Method for manufacturing wiring in groove
    2.
    发明授权
    Method for manufacturing wiring in groove 失效
    槽内布线方法

    公开(公告)号:US5656542A

    公开(公告)日:1997-08-12

    申请号:US544453

    申请日:1995-10-18

    摘要: In a semiconductor device and a method for manufacturing the same according to the present invention, for example, an insulating film is deposited on a silicon substrate, and a concave groove is formed in the insulating film in accordance with a predetermined wiring pattern. Titanium and palladium are deposited in sequence on the insulating film to form a titanium film and a palladium film, respectively. A silver film is formed on the palladium film by electroplating, and a groove-shaped silver wiring layer is formed by polishing. The resultant structure is annealed at a temperature of about 700.degree. C., and an intermetallic compound is formed by alloying the titanium film and palladium film with each other. Consequently, a burying type wiring layer whose resistance is lower than that of aluminum, is constituted by the silver wiring layer and intermetallic compound.

    摘要翻译: 在根据本发明的半导体器件及其制造方法中,例如,在硅衬底上沉积绝缘膜,并且根据预定的布线图案在绝缘膜中形成凹槽。 钛和钯依次沉积在绝缘膜上以分别形成钛膜和钯膜。 通过电镀在钯膜上形成银膜,通过研磨形成槽状的银布线层。 所得结构在约700℃的温度下退火,并通过使钛膜和钯膜彼此合金化形成金属间化合物。 因此,电阻低于铝的掩埋型布线层由银布线层和金属间化合物构成。

    Torque-index sensor
    4.
    发明授权
    Torque-index sensor 有权
    转矩传感器

    公开(公告)号:US08047084B2

    公开(公告)日:2011-11-01

    申请号:US12750082

    申请日:2010-03-30

    IPC分类号: G01B7/30 G01L3/00

    摘要: A torque-index sensor having index sensor and torque sensor closely arranged and integrated therein with lightened interference between them is provided. The invented torque-index sensor is comprised of torque sensor that includes first magnetic sensor arranged beside first annular-shaped magnet and index sensor that includes second magnet arranged beside annular-shaped encoder and second magnetic sensor that are arranged being in-line on common axis; and means for varying magnetic flux, which changes direction of magnetic flux that is generated from second magnet toward first magnetic sensor, positioned between first magnetic sensor in torque sensor and second magnet in index sensor.

    摘要翻译: 提供一种转矩指数传感器,其具有紧密排列和集成在其中的折射率传感器和扭矩传感器,其间具有减轻的干涉。 本发明的转矩传感器包括转矩传感器,转矩传感器包括布置在第一环形磁体旁边的第一磁传感器和索引传感器,该传感器包括布置在环形编码器旁边的第二磁体和第二磁传感器, ; 以及用于改变磁通量的装置,其改变位于扭矩传感器中的第一磁传感器和索引传感器中的第二磁体之间的从第二磁体产生的磁通量的方向朝向第一磁传感器。

    Magnetostrictive torque sensor
    5.
    发明申请
    Magnetostrictive torque sensor 有权
    磁致伸缩转矩传感器

    公开(公告)号:US20070227268A1

    公开(公告)日:2007-10-04

    申请号:US11526075

    申请日:2006-09-25

    IPC分类号: G01L3/00

    CPC分类号: G01L3/102 G01L3/105

    摘要: A magnetostrictive torque sensor having: a rotating shaft to rotate around a center axis, the rotating shaft having magnetostrictive characteristics; and a cylindrical magnetic core disposed at a predetermined distance on an outer periphery of the rotating shaft, the cylindrical magnetic core having a detection coil disposed on an inner periphery thereof to detect a torque applied to the rotating shaft. The detection coil is formed with a coil assembly to form a bridged circuit, and the coil assembly is formed with a flexible substrate coil disposed on a whole inner periphery of the magnetic core.

    摘要翻译: 一种磁致伸缩扭矩传感器,其具有:绕中心轴线旋转的旋转轴,所述旋转轴具有磁致伸缩特性; 以及在所述旋转轴的外周上以规定距离配置的圆筒形磁芯,所述圆筒形磁芯具有设置在其内周上的检测线圈,以检测施加到所述旋转轴的转矩。 检测线圈形成有线圈组件以形成桥接电路,并且线圈组件形成有设置在磁芯的整个内周上的柔性衬底线圈。

