公开(公告)号：US5519193A

公开(公告)日：1996-05-21

申请号：US966960

申请日：1992-10-27

申请人： Peter E. Freiermuth ,  Kathleen S. Ginn ,  Jeffrey A. Haley ,  Susan J. Lamaire ,  David A. Lewis ,  Gavin T. Mills ,  Timothy A. Redmond ,  Yuk L. Tsang ,  Joseph J. Van Horn ,  Alfred Viehbeck ,  George F. Walker ,  Jer-Ming Yang ,  Clarence S. Long

发明人： Peter E. Freiermuth ,  Kathleen S. Ginn ,  Jeffrey A. Haley ,  Susan J. Lamaire ,  David A. Lewis ,  Gavin T. Mills ,  Timothy A. Redmond ,  Yuk L. Tsang ,  Joseph J. Van Horn ,  Alfred Viehbeck ,  George F. Walker ,  Jer-Ming Yang ,  Clarence S. Long

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/265 ,  H01L21/268 ,  H01L21/326 ,  H01L21/329 ,  H05B6/80

CPC分类号： G01R31/2881 ,  G01R31/311 ,  Y10S148/071

摘要： The described invention is directed to microwave methods for burning-in, electrical stressing, thermal stressing and reducing rectifying junction leakage current in fully processed semiconductor chips individually and at wafer level, as well as burning in and stressing semiconductor chip packaging substrates and the combination of a semiconductor chip mounted onto a semiconductor chip packaging substrate. Microwaves burn-in devices in a substantially shorter period of time than conventional burn-in techniques and avoid the need for special workpiece holders which are required by conventional stress and burn-in techniques. Additionally, microwave methods are described for reducing the leakage current of recitfying junctions, such as PN junctions and Schottky barrier diode junctions of semiconductor devices on fully processed semiconductor chips and wafers.

摘要翻译： 所描述的发明涉及在半导体芯片单独和晶圆级别的烧结，电应力，热应力和减少整流结漏电流的微波方法，以及对半导体芯片封装衬底的燃烧和应力的组合 安装在半导体芯片封装基板上的半导体芯片。 微波老化装置在比传统的老化技术更短的时间内，并且避免了对于常规应力和老化技术所要求的特殊工件支架的需要。 此外，描述了微波方法，用于减少重新连接的漏电流，例如半导体器件在完全处理的半导体芯片和晶片上的PN结和肖特基势垒二极管接头。

公开(公告)号：US5593720A

公开(公告)日：1997-01-14

申请号：US447564

申请日：1995-05-23

申请人： Kie Y. Ahn ,  James L. Hedrick, Jr. ,  Jeffrey W. Labadie ,  Kang-Wook Lee ,  Robert J. Twieg ,  Alfred Viehbeck ,  George F. Walker

发明人： Kie Y. Ahn ,  James L. Hedrick, Jr. ,  Jeffrey W. Labadie ,  Kang-Wook Lee ,  Robert J. Twieg ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： C08G73/18 ,  C08L71/00 ,  H01L23/29 ,  H01L23/31 ,  H01L23/498 ,  H01L23/532 ,  H05K1/00 ,  H05K1/03 ,  B05D5/12

CPC分类号： H01L23/5329 ,  C08G73/18 ,  C08L71/00 ,  H01L23/293 ,  H01L23/49894 ,  H01L2924/0002 ,  H05K1/0346 ,  H05K3/4676 ,  Y10S428/901 ,  Y10T29/49155 ,  Y10T29/49171 ,  Y10T428/24917 ,  Y10T428/31605 ,  Y10T428/31721

摘要： A multilevel electronic package comprising at least two levels, each level including a poly(aryl ether benzimidazole), a polymide and copper. A process of preparing this package is disclosed. Several novel poly(aryl ether benzimidazoles) useful in preparing this package are also set forth.

