摘要:
A plasma treatment apparatus for forming a thin film on a substrate in a vacuum vessel includes a magnetic field generator which can be positioned inside or outside the vacuum vessel, and a microwave source. The magnetic field strength is controllable such that an electron cyclotron resonance (ECR) area is defined near the substrate. The magnetic field generator can be arranged so that plasma and reactive gas introduction ports are on the microwave introduction side of the ECR area and the substrate is on the opposite side of the ECR area. Alternatively, a gas introduction port can be positioned such that reactive gas is introduced into the ECR area or onto the substrate.
摘要:
A plasma operation apparatus utilizes plasma generated by a microwave cooperative with a magnetic field as to perform a surface operation on a specimen such as semiconductor substrates, such as, for example, thin film deposition, etching, sputtering and plasma oxidation. The apparatus particularly takes advantage of electron cyclotron resonance and is suitable for performing highly efficient and high-quality plasma operations.
摘要:
A laminar structure comprising an organic material and an inorganic material; for example, a coating structure on an organic substrate comprising an organic material on which an inorganic film must be formed and a method of producing the structure, a structure which is suitable for increasing the reliability of an optical disk and a method of producing this, a wiring structure on an organic substrate comprising the organic material on which electric wiring must be formed and a method of producing this, and a structure suitable for increasing the reliability of a semiconductor integrated circuit device and a method of producing this. In order to provide a laminar structure which exhibits a high degree of reliability with respect to prevention of cracks or separation and which comprises an organic material and an inorganic material and a method of producing this structure and a device which utilizes this structure, the present invention provides a laminar structure on an organic substrate comprising the organic substrate comprising an organic material and a thin film which is caused to adhere to the surface of the organic substrate and which comprises an inorganic material a second element which produces a metal bonding or covalent bonding with the first element that forms the thin film being contained in the organic substrate in the vicinity of the surface thereof.
摘要:
An impact tool (1) includes a motor (3); a hammer (42) having a rotational axis extending in a first direction, the hammer (42) being rotatable in a rotational direction including a forward direction and a reverse direction opposite to the forward direction by the motor (3) and being movable in the first direction and a second direction opposite to the first direction; an anvil (52) disposed at the first direction side of the hammer (42) and strikable by the hammer (42) in the forward direction, the hammer (42) that has been struck the anvil (52) being moved in the second direction to come free from the anvil (52); and a fixing member (45A, 46A) that selectively allows the hammer (42) to move in the second direction or prevents the hammer (42) from moving in the second direction.
摘要:
Provided is a foreign matter removing apparatus at a track branch, and a nozzle used in this apparatus that are capable of sufficiently securing foreign matter removing performance as well as significantly reducing generation of noises. In the nozzle for the foreign matter removing apparatus at a track branch, compressed air supplied from piping is injected from each nozzle element. Slits are formed in each nozzle element, a sloped portion is formed at a front end of the nozzle element, and this sloped portion opposes a tongue rail.
摘要:
Embodiments of the instant invention include a plurality of first operators which, together with the assignment of each of the musical tones being possible, designate the start of reproduction of the musical tones that have been assigned in accordance with their operation and a first control means with which any of the first operators are selected from among the plurality of the first operators and together with the cancellation of the assignment to the first operators that have been selected of the musical tones that had previously been assigned to the selected first operators, the musical tones themselves that had previously been assigned to the selected first operators or the pointers that indicate the musical tones that had previously been assigned to the selected first operators are stored and a second control means in which the musical tones themselves or the pointers that indicate the musical tones which have been stored in the first control means and any of the first operators from among the plurality of first operators are selected and assignments are made. Embodiments further include a display control means for displaying the state of assignment for the plurality of operators.
摘要:
A musical apparatus which controls a variety of parameters of musical tones by detecting motion of an object in a space adjacent to the musical apparatus. More specifically, the musical apparatus may comprise a musical tone signal generator which generates a musical tone signal, at least one light source which radiates light beams into a space adjacent to the musical apparatus, at least one light detector which detects at least two light beams reflected from an object in the space and generates a detection value for each of said at least two light beams, a computing element which receives the detection values and generates a synthesized value; and a controller which controls parameters of musical tones based on the synthesized value. For example, the synthesized value may be the sum of the detection values, the difference between the detection values, the ratio between the detection values, or some other relationship between the detection values.
摘要:
A semiconductor integrated circuit having three or more layers of wiring is provided with a plurality of lines of bonding pads arranged along the outer peripheral portion of a semiconductor chip. The bonding pads on the inner line side and those on the outer line side are arranged in a zigzag manner. First outgoing wiring for electrically connecting the bonding pads on the inner line side and internal circuits (input/output buffer circuits) is formed in one layer of wiring or a plurality of layers of wiring including at least the uppermost layer of wiring, and second outgoing wiring for electrically connecting the bonding pads on the outer line side and the internal circuits (the input/output buffer circuits) is formed in a plurality of layers of wiring other than the layer in which the first outgoing wiring is formed. Further, the first outgoing wiring and the second outgoing wiring are formed in different layers of wiring and at least one of the outgoing wiring films is formed of a plurality of layers of wiring.
摘要:
Herein disclosed is a semiconductor integrated circuit device comprising a SRAM having its memory cell composed of transfer MISFETs to be controlled through word lines and drive MISFETs. The gate electrodes of the drive MISFETs and the gate electrodes of the transfer MISFETs of the memory cell, and the word lines are individually formed of different conductive layers. The drive MISFETs and the transfer MISFETs are individually arranged to cross each other in the gate length direction. The word lines are extended in the gate length direction of the gate electrodes of the drive MISFETs and caused to cross the gate electrodes of the drive MISFETs partially. The two transfer MISFETs of the memory cell have their individual gate electrodes connected with two respective word lines spaced from each other and extended in an identical direction. The region defined by the two word lines is arranged therein with the two drive MISFETs and the source lines.The source line is formed of a conductive layer identical to that of the word line. The individual data lines of the complementary data line are formed of an identical conductive layer which is different from that of the word line and the source line. The identical conductive layer between the word line and source line and the complementary data line is formed with two word lines: a main word line extended in the first direction identical to that of the word line and source line and used by adopting the divided word line system: and a sub-word line used by adopting the double word line system.
摘要:
In an electro-mechanical energy conversion device which is disclosed, green sheets on which whole surface electrodes for grounding have been printed and green sheets on which 2-divided electrodes have been printed are laminated. The green sheets having the 0.degree. phase and 90.degree. phase on which the 2-divided electrodes have been printed are laminated through the printed sheet on which the whole surface electrode for grounding. After the laminate body was sintered and integrated, it is polarized in a manner such that the polarizing directions in the thickness direction of each layer are opposite between the two divided electrodes which form one pair by using the whole surface electrodes for grounding and the 2-divided electrodes which were printed, thereby constructing the conversion device for the laminated type vibration driven motor.