公开(公告)号：US4547395A

公开(公告)日：1985-10-15

申请号：US674627

申请日：1984-11-26

申请人： James T. Hall ,  Richard N. Leyden

发明人： James T. Hall ,  Richard N. Leyden

IPC分类号： C08G73/00 ,  B05D3/06 ,  B05D7/24 ,  C08G65/00 ,  C08G73/02 ,  C08G75/00 ,  C08G75/02 ,  C08G75/06 ,  C08G85/00 ,  H01L21/312 ,  B05D5/12

CPC分类号： B05D1/60 ,  C08G75/0272 ,  H01L21/312 ,  B05D3/06

摘要： A low temperature photochemical vapor deposition process for the deposition of a layer of a chosen polymer on the surface of a substrate. The polymer comprises repeating hydrocarbon units linked through oxygen, nitrogen, or sulfur atoms and is formed by reacting a vapor phase monomer precursor containing the hydrocarbon units and a vapor phase precursor containing the oxygen, nitrogen, or sulfur under radiation inducement. The low temperature of the process avoids thermal damage to the substrate. Specifically disclosed polymers are polyphenylether and polyxyleneamine, which are useful, respectively, as insulator or passivation layers in semiconductor devices and circuits, and as adhesives.

摘要翻译： 一种低温光化学气相沉积工艺，用于在衬底的表面上沉积所选聚合物层。 聚合物包含通过氧，氮或硫原子连接的重复烃单元，并且通过在辐射诱导下使包含烃单元的气相单体前体和含有氧，氮或硫的气相前体反应而形成。 该工艺的低温避免了对基材的热损伤。 具体公开的聚合物是分别作为半导体器件和电路中的绝缘体或钝化层以及作为粘合剂有用的聚苯醚和聚二甲苯。

公开(公告)号：US4781942A

公开(公告)日：1988-11-01

申请号：US810810

申请日：1985-12-19

申请人： Richard N. Leyden ,  James T. Hall

发明人： Richard N. Leyden ,  James T. Hall

IPC分类号： B05D3/06 ,  B05D7/24 ,  C09D4/00 ,  G03F7/16 ,  H01L21/312 ,  C08G77/12

CPC分类号： B05D1/60 ,  B05D3/061 ,  C09D4/00 ,  G03F7/167 ,  H01L21/3121 ,  Y10S522/914 ,  Y10T428/31663

摘要： A process for forming on the surface of a substrate a layer of a siloxane polymer by exposing the substrate to a first vapor phase monomer precursor having the formula SiR.sub.x H.sub.4-x where x is 1 to 4 and R is alkyl or phenyl, and a second vapor phase oxygen-containing precursor in the presence of radiation of a predetermined wavelength to bring about the reaction to form the siloxane polymer which deposits on the surface of substrate. The monomer precursor may comprise a mixture, such as SiRH.sub.3 and SiR.sub.2 H.sub.2 with each other or with SiR.sub.3 H. By varying the composition of such mixtures, the composition of the siloxane polymer may be chosen to provide predetermined properties, and, further, may be varied throughout the thickness of the deposited layer.

摘要翻译： 通过将基底暴露于具有式SiRxH4-x的第一气相单体前体（其中x为1至4，R为烷基或苯基）和第二蒸气（第二蒸气），在基底表面上形成硅氧烷聚合物层 在预定波长的辐射存在下，使相含氧的前体进行反应以形成沉积在基材表面上的硅氧烷聚合物。 单体前体可以包含彼此或SiR 3 H的混合物，例如SiRH 3和SiR 2 H 2。 通过改变这种混合物的组成，可以选择硅氧烷聚合物的组成以提供预定的性质，并且还可以在沉积层的整个厚度上变化。

公开(公告)号：US4588609A

公开(公告)日：1986-05-13

申请号：US674619

申请日：1984-11-26

申请人： Richard N. Leyden ,  James T. Hall

发明人： Richard N. Leyden ,  James T. Hall

IPC分类号： H01B5/14 ,  B05D3/06 ,  B05D7/24 ,  C08G61/00 ,  C08G61/02 ,  H01B13/00 ,  H01B17/60 ,  H01B17/62 ,  H01B19/00 ,  H01L21/312

CPC分类号： B05D1/60 ,  B05D3/06

摘要： A low-temperature process for forming a thin film of an aromatic polymer on the surface of a substrate by exposing the substrate to a monomer precursor containing arylene groups in the presence of radiation of a selected wavelength. Upon radiation inducement, the monomer units interact to form a polymer comprising directly bonded repeating arylene groups, and the polymer deposits as a layer on the substrate. Optionally, the polymer layer may be simultaneously or subsequently doped to provide a conductive polymer layer. Specifically disclosed polymers are polyparaphenylene and its antimony pentafluoride-doped derivative. The former is useful as a dielectric insulator or passivation material in semiconductor devices and circuits, while the latter is useful in batteries and solar cells, or electromagnetic shielding.