摘要翻译： 包括至少两个级别的多级电子封装，每个级别包括聚（芳基醚苯并咪唑），聚酰亚胺和铜。 公开了制备该包装的过程。 还介绍了可用于制备该包装的几种新颖的聚（芳基醚苯并咪唑）。

公开(公告)号：US5326643A

公开(公告)日：1994-07-05

申请号：US771929

申请日：1991-10-07

申请人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

发明人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： B32B7/10 ,  B32B15/08 ,  B32B15/088 ,  B32B27/00 ,  C08G73/00 ,  C08G73/10 ,  H01B3/30 ,  H01L21/52 ,  H05K1/03 ,  H05K3/46 ,  B32B9/00

CPC分类号： C08G73/1089 ,  C08G73/1003 ,  C08G73/1007 ,  C08G73/101 ,  H01B3/306 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/31721

摘要： The disclosure describes a multilayer article of manufacture comprising a substrate having adhered to it a terminally unsaturated adhesive polyimide, where the surface of the adhesive opposite the substrate is adhered to a polyimide, the article further characterized in having one set or a plurality of alternating layers of the terminally unsaturated adhesive polyimide and the polyimide. In another embodiment, the article has at least one adhesive polyimide layer adhered to a metal substrate or an electrical circuit component such as an integrated circuit, or means for forming electrical connections in an electrical circuit such as metal conduits on the circuit or a wiring network embedded within a ceramic and/or polymer substrate.In manufacturing the article of manufacture, a surface treatment technique such as wet process or a plasma/optional silane coupling agent may be applied to either the substrate, adhesive polyimide film or polyimide film prior to the bonding operation.A novel adhesive polyimide is also described which is an adhesive polyimide such as ODPA-APB terminated with unsaturated heterocyclic monoamines such as azaadenines, aminobenzotriazoles, aminopurines or aminopyrazolopyrimidines and optionally anhydrides, aminoacetylenes, vinylamines or amino phosphines. The novel polyimide may also contain unsaturated heterocyclic groups in the polymer backbone or chain, either as a partial or complete replacement for the aromatic diamines used in synthesizing the polyimide. This novel adhesive polyimide in this invention acts as an adhesive layer for the polymer-substrate (copper, polymer, glass ceramic) interface as well as a copper diffusion barrier layer for the polymer-copper interface.

摘要翻译： 本公开描述了一种多层制品，其包括粘附到其上的末端不饱和粘合聚酰亚胺的基底，其中与基底相对的粘合剂的表面粘附到聚酰亚胺上，该制品进一步的特征在于具有一组或多个交替层 的末端不饱和粘合聚酰亚胺和聚酰亚胺。 在另一个实施方案中，制品具有粘附到金属基底或诸如集成电路的电路部件的至少一个粘合聚酰亚胺层，或用于在电路中形成电连接的装置，例如电路上的金属管道或布线网络 嵌入在陶瓷和/或聚合物基材内。 在制造该制品时，可以在接合操作之前将表面处理技术如湿法或等离子体/任选的硅烷偶联剂施加到基底，粘合聚酰亚胺膜或聚酰亚胺膜上。 还描述了一种新型粘合聚酰亚胺，其是粘合聚酰亚胺，例如用不饱和杂环单胺如氮杂腺嘌呤，氨基苯并三唑，氨基嘌呤或氨基吡唑并嘧啶和任选的酸酐，氨基乙炔，乙烯胺或氨基膦封端的ODPA-APB。 新型聚酰亚胺还可以在聚合物主链或链中含有不饱和杂环基团，作为用于合成聚酰亚胺的芳族二胺的部分或完全替代物。 本发明中的这种新型粘合聚酰亚胺作为聚合物基材（铜，聚合物，玻璃陶瓷）界面的粘合剂层以及用于聚合物 - 铜界面的铜扩散阻挡层。

公开(公告)号：US5582858A

公开(公告)日：1996-12-10

申请号：US474985

申请日：1995-06-07

申请人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

发明人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： B32B7/10 ,  B32B15/08 ,  B32B15/088 ,  B32B27/00 ,  C08G73/00 ,  C08G73/10 ,  H01B3/30 ,  H01L21/52 ,  H05K1/03 ,  H05K3/46 ,  B05D5/10

