomu Murakami ,  Kozo Arao ,  Yasushi Fujioka

发明人： Katsumi Nakagawa ,  Shunichi Ishihara ,  Masahiro Kanai ,  Tsutomu Murakami ,  Kozo Arao ,  Yasushi Fujioka

IPC分类号： C30B33/00 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G02F1/03 ,  G02F1/05 ,  H01L21/205 ,  H01L21/365 ,  H01L31/0248 ,  H01L31/0296 ,  H01L31/0392 ,  H01L31/04 ,  H01L31/068 ,  H01L31/18

CPC分类号： H01L31/1832 ,  H01L21/0237 ,  H01L21/0242 ,  H01L21/02422 ,  H01L21/0256 ,  H01L21/02562 ,  H01L21/02576 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/02631 ,  H01L31/02966 ,  H01L31/0392 ,  H01L31/068 ,  Y02E10/547 ,  Y10T428/31678

摘要： A functional ZnSe.sub.1-x Te.sub.x :H film having a high doping efficiency and with no substantial change in the characteristics upon light irradiation. Said film is characterized in that the Se/Te quantitative ratio is in the range from 3:7 to 1:9 by the atom number ratio, hydrogen atoms are contained in an amount of 1 to 4 atomic % and the ratio of the crystal grain domains per unit volume is in the range from 65 to 85% by volume. There are also provided improved p-type and n-type ZnSe.sub.1-x Te.sub.x :H:M films (M stands for a dopant) of high electroconductivity characterized in the foregoing way.These deposited films may be efficiently deposited even on a non-single crystal substrate made of metal, glass or synthetic resin with a high deposition rate.These films are suited for the preparation of a high functional device such as a photovoltaic element.

摘要翻译： 功能性ZnSe1-xTex：H膜具有高的掺杂效率，并且在光照射下的特性没有显着变化。 所述膜的特征在于Se / Te的定量比在3:7至1:9的范围内以原子数比计，氢原子的含量为1至4原子％，晶粒的比例 每单位体积的畴数在65至85体积％范围内。 还提供了以上述方式表征的改进的高导电性的p型和n型ZnSe1-xTex：H：M膜（M代表掺杂剂）。 这些沉积膜即使在金属，玻璃或合成树脂制成的非单晶衬底上也可以高沉积速率。 这些膜适用于制备诸如光电元件的高功能器件。

公开(公告)号：US5019887A

公开(公告)日：1991-05-28

申请号：US596428

申请日：1990-10-11

申请人： Mitsuyuki Niwa ,  Takayoshi Arai ,  Isamu Shimizu ,  Eiji Takeuchi ,  Tsutomu Murakami ,  Shunichi Ishihara

发明人： Mitsuyuki Niwa ,  Takayoshi Arai ,  Isamu Shimizu ,  Eiji Takeuchi ,  Tsutomu Murakami ,  Shunichi Ishihara

IPC分类号： H01L31/0392 ,  H01L31/09 ,  H01L31/20

CPC分类号： H01L31/204 ,  H01L31/03921 ,  H01L31/095 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

摘要： A photosensor has a photoconductive member. The photoconductive member has a structure comprising a laminated product consisting of functional thin films superposed on one another. The laminated product comprises at least two functional thin films. The functional thin film containing 10 atomic % or less of hydrogen. The band gaps and conduction types and/or conductivity of the functional thin films are controlled to provide high photo sensitivity.

摘要翻译： 光电传感器具有感光元件。 感光体具有包括由彼此重叠的功能性薄膜组成的层压产品的结构。 层压产品包括至少两个功能薄膜。 含有10原子％以下的氢的功能性薄膜。 控制功能薄膜的带隙和导电类型和/或导电性以提供高的光敏性。

