Enhanced etch and deposition profile control using plasma sheath engineering
    2.
    发明授权
    Enhanced etch and deposition profile control using plasma sheath engineering 有权
    使用等离子体护套工程的增强蚀刻和沉积轮廓控制

    公开(公告)号:US08603591B2

    公开(公告)日:2013-12-10

    申请号:US12645638

    申请日:2009-12-23

    IPC分类号: H05H1/24

    摘要: A plasma processing tool is used to deposit material on a workpiece. For example, a method for conformal deposition of material is disclosed. In this embodiment, the plasma sheath shape is modified to allow material to impact the workpiece at a range of incident angles. By varying this range of incident angles over time, a variety of different features can be deposited onto. In another embodiment, a plasma processing tool is used to etch a workpiece. In this embodiment, the plasma sheath shape is altered to allow ions to impact the workpiece at a range of incident angles. By varying this range of incident angles over time, a variety of differently shaped features can be created.

    摘要翻译: 使用等离子体处理工具将材料沉积在工件上。 例如,公开了一种用于材料的共形沉积的方法。 在该实施例中,等离子体护套形状被修改以允许材料在入射角的范围内冲击工件。 通过随时间改变入射角的这个范围,可以沉积各种不同的特征。 在另一个实施例中,使用等离子体处理工具来蚀刻工件。 在该实施例中,等离子体鞘形状被改变以允许离子在入射角的范围内冲击工件。 通过随时间改变入射角的这个范围,可以产生各种不同形状的特征。

    Multi-mode ring scanner
    3.
    发明授权
    Multi-mode ring scanner 有权
    多模式环形扫描仪

    公开(公告)号:US07942326B2

    公开(公告)日:2011-05-17

    申请号:US11949651

    申请日:2007-12-03

    IPC分类号: G06K7/01

    摘要: A multi-mode ring scanner (MMRS) has a ring unit for wearing on a finger. The MMRS optionally has a wrist unit coupled to the ring unit, such as via a cable. The MMRS optionally communicates wirelessly with a computing device. The ring unit has one or more scanners (such as an optical scanner or an RFID tag reader). The ring unit optionally has two paddle switches for activation by inward pressure from fingers adjacent to the finger. The two switches enable specifying operation of the MMRS in a plurality of modes and/or to communicate a plurality of information codes to the computing device. The computing device is optionally enabled to assign a function to each combination of activation of the two switches. A scanning system including the MMRS optionally provides feedback to a user based on feedback from a host processor.

    摘要翻译: 多模式环形扫描器(MMRS)具有用于在手指上佩戴的环形单元。 MMRS可选地具有联接到环形单元的手腕单元,例如经由电缆。 MMRS可选地与计算设备进行无线通信。 环形单元具有一个或多个扫描仪(例如光学扫描器或RFID标签读取器)。 环形单元可选地具有两个桨叶开关,用于通过邻近手指的手指的向内压力进行激活。 两个开关使得能够以多种模式指定MMRS的操作和/或将多个信息代码传送到计算设备。 可选地,计算设备能够为两个开关的激活的每个组合分配功能。 包括MMRS的扫描系统可选地基于来自主处理器的反馈向用户提供反馈。

    PLASMA DOPING WITH ENHANCED CHARGE NEUTRALIZATION
    4.
    发明申请
    PLASMA DOPING WITH ENHANCED CHARGE NEUTRALIZATION 审中-公开
    具有增强电荷中和的等离子体掺杂

    公开(公告)号:US20090004836A1

    公开(公告)日:2009-01-01

    申请号:US11771190

    申请日:2007-06-29

    IPC分类号: H01L21/26 C23C16/00 H05H1/24

    摘要: A plasma doping apparatus includes a pulsed power supply that generates a pulsed waveform having a first period with a first power level and a second period with a second power level. A plasma source generates a pulsed plasma with the first power level during the first period and with the second power level during the second period. A bias voltage power supply generates a bias voltage waveform at an output that is electrically connected to a platen which supports a substrate. The bias voltage waveform having a first voltage during a first period and second voltage with a negative potential that attract ions in the plasma to the substrate for plasma doping during a second period. At least one of the first and second power levels of the RF waveform is chosen to at least partially neutralize charge accumulating on the substrate.