CPC分类号： C08G73/1089 ,  C08G73/1003 ,  C08G73/1007 ,  C08G73/101 ,  H01B3/306 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/31721

摘要： The disclosure describes a multilayer article of manufacture comprising a substrate having adhered to it a terminally unsaturated adhesive polyimide, where the surface of the adhesive opposite the substrate is adhered to a polyimide, the article further characterized in having one set or a plurality of alternating layers of the terminally unsaturated adhesive polyimide and the polyimide. In another embodiment, the article has at least one adhesive polyimide layer adhered to a metal substrate or an electrical circuit component such as an integrated circuit, or means for forming electrical connections in an electrical circuit such as metal conduits on the circuit or a wiring network embedded within a ceramic and/or polymer substrate.In manufacturing the article of manufacture, a surface treatment technique such as wet process or a plasma/optional silane coupling agent may be applied to either the substrate, adhesive polyimide film or polyimide film prior to the bonding operation.A novel adhesive polyimide is also described which is an adhesive polyimide such as ODPA-APB terminated with unsaturated heterocyclic monoamines such as azaadenines, aminobenzotriazoles, aminopurines or aminopyrazolopyrimidines and optionally anhydrides, aminoacetylenes, vinylamines or amino phosphines. The novel polyimide may also contain unsaturated heterocyclic groups in the polymer backbone or chain, either as a partial or complete replacement for the aromatic diamines used in synthesizing the polyimide. This novel adhesive polyimide in this invention acts as an adhesive layer for the polymer-substrate (copper, polymer, glass ceramic) interface as well as a copper diffusion barrier layer for the polymer-copper interface.

摘要翻译： 本公开描述了一种多层制品，其包括粘附到其上的末端不饱和粘合聚酰亚胺的基底，其中与基底相对的粘合剂的表面粘附到聚酰亚胺上，该制品进一步的特征在于具有一组或多个交替层 的末端不饱和粘合聚酰亚胺和聚酰亚胺。 在另一个实施方案中，制品具有粘附到金属基底或诸如集成电路的电路部件的至少一个粘合聚酰亚胺层，或用于在电路中形成电连接的装置，例如电路上的金属管道或布线网络 嵌入在陶瓷和/或聚合物基材内。 在制造该制品时，可以在接合操作之前将表面处理技术如湿法或等离子体/任选的硅烷偶联剂施加到基底，粘合聚酰亚胺膜或聚酰亚胺膜上。 还描述了一种新型粘合聚酰亚胺，其是粘合聚酰亚胺，例如用不饱和杂环单胺如氮杂腺嘌呤，氨基苯并三唑，氨基嘌呤或氨基吡唑并嘧啶和任选的酸酐，氨基乙炔，乙烯胺或氨基膦封端的ODPA-APB。 新型聚酰亚胺还可以在聚合物主链或链中含有不饱和杂环基团，作为用于合成聚酰亚胺的芳族二胺的部分或完全替代物。 本发明中的这种新型粘合聚酰亚胺作为聚合物基材（铜，聚合物，玻璃陶瓷）界面的粘合剂层以及用于聚合物 - 铜界面的铜扩散阻挡层。

公开(公告)号：US5599582A

公开(公告)日：1997-02-04

申请号：US475412

申请日：1995-06-07

申请人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

发明人： Eleftherios Adamopoulos ,  Jungihl Kim ,  Kang-Wook Lee ,  Tae S. Oh ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  John J. Ritsko ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： B32B7/10 ,  B32B15/08 ,  B32B15/088 ,  B32B27/00 ,  C08G73/00 ,  C08G73/10 ,  H01B3/30 ,  H01L21/52 ,  H05K1/03 ,  H05K3/46 ,  B05D5/10

CPC分类号： C08G73/1089 ,  C08G73/1003 ,  C08G73/1007 ,  C08G73/101 ,  H01B3/306 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/31721

