Alumina sintered product
    1.
    发明授权
    Alumina sintered product 失效
    氧化铝烧结产品

    公开(公告)号:US5830819A

    公开(公告)日:1998-11-03

    申请号:US424782

    申请日:1995-04-19

    CPC分类号: H01J29/485 C04B35/117

    摘要: An aluminous sintered product comprising 70 to 96% by weight of an alumina component and 4 to 30% by weight of additives, said additives including at least the one selected from oxides of elements of the Group 5a of periodic table and at least the one selected from oxides of metals of the iron family and oxides of manganese, titanium, calcium, magnesium, chromium and silica, and said aluminous sintered product exhibiting a volume resistivity of from 1.times.10.sup.7 to 1.times.10.sup.13 .OMEGA.-cm over a temperature range of from 25.degree. to 75.degree. C. and an absolute value of the temperature coefficient of volume resistivity of not larger than 1.8%/.degree.C. under the application of high voltages. The sintered product is used as antistatic part such as conveyer arm, handling jig, tweezers for holding wafers and the like that must not be electrostatically charged in an apparatus for producing semiconductors, and as resistance substrate, electrically conducting material, contact, heater, part in vacuum tubes, and part for electron guns in a CRT such as of TVs and the like.

    摘要翻译: 包含70至96重量%的氧化铝组分和4至30重量%的添加剂的高铝烧结产品,所述添加剂至少包括选自周期表第5a组元素的氧化物和至少一种选自 由铁族金属的氧化物和锰,钛,钙,镁,铬和二氧化硅的氧化物组成,所述铝烧结产品在25℃至75℃的温度范围内体积电阻率为1×10 7至1×10 13欧姆 - ℃,体积电阻率的温度系数的绝对值不大于1.8%/℃。 烧结体作为防静电部件,例如输送臂,处理夹具,用于保持晶片等的镊子,在用于制造半导体的装置中不得静电,并且作为电阻基板,导电材料,接触,加热器,部件 在真空管中,以及诸如电视机等的CRT中的电子枪的部件。