公开(公告)号：US4908329A

公开(公告)日：1990-03-13

申请号：US302243

申请日：1989-01-27

申请人： Masahiro Kanai ,  Tsutomu Murakami ,  Takayoshi Arai ,  Soichiro Kawakami

发明人： Masahiro Kanai ,  Tsutomu Murakami ,  Takayoshi Arai ,  Soichiro Kawakami

IPC分类号： C23C16/50 ,  C23C16/30 ,  C23C16/452 ,  C23C16/511 ,  C30B25/10 ,  H01L21/365

CPC分类号： C30B25/105 ,  C23C16/306 ,  C23C16/452 ,  C30B29/48 ,  H01L21/02422 ,  H01L21/02551 ,  H01L21/0256 ,  H01L21/02573 ,  H01L21/02581 ,  H01L21/0262 ,  Y10S148/045 ,  Y10S148/064

摘要： A process for the formation of a functional deposited film containing atoms belonging to the group II and VI of the periodical table as the main constituent atoms by introducing, into a film forming space for forming a deposited film on a substrate disposed therein, a group II compound (1) and a group VI compound (2) as the film-forming raw material and, if required, a compound (3) containing an element capable of controlling valence electrons for the deposited film as the constituent element each in a gaseous state, or in a state where at least one of such compounds is previously activated in an activation space disposed separately from the film forming space, while forming hydrogen atoms in an excited state which cause chemical reaction with at least one of the compounds (1), (2) and (3) in the gaseous state or in the activated state in an activation space different from the film forming space and introducing them into the film-forming space, thereby forming the functional deposited film on the substrate, wherein the hydrogen atoms in the excited state are formed from a hydrogen gas or a gas mixture composed of a hydrogen gas and a rare gas by means of a microwave plasma generated in a plasma generation chamber disposed in a cavity resonator integrated with two impedance matching circuits in a microwave circuit and the excited state of the hydrogen atom is controlled.

公开(公告)号：US5038713A

公开(公告)日：1991-08-13

申请号：US354856

申请日：1989-05-22

申请人： Soichiro Kawakami ,  Masahiro Kanai ,  Takayoshi Arai ,  Tsutomu Murakami

发明人： Soichiro Kawakami ,  Masahiro Kanai ,  Takayoshi Arai ,  Tsutomu Murakami

IPC分类号： B01J19/08 ,  C23C16/27 ,  C23C16/50 ,  C23C16/511 ,  C23F4/00 ,  C30B29/04 ,  H01J37/32 ,  H01L21/205 ,  H01L21/31 ,  H05H1/46

CPC分类号： H01J37/32357 ,  H05H1/46

摘要： A microwave plasma treating apparatus comprising a vacuum vessel, a device for introducing a microwave to the inside of the vacuum vessel by way of a microwave transmission circuit, a device for supplying a starting gas to the inside of the vacuum vessel, a device for evacuating the inside of the vacuum vessel, and a specimen holder for maintaining a specimen substrate to the inside of the vacuum vessel, wherein a cavity resonator integrated with two matching circuits is disposed in the microwave transmission circuit and a magnetic field generator is disposed to the outside of the cavity resonator, and having the following main features: (a) matching facilitated by a plunger for adjusting the axial length of the cavity resonator and cylindrical sling type irises, E-H tuner or three-stub tuner disposed at the portion of the cylindrical cavity resonator where the microwave is introduced, (b) a bell jar disposed within the cavity resonator to excite TM mode and (c) a magnetic field generator disposed to the outside of the cavity resonator to prepare a region of a great magnetic flux density in the discharging space at the inside of the cavity resonator.