摘要： The disclosure describes a multilayer article of manufacture comprising a substrate having adhered to it a terminally unsaturated adhesive polyimide, where the surface of the adhesive opposite the substrate is adhered to a polyimide, the article further characterized in having one set or a plurality of alternating layers of the terminally unsaturated adhesive polyimide and the polyimide. In another embodiment, the article has at least one adhesive polyimide layer adhered to a metal substrate or an electrical circuit component such as an integrated circuit, or means for forming electrical connections in an electrical circuit such as metal conduits on the circuit or a wiring network embedded within a ceramic and/or polymer substrate. A novel adhesive polyimide is also described which is an adhesive polyimide such as ODPA-APB terminated with unsaturated heterocyclic monoamines such as azaadenines, aminobenzotriazoles, aminopurines or aminopyrazolopyrimidines and optionally anhydrides, aminoacetylenes, vinylamines or amino phosphines. The novel polyimide may also contain unsaturated heterocyclic groups in the polymer backbone or chain, either as a partial or complete replacement for the aromatic diamines used in synthesizing the polyimide. This novel adhesive polyimide in this invention acts as an adhesive layer for the polymer-substrate (copper, polymer, glass ceramic) interface as well as a copper diffusion barrier layer for the polymer-copper interface.

摘要翻译： 本公开描述了一种多层制品，其包括粘附到其上的末端不饱和粘合聚酰亚胺的基底，其中与基底相对的粘合剂的表面粘附到聚酰亚胺上，该制品进一步的特征在于具有一组或多个交替层 的末端不饱和粘合聚酰亚胺和聚酰亚胺。 在另一个实施方案中，制品具有粘附到金属基底或诸如集成电路的电路部件的至少一个粘合聚酰亚胺层，或用于在电路中形成电连接的装置，例如电路上的金属管道或布线网络 嵌入在陶瓷和/或聚合物基材内。 还描述了一种新型粘合聚酰亚胺，其是粘合聚酰亚胺，例如用不饱和杂环单胺如氮杂腺嘌呤，氨基苯并三唑，氨基嘌呤或氨基吡唑并嘧啶和任选的酸酐，氨基乙炔，乙烯胺或氨基膦封端的ODPA-APB。 新型聚酰亚胺还可以在聚合物主链或链中含有不饱和杂环基团，作为用于合成聚酰亚胺的芳族二胺的部分或完全替代物。 本发明中的这种新型粘合聚酰亚胺作为聚合物基材（铜，聚合物，玻璃陶瓷）界面的粘合剂层以及用于聚合物 - 铜界面的铜扩散阻挡层。

公开(公告)号：US5569739A

公开(公告)日：1996-10-29

申请号：US197941

申请日：1994-02-17

申请人： Eleftherios Adamopoulos ,  Kang-Wook Lee ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

发明人： Eleftherios Adamopoulos ,  Kang-Wook Lee ,  Terrence R. O'Toole ,  Sampath Purushothaman ,  Jane M. Shaw ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： B32B7/10 ,  B32B15/08 ,  B32B15/088 ,  B32B27/00 ,  C08G73/00 ,  C08G73/10 ,  H01B3/30 ,  H01L21/52 ,  H05K1/03 ,  H05K3/46 ,  C08F8/34

CPC分类号： C08G73/1089 ,  C08G73/1003 ,  C08G73/1007 ,  C08G73/101 ,  H01B3/306 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/31721

摘要： The disclosure describes a multilayer article of manufacture comprising a substrate having adhered to it a terminally unsaturated adhesive polyimide, where the surface of the adhesive opposite the substrate is adhered to a polyimide, the article further characterized in having one set or a plurality of alternating layers of the terminally unsaturated adhesive polyimide and the polyimide. the bonding operation.A novel adhesive polyimide is also described which is an adhesive polyimide such as ODPA-APB terminated with unsaturated heterocyclic monoamines such as azaadenines, aminobenzotriazoles, aminopurines or aminopyrazolopyrimidines and optionally anhydrides, aminoacetylenes, vinylamines or amino phosphines. The novel polyimide may also contain unsaturated heterocyclic groups in the polymer backbone or chain, either as a partial or complete replacement for the aromatic diamines used in synthesizing the polyimide. This novel adhesive polyimide in this invention acts as an adhesive layer for the polymer-substrate (copper, polymer, glass ceramic) interface as well as a copper diffusion barrier layer for the polymer copper interface.

