公开(公告)号：US07876113B2

公开(公告)日：2011-01-25

申请号：US12007911

申请日：2008-01-17

Applicant: Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

Inventor： Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

IPC: G01R31/305

CPC classification number: H01J37/222 ,  G01R31/307 ,  H01J37/256 ,  H01J37/263 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/043 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/2813 ,  H01J2237/2817 ,  H01J2237/304

Abstract: Electron beam is irradiated to a wafer in the midst of steps at predetermined intervals by a plurality of times under a condition in which a junction becomes rearward bias and a difference in characteristic of a time period of alleviating charge in the rearward bias is monitored. As a result, charge is alleviated at a location where junction leakage is caused in a time period shorter than that of a normal portion and therefore, a potential difference is produced between the normal portion and a failed portion and is observed in a potential contrast image as a difference in brightness. By consecutively repeating operation of acquiring the image, executing an image processing in real time and storing a position and brightness of the failed portion, the automatic inspection of a designated region can be executed. Information of image, brightness and distribution of the failed portion is preserved and outputted automatically after inspection.

Abstract translation: 电子束在连接点成为向后偏置的状态下以预定间隔在步骤中照射到晶片，并且监视在向后偏置中减轻电荷的时间段的特性差。 结果，在比正常部分短的时间段内产生结漏电的位置处的电荷被减轻，因此在正常部分和失效部分之间产生电位差，并且在潜在对比图像中观察到电荷 作为亮度的差异。 通过连续重复获取图像的操作，实时执行图像处理并存储失败部分的位置和亮度，可以执行指定区域的自动检查。 故障部分的图像，亮度和分布信息在检查后自动保存并输出。

公开(公告)号：US06586952B2

公开(公告)日：2003-07-01

申请号：US09881000

申请日：2001-06-15

Applicant: Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

Inventor： Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

IPC: G01R31305

CPC classification number: H01J37/222 ,  G01R31/307 ,  H01J37/256 ,  H01J37/263 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/043 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/2813 ,  H01J2237/2817 ,  H01J2237/304

Abstract: Electron beam is irradiated to a wafer in the midst of steps at predetermined intervals by a plurality of times under a condition in which a junction becomes rearward bias and a difference in characteristic of a time period of alleviating charge in the rearward bias is monitored. As a result, charge is alleviated at a location where junction leakage is caused in a time period shorter than that of a normal portion and therefore, a potential difference is produced between the normal portion and a failed portion and is observed in a potential contrast image as a difference in brightness. By consecutively repeating operation of acquiring the image, executing an image processing in real time and storing a position and brightness of the failed portion, the automatic inspection of a designated region can be executed. Information of image, brightness and distribution of the failed portion is preserved and outputted automatically after inspection.

Abstract translation: 电子束在连接点成为向后偏置的状态下以预定间隔在步骤中照射到晶片，并且监视在向后偏置中减轻电荷的时间段的特性差。 结果，在比正常部分短的时间段内产生结漏电的位置处的电荷被减轻，因此在正常部分和失效部分之间产生电位差，并且在潜在对比图像中观察到电荷 作为亮度的差异。 通过连续重复获取图像的操作，实时执行图像处理并存储失败部分的位置和亮度，可以执行指定区域的自动检查。 故障部分的图像，亮度和分布信息在检查后自动保存并输出。

公开(公告)号：US06924482B2

公开(公告)日：2005-08-02

申请号：US10395197

申请日：2003-03-25

Applicant: Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

Inventor： Mari Nozoe ,  Mitsuo Suga ,  Yoichiro Neo ,  Hidetoshi Nishiyama

IPC: G01R31/28 ,  G01Q10/00 ,  G01Q30/04 ,  G01R31/307 ,  H01L21/00 ,  H01L21/66 ,  G21K7/00

CPC classification number: H01J37/222 ,  G01R31/307 ,  H01J37/256 ,  H01J37/263 ,  H01J37/265 ,  H01J37/266 ,  H01J2237/043 ,  H01J2237/24564 ,  H01J2237/2594 ,  H01J2237/2813 ,  H01J2237/2817 ,  H01J2237/304