公开(公告)号：US4908330A

公开(公告)日：1990-03-13

申请号：US302245

申请日：1989-01-27

申请人： Takayoshi Arai ,  Masahiro Kanai ,  Soichiro Kawakami ,  Tsutomu Murakami

发明人： Takayoshi Arai ,  Masahiro Kanai ,  Soichiro Kawakami ,  Tsutomu Murakami

IPC分类号： C23C16/452 ,  C23C16/511 ,  C23C16/52

CPC分类号： C23C16/511 ,  C23C16/452 ,  C23C16/52

摘要： A process for the formation of a functional deposited film as a thin semiconductor film constituted with the group IV element or a thin semiconductor film constituted with group IV element alloy, by introducing, into a film forming space, a compound as the film-forming raw material and, if required, a compound containing an element capable of controlling valence electrons for the deposited film as the constituent element each in a gaseous state, or in a state where at least one of the compounds is activated, while forming hydrogen atoms in an excited state causing chemical reaction with at least one of the compounds in the gaseous state or in the activated state in an activation space different from the film forming space and introducing them into the film forming space, thereby forming a deposited film on a substrate, wherein the hydrogen atoms in the excited state are formed from a hydrogen gas or a gas mixture composed of a hydrogen gas and a rare gas by means of a microwave plasma generated in a plasma generation chamber disposed in a cavity resonator integrated with two impedance matching circuits in a microwave circuit and the excited state of the hydrogen atoms is controlled.

公开(公告)号：US4998503A

公开(公告)日：1991-03-12

申请号：US430246

申请日：1989-11-02

申请人： Tsutomu Murakami ,  Masahiro Kanai

发明人： Tsutomu Murakami ,  Masahiro Kanai

IPC分类号： C23C16/50 ,  C23C16/511 ,  H01J37/32

CPC分类号： H01J37/32357 ,  C23C16/511

摘要： Disclosed herein is an apparatus for forming a deposited film by a microwave plasma CVD process comprising introducing a film-forming raw material gas into a reaction vessel capable of being vacuum sealed, and generating a microwave-excited plasma in the reaction vessel to deposit a film on a substrate for film deposition disposed in the reaction vessel. The apparatus comprises a waveguide for transmitting microwave energy, a pair of microwave cutoff cavities having different cutoff frequencies, the cavities being oppositely disposed on opposite sides of the waveguide, and a reaction vessel disposed to penetrate through the waveguide and the microwave cutoff cavities, wherein a raw material gas inlet is provided at one end of the reaction vessel, and a film deposition space is provided at the other end of the reaction vessel, whereby it is possible to use effectively the plasma generated in the reaction vessel for film deposition without leakage of the plasma into the cavity on the gas inlet side, and to perform stable film deposition with good reproducibility.

公开(公告)号：US4898118A

公开(公告)日：1990-02-06

申请号：US252525

申请日：1988-10-03

申请人： Tsutomu Murakami ,  Masahiro Kanai

发明人： Tsutomu Murakami ,  Masahiro Kanai

IPC分类号： C23C16/50 ,  C23C16/511 ,  H01J37/32

CPC分类号： H01J37/32357 ,  C23C16/511

摘要： Disclosed herein is an apparatus for forming a deposited film by a microwave plasma CVD process comprising introducing a film-forming raw material gas into a reaction vessel capable of being vacuum sealed, and generating a microwave-excited plasma in the reaction vessel to deposit a film on a substrate for film deposition disposed in the reaction vessel. The apparatus comprises a rectangular waveguide for transmitting microwave energy, a pair of microwave cutoff cavities having different cutoff frequencies, the cavities being oppositely disposed on opposite sides of the waveguide, and a reaction vessel disposed to penetrate through the waveguide and the microwave cutoff cavities, wherein a raw material gas inlet is provided at one end of the reaction vessel, and a film deposition space is provided at the other end of the reaction vessel, whereby it is possible to use effectively the plasma generated in the reaction vessel for film deposition without leakage of the plasma into the cavity on the gas inlet side, and to perform stable film deposition with good reproducibility.

摘要翻译： 本文公开了一种通过微波等离子体CVD法形成沉积膜的装置，包括将成膜原料气体引入能够被真空密封的反应容器中，并在反应容器中产生微波激发等离子体以沉积膜 在设置在反应容器中的用于膜沉积的基板上。 该装置包括用于传输微波能量的矩形波导，具有不同截止频率的一对微波截止腔，空腔相对地设置在波导的相对侧上，反应容器设置成穿过波导和微波截止腔， 其中原料气体入口设置在反应容器的一端，并且在反应容器的另一端设置有膜沉积空间，由此可以有效地利用在反应容器中产生的用于膜沉积的等离子体而不用 将等离子体泄漏到气体入口侧的空腔中，并以良好的再现性进行稳定的膜沉积。