摘要翻译： 本公开描述了一种多层制品，其包括粘附到其上的末端不饱和粘合聚酰亚胺的基底，其中与基底相对的粘合剂的表面粘附到聚酰亚胺上，该制品进一步的特征在于具有一组或多个交替层 的末端不饱和粘合聚酰亚胺和聚酰亚胺。 接合操作。 还描述了一种新型粘合聚酰亚胺，其是粘合聚酰亚胺，例如用不饱和杂环单胺如氮杂腺嘌呤，氨基苯并三唑，氨基嘌呤或氨基吡唑并嘧啶和任选的酸酐，氨基乙炔，乙烯胺或氨基膦封端的ODPA-APB。 新型聚酰亚胺还可以在聚合物主链或链中含有不饱和杂环基团，作为用于合成聚酰亚胺的芳族二胺的部分或完全替代物。 本发明中的这种新型粘合聚酰亚胺作为聚合物基材（铜，聚合物，玻璃陶瓷）界面的粘合剂层以及用于聚合物铜界面的铜扩散阻挡层。

公开(公告)号：US5516874A

公开(公告)日：1996-05-14

申请号：US319392

申请日：1994-10-06

申请人： Kie Y. Ahn ,  James L. Hedrick, Jr. ,  Jeffrey W. Labadie ,  Kang-Wook Lee ,  Robert J. Twieg ,  Alfred Viehbeck ,  George F. Walker

发明人： Kie Y. Ahn ,  James L. Hedrick, Jr. ,  Jeffrey W. Labadie ,  Kang-Wook Lee ,  Robert J. Twieg ,  Alfred Viehbeck ,  George F. Walker

IPC分类号： C08G73/18 ,  C08L71/00 ,  H01L23/29 ,  H01L23/31 ,  H01L23/498 ,  H01L23/532 ,  H05K1/00 ,  H05K1/03 ,  C08G8/02 ,  C08G65/00

CPC分类号： H01L23/5329 ,  C08G73/18 ,  C08L71/00 ,  H01L23/293 ,  H01L23/49894 ,  H01L2924/0002 ,  H05K1/0346 ,  H05K3/4676 ,  Y10S428/901 ,  Y10T29/49155 ,  Y10T29/49171 ,  Y10T428/24917 ,  Y10T428/31605 ,  Y10T428/31721

摘要： A multilevel electronic package comprising at least two levels, each level including a poly(aryl ether benzimidazole), a polymide and copper. A process of preparing this package is disclosed. Several novel poly(aryl ether benzimidazoles) useful in preparing this package are also set forth.

摘要翻译： 包括至少两个级别的多级电子封装，每个级别包括聚（芳基醚苯并咪唑），聚酰亚胺和铜。 公开了制备该包装的过程。 还介绍了可用于制备该包装的几种新颖的聚（芳基醚苯并咪唑）。

公开(公告)号：US20120286236A1

公开(公告)日：2012-11-15

申请号：US13555383

申请日：2012-07-23

申请人： Harold J. HOVEL ,  Qiang Huang ,  Xiaoyan Shao ,  James Vichiconti ,  George F. Walker

发明人： Harold J. HOVEL ,  Qiang Huang ,  Xiaoyan Shao ,  James Vichiconti ,  George F. Walker

IPC分类号： H01L29/06 ,  B82Y99/00

CPC分类号： H01L31/18 ,  B82Y10/00 ,  B82Y30/00 ,  C30B29/02 ,  C30B29/06 ,  C30B29/40 ,  C30B29/52 ,  C30B29/60 ,  C30B29/605 ,  C30B33/10 ,  H01L21/30604 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/068 ,  H01L29/125 ,  H01L31/0352 ,  H01L33/20

摘要： Segmented semiconductor nanowires are manufactured by removal of material from a layered structure of two or more semiconductor materials in the absence of a template. The removal takes place at some locations on the surface of the layered structure and continues preferentially along the direction of a crystallographic axis, such that nanowires with a segmented structure remain at locations where little or no removal occurs. The interface between different segments can be perpendicular to or at angle with the longitudinal direction of the nanowire.