Abstract: Electron beam is irradiated to a wafer in the midst of steps at predetermined intervals by a plurality of times under a condition in which a junction becomes rearward bias and a difference in characteristic of a time period of alleviating charge in the rearward bias is monitored. As a result, charge is alleviated at a location where junction leakage is caused in a time period shorter than that of a normal portion and therefore, a potential difference is produced between the normal portion and a failed portion and is observed in a potential contrast image as a difference in brightness. By consecutively repeating operation of acquiring the image, executing an image processing in real time and storing a position and brightness of the failed portion, the automatic inspection of a designated region can be executed. Information of image, brightness and distribution of the failed portion is preserved and outputted automatically after inspection.

Abstract translation: 电子束在连接点成为向后偏置的状态下以预定间隔在步骤中照射到晶片，并且监视在向后偏置中减轻电荷的时间段的特性差。 结果，在比正常部分短的时间段内产生结漏电的位置处的电荷被减轻，因此在正常部分和失效部分之间产生电位差，并且在潜在对比图像中观察到电荷 作为亮度的差异。 通过连续重复获取图像的操作，实时执行图像处理并存储失败部分的位置和亮度，可以执行指定区域的自动检查。 故障部分的图像，亮度和分布信息在检查后自动保存并输出。

公开(公告)号：US20090250609A1

公开(公告)日：2009-10-08

申请号：US12335143

申请日：2008-12-15

Applicant: Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

IPC: G01N23/00 ,  C12N5/00

CPC classification number: G01N23/2202 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.

Abstract translation: 用于检查液体试样的电子显微镜方法及其试剂溶液。 将培养基和生物细胞放入样品架中。 将堵塞剂混合到液体样品中。 细胞可以通过膜用初级束照射。 通过检测所得到的辅助信号来获得单元的图像或关于单元的信息。 如果胶片被破坏，则堵塞剂堵塞胶片的损坏部分。 因此，可以使液体泄漏最小化。

公开(公告)号：US08030622B2

公开(公告)日：2011-10-04

申请号：US12478111

申请日：2009-06-04

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC: H01J37/20 ,  G01N1/28 ,  G21K5/08

CPC classification number: G01N23/2204 ,  H01J37/20 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).

Abstract translation: 提供样品架，可以减少由培养细胞组成的标本上喷洒的化学物质的量。 样品架具有开放的样品保持表面。 试样保持面的至少一部分由膜和形成在膜周围的锥形部分形成。 样品可以在膜的样品保持表面上培养。 锥形部分的存在可以减少使用的试剂的量。 样品可以通过膜通过初级光束照射，用于观察或检查样品。 因此，在培养样品时，可以在体内良好地观察或检查样品，例如细胞。 特别地，如果使用电子束作为主光束，则可以通过SEM（扫描电子显微镜）在体内良好地观察或检查样品。

公开(公告)号：US20100019146A1

公开(公告)日：2010-01-28

申请号：US12501011

申请日：2009-07-10

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC: G01N23/225

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/2004

Abstract: Specimen holder, specimen inspection apparatus, and specimen inspection method for observing or inspecting a specimen consisting of cultured cells. The specimen holder has a body portion and a film. The body portion has a specimen-holding surface opened to permit access from the outside. The film has a first surface forming the specimen-holding surface. The specimen disposed on the first surface of the film can be irradiated with a primary beam for observation or inspection of the specimen via the film. A region coated with an electrically conductive film is formed on the bottom surface of the body portion facing away from the specimen-holding surface. An optically transparent region not coated with the electrically conductive film is also formed on the bottom surface.

Abstract translation: 样本支架，样本检查装置和用于观察或检查由培养细胞组成的标本的样本检查方法。 试样架具有主体部分和薄膜。 主体部分具有打开以允许从外部进入的标本保持表面。 膜具有形成试样保持面的第一表面。 可以利用主光束照射设置在膜的第一表面上的试样，以通过膜观察或检查试样。 涂覆有导电膜的区域形成在主体部分的背离标本保持表面的底表面上。 未涂覆导电膜的光学透明区域也形成在底面上。

公开(公告)号：US07906760B2

公开(公告)日：2011-03-15

申请号：US12335143

申请日：2008-12-15

Applicant: Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

IPC: H01J37/20

CPC classification number: G01N23/2202 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.