    摘要翻译: 等离子体掺杂装置包括脉冲电源,其生成具有第一功率电平的第一周期和具有第二功率电平的第二周期的脉冲波形。 等离子体源在第一周期期间产生具有第一功率电平的脉冲等离子体,并且在第二周期期间产生第二功率电平。 偏置电压电源在与支撑衬底的压板电连接的输出端产生偏置电压波形。 偏置电压波形在第一时段期间具有第一电压,在第二周期期间具有将等离子体中的离子吸引到衬底以进行等离子体掺杂的具有负电位的第二电压。 选择RF波形的第一和第二功率电平中的至少一个以至少部分地中和在衬底上累积的电荷。

    TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION
    5.
    发明申请
    TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION 审中-公开
    在等离子体离子植入中使用改进的护环的技术

    公开(公告)号:US20080160170A1

    公开(公告)日:2008-07-03

    申请号:US11617348

    申请日:2006-12-28

    IPC分类号: C23C14/02 B05C11/00

    摘要: A technique for using an improved shield ring in plasma-based ion implantation is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus and method for plasma-based ion implantation, such as radio frequency plasma doping (RF-PLAD). The apparatus and method may comprise a shield ring positioned on a same plane as and around a periphery of a target wafer, wherein the shield ring comprises an aperture-defining device for defining an area of at least one aperture, a Faraday cup positioned under the at least one aperture, and dose count electronics connected the Faraday cup for calculating ion dose rate. The at least one aperture may comprise at least one of a circular, arc-shaped, slit-shaped, ring-shaped, rectangular, triangular, and elliptical shape. The aperture-defining device may comprise at least one of silicon, silicon carbide, carbon, and graphite.

    摘要翻译: 公开了一种在等离子体离子注入中使用改进的屏蔽环的技术。 在一个特定的示例性实施例中,该技术可以被实现为用于基于等离子体的离子注入的装置和方法,例如射频等离子体掺杂(RF-PLAD)。 该装置和方法可以包括一个屏蔽环,该屏蔽环与目标晶片的周边定位在同一平面上,其中屏蔽环包括用于限定至少一个孔的区域的孔限定装置,位于下方的法拉第杯 至少一个孔径和剂量计数电子元件连接法拉第杯以计算离子剂量率。 至少一个孔可以包括圆形,弧形,狭缝状,环形,矩形,三角形和椭圆形中的至少一个。 孔限定装置可以包括硅,碳化硅,碳和石墨中的至少一种。

    System and method for mitigating filter transients in an ultra wideband receiver
    7.
    发明申请
    System and method for mitigating filter transients in an ultra wideband receiver 审中-公开
    用于减轻超宽带接收机中的滤波器瞬变的系统和方法

    公开(公告)号:US20070025417A1

    公开(公告)日:2007-02-01

    申请号:US11190901

    申请日:2005-07-28

    IPC分类号: H04B1/69

    CPC分类号: H04B1/71637

    摘要: A system (600) and method (500) are presented for mitigating a transient in processing a received signal (710) in a signal path associated with an Ultra Wideband (UWB) receiver. An impending processing event associated with processing the received signal is detected. A processing element (201, 202, 203, 204) capable of generating a transient when activated, is activated prior to the processing event such that the transient is mitigated or cleared when the processing event occurs and the received signal is processed. At least a portion of the processing element is normally deactivated so as to conserve power. The processing event includes one or more of: an acquisition processing event, a lock processing event, and a tracking processing event associated with the received signal in the signal path.

    摘要翻译: 提出了一种系统(600)和方法(500),用于减轻处理与超宽带(UWB)接收机相关联的信号路径中的接收信号(710)的瞬态。 检测与处理接收信号相关联的即将到来的处理事件。 在处理事件之前激活能够产生瞬态的处理元件(201,202,203,204),使得当处理事件发生并处理接收到的信号时,缓和或清除瞬变。 处理元件的至少一部分通常被去激活以节省功率。 处理事件包括与信号路径中的接收信号相关联的获取处理事件,锁定处理事件和跟踪处理事件中的一个或多个。

    Method for sharing bandwidth using reduced duty cycle signals and media access control
    8.
    发明申请
    Method for sharing bandwidth using reduced duty cycle signals and media access control 有权
    使用减少的占空比信号和媒体访问控制共享带宽的方法

    公开(公告)号:US20060203795A1

    公开(公告)日:2006-09-14

    申请号:US11128269

    申请日:2005-05-13

    摘要: A method is provided for transmitting data. A first device (121) generates a first signal (320) having a first duty cycle, comprising a first gated-on portion (323) and a first gated-off portion (363) in a time slot (260); and a second device (125) generates a second signal (330) having second duty cycle, comprising a second gated-on portion (333) and a second gated-off portion (363) in the same time slot (260). The first gated-on portion (323) is generated during a first segment of the time slot (260) and the first gated-off portion (363) is generated during a second segment of the time slot (260), while the second gated-on portion (333) is generated during the second segment and the second gated-off portion (363) is generated during the first segment. Media access control (MAC) can be used to further define positions within time slots (250) and provide error correction, power control, and the like. A preamble (860) can be transmitted at an increased power level to facilitate acquisition.