摘要翻译： 一种用于在基板表面上形成芳族聚合物薄膜的低温方法，该方法是在存在选定波长的辐射的情况下将基板暴露于含有亚芳基的单体前体。 在辐射诱导时，单体单元相互作用形成包含直接键合的重复亚芳基的聚合物，并且聚合物作为基底上的层沉积。 任选地，聚合物层可以同时或随后掺杂以提供导电聚合物层。 具体公开的聚合物是聚对亚苯基和其五氟化锑掺杂衍生物。 前者可用作半导体器件和电路中的介电绝缘体或钝化材料，而后者可用于电池和太阳能电池或电磁屏蔽。

公开(公告)号：US5009485A

公开(公告)日：1991-04-23

申请号：US394909

申请日：1989-08-17

申请人： James T. Hall

发明人： James T. Hall

IPC分类号： C23C16/52 ,  G02B5/28

CPC分类号： G02B5/289 ,  C23C16/52 ,  Y10S359/90

摘要： An error-compensated process for forming a multiple-notch optical filter which is characterized by a continually and accurately varying periodic profile. The optical medium if formed on a substrate so that the profile of the refractive index is multiply sinusoidally modulated to maintain Bragg's law for each component in the multiple-notch profile. In a preferred embodiment, as the optical medium is coated on the substrate, the depositing film is monitored by optical techniques, and feedback information is provided to a computer driven by a pre-programmed process control algorithm so that real time control of the manufacturing process may be accomplished.

公开(公告)号：US4590091A

公开(公告)日：1986-05-20

申请号：US682406

申请日：1984-12-17

申请人： Harvey N. Rogers, Jr. ,  James T. Hall

发明人： Harvey N. Rogers, Jr. ,  James T. Hall

IPC分类号： H01L21/302 ,  C23C8/06 ,  C23C16/02 ,  C23C16/40 ,  H01L21/306 ,  H01L21/311 ,  H01L21/465 ,  H01L21/4757 ,  B05D3/06 ,  B05D5/12

CPC分类号： H01L21/02046 ,  C23C16/0236 ,  C23C16/402 ,  C23C8/06 ,  H01L21/31116 ,  H01L21/465 ,  H01L21/4757 ,  Y10S438/974

摘要： A substrate having an undesired native oxide layer formed on the surface thereof is treated at a low temperature by exposure to a chosen vapor phase hydrogen-containing precursor in the presence of radiation of a selected wavelength. Upon radiation-inducement, neutral hydrogen species are formed from the precursor and interact with the native oxide to convert the native oxide to a chemically reduced form. By this process, thermal damage and charge damage to the substrate are avoided and the electrical properties of a subsequently formed device are enhanced.

摘要翻译： 在其表面形成有不希望的天然氧化物层的衬底通过在所选择的波长的辐射存在下暴露于所选择的含气体气相的前体，在低温下进行处理。 在辐射诱导下，从前体形成中性氢物质并与天然氧化物相互作用以将天然氧化物转化为化学还原形式。 通过该过程，避免了对基板的热损伤和电荷损伤，并且随后形成的器件的电性能得到提高。

公开(公告)号：US06611324B1

公开(公告)日：2003-08-26

申请号：US09628196

申请日：2000-07-28

申请人： James T. Hall ,  H. Donald Wolpert

发明人： James T. Hall ,  H. Donald Wolpert

IPC分类号： G01N2188

CPC分类号： G01N17/004 ,  G01N21/47 ,  G01N21/958 ,  Y10S136/29

摘要： A method for determining the susceptibility of solar cell coverglass assemblies to degrade wherein the solar cell assembly contains coated or uncoated coverglass, the method comprises exposing the solar cell coverglass assembly with a pulsing laser having an energy per unit area per pulse which distinguishes by laser damage between coverglass assemblies that have an anomalously high propensity to darken under solar exposure and those that only have a normal, nominal propensity to darken; and, characterizing the propensity of the coverglass assemblies to darken. The process results in an improvement of the long-term power output of solar cells by maintaining optical transparency and reducing temperature increases arising from increased solar absorption in darkened coverglass assemblies.