Abstract translation: 用于检查液体试样的电子显微镜方法及其试剂溶液。 将培养基和生物细胞放入样品架中。 将堵塞剂混合到液体样品中。 细胞可以通过膜用初级束照射。 通过检测所得到的辅助信号来获得单元的图像或关于单元的信息。 如果胶片被破坏，则堵塞剂堵塞胶片的损坏部分。 因此，可以使液体泄漏最小化。

公开(公告)号：US20090314955A1

公开(公告)日：2009-12-24

申请号：US12478111

申请日：2009-06-04

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC: G21K5/10 ,  G01N23/00

CPC classification number: G01N23/2204 ,  H01J37/20 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part of the specimen-holding surface is formed by a film and a tapering portion formed around the film. The specimen can be cultured on the specimen-holding surface of the film. The presence of the tapering portion can reduce the amount of used reagent. The specimen can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the specimen, such as cells, can be well observed or inspected in vivo while the specimen is being cultured. Especially, if an electron beam is used as the primary beam, the specimen can be well observed or inspected in vivo by SEM (scanning electron microscopy).

Abstract translation: 提供样品架，可以减少由培养细胞组成的标本上喷洒的化学物质的量。 样品架具有开放的样品保持表面。 试样保持面的至少一部分由膜和形成在膜周围的锥形部分形成。 样品可以在膜的样品保持表面上培养。 锥形部分的存在可以减少使用的试剂的量。 样品可以通过膜通过初级光束照射，用于观察或检查样品。 因此，在培养样品时，可以在体内良好地观察或检查样品，例如细胞。 特别地，如果使用电子束作为主光束，则可以通过SEM（扫描电子显微镜）在体内良好地观察或检查样品。

公开(公告)号：US07928380B2

公开(公告)日：2011-04-19

申请号：US12342897

申请日：2008-12-23

Applicant: Mitsuo Suga ,  Hidetoshi Nishiyama

Inventor： Mitsuo Suga ,  Hidetoshi Nishiyama

IPC: G01N23/02

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/262 ,  H01J2237/28

Abstract: A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a first surface on which a sample is held. The thickness D of the film and the length L of the portion of the film providing a cover over the opening in the frame-like member satisfy a relationship given by L/D

Abstract translation: 用于SEM（扫描电子显微镜）或TEM（透射电子显微镜）中的样品架，允许以更高分辨率观察和检查。 保持器具有设置有被膜覆盖的开口的框架状构件。 该膜具有保持样品的第一表面。 膜的厚度D和在框状构件的开口上设置盖的膜的部分的长度L满足由L / D <200,000给出的关系。

公开(公告)号：US20100243888A1

公开(公告)日：2010-09-30

申请号：US12725816

申请日：2010-03-17

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi ,  Mitsuo Suga

IPC: G01N23/22 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2443 ,  H01J2237/24475

Abstract: An inspection apparatus and method capable of well observing or inspecting a specimen contained in a liquid. The inspection apparatus has a film including first and second surfaces. Furthermore, the apparatus has a vacuum chamber for reducing the pressure in the ambient in contact with the second surface of the film, primary beam irradiation column connected with the vacuum chamber, and a shutter for partially partitioning the space between the film and the primary beam irradiation column within the vacuum chamber. A liquid sample is held on the first surface of the film. The primary beam irradiation column irradiates the sample. Backscattered electrons (a secondary beam) produced from the sample by the primary beam irradiation are directed at the shutter, producing secondary electrons (a tertiary signal).

Abstract translation: 能够良好地观察或检查包含在液体中的试样的检查装置和方法。 检查装置具有包括第一表面和第二表面的膜。 此外，该装置具有用于减小与膜的第二表面接触的环境中的压力的​​真空室，与真空室连接的主光束照射塔，以及用于部分地分隔膜和主光束之间的空间的遮板 真空室内的照射柱。 液体样品被保持在膜的第一表面上。 主光束照射列照射样品。 通过主光束照射由样品产生的后向散射电子（次级光束）指向快门，产生二次电子（第三信号）。