Mobile unit support system and mobile unit detection device and a system
    5.
    发明授权
    Mobile unit support system and mobile unit detection device and a system 失效
    移动单元支持系统和移动单元检测设备及系统

    公开(公告)号:US6130626A

    公开(公告)日:2000-10-10

    申请号:US899483

    申请日:1997-07-24

    IPC分类号: G08G1/01 G08G1/09 G08G1/0967

    摘要: A mobile unit support system has a mobile unit and a plurality of sources to be detected installed along a route of movement of said mobile unit, characterized in that said mobile unit includes a storage section for storing in advance the information on the arrangement of said plurality of the sources to be detected, a detection section for detecting said sources to be detected, and an arithmetic processing section for producing predetermined information on the basis of said detection information detected and said arrangement information stored.

    摘要翻译: 移动单元支持系统具有沿着所述移动单元的移动路线安装的移动单元和多个待检测的源,其特征在于,所述移动单元包括用于预先存储关于所述多个移动单元的布置的信息的存储部分 要检测的源,用于检测所述检测源的检测部分,以及用于根据检测到的所述检测信息和存储的所述布置信息产生预定信息的算术处理部分。

    Apparatus and method for forming thin film
    8.
    发明授权
    Apparatus and method for forming thin film 失效
    用于形成薄膜的装置和方法

    公开(公告)号:US5863338A

    公开(公告)日:1999-01-26

    申请号:US583662

    申请日:1996-01-05

    摘要: A forming apparatus of a thin film, includes a processing chamber where a predetermined process is carried out on a surface of a supplied substrate, and a feeding device, which is provided in the processing chamber, for feeding material to form an organic molecular layer including silicon or germanium on the surface of the substrate. A forming method of a thin film, includes steps of forming a thin film on a surface of a supplied substrate in a processing chamber, and feeding material for forming an organic molecular layer including silicon or germanium on the formed thin film on the surface of the substrate through a feeding device in the processing chamber, and then forming the organic molecular layer on the surface of the substrate.

    摘要翻译: 薄膜的成形装置包括处理室,其中在所提供的基板的表面上执行预定的处理;以及馈送装置,其设置在处理室中,用于馈送材料以形成有机分子层,所述有机分子层包括 硅或锗在基板的表面上。 薄膜的形成方法包括以下步骤:在处理室中的供给的基板的表面上形成薄膜,以及在所形成的薄膜上形成包含硅或锗的有机分子层的供给材料 基板通过处理室中的进料装置,然后在基板的表面上形成有机分子层。