摘要翻译： 一种用于确定太阳能电池盖玻璃组件降解的敏感性的方法，其中太阳能电池组件包含涂覆或未涂覆的玻璃罩，该方法包括用脉冲激光器暴露太阳能电池盖玻璃组件，脉冲激光器具有每脉冲的每单位面积的能量，其通过激光损伤 在太阳暴露下具有异常高倾向倾斜的覆盖层组件和仅具有正常的标称倾斜倾向的玻璃组件之间; 并表征了盖玻璃组件变暗的倾向。 该过程通过保持光学透明度并减少由于在较暗的盖玻片组件中增加的太阳能吸收而引起的温度升高，从而改善了太阳能电池的长期功率输出。

公开(公告)号：US4631199A

公开(公告)日：1986-12-23

申请号：US757562

申请日：1985-07-22

申请人： James T. Hall ,  John W. Peters

发明人： James T. Hall ,  John W. Peters

IPC分类号： C23C16/40 ,  C23C16/48 ,  H01L21/316 ,  C23C16/50

CPC分类号： H01L21/02164 ,  C23C16/402 ,  C23C16/48 ,  H01L21/02211 ,  H01L21/02277 ,  H01L21/31612

摘要： An improved process for depositing an oxide layer on a substrate by exposing the substrate to a selected vapor phase reactant and an oxygen-containing precursor comprising nitrous oxide mixed with molecular oxygen in a predetermined ratio, in the presence of radiation of a selected wavelength. The radiation causes the direct dissociation of the oxygen-containing precursor to form neutral oxygen atoms that react with the vapor phase reactant and form the oxide, which deposits as a layer on the substrate. The rate of reaction to form and deposit the oxide layer is enhanced by the mixing of molecular oxygen with nitrous oxide in the precursor.

摘要翻译： 一种改进的方法，用于在所选择的波长的辐射存在下，将衬底暴露于所选择的气相反应物和含有氧分子的预氧化合物前体中，以将氧化层沉积在衬底上。 辐射导致含氧前体的直接解离形成中性氧原子，其与气相反应物反应并形成氧化物，其作为一层沉积在基底上。 通过在前体中将分子氧与一氧化二氮混合来提高形成和沉积氧化物层的反应速率。

公开(公告)号：US06359212B1

公开(公告)日：2002-03-19

申请号：US09615385

申请日：2000-07-13

申请人： James T. Hall ,  Frederick D. Cottrell

发明人： James T. Hall ,  Frederick D. Cottrell

IPC分类号： H01L31048

CPC分类号： G01N21/55 ,  G01N17/004 ,  G01N21/33 ,  Y10S359/90

摘要： A method for determining the susceptibility of solar cell cover glass or second surface mirror to ultraviolet (UV) degradation comprises the steps of illuminating the solar cell cover glass with ultra violet light at a preselected illumination angle where the solar cell cover glass reflects a portion of the ultraviolet light; measuring the reflected portion of the ultraviolet light; and, characterizing the propensity of the cover glass or contaminate layer on a second surface mirror to degradation as a function of the reflectance. The process results in an improvement of the long-term power output of solar cells by screening out cover glasses that have a propensity to darken under solar-equivalent UV exposure and thus maintaining optical transparency arising from increased solar absorption in darkened cover glass. The process will additionally result in decreased contaminant levels on thermal control surfaces and less on-orbit degradation.

摘要翻译： 用于确定太阳能电池盖玻璃或第二表面镜对紫外（UV）降解的敏感性的方法包括以预选的照射角度以太阳能电池盖玻璃反射一部分的太阳能电池盖玻璃照射太阳能电池盖玻璃的步骤 紫外线; 测量紫外光的反射部分; 并且表征第二表面镜上的玻璃或污染层的倾向作为反射率的函数而劣化。 该过程通过筛选在太阳等效UV暴露下倾向于变暗的覆盖玻璃，从而保持由于遮蔽玻璃中的太阳吸收增加而导致的光学透明度，从而改善了太阳能电池的长期功率输出。 该过程还将导致热控制表面上的污染物水平降低和较少的在轨降解。

公开(公告)号：US07270891B2

公开(公告)日：2007-09-18

申请号：US10990731

申请日：2004-11-17

申请人： James A. Roth ,  James T. Hall ,  Dennis G. Neal ,  Craig R. Wilkinson ,  Steven Lai ,  Mark W. Johnson

