公开(公告)号：US08367541B2

公开(公告)日：2013-02-05

申请号：US11189866

申请日：2005-07-27

申请人： Kouichi Nagai ,  Hitoshi Saito ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudo ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Katsuhiro Sato ,  Kaoru Saigoh

发明人： Kouichi Nagai ,  Hitoshi Saito ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudo ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Katsuhiro Sato ,  Kaoru Saigoh

IPC分类号： H01L21/4763

CPC分类号： H01L27/11507 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76831 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/76843 ,  H01L24/03 ,  H01L24/05 ,  H01L24/48 ,  H01L27/105 ,  H01L27/11502 ,  H01L27/11509 ,  H01L28/57 ,  H01L28/65 ,  H01L2224/02166 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05093 ,  H01L2224/05096 ,  H01L2224/05166 ,  H01L2224/05187 ,  H01L2224/05553 ,  H01L2224/05567 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/48463 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01057 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01083 ,  H01L2924/05042 ,  H01L2924/13091 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2224/45099 ,  H01L2224/05552

摘要： After a ferroelectric capacitor is formed, an Al wiring (conductive pad) connected to the ferroelectric capacitor is formed. Then, a silicon oxide film and a silicon nitride film are formed around the Al wiring. Thereafter, as a penetration inhibiting film which inhibits penetration of moisture into the silicon oxide film, an Al2O3 film is formed.

摘要翻译： 在形成铁电电容器之后，形成连接到铁电电容器的Al布线（导电焊盘）。 然后，在Al布线周围形成氧化硅膜和氮化硅膜。 此后，作为抑制水分渗透到氧化硅膜中的渗透抑制膜，形成Al 2 O 3膜。

公开(公告)号：US20060220081A1

公开(公告)日：2006-10-05

申请号：US11189866

申请日：2005-07-27

申请人： Kouichi Nagai ,  Hitoshi Saito ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudo ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Katsuhiro Sato ,  Kaoru Saigoh

发明人： Kouichi Nagai ,  Hitoshi Saito ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudo ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Katsuhiro Sato ,  Kaoru Saigoh

IPC分类号： H01L29/76

CPC分类号： H01L27/11507 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76831 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/76843 ,  H01L24/03 ,  H01L24/05 ,  H01L24/48 ,  H01L27/105 ,  H01L27/11502 ,  H01L27/11509 ,  H01L28/57 ,  H01L28/65 ,  H01L2224/02166 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05093 ,  H01L2224/05096 ,  H01L2224/05166 ,  H01L2224/05187 ,  H01L2224/05553 ,  H01L2224/05567 ,  H01L2224/05624 ,  H01L2224/05647 ,  H01L2224/48463 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01007 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01018 ,  H01L2924/01022 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01057 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01083 ,  H01L2924/05042 ,  H01L2924/13091 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/04941 ,  H01L2924/04953 ,  H01L2224/45099 ,  H01L2224/05552

摘要： After a ferroelectric capacitor is formed, an Al wiring (conductive pad) connected to the ferroelectric capacitor is formed. Then, a silicon oxide film and a silicon nitride film are formed around the Al wiring. Thereafter, as a penetration inhibiting film which inhibits penetration of moisture into the silicon oxide film, an Al2O3 film is formed.

摘要翻译： 在形成铁电电容器之后，形成连接到铁电电容器的Al布线（导电焊盘）。 然后，在Al布线周围形成氧化硅膜和氮化硅膜。 此后，作为抑制水分渗透到氧化硅膜中的渗透抑制膜，形成Al 2 O 3 3膜。

公开(公告)号：US07982254B2

公开(公告)日：2011-07-19

申请号：US11969019

申请日：2008-01-03

申请人： Kouichi Nagai ,  Katsuhiro Sato ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudou ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Kaoru Saigoh

发明人： Kouichi Nagai ,  Katsuhiro Sato ,  Kaoru Sugawara ,  Makoto Takahashi ,  Masahito Kudou ,  Kazuhiro Asai ,  Yukimasa Miyazaki ,  Kaoru Saigoh

IPC分类号： H01L29/76

CPC分类号： H01L27/11502 ,  H01L27/11507 ,  H01L28/57 ,  H01L28/65 ,  H01L2924/0002 ,  H01L2924/00

摘要： A protective film (56) having a water/hydrogen blocking function is formed so as to cover the periphery of a pad electrode (54a) while being electrically isolated from the pad electrode. A material selected in the embodiment for composing the protective film is a highly moisture-proof material having a water/hydrogen blocking function considerably superior to that of the insulating material, such as palladium (Pd) or palladium-containing material, and iridium (Ir) or iridium oxide (IrOx: typically x=2) or an iridium- or iridium oxide-containing material. An FeRAM capable of reliably preventing water/hydrogen from entering inside, and of maintaining high performance of the ferroelectric capacitor structure (30) may be realized only by a simple configuration.

摘要翻译： 形成具有水/氢阻断功能的保护膜（56），以便在与焊盘电极电隔离的同时覆盖焊盘电极（54a）的外围。 用于构成保护膜的实施方案中选择的材料是具有显着优于绝缘材料（例如钯（Pd）或含钯材料）和铱（Ir）的防氢/阻氢功能的高度防潮材料 ）或氧化铱（IrOx：通常为x = 2）或含铱或氧化铱的材料。 可以通过简单的结构实现能够可靠地防止水/氢进入内部并且保持铁电电容器结构（30）的高性能的FeRAM。

公开(公告)号：US6030536A

公开(公告)日：2000-02-29

申请号：US48218

申请日：1998-03-26

申请人： Yukio Wada ,  Kazumasa Kosugi ,  Masaki Ozawa ,  Kaoru Sugawara ,  Hidechiyo Kashihara ,  Nobuyuki Sasao

发明人： Yukio Wada ,  Kazumasa Kosugi ,  Masaki Ozawa ,  Kaoru Sugawara ,  Hidechiyo Kashihara ,  Nobuyuki Sasao

IPC分类号： B01D17/02 ,  C02F1/28 ,  C02F1/30 ,  C02F1/467 ,  C02F1/72 ,  C09K3/32 ,  C10G25/00 ,  B01D15/00

CPC分类号： B01D17/0202 ,  C02F1/281 ,  C02F1/30 ,  C02F1/4672 ,  C02F1/725 ,  C02F2101/32 ,  C02F2305/026 ,  Y10S210/924 ,  Y10S210/925

摘要： A method for easily decomposing viscous, solidified spilled fuel oil or crude oil containing sea water and other disposal inhibiting substances. Titanium dioxide particles are added to viscous spilled fuel oil recovered in drums in a weight ratio of at least 0.2 to 1 times. Fuel oil is specifically adsorbed by the adsorbent and the mixture can be suspended in water. The suspension is filtered by a coarse filter to remove substances interfering with disposal by the oil. This filtrate is passed through a high performance filter (of sufficiently fine mesh to retain the adsorbent) so that the adsorbent is recovered, and sea water and other substances are discarded.

摘要翻译： 一种容易分解粘稠，固化的溢出燃料油或含海水和其他处理抑制物质的原油的方法。 将二氧化钛颗粒以至少0.2至1倍的重量比加入到以桶中回收的粘性溢出的燃料油中。 燃料油被吸附剂特别吸附，混合物可以悬浮在水中。 将悬浮液用粗过滤器过滤以除去干扰油的处理的物质。 将该滤液通过高性能过滤器（足够细的网孔以保持吸附剂），从而回收吸附剂，并且丢弃海水和其他物质。