    摘要翻译: 提供了一种用于传输数据的方法。 第一装置(121)产生具有第一占空比的第一信号(320),包括在时隙(260)中的第一选通部分(323)和第一门控部分(363); 并且第二装置(125)产生具有第二占空比的第二信号(330),该第二信号包括在同一时隙(260)中的第二选通部分(333)和第二选通部分(363)。 在时隙(260)的第一段期间产生第一选通部分(323),并且在时隙(260)的第二段期间产生第一选通部分(363),而第二门控 在第二段期间产生部分(333),并且在第一段期间产生第二门控部分(363)。 媒体访问控制(MAC)可用于进一步定义时隙内的位置(250),并提供纠错,功率控制等。 可以以增加的功率电平发送前导码(860)以便于采集。

    Decision feed forward equalizer system and method
    9.
    发明申请
    Decision feed forward equalizer system and method 有权
    决策前馈均衡器系统和方法

    公开(公告)号:US20060164270A1

    公开(公告)日:2006-07-27

    申请号:US10538174

    申请日:2003-12-09

    IPC分类号: H03M3/00

    摘要: An equalizer and corresponding methods is arranged and constructed to mitigate adverse effects of a wireless channel (300). The equalizer includes a delay line (503) coupled to an input signal (501) and comprising a delay circuit coupled to an output combiner (507) that is operable to provide an interim signal (g0 . . . gN) and a feed forward circuit (505) coupled to the delay line and operable to provide a feed forward signal (506) that comprises a hard decision scaled according to a scaling factor corresponding to an estimate of channel parameters, wherein the output combiner is operable to combine the feed forward signal and the interim signal to provide an output signal (509) that is compensated for an adverse effect of the wireless channel on the input signal.

    摘要翻译: 布置和构造均衡器和相应的方法以减轻无线信道的不利影响(300)。 均衡器包括耦合到输入信号(501)的延迟线(503),并且包括耦合到输出组合器(507)的延迟电路,其可操作以提供中间信号(g0 ... gN)和前馈 电路(505),其耦合到所述延迟线并且可操作以提供包括根据对应于信道参数的估计的缩放因子定标的硬判决的前馈信号(506),其中所述输出组合器可操作以组合所述前馈 信号和中间信号以提供补偿无线信道对输入信号的不利影响的输出信号(509)。

    Circuit and method for dynamically adjusting a filter bandwidth
    10.
    发明申请
    Circuit and method for dynamically adjusting a filter bandwidth 失效
    用于动态调整滤波器带宽的电路和方法

    公开(公告)号:US20060140322A1

    公开(公告)日:2006-06-29

    申请号:US11022883

    申请日:2004-12-28

    IPC分类号: H03D3/24

    摘要: A tracking circuit (100) is provided for controlling a locally-generated clock. A receive channel (110) in the tracking circuit receives an incoming signal and a local clock, generates a local signal based on the local clock, and compares the local signal and the incoming signal to generate a data signal and an unfiltered phase error signal. A loop filter (120) filters the unfiltered phase error signal to provide a filtered phase error signal. A numerically controlled oscillator (140) generates a correction clock based on the filtered phase error signal. And a filter control circuit (160) provides one or more filter control signals to control operational parameters of the loop filter. The correction clock is provided to the receive channel to modify at least one of the phase and frequency of the local clock. In addition, a sample switch (125) may also be provided to sample the unfiltered phase error signal.

    摘要翻译: 提供跟踪电路(100)用于控制本地产生的时钟。 跟踪电路中的接收通道(110)接收输入信号和本地时钟,基于本地时钟产生本地信号,并且比较本地信号和输入信号以产生数据信号和未滤波的相位误差信号。 环路滤波器(120)对未滤波的相位误差信号进行滤波以提供滤波的相位误差信号。 数控振荡器(140)基于滤波的相位误差信号产生校正时钟。 并且滤波器控制电路(160)提供一个或多个滤波器控制信号以控制环路滤波器的操作参数。 校正时钟被提供给接收通道以修改本地时钟的相位和频率中的至少一个。 此外,还可以提供采样开关(125)以对未滤波的相位误差信号进行采样。