发明人： James A. Roth ,  James T. Hall ,  Dennis G. Neal ,  Craig R. Wilkinson ,  Steven Lai ,  Mark W. Johnson

IPC分类号： C23C14/14 ,  C23C14/20 ,  C23C14/34 ,  B32B15/00 ,  B32B15/08

CPC分类号： B64G1/54 ,  B64G1/226 ,  B64G1/50 ,  Y10T428/12667 ,  Y10T428/31504 ,  Y10T428/31678

摘要： A passive thermal control blanket and a method for its manufacture, the blanket including a plastic substrate on which is deposited a film that is a homogeneous mixture of silicon and germanium, thereby combining the excellent reflective and electrostatic discharge properties of germanium with the superior adhesion and corrosion resistance properties of silicon. The uniform mixture is preferably obtained by sputtering the two materials simultaneously onto the substrate, using either separate targets, a single mosaic target, or a single composite target.

摘要翻译： 一种被动热控制毯及其制造方法，该毯包括一塑料基底，其上沉积有硅和锗的均匀混合物的薄膜，从而将锗的优异的反射和静电放电性能与优异的粘附力结合， 硅的耐腐蚀性能。 均匀混合物优选通过使用单独的靶，单个镶嵌靶或单一复合靶将两种材料同时溅射到基底上而获得。

公开(公告)号：US5471326A

公开(公告)日：1995-11-28

申请号：US56218

申请日：1993-04-30

申请人： James T. Hall ,  Arthur B. O'Connor ,  Susan M. Raffensperger ,  Seymour Levine

发明人： James T. Hall ,  Arthur B. O'Connor ,  Susan M. Raffensperger ,  Seymour Levine

IPC分类号： B64D45/08 ,  G02B26/10 ,  G02B5/32 ,  G02B5/28 ,  G02B27/42

CPC分类号： G02B26/106 ,  G03H2270/22

摘要： A holographic optical element (HOE) includes a substrate structure having rotational symmetry with respect to a rotational axis for rotatively supporting at least two holograms. A first hologram on the substrate structure in the path of a normally incident beam diffracts the beam by a first acute angle and in a first radial direction from the rotational axis to a first redirected path. A second hologram on the substrate structure in the first redirected path diffracts the beam by a different second acute angle and in an opposite second radial direction from the rotational axis to a second redirected path. As a result, the two holograms may be used to achieve a second redirected path at an angle to the rotational axis that has a size which is the difference between the size of the first angle and the size of the second angle. The substrate structure may include first, second, and third disc-shaped substrates bonded together so that the third substrate is in between the first and second substrates, and a thin-film interference filter may be included on the third substrate to suppress zero-order leakage through the first hologram. The filter element may include one of a dielectric stack, a transmission hologram, or a reflectance hologram. The first hologram may be imprinted to achieve total internal reflection of zero-order leakage through the second hologram. An additional interference filter may be included on either the output face of the HOE or on a separate window element in order to reflects any zero-order leakage from the second hologram. The HOE may also have Schmidt-type aberration correction superimposed on at least one of the holograms to compensate for spherical aberrations from an all spherical Cassegrain type of telescope.

摘要翻译： 全息光学元件（HOE）包括具有相对于旋转轴线旋转对称的衬底结构，用于旋转地支撑至少两个全息图。 在正常入射光束的路径中的衬底结构上的第一全息图将光束从第一锐角和第一径向方向从旋转轴衍射到第一重定向路径。 在第一重定向路径中的衬底结构上的第二全息图将光束以不同的第二锐角和与旋转轴线相反的第二径向方向衍射到第二重定向路径。 结果，两个全息图可以用于实现与旋转轴成一定角度的第二重定向路径，其具有的尺寸是第一角度的大小与第二角度的尺寸之差。 衬底结构可以包括接合在一起的第一，第二和第三盘状衬底，使得第三衬底位于第一和第二衬底之间，并且可以在第三衬底上包括薄膜干涉滤光器以抑制零级 通过第一个全息图泄漏。 滤波器元件可以包括电介质叠层，透射全息图或反射全息图之一。 可以印刷第一全息图以实现通过第二全息图的零级泄漏的全内反射。 附加的干涉滤光片可以包括在HOE的输出面上或单独的窗口元件上，以便反射来自第二全息图的任何零级泄漏。 HOE还可以具有叠加在至少一个全息图上的施密特型像差校正，以补偿来自全球形卡塞格伦型望远镜的球面像差。