    Torque sensor
    6.
    发明申请
    Torque sensor 有权
    扭矩传感器

    公开(公告)号:US20070012122A1

    公开(公告)日:2007-01-18

    申请号:US11390122

    申请日:2006-03-28

    IPC分类号: G01N19/08

    CPC分类号: G01L3/104

    摘要: A torque sensor 1 is provided with two shafts 3, 4 (input shaft 3 and output shaft 4) which constitute a shaft member 2, which is a torque detection object, an elastic member 5 which connects the shafts 3 and 4 coaxially, and a torsion angle of the elastic member 5 is detected as a torque which affects on the shaft member 2. The torque sensor 1 is provided with a hard magnetic member 6 which generates a magnetic flux therearound, a pair of first soft magnetic members 7, 8 which constitute a first magnetic circuit H1 together with the hard magnetic member 6 to change a reluctance by torsion of the elastic member 5, a pair of second soft magnetic members 9, 10 which constitute a second magnetic circuit H2 together with the hard magnetic member 6 to keep the reluctance constant, and a flux detection means 12 which detects a flux density of the second magnetic circuit H2 that varies in accordance with a torsion angle of the elastic member 5.

    摘要翻译: 扭矩传感器1设置有构成转矩检测对象的轴构件2,同轴地连接轴3和4的弹性构件5的两个轴3,4(输入轴3和输出轴4)和 检测弹性构件5的扭转角作为影响轴构件2的扭矩。扭矩传感器1设置有产生磁通的硬磁性构件6,一对第一软磁性构件7,8 与硬磁体6一起构成第一磁路H 1,以通过弹性部件5的扭转改变磁阻,构成第二磁路H 2的一对第二软磁体9,10与硬磁性体 6以保持磁阻恒定;以及磁通检测装置12,其检测根据弹性构件5的扭转角度变化的第二磁路H 2的磁通密度。

    High frequency module and antenna device
    7.
    发明申请
    High frequency module and antenna device 失效
    高频模块和天线设备

    公开(公告)号:US20050104686A1

    公开(公告)日:2005-05-19

    申请号:US10508832

    申请日:2003-03-20

    CPC分类号: H01P1/2131 H01P1/2138

    摘要: The present invention includes: a first main waveguide 1; a T-branch circuit 3 connected thereto; a first low-pass filter 5 connected thereto; a band-pass filter 7 connected to the first T-branch circuit 3; a first converter 8 connected to the first low-pass filter 5 for converting transmission lines between a waveguide and a microwave integrated circuit; an amplifier 10 connected to the first converter and structured by the microwave integrated circuit; a second converter 9 connected thereto for converting transmission lines between a waveguide and the microwave integrated circuit; a second low-pass filter 6 connected thereto; a second T-branch circuit 4 connected to the second low-pass filter and the band-pass filter 7; and a second main waveguide 2 connected to the second T-branch circuit.

    摘要翻译: 本发明包括:第一主波导1; 与其连接的T分支电路3; 与其连接的第一低通滤波器5; 连接到第一T分支电路3的带通滤波器7; 连接到第一低通滤波器5的第一转换器8,用于转换波导和微波集成电路之间的传输线; 连接到第一转换器并由微波集成电路构成的放大器10; 连接到其上的用于转换波导和微波集成电路之间的传输线的第二转换器9; 与其连接的第二低通滤波器6; 连接到第二低通滤波器和带通滤波器7的第二T分支电路4; 以及连接到第二T分支电路的第二主波导2。

    High-frequency amplifier, feed-forward amplifier and distortion compensating amplifier
    8.
    发明授权
    High-frequency amplifier, feed-forward amplifier and distortion compensating amplifier 失效
    高频放大器,前馈放大器和失真补偿放大器

    公开(公告)号:US06894562B2

    公开(公告)日:2005-05-17

    申请号:US10111411

    申请日:2001-08-30

    摘要: A divider 3 for dividing and distributing a high-frequency signal input from an input terminal 1 to two output sides, a main amplifying unit 4, connected to one output side of the divider 3, for amplifying one high-frequency signal output from the divider 3, a subsidiary amplifying unit 5, connected to the other output side of the divider 3, for performing no operation in case of a low instantaneous electric power of the other high-frequency signal output from the divider 3 and amplifying the other high-frequency signal in case of a high instantaneous electric power of the other high-frequency signal and a circulator 6 for injecting the high-frequency signal amplified in the subsidiary amplifying unit 5 into the output side of the main amplifying unit 4 and injecting the high-frequency signal amplified in the main amplifying unit 4 into an output terminal 2 are arranged.

    摘要翻译: 分频器3,用于将从输入端子1输入的高频信号分配到两个输出侧;主放大单元4,连接到除法器3的一个输出侧,用于放大从分频器输出的一个高频信号 如图3所示,附加放大单元5连接到除法器3的另一个输出侧,用于在从分频器3输出的另一个高频信号的低瞬时功率的情况下不执行操作,并且放大另一个高频 在另一个高频信号的高瞬时功率的情况下的信号;以及用于将在副放大单元5中放大的高频信号注入到主放大单元4的输出侧的循环器6,并且将高频 在主放大单元4中被放大为输出端子2的信号被布置。