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公开(公告)号:US20230329012A1
公开(公告)日:2023-10-12
申请号:US18149929
申请日:2023-01-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bongyong LEE , Taeyoung KIM , Hyunmog PARK , Siyeon CHO
Abstract: A semiconductor device may include a first substrate structure including a substrate, circuit elements on the substrate, and first bonding layers on the circuit elements, and a second substrate structure on the first substrate structure. The second substrate structure may include a plate layer, an intermediate insulating layer below the plate layer and including silicon nitride, gate electrodes below the intermediate insulating layer and stacked to be spaced apart from each other in a vertical direction, a channel structure in a channel hole passing through the intermediate insulating layer and the gate electrodes and including a semiconductor layer, and second bonding layers connected to the first bonding layers. The channel hole may have a first width in a first portion passing through the gate electrodes and a second width, wider than the first width, in a second portion passing through the intermediate insulating layer.
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公开(公告)号:US20230292630A1
公开(公告)日:2023-09-14
申请号:US17966183
申请日:2022-10-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Siyeon CHO , Taeyoung KIM , Hyunmog PARK , Bongyong LEE , Yukio HAYAKAWA
CPC classification number: H01L43/04 , G11C11/161 , G11C11/18 , H01L27/222 , H01L43/06 , H01L43/10
Abstract: A magnetic memory device includes a loop-type magnetic track having a first part and a second part that are arranged in a counterclockwise direction, a first conductive line on a top surface of the first part, and a second conductive line on a bottom surface of the second part. The magnetic track includes a lower magnetic layer, a spacer layer, and an upper magnetic layer that are sequentially stacked. Each of the first and second conductive lines includes heavy metal. Each of the first and second conductive lines is configured to generate spin-orbit torque caused by current that flows therein. The spin-orbit torque causes magnetic domains in the magnetic track to move in a clockwise direction or in the counterclockwise direction.
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公开(公告)号:US20230292522A1
公开(公告)日:2023-09-14
申请号:US18055974
申请日:2022-11-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daewon HA , Kyunghwan LEE , Hyunmog PARK
IPC: H01L21/02
Abstract: A three-dimensional non-volatile memory device includes a memory cell array including a plurality of memory cells repeatedly arranged in a first lateral direction, a second lateral direction, and a vertical direction on a substrate. The first lateral direction and the second lateral direction are parallel to a main surface of the substrate and perpendicular to each other, and the vertical direction is perpendicular to the main surface of the substrate. The memory cell array includes a plurality of horizontal channel regions and a vertical word line. The plurality of horizontal channel regions extend in the first lateral direction on the substrate. The plurality of horizontal channel regions overlap each other and are apart from each other in the vertical direction. The vertical word line passes through the plurality of horizontal channel regions in the vertical direction.
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4.
公开(公告)号:US20240105603A1
公开(公告)日:2024-03-28
申请号:US18198081
申请日:2023-05-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyunmog PARK
IPC: H01L23/528 , H01L23/522 , H01L25/065 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B80/00
CPC classification number: H01L23/5283 , H01L23/5226 , H01L25/0652 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B80/00 , H01L2225/06524
Abstract: A semiconductor device is provided. The semiconductor device includes: gate lines spaced apart from each other between a conductive layer and a conductive pad; and a channel structure extending through the gate lines. The channel structure includes: a channel region which defines a columnar space, and includes a first channel end in contact with the conductive pad and a second channel end in contact with the conductive layer; and a variable resistance pattern including an outer sidewall and a first end, the outer sidewall overlapping first gate lines, from among the gate lines, in a horizontal direction with the channel region therebetween, the first end being spaced apart from the first channel end of the channel region, and the variable resistance pattern being offset from, in the horizontal direction, at least one second gate line, from among the gate lines, that is adjacent to the conductive pad.
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公开(公告)号:US20230021071A1
公开(公告)日:2023-01-19
申请号:US17949305
申请日:2022-09-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Minhee CHO , Woobin SONG , Hyunmog PARK , Sangkil LEE
IPC: G11C11/00 , H01L27/108 , H01L27/1159 , G11C11/4096 , G11C11/22 , H01L27/11592
Abstract: A memory device includes a substrate including first and second regions, the first region having first wordlines and first bitlines, and the second region having second wordlines and second bitlines, a first memory cell array including first memory cells in the first region, the first memory cell array having volatility, and each of the first memory cells including a cell switch having a first channel region adjacent to a corresponding first wordline of the first wordlines, and a capacitor connected to the cell switch, and a second memory cell array including second memory cells in the second region, the second memory cell array having non-volatility, and each of the second memory cells including a second channel region adjacent to a corresponding second wordline of the second wordlines, and a ferroelectric layer between the corresponding second wordline of the second wordlines and the second channel region.