摘要翻译： 在没有模板的情况下通过从两种或更多种半导体材料的层状结构中去除材料来制造分段半导体纳​​米线。 去除在层状结构的表面上的某些位置处发生，并且优选地沿着结晶轴的方向延伸，使得具有分段结构的纳米线保持在很少或不发生去除的位置。 不同片段之间的界面可以垂直于纳米线的纵向方向或与之相垂直。

公开(公告)号：US20120193231A1

公开(公告)日：2012-08-02

申请号：US13359750

申请日：2012-01-27

申请人： Ali Afzali-Ardakani ,  Stefan Harrer ,  Binquan Luan ,  Glenn J. Martyna ,  Hongbo Peng ,  Stephen M. Rossnagel ,  Gustavo A. Stolovitzky ,  Philip S. Waggoner ,  George F. Walker

发明人： Ali Afzali-Ardakani ,  Stefan Harrer ,  Binquan Luan ,  Glenn J. Martyna ,  Hongbo Peng ,  Stephen M. Rossnagel ,  Gustavo A. Stolovitzky ,  Philip S. Waggoner ,  George F. Walker

IPC分类号： G01N27/447 ,  G01N27/453

CPC分类号： G01N33/48721 ,  C12Q1/6869 ,  C12Q2563/116 ,  C12Q2563/157 ,  C12Q2565/607 ,  C12Q2565/631

摘要： A nanodevice is provided. A reservoir is filled with an ionic fluid. A membrane separates the reservoir, and the membrane includes electrode layers separated by insulating layers in which the electrode layers have an organic coating. A nanopore is formed through the membrane, and the organic coating on the electrode layers forms transient bonds to a base of a molecule in the nanopore. When a first voltage is applied to the electrode layers a tunneling current is generated by the base in the nanopore, and the tunneling current travels through the transient bonds formed to the base to be measured as a current signature for distinguishing the base.

摘要翻译： 提供了一个纳米设备。 储存器充满离子流体。 膜分离储存器，并且膜包括由绝缘层分离的电极层，其中电极层具有有机涂层。 通过膜形成纳米孔，并且电极层上的有机涂层与纳米孔中分子的碱基形成瞬态键。 当第一电压施加到电极层时，通过纳米孔中的基底产生隧道电流，并且隧道电流通过形成到待测量的基极的瞬态键作为用于区分基极的电流签名传播。

公开(公告)号：US06927472B2

公开(公告)日：2005-08-09

申请号：US09992344

申请日：2001-11-14

申请人： David K. Anderson ,  Tien-Jen Cheng ,  Timothy J. Dalton ,  Christopher V. Jahnes ,  Andrew Lu ,  Chandrasekhar Narayan ,  Kevin S. Petrarca ,  Richard P. Volant ,  George F. Walker

发明人： David K. Anderson ,  Tien-Jen Cheng ,  Timothy J. Dalton ,  Christopher V. Jahnes ,  Andrew Lu ,  Chandrasekhar Narayan ,  Kevin S. Petrarca ,  Richard P. Volant ,  George F. Walker

IPC分类号： H01L23/525 ,  H01L21/336

CPC分类号： H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and structure for a fuse structure comprises an insulator layer, a plurality of fuse electrodes extending through the insulator layer to an underlying wiring layer, an electroplated fuse element connected to the electrodes, and an interface wall. The fuse element is positioned external to the insulator, with a gap juxtaposed between the insulator and the fuse element. The interface wall further comprises a first side wall, a second side wall, and an inner wall, wherein the inner wall is disposed within the gap. The fuse electrodes are diametrically opposed to one another, and the fuse element is perpendicularly disposed above the fuse electrodes. The fuse element is either electroplatted, electroless plated, or is an ultra thin fuse.