METHOD FOR SEPARATING EPITAXIAL LAYER FROM GROWTH SUBSTRATE
    2.
    发明申请
    METHOD FOR SEPARATING EPITAXIAL LAYER FROM GROWTH SUBSTRATE 有权
    从生长基底分离外延层的方法

    公开(公告)号:US20140335677A1

    公开(公告)日:2014-11-13

    申请号:US14361117

    申请日:2012-11-27

    CPC classification number: H01L21/02664 H01L21/0254 H01L21/02587 H01L33/0079

    Abstract: The present invention provides a method for separating an epitaxial layer from a growth substrate, comprising growing an epitaxial layer including a plurality of layers on a growth substrate; etching an edge of at least one layer in the epitaxial layer to form a notch; forming a bonding layer on the epitaxial layer, contacting a bonding substrate onto the bonding layer, and then heating the bonding layer to a bonding temperature for joining the epitaxial layer and the bonding substrate; and cooling the bonding layer after the heating of the boding layer, so that the epitaxial layer and the bonding substrate are joined by the bonding layer, and the epitaxial layer is separated from the growth substrate, wherein the separating the epitaxial layer from the growth substrate starts with separation from the at least one layer where the notch is formed.

    Abstract translation: 本发明提供了一种用于从生长衬底分离外延层的方法,包括在生长衬底上生长包括多个层的外延层; 蚀刻外延层中的至少一层的边缘以形成凹口; 在所述外延层上形成接合层,将接合基板接触到所述接合层上,然后将所述接合层加热至接合所述外延层和所述接合基板的接合温度; 并且在加热所述粘合层之后冷却所述接合层,使得所述外延层和所述接合基板通过所述接合层接合,并且所述外延层与所述生长基板分离,其中所述外延层与所述生长基板分离 从形成有凹口的至少一个层分离开始。

    Light emitting device
    3.
    发明授权

    公开(公告)号:US12183848B2

    公开(公告)日:2024-12-31

    申请号:US17964056

    申请日:2022-10-12

    Abstract: A light emitting device including a substrate, a first conductivity-type semiconductor layer, a mesa including a second conductivity-type semiconductor layer and an active layer, first and second contact electrodes respectively contacting the first and second conductivity-type semiconductor layers, a passivation layer covering the first and second contact electrodes, the mesa, and including first and second openings, and first and second bump electrodes electrically connected to the first and second contact electrodes through the first and second openings, respectively, in which the first and second bump electrodes are disposed on the mesa, the passivation layer is disposed between the first bump electrode and the second contact electrode, the first contact electrode includes a reflective material, and a portion of the first opening is surrounded with a side surface of the mesa, and another portion of the first opening is not surrounded with the side surface of the mesa.

    LIGHT EMITTING DIODE PACKAGE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20230155072A1

    公开(公告)日:2023-05-18

    申请号:US18098030

    申请日:2023-01-17

    CPC classification number: H01L33/486 H01L33/20

    Abstract: A light emitting diode, including a first type semiconductor layer, an active layer, and a second type semiconductor layer; an ohmic contact layer disposed on the second type semiconductor layer; a first insulating layer disposed on the semiconductor structure and including a first opening overlapping the first type semiconductor layer and a second opening overlapping the ohmic contact layer; a first connection wiring disposed on the first insulating layer, the first connection wiring having a first portion and a second portion; and a second connection wiring disposed on the first insulating layer and spaced apart from the first connection wiring, the second connection wiring electrically connected to the second type semiconductor layer through the second opening. The second connection wiring surrounds at least a portion of the first portion of the first connection wiring in a plan view.

    Light emitting device
    5.
    发明授权

    公开(公告)号:US11489087B2

    公开(公告)日:2022-11-01

    申请号:US16985077

    申请日:2020-08-04

    Abstract: A light emitting device including a substrate, a first semiconductor layer disposed on the substrate, a mesa including a second semiconductor layer and an active layer disposed on the first semiconductor layer, a first contact electrode contacting the first semiconductor layer, a second contact electrode contacting the second semiconductor layer, a passivation layer covering the first contact electrode, the mesa, and the second contact electrode, and including a first opening disposed on the first contact electrode and a second opening disposed on the second contact electrode, and first and second bump electrodes electrically connected to the first and second contact electrodes through the first and second openings, respectively, in which the first and second bump electrodes are disposed on the mesa, the passivation layer is disposed between the first bump electrode and the second contact electrode, and the first contact electrode includes an alloy layer.

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