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公开(公告)号:US20220310698A1
公开(公告)日:2022-09-29
申请号:US17526262
申请日:2021-11-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyunmog PARK , Jungyu LEE , Daehwan KANG , Sungho EUN
IPC: H01L27/24
Abstract: A resistive memory device includes: memory cells overlapping one another in a vertical direction within a cell array region and each including a switching element and a variable resistive element; first conductive lines each being connected to the switching element; a second conductive line connected to the variable resistive element and conductive pads arranged in a connection region and connected to respective one ends of the first conductive lines, respectively, and having different lengths in the second horizontal direction. A lower conductive pad from among the conductive pads includes a first portion covered by an upper conductive pad, and a second portion not covered by the upper conductive pad, and a thickness of each of the first and second portions in the vertical direction is greater than a thickness of each of the first conductive lines in the vertical direction.
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公开(公告)号:US20230337438A1
公开(公告)日:2023-10-19
申请号:US18152310
申请日:2023-01-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunmog PARK , Bongyong LEE
Abstract: A semiconductor device includes gate electrodes extending in a first direction, first and second vertical structures passing through the gate electrodes, a first upper interconnection, and a second upper interconnection structure, the first and second vertical structures including a back gate electrode, a ferroelectric material layer, a channel layer, and a gate insulating layer, the first upper interconnection structure including bit lines extending in a second direction, a first contact plug connected to a lower surface of a first back gate electrode of the first vertical structure, and a first back gate interconnection extending between the bit lines in the second direction and connected to the first contact plug, and the second upper interconnection structure including a second contact plug connected to an upper surface of a second back gate electrode of the second vertical structure, and a second back gate interconnection extending in the second direction and connected to the second contact plug.
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公开(公告)号:US20210280230A1
公开(公告)日:2021-09-09
申请号:US17330828
申请日:2021-05-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Minhee CHO , Woobin SONG , Hyunmog PARK , Sangkil LEE
IPC: G11C11/00 , H01L27/1159 , H01L27/108 , G11C11/4096 , G11C11/22 , H01L27/11592
Abstract: A memory device includes a substrate including first and second regions, the first region having first wordlines and first bitlines, and the second region having second wordlines and second bitlines, a first memory cell array including first memory cells in the first region, the first memory cell array having volatility, and each of the first memory cells including a cell switch having a first channel region adjacent to a corresponding first wordline of the first wordlines, and a capacitor connected to the cell switch, and a second memory cell array including second memory cells in the second region, the second memory cell array having non-volatility, and each of the second memory cells including a second channel region adjacent to a corresponding second wordline of the second wordlines, and a ferroelectric layer between the corresponding second wordline of the second wordlines and the second channel region.
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9.
公开(公告)号:US20200075101A1
公开(公告)日:2020-03-05
申请号:US16659715
申请日:2019-10-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Da Woon JEONG , Sung-Hun LEE , Seokjung YUN , Hyunmog PARK , JoongShik SHIN , Young-Bae YOON
IPC: G11C16/04 , H01L27/11524 , H01L27/11556 , H01L27/1157 , H01L27/11582 , H01L21/768 , G11C5/02 , G11C5/06 , H01L49/02
Abstract: Three-dimensional (3D) semiconductor memory devices and methods of manufacturing the same are provided. Three-dimensional (3D) semiconductor memory devices may include a substrate including a cell array region and a connection region, a lower stack structure including a plurality of lower electrodes vertically stacked on the substrate, the lower stack structure having a first stair step structure extending in a first direction on the connection region and a second stair step structure extending in a second direction substantially perpendicular to the first direction on the connection region, and a plurality of intermediate stack structures vertically stacked on the lower stack structure. Each of the intermediate stack structures includes a plurality of intermediate electrodes vertically stacked and has a third stair step structure extending in the second direction on the connection region. Each of the intermediate stack structures exposes the third stair step structure of the intermediate stack structure disposed thereunder.
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公开(公告)号:US20240179913A1
公开(公告)日:2024-05-30
申请号:US18489224
申请日:2023-10-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyunmook CHOI , Jihong KIM , Hyunmog PARK
CPC classification number: H10B43/27 , H01L25/0652 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/35 , H10B80/00 , H01L2225/06506 , H01L2225/0651
Abstract: A semiconductor device including first gate electrodes stacked on a substrate and spaced apart from each other, a first channel structure passing through the first gate electrodes, the first channel structure including a first channel layer, a first dielectric layer between the first channel layer and the first gate electrodes, a first buried insulating layer filling an interior of the first channel layer, an auxiliary channel layer covering at least a portion of the first channel layer and the first dielectric layer, and a first channel pad on the first buried insulating layer, and isolation regions passing through the first gate electrodes, the isolation regions and spaced apart from each other may be provided. The auxiliary channel layer may be in contact with the first channel pad. The first channel pad may be spaced apart from the first dielectric layer by the auxiliary channel layer.
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