摘要:
A heat-treatment apparatus includes a quartz heat-treatment tube having a vertically set axis in which a heat-treatment gas is supplied from its lower portion, and a quartz cap to be mounted on an upper opening portion of the heat-treatment tube. An opening is formed in a central portion of the cap, a quartz rod is inserted through the opening along the axis of the heat-treatment tube, and semiconductor parts to be heat-treated are held by the rod. A first exhaust duct is formed in a side surface of the heat-treatment tube at a position higher than at least the semiconductor parts held by the rod and exhausts the heat-treatment gas in the heat-treatment tube. A ring-like chamber open toward the inner surface of the cap is formed in the outer circumferential surface of the heat-treatment tube in a position close to the upper opening surface, and a second exhaust duct communicates with this chamber. The chamber communicates with the opening portion formed in the cap in the outer circumferential portion of the rod and communicates with the interior of the heat-treatment tube, thereby exhausting an external air drawn from the opening together with the heat-treatment gas in the heat-treatment tube.
摘要:
A semiconductor device of this invention is characterized in that one element region is electrically isolated from another element region adjacent thereto by forming a groove surrounding the one element region and a distance between the groove surrounding one element region and a groove surrounding the another element region is set to be equal to or larger than 3 .mu.m.
摘要:
This invention relates to a method of manufacturing a semiconductor device having elements isolated by a trench. A trench is formed to surround an element region of a silicon substrate by anisotropic etching. A nonoxide film such as a silicon nitride film is selectively formed on the upper surface of the element region. Thermal oxidation is performed using the nonoxide film as a mask to form an oxide film on the inner face of the trench and the upper surface of a field region. Thereafter, a polysilicon layer is buried in the trench, and after the surface of the polysilicon layer is flattened, a capping oxide film is formed on the upper surface of the trench. In addition, a non-oxide film is formed to have an interval between the end of the nonoxide film and the trench of 2 .mu.m or more.
摘要:
A chemical vapor deposition apparatus comprises a reaction chamber for annealing a silicon wafer, a transportation mechanism for transporting the silicon wafer to the reaction chamber, a detecting device for detecting temperature of the reaction chamber, and an operation control device for receiving signals corresponding to the temperature of the reaction chamber, and supplying to the transportation mechanism, other signals for preventing the silicon wafer from being transported when the temperature is 100.degree. C. or more.
摘要:
To heat treat a semiconductor substrate without forming an oxide film on the surface thereof, the method of heat treating a semiconductor substrate, comprises: a step 1 of carrying a semiconductor substrate into a heat treating chamber heated at a temperature 150.degree. C. or lower; a step 2 of heating the heat treating chamber up to about 200.degree. C. to emit moisture adhering to the semiconductor substrate; a step 3 of introducing an etching gas into the heat treating chamber to etch an oxide film formed on the surface of the semiconductor substrate; and a step 4 of raising the temperature within the heat treating chamber up to a heat treating temperature to heat treat the semiconductor substrate.
摘要:
The present invention aims to provide a method which enables efficient removal of impurities such as the host proteins from an influenza virus culture liquid by a simple operation, allowing separation and purification of an influenza virus antigen. The method of the present invention for producing a purified influenza virus antigen comprises the step of treating a sample containing an influenza virus with a surfactant, the step of bringing the sample after the treatment into contact with hydroxyapatite in the presence of the surfactant, and the step of recovering a hydroxyapatite-non-adsorbed fraction.
摘要:
Each unit cell of a water electrolysis apparatus includes a pair of an anode separator and a cathode separator and a membrane electrode assembly interposed between the pair of separators. The anode separator has a first flow field to which water is supplied, and the cathode separator has a second flow field for producing high-pressure hydrogen through electrolysis of the water. A second seal groove for receiving a second seal member is disposed annularly around the second flow field. A pressure-releasing chamber is disposed outwardly of the second seal groove, is capable of communicating with the second seal groove and communicates with the outside through a depressurizing channel.
摘要:
In a vehicle battery unit, since a second support plate (30B) and a second end plate (29B) of a second battery module (22B) having a plurality of battery cells (21) stacked are placed on top of a first support plate (30A) and a first end plate (29A) of a first battery module (22A) having a plurality of the battery cells (21), it is possible to prevent the weight of the second battery module (22B) from being imposed on the battery cells (21) of the first battery module (22A). Moreover, since it is not necessary to provide on the exterior of the first battery module (22A) a member for supporting the weight of the second battery module (22B), it is possible to reduce the dimensions of the first battery module (22A).
摘要:
A spectacles-type image display device having an image output unit that includes a display element that displays images and is disposed on a spectacle frame and a reflection unit that is disposed adjacent to at least one of spectacle lenses and reflects the image light that is output from the image output unit toward the eyeball so that the viewer can see a virtual image of the image is provided. The reflection unit is a reflection member having a positive refractive power and an effective luminous flux that is output from the image output unit and reaches the eyeball of the viewer is configured so that the width of the luminous flux perpendicular to an optical axis is minimum at the reflection unit with respect to the optical axis cross-section parallel to an incident surface of the optical axis relative to the reflection unit.
摘要:
A crosslinking reaction and a reaction for reducing molecular weight that take place in a hyaluronic acid-methotrexate conjugate upon irradiation with light are suppressed to improve the photostability of the conjugate. Specifically, a substance having a quenching effect and/or a radical scaveng effect is added to a pharmaceutical composition containing the hyaluronic acid-methotrexate conjugate.